公开(公告)号：US11302507B2

公开(公告)日：2022-04-12

申请号：US16500789

申请日：2018-03-30

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani ,  Atsushi Koizumi ,  Tomoaki Kawamata ,  Haruka Shikano

IPC: H01J1/94 ,  H01J3/02

Abstract: The present invention addresses the problem of providing an electron beam generator and an electron beam applicator for which maintenance is facilitated. The electron beam generator comprises a vacuum chamber, a photocathode holder, an activation vessel, and an internal motive power transmission member. The photocathode holder is capable of moving relative to the activation vessel.

公开(公告)号：US09818569B2

公开(公告)日：2017-11-14

申请号：US14587634

申请日：2014-12-31

Applicant: Rad Source Technologies, Inc.

Inventor： Phillip Kent Ausburn

IPC: H01J35/32 ,  H01J35/18 ,  H01J35/08 ,  H01J37/06 ,  H01J19/32 ,  H01J19/48 ,  H01J1/16 ,  H01J1/40 ,  H01J37/063 ,  H01J35/06 ,  H01J35/16 ,  H01J1/94 ,  A61B6/00 ,  H01J19/57

CPC classification number: H01J19/32 ,  A61B6/40 ,  A61B6/482 ,  H01J1/16 ,  H01J1/40 ,  H01J1/94 ,  H01J19/48 ,  H01J19/57 ,  H01J35/06 ,  H01J35/08 ,  H01J35/16 ,  H01J35/18 ,  H01J35/32 ,  H01J37/063 ,  H01J2235/087 ,  H01J2235/186 ,  H01J2893/0006 ,  H01J2893/0012

Abstract: A high dose output, through transmission target X-ray tube and methods of use includes, in general an X-ray tube for accelerating electrons under a high voltage potential having an evacuated high voltage housing, a hemispherical shaped through transmission target anode disposed in said housing, a cathode structure to deflect the electrons toward the hemispherical anode disposed in said housing, a filament located in the geometric center of the anode hemisphere disposed in said housing, a power supply connected to said cathode to provide accelerating voltage to the electrons.

公开(公告)号：US20160240365A1

公开(公告)日：2016-08-18

申请号：US15025928

申请日：2014-10-29

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Akinori ASAI ,  Naoya MATSUMOTO

IPC: H01J61/073 ,  H01J61/16 ,  H01J1/94

CPC classification number: H01J61/0737 ,  H01J1/94 ,  H01J61/0732 ,  H01J61/16 ,  H01J65/04

Abstract: In a light-emitting sealed body, a metal structure (electron emission structure) containing an easily electron-emitting material is used, so that it is not necessary to perform feeding for discharge between electrodes. Therefore, a feeding member does not need to be connected to the metal structure from the outside of a bulb. In addition, in the light-emitting sealed body, the metal structure is disposed in an internal space S of the bulb and a positioning unit of the metal structure is disposed only in the bulb. Therefore, in the light-emitting sealed body, the metal structure and the positioning unit do not penetrate the bulb and are not buried in the bulb and weakened portions are not formed in the bulb made of glass. Therefore, a sealing state of the bulb can be maintained surely.

Abstract translation: 在发光密封体中，使用容纳电子发射材料的金属结构（电子发射结构），从而不需要在电极之间进行放电。 因此，馈电构件不需要从灯泡的外部连接到金属结构。 此外，在发光密封体中，金属结构设置在灯泡的内部空间S中，并且金属结构的定位单元仅设置在灯泡中。 因此，在发光密封体中，金属结构体和定位单元不会穿透灯泡，并且不会埋入灯泡，并且在玻璃制的灯泡中不形成弱化部。 因此，能够可靠地保持灯泡的密封状态。

公开(公告)号：US08624480B2

公开(公告)日：2014-01-07

申请号：US13068544

申请日：2011-05-13

Applicant: Tadami Maeda

Inventor： Tadami Maeda

IPC: H01J1/94 ,  H01J17/04

CPC classification number: H01J29/96 ,  H01J31/126

Abstract: The distance between filamentary cathodes and a phosphor on an anode substrate can be reduced by shortening the distance between the filamentary cathodes and a grid. To obtain high luminance without loss of display quality, the present invention provides a vacuum fluorescent display (1) with a driver IC, comprising a display unit (3) provided with a phosphor layer on an anode substrate (2), a plurality of filamentary cathodes (5), a grid (4), a driver IC (6), and a filament support (7) for shielding the IC and supporting an end part of the filamentary cathodes. The end part of the filamentary cathodes is fixed to one short side of the vacuum fluorescent display at a long side of the filament support. Depressions are provided to a surface of the filament support, or slits are provided to the filament support.

