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公开(公告)号：US20200249084A1
公开(公告)日：2020-08-06
申请号：US16636548
申请日：2018-07-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masahiro YAMAZAKI , Katsumi SHIBAYAMA , Ryusuke KITAURA
Abstract: A light detector includes a light detecting element and a reference element. The reference element includes a second substrate and a second membrane disposed on a second surface so as to form a void space between the second membrane and the second surface of the second substrate. The second membrane includes a pair of second wiring layers facing each other with a second gap extending along a second line interposed therebetween and a second resistance layer electrically connected to each of the pair of second wiring layers and having an electrical resistance depending on a temperature. An outer shape of the second membrane when viewed from a direction perpendicular to the second surface is a polygonal shape. The second line extends between diagonals facing each other with a geometric center position of the second membrane interposed therebetween when viewed from a direction perpendicular to the second surface.
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公开(公告)号：US20200056940A1
公开(公告)日：2020-02-20
申请号：US16662448
申请日：2019-10-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI
Abstract: A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region.
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公开(公告)号：US20190341420A1
公开(公告)日：2019-11-07
申请号：US16514003
申请日：2019-07-17
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Noburo HOSOKAWA , Nao INOUE , Katsumi SHIBAYAMA
IPC: H01L27/146 , H01L23/00 , H01L31/0216 , H01L23/48 , H01L21/768 , H01L31/103 , H01L21/3205 , H01L23/522 , H01L23/532 , H01L31/02 , H01L31/107 , H01L31/0224
Abstract: A method of manufacturing a semiconductor device includes a first process in which a first wiring 3 is provided on a first surface 2a of a semiconductor substrate 2; a second process in which a light transmitting substrate 5 is attached to the first surface 2a; a third process in which the semiconductor substrate 2 is thinned so that the thickness of the semiconductor substrate 2 is smaller than the thickness of the light transmitting substrate 5; a fourth process in which a through hole 7 is formed in the semiconductor substrate 2; a fifth process in which a dip coating method is performed using a first resin material and thus a resin insulating layer 10 is provided; a sixth process in which a contact hole 16 is formed in the resin insulating layer 10; and a seventh process in which a second wiring 8 is provided on a surface 10b of the resin insulating layer 10, and the first wiring 3 and the second wiring 8 are electrically connected via a contact hole 16.
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34.发明申请公开(公告)号：US20190204150A1
公开(公告)日：2019-07-04
申请号：US16303209
申请日：2017-05-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
CPC classification number: G02B26/001 , B23K26/0006 , B23K26/064 , B23K26/0643 , B23K26/53 , B23K2101/40 , B23K2103/56 , B81B3/0072 , B81C1/00539 , B81C1/00634 , G01J3/0243 , G01J3/26 , G02B5/284
Abstract: The Fabry-Perot interference filter includes: a substrate having a first surface, a first laminate having a first mirror portion disposed on the first surface, a second laminate having a second mirror portion facing the first mirror portion with an air gap interposed therebetween, and an intermediate layer defining the air gap between the first and second laminate. The substrate has an outer edge portion positioned outside an outer edge of the intermediate layer when viewed from a direction perpendicular to the first surface. The second laminate further includes a covering portion covering the intermediate layer and a peripheral edge portion positioned on the first surface in the outer edge portion. The second mirror portion, the covering portion, and the peripheral edge portion are integrally formed so as to be continuous with each other. The peripheral edge portion is thinned along an outer edge of the outer edge portion.
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公开(公告)号：US20180348054A1
公开(公告)日：2018-12-06
申请号：US16059744
申请日：2018-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI
Abstract: A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the transmission region.
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Patent Agency Ranking
公开(公告)号：US20180266883A1
公开(公告)日：2018-09-20
申请号：US15987563
申请日：2018-05-23
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takafumi YOKINO , Katsumi SHIBAYAMA
CPC classification number: G01J3/18 , G01J3/0256 , G01J3/0286 , G01J3/0291 , G01J3/2803 , G01J3/36
Abstract: A spectrometer includes a light detection element having a substrate made of a semiconductor material, a light passing part provided in the substrate, and a light detection part put in the substrate, a support having a base wall part opposing the light detection element, and side wall parts integrally formed with the base wall part, the light detection element being fixed to the side wall parts, the support being provided with a wiring electrically connected to the light detection part, and a dispersive part provided on a surface of the base wall part on a side of a space. An end part of the wiring is connected to a terminal of the light detection element. An end part of the wiring is positioned on a surface in the base wall part on an opposite side from the side of the space.
