公开(公告)号：US20050178118A1

公开(公告)日：2005-08-18

申请号：US11107787

申请日：2005-04-18

Applicant: Kia Silverbrook

Inventor： Kia Silverbrook

IPC: B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16 ,  B81B3/00 ,  B81C1/00 ,  G11B5/55 ,  F01B29/10 ,  F02G1/04 ,  G11B21/08

CPC classification number: B41J2/1645 ,  B41J2/14427 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1648 ,  B81B3/007 ,  B81B2201/031 ,  B81B2201/036 ,  B81B2201/052 ,  Y10T29/42 ,  Y10T29/49083 ,  Y10T29/49401

Abstract: A thermal bend actuator (6) is provided with a group of upper arms (23, 25, 26) and a group of lower arms (27, 28) which are non planar, so increasing the stiffness of the arms. The arms (23, 25, 26,27,28) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material

Abstract translation: 热弯曲致动器（6）设置有一组上臂（23,25,26）和一组非平面的下臂（27,28），因此增加了臂的刚度。 臂（23,25,26,27,28）可以彼此横向间隔开，并且在平面图中不会彼此过多，因此能够通过沉积单层臂形成材料来形成所有臂

公开(公告)号：US06439693B1

公开(公告)日：2002-08-27

申请号：US09564034

申请日：2000-05-04

Applicant: Kia Silverbrook

Inventor： Kia Silverbrook

IPC: B41J204

CPC classification number: B41J2/1645 ,  B41J2/14427 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1648 ,  B81B3/007 ,  B81B2201/031 ,  B81B2201/036 ,  B81B2201/052 ,  Y10T29/42 ,  Y10T29/49083 ,  Y10T29/49401

Abstract: A thermal bend actuator (6) is provided with upper arms (23, 25, 26) and lower arms (27, 28) which are non planar, so increasing the stiffness of the arms. The arms (23, 25, 26, 27, 28) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material.

公开(公告)号：US06345502B1

公开(公告)日：2002-02-12

申请号：US09191267

申请日：1998-11-12

Applicant: Yu-Chong Tai ,  Xing Yang ,  Charles Grosjean ,  Xuan-Qi Wang

Inventor： Yu-Chong Tai ,  Xing Yang ,  Charles Grosjean ,  Xuan-Qi Wang

IPC: F01B2900

CPC classification number: F15C5/00 ,  B81B3/0024 ,  B81B2201/036 ,  B81B2201/054 ,  F04B19/24 ,  F04B43/043 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/7737 ,  Y10T137/7879

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

公开(公告)号：US20010017287A1

公开(公告)日：2001-08-30

申请号：US09745367

申请日：2000-12-22

Applicant: California Institute of Technology, a California corportion

Inventor： Xu-Chong Tai ,  Xing Yang ,  Charles Grosjean ,  Xuan-Qi Wang

IPC: F02G001/04 ,  B44C001/22 ,  C23F001/00

CPC classification number: F15C5/00 ,  B81B3/0024 ,  B81B2201/036 ,  B81B2201/054 ,  F04B19/24 ,  F04B43/043 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/7737 ,  Y10T137/7879

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

公开(公告)号：US20240158221A1

公开(公告)日：2024-05-16

申请号：US18055140

申请日：2022-11-14

Applicant: Robert Bosch Gmbh

Inventor： Christoph Schelling ,  Timothy Schultz

IPC: B81B3/00

CPC classification number: B81B3/0021 ,  B81B2201/0257 ,  B81B2201/036 ,  B81B2203/0118 ,  B81B2203/053

Abstract: A fluidic microelectromechanical system (MEMS) device includes fluid interaction elements (FIEs) that can be displaced by an actuator to generate fluid flow. The FIEs include a serial arrangement of cantilevered lever arms to achieve, for example, high sound pressure levels in a micro speaker or high pump rates in a micropump as compared to some conventional MEMS devices.

公开(公告)号：US11940576B1

公开(公告)日：2024-03-26

申请号：US17362212

申请日：2021-06-29

Applicant: National Technology & Engineering Solutions of Sandia, LLC

Inventor： Mark D. Allendorf ,  Fred Patrick Doty

IPC: G01T1/20 ,  B01J20/22 ,  B81B7/00 ,  G01T1/16 ,  G01T1/167 ,  G01T7/02

CPC classification number: G01T1/20184 ,  B01J20/226 ,  B81B7/0038 ,  B81B7/0077 ,  G01T1/167 ,  G01T7/02 ,  B81B2201/0214 ,  B81B2201/036

Abstract: Various technologies presented herein relate to a method and equipment for detecting both airborne radioisotope and molecular effluent gases. Multi-Axis Sensing can be conducted by utilizing a pressurized MOF sorbent, such as a scintillating Metal-Organic Frameworks (S-MOFs). These MOFs are crystalline nanoporous materials that have synthetic versatility that allow adjustment of pore size, chemical environment, and luminescence properties. A method for detecting an analyte in a fluid sample is provided that comprises: loading a sorbent with a sample fluid, wherein the sorbent comprises a MOF material; pressurizing the sample fluid to increase the fluid in the sorbent thereby making a pressurized sorbent; and detecting ionizing radiation or a chemical property of the analyte in the pressurized sorbent.