Abstract translation: 可以通过缩短丝状阴极和网格之间的距离来减小丝状阴极与阳极基底上的磷光体之间的距离。 为了获得高亮度而不损失显示质量，本发明提供一种具有驱动器IC的真空荧光显示器（1），其包括在阳极基板（2）上设置有荧光体层的显示单元（3），多个丝状 阴极（5），格栅（4），驱动器IC（6）和用于屏蔽IC并支撑丝状阴极的端部的灯丝支撑件（7）。 长丝支撑体的长边，将丝状阴极的端部固定在真空荧光显示器的一个短边上。 在灯丝支撑体的表面上提供凹陷，或者将狭缝设置到灯丝支撑件上。

公开(公告)号：US20050094989A1

公开(公告)日：2005-05-05

申请号：US10986237

申请日：2004-11-09

Applicant: Michael Halpin

Inventor： Michael Halpin

IPC: H05B3/06 ,  A21B1/00 ,  F24C7/00 ,  H01J1/94 ,  H01J1/98 ,  H01J19/42 ,  H01J19/48 ,  H01K1/18 ,  H01K1/24 ,  H01K3/00 ,  H01K5/02 ,  H01L21/205 ,  H01L21/26 ,  H05B3/00 ,  H05B3/44

CPC classification number: H01K1/24 ,  C23C16/481 ,  H01K1/18 ,  H01K3/00 ,  H01K5/02 ,  H05B3/0047

Abstract: An improved support is provided for locating a lamp filament axially within a lamp sleeve. The illustrated support is a spiral coil that includes a small diameter center portion that makes contact with the filament. On either side of the filament-contacting portion, the coil opens up to larger diameters for contacting the inner wall of the quartz sleeve within which the filament is housed. The support thus appears H-shaped when viewed from the side. A lamp filament is also provided with expansion compensation sections at either end of a central section. The filament wire in the compensation sections is wound into coils having a greater diameter and also a greater spacing between windings, as compared to coil in the central section. The expansion compensation sections are preferably capable of compressing and thereby absorbing thermal expansion of the filament during operation, without shorting the filament across adjacent windings.

Abstract translation: 提供了一种改进的支撑件，用于在灯套内轴向定位灯丝。 所示的支撑件是包括与灯丝接触的小直径中心部分的螺旋线圈。 在灯丝接触部分的任一侧上，线圈开口到更大的直径以接触容纳灯丝的石英套管的内壁。 因此，从侧面观察时，支撑体显示为H形。 灯丝还在中央部分的任一端设置有膨胀补偿部分。 与中心部分中的线圈相比，补偿部分中的细丝线被缠绕成具有更大直径的线圈以及绕组之间的较大间隔。 膨胀补偿部分优选地能够在操作期间压缩并因此吸收灯丝的热膨胀，而不会使灯丝短路在相邻的绕组上。

公开(公告)号：US06856078B2

公开(公告)日：2005-02-15

申请号：US10179658

申请日：2002-06-24

Applicant: Michael W. Halpin

Inventor： Michael W. Halpin

IPC: H05B3/06 ,  A21B1/00 ,  F24C7/00 ,  H01J1/94 ,  H01J1/98 ,  H01J19/42 ,  H01J19/48 ,  H01K1/18 ,  H01K1/24 ,  H01K3/00 ,  H01K5/02 ,  H01L21/205 ,  H01L21/26 ,  H05B3/00 ,  H05B3/44

CPC classification number: H01K1/24 ,  C23C16/481 ,  H01K1/18 ,  H01K3/00 ,  H01K5/02 ,  H05B3/0047

