公开(公告)号：US08399864B2

公开(公告)日：2013-03-19

申请号：US13222536

申请日：2011-08-31

Applicant: Raymond Hill ,  Lawrence Scipioni ,  Colin August Sanford ,  Mark DiManna ,  Michael Tanguay

Inventor： Raymond Hill ,  Lawrence Scipioni ,  Colin August Sanford ,  Mark DiManna ,  Michael Tanguay

IPC: H01J37/26 ,  H01J37/141

CPC classification number: H01J37/141 ,  H01J37/026 ,  H01J37/08 ,  H01J2237/0042 ,  H01J2237/0805 ,  H01J2237/1405 ,  H01J2237/28 ,  H01J2237/317 ,  H01J2237/31749

Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.

公开(公告)号：US08164066B2

公开(公告)日：2012-04-24

申请号：US12837857

申请日：2010-07-16

Applicant: Bryan Barnard ,  Christopher Glenister

Inventor： Bryan Barnard ,  Christopher Glenister

IPC: H01J37/145 ,  H01J37/14 ,  G21K5/10

CPC classification number: H01J37/141 ,  H01J37/023 ,  H01J37/21 ,  H01J37/285 ,  H01J2237/1405

Abstract: The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece disposed about the central pole piece, wherein the lens comprises a magnetic moveable element for movement relative to at least one of the pole pieces, whereby a focal length of the lens is variable by said movement of the magnetic moveable element, thereby enabling a zoom facility for changing the magnification of an image. The movement of the moveable element preferably changes the magnetic circuit between the pole pieces. Also provided is a method of focusing charged particles emitted from a sample and a charged particle energy analyzer, such as an imaging photoelectron spectroscopy system.

Abstract translation: 本发明提供一种用于产生磁成像场的磁透镜，用于聚焦从样品发射的带电粒子，所述透镜包括中心极片和设置在中心极片周围的外极片，其中所述透镜包括用于移动的磁性可移动元件 相对于极片中的至少一个，由此通过所述磁性可移动元件的移动可以使透镜的焦距变化，由此实现用于改变图像的放大率的变焦设备。 可移动元件的移动优选地改变极片之间的磁路。 还提供了一种聚焦从样品发射的带电粒子和带电粒子能量分析仪（诸如成像光电子能谱系统）的方法。

公开(公告)号：US08058626B2

公开(公告)日：2011-11-15

申请号：US12703194

申请日：2010-02-10

Applicant: Kenneth Harry Purser ,  William H. Park

Inventor： Kenneth Harry Purser ,  William H. Park

IPC: H01J37/317 ,  H01J3/26 ,  H01L21/265

CPC classification number: G21K1/093 ,  H01J37/12 ,  H01J37/153 ,  H01J37/3171 ,  H01J2237/1405 ,  H01J2237/1534 ,  H01J2237/30477

Abstract: A ribbon-shaped ion beam having an elongate cross-section normal to a beam direction is modified by generating, at a predetermined position along the ribbon-shaped beam, a magnetic field extending in an x-direction along an x-axis. The x-direction magnetic field has a non-uniform intensity which is a desired function of x.

Abstract translation: 通过在沿着带状梁的预定位置处沿着x轴在x方向上延伸的磁场产生具有垂直于光束方向的细长横截面的带状离子束。 x方向磁场具有不均匀的强度，这是x的期望函数。

公开(公告)号：US08013311B2

公开(公告)日：2011-09-06

申请号：US12576914

申请日：2009-10-09

Applicant: Raymond Hill ,  Lawrence Scipioni ,  Colin August Sanford ,  Mark DiManna ,  Michael Tanguay

Inventor： Raymond Hill ,  Lawrence Scipioni ,  Colin August Sanford ,  Mark DiManna ,  Michael Tanguay

IPC: H01J37/30 ,  H01J37/26 ,  H01J37/10

CPC classification number: H01J37/141 ,  H01J37/026 ,  H01J37/08 ,  H01J2237/0042 ,  H01J2237/0805 ,  H01J2237/1405 ,  H01J2237/28 ,  H01J2237/317 ,  H01J2237/31749

Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.

