公开(公告)号：US20230236517A1

公开(公告)日：2023-07-27

申请号：US18130328

申请日：2023-04-03

Applicant: Intel Corporation

Inventor： Changhua LIU ,  Jianyong MO ,  Liang ZHANG

IPC: G03F7/20 ,  B81B1/00 ,  B81C1/00

CPC classification number: G03F7/70733 ,  B81B1/00 ,  B81C1/00111 ,  G03F7/201 ,  B81B2203/0361 ,  B81C2201/0159

Abstract: Embodiments disclosed herein include lithographic patterning systems for non-orthogonal patterning and devices formed with such patterning. In an embodiment, a lithographic patterning system comprises an actinic radiation source, where the actinic radiation source is configured to propagate light along an optical axis. In an embodiment, the lithographic patterning system further comprises a mask mount, where the mask mount is configurable to orient a surface of a mask at a first angle with respect to the optical axis. In an embodiment, the lithographic patterning system further comprises a lens module, and a substrate mount, where the substrate mount is configurable to orient a surface of a substrate at a second angle with respect to the optical axis.

公开(公告)号：US20180148324A1

公开(公告)日：2018-05-31

申请号：US15725752

申请日：2017-10-05

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chin-Han MENG ,  Chih-Hsien HSU ,  Chia-Chi CHUNG ,  Yu-Pei CHIANG ,  Wen-Chih CHEN ,  Chen-Huang HUANG ,  Zhi-Sheng XU ,  Jr-Sheng CHEN ,  Kuo-Chin LIU ,  Lin-Ching HUANG

IPC: B81C1/00 ,  H01H59/00 ,  H01G5/18 ,  B81B3/00

CPC classification number: B81C1/00182 ,  B81B3/0072 ,  B81C1/00158 ,  B81C1/00476 ,  B81C1/00523 ,  B81C2201/0159 ,  B81C2201/0198 ,  H01G5/18 ,  H01H59/0009

Abstract: A method for forming a micro-electro-mechanical system (MEMS) device structure is provided. The method includes forming a second substrate over a first substrate, and a cavity is formed between the first substrate and the second substrate. The method includes forming a hole through the second substrate using an etching process, and the hole is connected to the cavity. The etching process includes a plurality of etching cycles, and each of the etching cycles includes an etching step, and the etching step has a first stage and a second stage. The etching time of each of the etching steps during the second stage is gradually increased as the number of etching cycles is increased.

公开(公告)号：US09975761B2

公开(公告)日：2018-05-22

申请号：US15444086

申请日：2017-02-27

Applicant: SMARTTIP BV

Inventor： Edin Sarajlic

IPC: B81C1/00 ,  A61B5/15

CPC classification number: B81C1/0015 ,  A61B5/150022 ,  A61B5/150282 ,  A61B5/150396 ,  A61B5/150511 ,  A61B5/150519 ,  A61B5/150984 ,  A61B5/15142 ,  A61M37/0015 ,  B81B2201/057 ,  B81B2201/12 ,  B81B2203/0118 ,  B81B2203/0353 ,  B81C1/00087 ,  B81C1/00111 ,  B81C1/00119 ,  B81C2201/0132 ,  B81C2201/0143 ,  B81C2201/0159 ,  B81C2201/0198 ,  C01B21/0687

Abstract: A method of manufacturing a plurality of through-holes in a layer of first material, for example for the manufacturing of a probe comprising a tip containing a channel. To manufacture the through-holes in a batch process, a layer of first material is deposited on a wafer comprising a plurality of pits a second layer is provided on the layer of first material, and the second layer is provided with a plurality of holes at central locations of the pits; using the second layer as a shadow mask when depositing a third layer at an angle, covering a part of the first material with said third material at the central locations, and etching the exposed parts of the first layer using the third layer as a protective layer.

公开(公告)号：US20170166443A1

公开(公告)日：2017-06-15

申请号：US15197418

申请日：2016-06-29

Applicant: HYUNDAI MOTOR COMPANY

Inventor： Ilseon YOO

IPC: B81C1/00

CPC classification number: B81C1/00269 ,  B81B7/007 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/04 ,  B81C2201/013 ,  B81C2201/0159 ,  B81C2203/0118 ,  B81C2203/031 ,  B81C2203/035 ,  B81C2203/036

Abstract: A manufacturing method of a MEMS sensor includes forming a first substrate, wherein the first substrate includes a lower electrode provided at one surface thereof, forming a second substrate, wherein the second substrate includes a first concave-convex portion provided at one surface thereof, first-bonding one surface of the first substrate and one surface of the second substrate to face each other, forming a third substrate, wherein the third substrate includes an upper electrode provided at one surface thereof, second-bonding another surface of the second substrate and one surface of the third substrate to face each other, and forming an electrode line on another surface of the third substrate to be connected to the lower electrode and the upper electrode.