Abstract: An improved support is provided for locating a lamp filament axially within a lamp sleeve. The illustrated support is a spiral coil that includes a small diameter center portion that makes contact with the filament. On either side of the filament-contacting portion, the coil opens up to larger diameters for contacting the inner wall of the quartz sleeve within which the filament is housed. The support thus appears H-shaped when viewed from the side. A lamp filament is also provided with expansion compensation sections at either end of a central section. The filament wire in the compensation sections is wound into coils having a greater diameter and also a greater spacing between windings, as compared to coil in the central section. The expansion compensation sections are preferably capable of compressing and thereby absorbing thermal expansion of the filament during operation, without shorting the filament across adjacent windings.

公开(公告)号：US4728852A

公开(公告)日：1988-03-01

申请号：US748544

申请日：1985-06-25

Applicant: Roger Hoet

Inventor： Roger Hoet

IPC: H01J1/94 ,  H01J19/48 ,  H01J1/46

CPC classification number: H01J19/48 ,  H01J1/94

Abstract: The present invention concerns a device for fixing the skirt of a grid made of pyrolytic graphite to the base of an electron tube, the fixation device being constituted by a ring fixed onto the base of the tube against which is maintained the skirt of the grid by means of abutments.

Abstract translation: 本发明涉及一种用于将由热解石墨制成的网格的裙部固定到电子管的底部的装置，该固定装置由固定在管的基座上的环构成，通过该环固定网格的裙部， 基台的手段

公开(公告)号：US4370588A

公开(公告)日：1983-01-25

申请号：US161569

申请日：1980-06-20

Applicant: Kenji Takahashi ,  Yukio Takanashi

Inventor： Kenji Takahashi ,  Yukio Takanashi

IPC: H01J1/20 ,  H01J1/94 ,  H01J19/48

CPC classification number: H01J1/20

Abstract: A cathode assembly for cathode-ray tube which comprises a cathode sleeve with a blackened surface, a first cylindrical reflective member fixedly put on the top end portion of the cathode sleeve with a fixing point therebetween and having one end portion closed up with a metal substrate, and a second cylindrical reflective member attached to the cathode sleeve by means of support members so as to be on the same axis with the cathode sleeve and having a diameter greater than that of the cathode sleeve, both the first and second cylindrical reflective members being provided for reflecting radiant heat from the cathode sleeve, and the length of the first cylindrical reflective member being set so that an angle formed between the longitudinal direction of the cathode sleeve and a straight line connecting a heat radiation peak point on the outer surface of the cathode sleeve and the inner edge of a top opening portion of the second cylindrical reflective member, on a plane passing through the same axis, may be 30.degree. or less.

Abstract translation: 一种用于阴极射线管的阴极组件，其包括具有黑化表面的阴极套管，第一圆柱形反射部件固定地放置在阴极套管的顶端部分上，固定点在其间，并且一个端部部分用金属基片封闭 以及第二圆柱形反射构件，其通过支撑构件附接到阴极套筒，以便与阴极套筒在同一轴线上并且具有大于阴极套筒的直径，第一和第二圆柱形反射构件均为 用于反射来自所述阴极套筒的辐射热，并且所述第一圆柱形反射构件的长度被设定为使得在所述阴极套管的纵向方向和连接所述阴极套筒的外表面上的热辐射峰值点的直线之间形成的角度 阴极套筒和第二圆柱形反射构件的顶部开口部分的内边缘，穿过第二圆柱形反射构件的平面 同一轴线，可以在30°以下。