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公开(公告)号：US20180113024A1
公开(公告)日：2018-04-26
申请号：US15569101
申请日：2016-04-19
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Takehiko YASHIRO , Mitsushi MINENO , Shigeru SUZUKI
CPC classification number: G01J3/26 , G01J3/0286 , G01J3/0291 , G01J5/0225 , G01J5/024 , G01J5/045 , G01J5/046 , G01J5/06 , G01J5/0862 , G01J5/10 , G01J2005/068 , G02B5/284 , G02B7/008 , G02B26/001
Abstract: A light detection device includes a Fabry-Perot interference filter, a light detector, a spacer that has a placement surface on which a portion outside a light transmission region in a bottom surface of the interference filter is placed, and an adhesive member that adheres the interference filter and the spacer to each other. Elastic modulus of the adhesive member is smaller than elastic modulus of the spacer. At least a part of a lateral surface of the interference filter is located on the placement surface such that a part of the placement surface of the spacer is disposed outside the lateral surface. The adhesive member is disposed in a corner portion formed by the lateral surface of the interference filter and the part of the placement surface of the spacer and contacts each of the lateral surface and the part of the placement surface.
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公开(公告)号：US20170176251A1
公开(公告)日：2017-06-22
申请号：US15116918
申请日：2015-02-03
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takafumi YOKINO , Katsumi SHIBAYAMA
CPC classification number: G01J3/021 , G01J3/0256 , G01J3/0262 , G01J3/0264 , G01J3/0286 , G01J3/0291 , G01J3/04 , G01J3/18
Abstract: A spectrometer includes a light detection element provided with a light passing part and a light detection part, a support fixed to the light detection element such that a space is formed between the light passing part and the light detection part, a first reflection part provided in the support and configured to reflect light passing through the light passing part in the space, a second reflection part provided in the light detection element and configured to reflect the light reflected by the first reflection part in the space, and a dispersive part provided in the support and configured to disperse and reflect the light reflected by the second reflection part to the light detection part in the space.
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公开(公告)号：US20170010156A1
公开(公告)日：2017-01-12
申请号：US15116231
申请日：2015-02-03
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takafumi YOKINO , Katsumi SHIBAYAMA , Katsuhiko KATO
CPC classification number: G01J3/2803 , G01J3/0202 , G01J3/0256 , G01J3/0286 , G01J3/0291 , G01J3/18 , G01J2003/1852
Abstract: A spectrometer includes a package having a stem and a cap, an optical unit disposed on the stem, and a lead pin for securing the optical unit to the stem. The optical unit includes a dispersive part for dispersing and reflecting light entering from a light entrance part of the cap, a light detection element having a light detection part for detecting the light dispersed and reflected by the dispersive part, a support for supporting the light detection element such that a space is formed between the dispersive part and the light detection element, and a projection protruding from the support, the lead pin being secured to the projection. The optical unit is movable with respect to the stem in a contact part of the optical unit and the stem.
Abstract translation: 光谱仪包括具有杆和盖的封装，设置在杆上的光学单元和用于将光学单元固定到杆的引脚。 光学单元包括用于分散和反射从灯的入射部分入射的光的分散部分，具有用于检测由分散部分分散和反射的光的光检测部分的光检测元件，用于支撑光检测的支撑 元件，使得在分散部分和光检测元件之间形成空间，以及从支撑件突出的突起，引脚固定到突起。 光学单元可以在光学单元和杆的接触部分中相对于杆移动。
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公开(公告)号：US20160357009A1
公开(公告)日：2016-12-08
申请号：US15117757
申请日：2015-02-03
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI
IPC: G02B26/00
Abstract: A Fabry-Perot interference filter includes a fixed mirror and a movable mirror disposed opposite to the fixed mirror via a gap, distance between the fixed mirror and the movable in a light transmission region being adjusted by electrostatic force. A plurality of first annular grooves surrounding the light transmission region and a plurality of first through-holes opening to the gap side and the opposite side are formed at a surrounding portion surrounding the light transmission region in the movable mirror.
Abstract translation: 法布里 - 珀罗干涉滤光器包括固定镜和可移动镜，通过间隙与固定镜相对设置，固定镜与可透过静电力调节的光透射区域之间的距离。 围绕透光区域的多个第一环形槽和在间隙侧和相对侧开放的多个第一通孔形成在可移动反射镜中的围绕光透射区域的周围部分。
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