Abstract translation: 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。 离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。 可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。 磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。

公开(公告)号：US08003953B2

公开(公告)日：2011-08-23

申请号：US12636007

申请日：2009-12-11

Applicant: Zhongwei Chen ,  Weiming Ren ,  Kenichi Kanai ,  Xuedong Liu

Inventor： Zhongwei Chen ,  Weiming Ren ,  Kenichi Kanai ,  Xuedong Liu

IPC: H01J1/50

CPC classification number: H01J37/141 ,  H01J2237/1405

Abstract: The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.

Abstract translation: 本发明涉及带电粒子束系统的多轴磁透镜。 该装置从由公共的励磁线圈产生的磁场中消除不期望的非轴对称的横向磁场分量，并且留下用于聚焦在系统内采用的每个粒子束的期望的轴对称场。

公开(公告)号：US20110018470A1

公开(公告)日：2011-01-27

申请号：US12896110

申请日：2010-10-01

Applicant: Xu Zhang ,  Zhong-Wei Chen

Inventor： Xu Zhang ,  Zhong-Wei Chen

IPC: H01J29/64 ,  H01J29/70 ,  H01J1/50

CPC classification number: H01J37/141 ,  H01J37/063 ,  H01J2237/065 ,  H01J2237/083 ,  H01J2237/1035 ,  H01J2237/1405

Abstract: An electron gun comprises an electron emitter, an electrode surrounding the electron emitter, an extraction electrode, and a double condenser lens assembly, the double condenser lens assembly comprising a magnetic immersion pre-condenser lens and a condenser lens. In combination with a probe forming objective lens, the electron gun apparatus can provide an electron beam of independently adjustable probe size and probe current, as is desirable in electron beam applications. The electron emitter is immersed in the magnetic field generated by a magnetic type pre-condenser lens. When activated, the pre-condenser lens collimates the beam effectively to increase its angular intensity while at the same time enlarging the virtual source as compared with non-immersion case, due to geometric magnification and aberrations of its lens action. The pre-condenser lens is followed by a condenser lens. If the condenser lens is of the magnetic type, its peak magnetic field is far enough away and thus its action does not significantly affect the size of the virtual source. Independent adjustment of the lenses, combined with suitable selection of final probe forming objective aperture size, allows various combination of the final probe size and probe current to be obtained in a range sufficient for most electron beam applications.

Abstract translation: 电子枪包括电子发射器，围绕电子发射体的电极，引出电极和双重聚光透镜组件，双重聚光透镜组件包括磁性浸入式预聚光透镜和聚光透镜。 与形成物镜的探针组合，如在电子束应用中所希望的那样，电子枪装置可以提供独立可调的探针尺寸和探针电流的电子束。 将电子发射器浸入由磁式预聚光透镜产生的磁场中。 当激活时，由于几何放大和其透镜作用的像差，预聚焦透镜有效地准直光束以增加其角度强度，同时与非浸没情况相比放大虚拟光源。 预聚光透镜之后是聚光透镜。 如果聚光透镜是磁性的，则其峰值磁场足够远，因此其作用不会显着影响虚拟源的尺寸。 透镜的独立调整结合适当选择最终探针形成物镜孔径的尺寸允许在足以满足大多数电子束应用的范围内获得最终探针尺寸和探针电流的各种组合。

公开(公告)号：US20110012018A1

公开(公告)日：2011-01-20

申请号：US12837857

申请日：2010-07-16

Applicant: Bryan BARNARD ,  Christopher Glenister

Inventor： Bryan BARNARD ,  Christopher Glenister

IPC: H01J37/141 ,  H01J47/00 ,  G01N23/22

CPC classification number: H01J37/141 ,  H01J37/023 ,  H01J37/21 ,  H01J37/285 ,  H01J2237/1405

Abstract: The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece disposed about the central pole piece, wherein the lens comprises a magnetic moveable element for movement relative to at least one of the pole pieces, whereby a focal length of the lens is variable by said movement of the magnetic moveable element, thereby enabling a zoom facility for changing the magnification of an image. The movement of the moveable element preferably changes the magnetic circuit between the pole pieces. Also provided is a method of focusing charged particles emitted from a sample and a charged particle energy analyzer, such as an imaging photoelectron spectroscopy system.