公开(公告)号：US09618342B2

公开(公告)日：2017-04-11

申请号：US14270596

申请日：2014-05-06

Applicant: Chinese Academy of Sciences Institute of Geology and Geophysics

Inventor： Lian Zhong Yu ,  Chen Sun

IPC: G01C19/5747 ,  G01C19/5769

CPC classification number: G01C19/5769 ,  B81B3/0048 ,  B81B2201/0242 ,  B81B2203/0118 ,  B81B2203/0136 ,  B81C1/00531 ,  B81C2201/0132 ,  B81C2201/0159 ,  B81C2201/0176 ,  B81C2203/0118 ,  G01C19/574 ,  G01C19/5747

Abstract: A MEMS anti-phase vibratory gyroscope includes two measurement masses with a top cap and a bottom cap each coupled with a respective measurement mass. The measurement masses are oppositely coupled with each other in the vertical direction. Each measurement mass includes an outer frame, an inner frame located within the outer frame, and a mass located within the inner frame. The two measurement masses are coupled with each other through the outer frame. The inner frame is coupled with the outer frame by a plurality of first elastic beams. The mass is coupled with the inner frame by a plurality of second elastic beams. A comb coupling structure is provided along opposite sides of the outer frame and the inner frame. The two masses vibrate toward the opposite direction, and the comb coupling structure measures the angular velocity of rotation.

公开(公告)号：US09433115B2

公开(公告)日：2016-08-30

申请号：US13910340

申请日：2013-06-05

Applicant: THE AEROSPACE CORPORATION

Inventor： Henry Helvajian

IPC: H05K1/11 ,  H05K7/02 ,  B01J19/00 ,  B01L3/00 ,  B81B7/00 ,  B81C99/00 ,  H01P3/12 ,  H05K1/16 ,  H05K3/10 ,  G02B6/12 ,  H05K1/03 ,  H05K3/00

CPC classification number: H05K7/02 ,  B01J19/0093 ,  B01J2219/00824 ,  B01J2219/00835 ,  B01J2219/00853 ,  B01J2219/00941 ,  B01J2219/00948 ,  B01L3/502707 ,  B01L2300/0654 ,  B01L2300/0681 ,  B01L2300/0867 ,  B01L2300/0874 ,  B81B7/0077 ,  B81B2207/07 ,  B81B2207/092 ,  B81B2207/095 ,  B81B2207/096 ,  B81C99/0095 ,  B81C2201/0143 ,  B81C2201/0159 ,  G02B2006/12035 ,  G02B2006/12171 ,  H01P3/121 ,  H05K1/0306 ,  H05K1/16 ,  H05K1/162 ,  H05K1/165 ,  H05K3/0023 ,  H05K3/101 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

Abstract: A photostructurable ceramic is processed using photostructuring process steps for embedding devices within a photostructurable ceramic volume, the devices may include one or more of chemical, mechanical, electronic, electromagnetic, optical, and acoustic devices, all made in part by creating device material within the ceramic or by disposing a device material through surface ports of the ceramic volume, with the devices being interconnected using internal connections and surface interfaces.

Abstract translation: 使用用于将器件嵌入可光可陶瓷陶瓷体积内的光学结构化工艺步骤来处理可光电陶瓷，该器件可以包括化学，机械，电子，电磁，光学和声学设备中的一种或多种，​​所有这些都部分地通过在 陶瓷或通过陶瓷体的表面端口设置器件材料，使用内部连接和表面接口互连这些器件。

公开(公告)号：US20160238390A1

公开(公告)日：2016-08-18

申请号：US14270596

申请日：2014-05-06

Applicant: Chinese Academy of Sciences Institute of Geology and Geophysics

Inventor： Lian Zhong Yu ,  Chen Sun

IPC: G01C19/5747 ,  G01C19/5769

CPC classification number: G01C19/5769 ,  B81B3/0048 ,  B81B2201/0242 ,  B81B2203/0118 ,  B81B2203/0136 ,  B81C1/00531 ,  B81C2201/0132 ,  B81C2201/0159 ,  B81C2201/0176 ,  B81C2203/0118 ,  G01C19/574 ,  G01C19/5747

Abstract: A MEMS anti-phase vibratory gyroscope includes two measurement masses with a top cap and a bottom cap each coupled with a respective measurement mass. The measurement masses are oppositely coupled with each other in the vertical direction. Each measurement mass includes an outer frame, an inner frame located within the outer frame, and a mass located within the inner frame. The two measurement masses are coupled with each other through the outer frame. The inner frame is coupled with the outer frame by a plurality of first elastic beams. The mass is coupled with the inner frame by a plurality of second elastic beams. A comb coupling structure is provided along opposite sides of the outer frame and the inner frame. The two masses vibrate toward the opposite direction, and the comb coupling structure measures the angular velocity of rotation.