公开(公告)号：US4207489A

公开(公告)日：1980-06-10

申请号：US964294

申请日：1978-11-28

Applicant: Jean Camplan ,  Jacques Chaumont ,  Robert Meunier

Inventor： Jean Camplan ,  Jacques Chaumont ,  Robert Meunier

IPC: H01J27/02 ,  H01J27/08 ,  H01J37/08 ,  H01J37/15 ,  H01J1/94 ,  H01J27/00 ,  H05H1/00

CPC classification number: H01J37/15 ,  H01J27/022 ,  H01J37/08

Abstract: The extraction electrode consists of a metallic screen provided with an opening and placed within a vacuum chamber in front of an ion source, the screen being brought to a negative potential with respect to the source. Displacement of the electrode is controlled from the exterior of the chamber by two mechanical systems for independent displacement of the two lateral sides of the screen. Each system comprises a deformable parallelogram pivotally coupled to a member for supporting one side of the screen and to a member which is slidably mounted on a guide column, and a mechanism for controlling the deformation of the parallelogram by means of a link-arm rigidly fixed at one end to a toothed wheel in mesh with an endless screw and control rod which is accessible from the exterior of the chamber. The invention is primarily applicable to the construction of ion implanters, especially for the fabrication of semiconductors.

Abstract translation: 提取电极由设置有开口并设置在离子源前面的真空室内的金属屏幕组成，屏幕相对于源极处于负电位。 电极的位移通过两个机械系统从腔室的外部控制，用于屏幕的两个侧面的独立位移。 每个系统包括可枢转地联接到用于支撑屏幕的一侧的构件和可滑动地安装在导向柱上的构件的可变形平行四边形，以及用于通过刚性固定的连杆臂来控制平行四边形的变形的机构 一端连接到与环形螺钉啮合的齿轮和从腔室的外部可接近的控制杆。 本发明主要适用于离子注入机的构造，特别是用于制造半导体。