公开(公告)号：US10082135B2

公开(公告)日：2018-09-25

申请号：US13508650

申请日：2010-11-12

Applicant: Yves Fouillet ,  Francois Baleras ,  Martine Cochet ,  Sandrine Maubert

Inventor： Yves Fouillet ,  Francois Baleras ,  Martine Cochet ,  Sandrine Maubert

IPC: F04B45/04 ,  F04B43/04 ,  F04B43/02 ,  A61M5/145 ,  B81C1/00

CPC classification number: F04B43/046 ,  A61M5/14586 ,  B81B2201/036 ,  B81B2203/0127 ,  B81C1/00182 ,  B81C2201/0167 ,  B81C2201/019 ,  F04B43/02 ,  F04B43/043 ,  F05C2203/02 ,  F05C2203/06 ,  Y10T29/494

Abstract: A method for producing at least one deformable membrane micropump including a first substrate and a second substrate assembled together, the first substrate including at least one cavity and the second substrate including at least one deformable membrane arranged facing the cavity. In the method: the cavity is produced in the first substrate; then the first and second substrates are assembled together; then the deformable membrane is produced in the second substrate.

公开(公告)号：US09708176B2

公开(公告)日：2017-07-18

申请号：US14723927

申请日：2015-05-28

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Joseph Seeger

IPC: B81B3/00

CPC classification number: B81B3/0086 ,  B81B7/02 ,  B81B2201/014 ,  B81B2201/0214 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2201/0271 ,  B81B2201/0292 ,  B81B2201/036 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81B2203/04 ,  B81B2207/012 ,  B81C2203/0792 ,  H01H1/0036

Abstract: A system and/or method for utilizing MEMS switching technology to operate MEMS sensors. As a non-limiting example, a MEMS switch may be utilized to control DC and/or AC bias applied to MEMS sensor structures. Also for example, one or more MEMS switches may be utilized to provide drive signals to MEMS sensors (e.g., to provide a drive signal to a MEMS gyroscope).

公开(公告)号：US20170151560A1

公开(公告)日：2017-06-01

申请号：US15429706

申请日：2017-02-10

Applicant: RHEONIX, INC.

Inventor： Peng Zhou ,  Lincoln C. Young

IPC: B01L3/00 ,  F04B43/02 ,  B81B3/00 ,  B29C65/48 ,  B29C65/00 ,  B81C1/00 ,  F16K99/00 ,  B01F13/00

CPC classification number: F16K7/12 ,  B01F5/0683 ,  B01F5/0688 ,  B01F11/0071 ,  B01F13/0059 ,  B01F2215/0034 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0861 ,  B01L2300/0867 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0487 ,  B01L2400/06 ,  B01L2400/0638 ,  B01L2400/0655 ,  B01L2400/084 ,  B29C65/4895 ,  B29C66/004 ,  B29C66/54 ,  B29C66/5412 ,  B29C66/71 ,  B29K2025/00 ,  B29K2025/04 ,  B29K2033/08 ,  B29K2069/00 ,  B29K2101/12 ,  B29L2031/7496 ,  B29L2031/7506 ,  B29L2031/756 ,  B81B3/0021 ,  B81B2201/036 ,  B81B2201/054 ,  B81B2203/0127 ,  B81C1/00103 ,  B81C1/00158 ,  F04B43/028 ,  F04B43/043 ,  F04B43/06 ,  F15C1/08 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0021 ,  F16K99/0034 ,  F16K99/0055 ,  F16K99/0057 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T29/49405 ,  Y10T137/212 ,  Y10T137/2202 ,  Y10T137/2218 ,  Y10T137/8593 ,  Y10T137/85978 ,  Y10T156/1002 ,  Y10T156/1043 ,  B29K2033/12 ,  B29K2025/06

Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.

公开(公告)号：US20160204716A1

公开(公告)日：2016-07-14

申请号：US14910622

申请日：2014-07-30

Applicant: NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY ,  OMRON CORPORATION ,  KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO

Inventor： Masato SUZUKI ,  Akito MORI ,  Gen HASHIGUCHI ,  Tatsuhiko SUGIYAMA ,  Hiroshi IMAMOTO ,  Masatoshi OBA ,  Hiroyuki MITSUYA ,  Hisayuki ASHIZAWA ,  Kazunori ISHIBASHI

IPC: H02N1/00 ,  F16K31/02 ,  G02B26/02 ,  B81B3/00 ,  H01H59/00

CPC classification number: H02N1/008 ,  B81B3/0054 ,  B81B2201/018 ,  B81B2201/0292 ,  B81B2201/033 ,  B81B2201/036 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/0163 ,  B81B2203/051 ,  F16K31/02 ,  G02B26/02 ,  H01H59/00

Abstract: An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.

Abstract translation: 致动器包括：静电致动机构，包括固定电极和可动电极; 由静电致动机构驱动的第一可动部; 第一弹性支撑部，其弹性地支撑所述第一可动部; 在所述固定电极和所述可动电极中的至少一个上形成的驻极体; 以及驱动控制单元，其控制对静电致动机构施加电压。 在致动器中，设置多个稳定状态，其中第一可移动部件位于由驻极体产生的静电力与由第一弹性支撑部分施加的弹力相匹配的稳定位置处，或者靠近这样的稳定​​位置 稳定的位置。 通过向静电致动机构施加电压，第一可动部件可以从任何稳定位置移动到另一个稳定位置。