Abstract translation: MEMS反相振动陀螺仪包括两个测量质量，其具有顶盖和底盖，每个与相应的测量质量耦合。 测量质量在垂直方向上相互耦合。 每个测量质量包括外框架，位于外框架内的内框架和位于内框架内的质量。 两个测量质量通过外框架相互耦合。 内框架通过多个第一弹性梁与外框架联接。 质量通过多个第二弹性梁与内框架联接。 梳齿联接结构沿着外框架和内框架的相对侧设置。 两个质量体向相反方向振动，梳齿联结结构测量旋转角速度。

公开(公告)号：US09051176B2

公开(公告)日：2015-06-09

申请号：US12524946

申请日：2008-02-04

Applicant: Thomas G. Mason

Inventor： Thomas G. Mason

IPC: B81C3/00 ,  B81C99/00 ,  G03F7/40

CPC classification number: B81C99/008 ,  B81C3/002 ,  B81C3/005 ,  B81C2201/0149 ,  B81C2201/0159 ,  B81C2203/057 ,  G03F7/40 ,  Y10T428/24802

Abstract: Producing composite structures includes dispersing a first plurality of objects, a second plurality of objects, and a third plurality of objects in a fluid, the third and second plurality of objects having an average maximum dimension that is smaller than the first plurality of objects The first plurality of objects comprise a first, a second, a third and a forth object, each having mating surface regions The first and second objects' mating surfaces are complimentary and the third and forth objects' mating surfaces are complementary The first and second object aggregate together in response to the dispersing of the second plurality of objects in the fluid due to a depletion attraction between the first and the second object The third and forth object aggregate together in response to dispersing the third plurality of objects in the fluid due to a depletion attraction between the third and the fourth object.

Abstract translation: 生产复合结构包括将第一多个物体，第二多个物体和第三多个物体分散在流体中，第三和第二多个物体具有小于第一多个物体的平均最大尺寸。第一 多个物体包括具有配合表面区域的第一，第二，第三和第四物体。第一和第二物体的配合表面是互补的，并且第三和第四物体的配合表面是互补的。第一和第二物体聚集在一起 响应于由于第一和第二物体之间的耗尽引力而使第二多个物体在流体中的分散。第三和第四个物体响应于由于耗尽吸力而将第三多个物体分散在流体中而聚集在一起 在第三和第四个物体之间。

公开(公告)号：US09006845B2

公开(公告)日：2015-04-14

申请号：US13743300

申请日：2013-01-16

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe

IPC: H01L29/84 ,  B81B3/00 ,  B81C1/00

CPC classification number: B81C1/00325 ,  B81B3/0072 ,  B81B2201/0257 ,  B81C1/00158 ,  B81C1/00182 ,  B81C2201/013 ,  B81C2201/0159 ,  B81C2201/0198

Abstract: A MEMS device, a method of making a MEMS device and a system of a MEMS device are shown. In one embodiment, a MEMS device includes a first polymer layer, a MEMS substrate disposed on the first polymer layer and a MEMS structure supported by the MEMS substrate. The MEMS device further includes a first opening disposed in the MEMS substrate and a second opening disposed in the first polymer layer.

Abstract translation: 示出了MEMS器件，制造MEMS器件的方法和MEMS器件的系统。 在一个实施例中，MEMS器件包括第一聚合物层，设置在第一聚合物层上的MEMS衬底和由MEMS衬底支撑的MEMS结构。 MEMS器件还包括设置在MEMS衬底中的第一开口和设置在第一聚合物层中的第二开口。

公开(公告)号：US20140030811A1

公开(公告)日：2014-01-30

申请号：US13675685

申请日：2012-11-13

Applicant: Princeton University

Inventor： Han Cao ,  Jonas O. Tegenfeldt ,  Stephen Chou ,  Robert H. Austin

IPC: G01N21/64

CPC classification number: G01N21/6486 ,  B01L3/502707 ,  B01L3/502715 ,  B01L3/502746 ,  B01L3/502761 ,  B01L2200/027 ,  B01L2200/0663 ,  B01L2200/12 ,  B01L2300/0654 ,  B01L2300/0896 ,  B01L2400/0415 ,  B01L2400/086 ,  B81B2201/058 ,  B81C1/00119 ,  B81C2201/0157 ,  B81C2201/0159 ,  B82Y30/00 ,  G01N33/48721 ,  G03F7/2008 ,  Y10T436/143333

Abstract: The present invention relates to a device for interfacing nanofluidic and microfluidic components suitable for use in performing high throughput macromolecular analysis. Diffraction gradient lithography (DGL) is used to form a gradient interface between a microfluidic area and a nanofluidic area. The gradient interface area reduces the local entropic barrier to nanochannels formed in the nanofluidic area. In one embodiment, the gradient interface area is formed of lateral spatial gradient structures for narrowing the cross section of a value from the micron to the nanometer length scale. In another embodiment, the gradient interface area is formed of a vertical sloped gradient structure. Additionally, the gradient structure can provide both a lateral and vertical gradient.

Abstract translation: 本发明涉及适用于进行高通量大分子分析的纳米流体和微流体组分的界面装置。 衍射梯度光刻（DGL）用于在微流体区域和纳流体区域之间形成梯度界面。 梯度界面面积减小了在纳米流体区域形成的纳米通道的局部熵阻挡。 在一个实施例中，梯度界面区域由横向空间梯度结构形成，用于使从微米到纳米长度尺度的值的横截面变窄。 在另一个实施例中，梯度界面区域由垂直倾斜梯度结构形成。 此外，梯度结构可以提供横向和垂直梯度。