公开(公告)号：US4158790A

公开(公告)日：1979-06-19

申请号：US804475

申请日：1977-06-07

Applicant: John V. Sullivan

Inventor： John V. Sullivan

IPC: H01J1/02 ,  H01J61/00 ,  H01J1/94 ,  H01J37/34 ,  H01J61/06 ,  H01J61/52

CPC classification number: H01J61/00 ,  H01J1/02

Abstract: A high intensity atomic spectral lamp having a first set of electrodes including a primary cathode consisting of or comprising a selected element adapted to produce a primary electric discharge which gives rise to an atomic vapor of said element by cathodic sputtering from the primary cathode; a second set of electrodes adapted to produce a secondary electric discharge which passes through the said atomic vapor, to excite the atoms in the vapor to emit radiation characteristic of said element; a window to allow the passage of said radiation out of the lamp, said window being placed in front of the operative surface of the primary cathode; means to pass a stream of inert gas through the lamp close to and across the operative surface of the primary cathode and between the primary cathode and the window in such manner as to sweep away from the vicinity of the primary cathode surface atomic species formed by said primary discharge.The preferred form of the lamp includes demountable cathode support means to permit ready removal and replacement of the primary cathode.This invention is concerned with an improved form of high intensity atomic spectral lamp.The principal type of atomic spectral lamp at present in use is the hollow cathode discharge lamp, in which the cathode is shaped in the form of a hollow cylinder and is made of a material which consists wholly or partly of the elements of which the atomic spectrum is to be obtained. This type of lamp suffers from the principal disadvantage that the electrical discharge between the anode and cathode serves to generate or produce an atomic vapour by sputtering from the cathode, and also to supply the excitation, which is necessary for the production of atomic spectra, to at least some of the atoms in the vapour. These two functions of the discharge cannot be separately controlled, and a variation in one parameter of the discharge, e.g. current or pressure, will affect both functions. The amount of atomic vapour produced must be limited to relatively small quantities if the widths of the spectral lines are not to be increased by self-absorption and resonance broadening. Thus the discharge current that can be used, and therefore the degree of excitation that can be imparted to the atomic vapour, are similarly limited. Consequently the intensities of the spectra emitted by such discharge lamps are limited if sharp lines are required.Our prior Australian Pat. Nos. 260,726 and 289,307 described forms of high intensity atomic spectral lamp in which the atomic vapour of an element was generated by a first electrical discharge giving rise to cathodic sputtering and this vapour was then excited by a means of a second independent discharge to thereby increase the radiation emitted by the lamp, in comparison with ordinary cathode sputtering lamps, without incurring significant line broadening. A further modification of this type of lamp is described in our Australian Pat. No. 295,985, the lamp described therein producing atomic vapour by thermal means rather than by cathodic sputtering. Such prior art high intensity lamps have found significant applications in the field of atomic adsorption spectroscopy although they still share with ordinary hollow cathode lamps the disadvantage that one lamp is required for each element to be determined.Most prior art lamps, whether of the normal or high intensity type generally conform to one basic configuration in which the lamp envelope is of elongated tubular shape, with a flat optical window at one end, the hollow cathode being situated at or near the other end of the tube and facing the window. In the high intensity type of lamp the second set of electrodes which provide the exciting discharge are usually arranged to be diametrically opposed across the long axis of the lamp and close to the mouth of the hollow cathode. Other arrangements are, of course, possible but the principal criterion of any such lamp is that the window must be fairly remote from the hollow cathode in order to minimise the amount of cathode material which is deposited on the window as a result of cathodic sputtering. Even so, after a long period of operation, windows of most lamps, particularly those used for producing the spectra of fairly volatile elements become coated with a sputtered film of the element and lose their usefulness. In lamps of the sealed off type, which are the most common, another problem is that clean-up of the filler gas inevitably occurs thereby limiting the useful lifetime of the lamp.Another difficulty which is encountered with our earlier high intensity lamps, e.g. of the type described in Australian Pat. Nos. 260,728 and 289,307, is that there is substantial interaction between the primary discharge, which produces the atomic vapour, and the secondary (exciting) discharge. It is found, in fact, that if the secondary discharge current exceeds about 80 to 100 mA the light output of the lamp actually falls off, due to effective lowering of the voltage across the primary discharge electrodes.While the prior art high intensity lamps have been used with some success for atomic fluorescence spectroscopy, they are by no means ideal for this purpose. Because of the configuration of the lamps as described above, they essentially have a small numerical aperture. This coupled with the fact that they cannot be run at their maximum light output reduces the useful intensity of radiation which they provide to the point where it may not be sufficient to enable satisfactory use of atomic fluorescence techniques.The principal objects of the present invention can therefore be stated as the provision of a high intensity atomic spectral lamp having at least one and preferably all of the following features:1. Low or minimal interaction between the primary and secondary discharges.2. Provision for interchangeable cathodes.3. The capability of working at optimum filler gas pressure for maximum light output, without compromising service life.4. High numerical aperture.Barnes Engineering Company of Stamford, Conn., U.S.A., have produced a demountable, hollow cathode, atomic spectral lamp which includes a gas flow-through system but the design of the lamp is essentially conventional, having an elongate tubular body with a window at one end and the hollow cathode at the other.In the Barnes lamp, the flow direction of the gas is from the cathode towards the window, which inevitably will lead to deposition of the sputtered cathode material on to the window.The use of gas flow through systems is also described in our Australian Pat. No. 414,987, and patent application No. 59106/73 which