Abstract translation: 本发明提供一种用于产生磁成像场的磁透镜，用于聚焦从样品发射的带电粒子，所述透镜包括中心极片和设置在中心极片周围的外极片，其中所述透镜包括用于移动的磁性可移动元件 相对于极片中的至少一个，由此通过所述磁性可移动元件的移动可以使透镜的焦距变化，由此实现用于改变图像的放大率的变焦设备。 可移动元件的移动优选地改变极片之间的磁路。 还提供了一种聚焦从样品发射的带电粒子和带电粒子能量分析仪（诸如成像光电子能谱系统）的方法。

公开(公告)号：US07755060B2

公开(公告)日：2010-07-13

申请号：US11784698

申请日：2007-04-09

Applicant: Eiji Kawai

Inventor： Eiji Kawai

IPC: G21K1/093 ,  H01J1/50 ,  H01J3/20

CPC classification number: H01J37/153 ,  H01J2237/1405 ,  H01J2237/1532 ,  H01J2237/26 ,  H01J2237/28

Abstract: There is disclosed a multipole lens that can be machined with improved accuracy. A method of fabricating this lens is also disclosed. The multipole lens has a blank material from which polar elements will be fabricated. The blank material is sandwiched vertically between two layers of film-like insulator. The blank material and the two layers of film-like insulator are sandwiched vertically between an upper ring and a lower ring. These members are provided with injection holes for injecting a curing agent. The injection holes of these members are aligned. The curing agent is injected into the holes and cured. Then, the blank material is machined by electric discharge machining to form the polar elements.

Abstract translation: 公开了可以提高准确度来加工的多极镜头。 还公开了一种制造该透镜的方法。 多极镜头具有制造极性元件的空白材料。 坯料垂直夹在两层薄膜状绝缘体之间。 空白材料和两层薄膜状绝缘体垂直夹在上环和下环之间。 这些构件设置有用于注入固化剂的注入孔。 这些构件的注入孔对齐。 将固化剂注入孔中并固化。 然后，通过放电加工对坯料进行加工以形成极性元件。

公开(公告)号：US20090261266A1

公开(公告)日：2009-10-22

申请号：US12492610

申请日：2009-06-26

Applicant: STEFAN LANIO

Inventor： STEFAN LANIO

IPC: H01J1/50

CPC classification number: H01J37/141 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1205 ,  H01J2237/1405

Abstract: The invention provides a lens system for a plurality of charged particle beams. The lens system comprises an excitation coil providing a magnetic flux to a pole piece unit having a first pole piece, a second pole piece and at least two openings for charged particle beams, wherein the two openings are arranged in one row, thereby forming a lens row, and wherein the pole piece unit has an elongated shape.

Abstract translation: 本发明提供一种用于多个带电粒子束的透镜系统。 所述透镜系统包括向具有第一极片，第二极片和用于带电粒子束的至少两个开口的极片单元提供磁通的激励线圈，其中两个开口布置成一排，从而形成透镜 并且其中所述极靴单元具有细长形状。

公开(公告)号：US07601976B2

公开(公告)日：2009-10-13

申请号：US11641540

申请日：2006-12-18

Applicant: Raymond Hill ,  Colin August Sanford ,  Lawrence Scipioni ,  Mark DiManna ,  Michael Tanguay

Inventor： Raymond Hill ,  Colin August Sanford ,  Lawrence Scipioni ,  Mark DiManna ,  Michael Tanguay

IPC: H01J37/30 ,  H01L21/266 ,  H01L21/263

CPC classification number: H01J37/141 ,  H01J37/026 ,  H01J37/08 ,  H01J2237/0042 ,  H01J2237/0805 ,  H01J2237/1405 ,  H01J2237/28 ,  H01J2237/317 ,  H01J2237/31749

Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.

Abstract translation: 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。 离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。 可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。 磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。