are concerned with a type of apparatus (now known as a "sputtering chamber") in which an atomic vapour is produced by a sputtering discharge from a replaceable cathode comprising a solid sample in a chamber through which a constant flow of gas is passing. This arrangement allows contaminants, introduced by the opening of the chamber to exchange cathodes, to be removed from the chamber and also avoids "clean-up" problems. Particularly in the system described in our patent application No. 59106/73, the cathode has a comparatively large area and this necessitates the use of a rather complicated "arrester" to control both the discharge characteristics and the gas flow which is directed essentially from and perpendicularly away from the face of the cathode. Gas pressure and flow-rate are also critical in this system and must be carefully controlled.It should be noted that in the sputtering chamber the cathode is the sample under test and the object is to ensure the production of an atomic vapour from the sample which is properly representative in composition of the sample.A sputtering chamber is not designed or intended to produce emitted radiation. A high intensity spectral lamp on the other hand is essentially a spectral source, for which it is often desirable that the cathode be as pure as possible, for example in atomic fluorescence work. This therefore implies the use of a cathode of relatively small area.The present invention is concerned with a high intensity lamp of an entirely new configuration which utilizes both the flow-through principle and a demountable cathode system and, which, by virtue of its design, maximises the advantages to be obtained from these features.According to the present invention there is provided a high intensity atomic spectral lamp having a first set of electrodes including a primary cathode consisting of or comprising a selected element adapted to produce a primary electric discharge which gives rise to an atomic vapour of said element by cathodic sputtering from the primary cathode; a second set of electrodes adapted to produce a secondary electric discharge which passes through the said atomic vapour, to excite the atoms in the vapour to emit radiation characteristic of said element; a window to allow the passage of said radiation out of the lamp, said window being placed in front of the operative surface of the primary cathode; means to pass a stream of inert gas through the lamp close to and across the operative surface of the primary cathode and between the primary cathode and the window in such manner as to sweep away from the vicinity of the primary cathode surface atomic species formed by said primary discharge.Preferably the window is substantially parallel to the operative surface of the primary cathode and the gas stream also passes substantially parallel to that surface.It is further preferred that the lamp includes demountable cathode support means to permit ready removal and replacement of the primary cathode.A principal feature of the lamp of the invention is thus the use of a gas flow to sweep atomic vapour sputtered from the primary cathode away from the area between the cathode and the window in a direction substantially parallel to the window. This arrangement permits the window to be relatively close to the front surface of the primary cathode and thus subtend a relatively large angle at the cathode surface. This enables the provision of high numerical aperture with a window of relatively small diameter, while still minimizing deposition of sputtered material on the window.In one preferred embodiment the high intensity lamp of the present invention comprises an elongate, generally tubular body portion with the primary cathode mounted in the wall of the body portion; the secondary cathode and common anode being mounted within the body portion and arranged to direct the second discharge across and through a region in front of the primary cathode; and gas inlet and outlet means arranged to pass a stream of gas through said region in a generally axial direction with respect to the body portion and in the direction of the secondary discharge.More specifically, the preferred lamp of the invention comprises:a generally tubular body portion having gas inlet and outlet means to allow a flow of gas through the body portion in a generally axial direction;a cathode compartment located in the wall of the body portion;primary cathode means located in said compartment and comprising a primary cathode and demountable primary cathode support means adapted to allow the first cathode to be readily removed from and replaced in said compartment;window means attached to the wall of the body portion, said window means comprising a chamber in open communication with an aperture in the wall of the body portion diametrically opposite the cathode compartment and an optical window at the end of the chamber remote from the aperture;a secondary cathode located within the body portion and spaced away from the cathode compartment;a common anode located within the body portion and spaced away from the cathode compartment in the opposite direction to the secondary cathode.The body portion is preferably of reduced diameter in at least part of those portions of the body which lie between the cathode compartment and the secondary cathode and anode respectively. This arrangement helps to increase the current density of the secondary discharge and therefore the degree of excitation of the atomic vapour.Preferably the optical window is of substantially larger diameter than the said aperture or the primary cathode, thereby to provide a high numerical aperture.Preferably also, the primary cathode has a substantially flat front face and the arrangement of the cathode compartment and supporting means is such that in use the flat face of cathode is substantially flush with the inside wall of the body portion adjacent the cathode compartment. The use of the flat-faced cathode permits higher operating voltages for the primary discharge (up to about 550V) as compared with a hollow cathode (about 200V). This further contributes to minimising interaction between the discharges.It is further preferred that the secondary cathode is of the electrically heated (filament) type and/or is coated with a thermionically emissive material. The preferred coating material is lanthanum hexaboride which is stable to repeated exposure to air. To facilitate replacement of the secondary cathode, when necessary, it is preferred that the secondary cathode is supported on supporting means which can be removed from and replaced in the body portion.

Abstract translation: 一种高强度原子光谱灯，具有第一组电极，其包括由适于产生初级放电组成或包含选定元件的一次阴极，该主要电极通过阴极溅射从初级阴极产生所述元件的原子蒸气; 第二组电极，其适于产生通过所述原子蒸气的次级放电，以激发蒸汽中的原子以发射所述元件的辐射特性; 允许所述辐射通过所述灯的窗口，所述窗口被放置在所述主阴极的操作表面的前面; 用于使惰性气体流穿过主灯阴极表面和第一阴极与窗口之间的靠近并跨越初级阴极和窗口的操作表面的惰性气体流，以便从所述主阴极表面原子物质的附近扫除由所述 初次放电。