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公开(公告)号:US09919916B2
公开(公告)日:2018-03-20
申请号:US15031957
申请日:2014-10-15
Applicant: Semitechnologies Limited
CPC classification number: B81C1/00111 , A61M37/0015 , A61M2037/003 , A61M2037/0053 , B81B2201/055 , B81C2201/0132 , B81C2201/0133 , B81C2201/0159 , B81C2201/0176 , B81C2201/0181 , C23C16/402
Abstract: A method of forming microneedles where through a series of coating and etching processes microneedles are formed from a surface as an array. The microneedles have a bevelled end and bore which are formed as part of the process with no need to use a post manufacturing process to finish the microneedle.
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公开(公告)号:US09868628B2
公开(公告)日:2018-01-16
申请号:US15066799
申请日:2016-03-10
Inventor: Yu-Chia Liu , Chia-Hua Chu , Chun-Wen Cheng
CPC classification number: B81B7/0006 , B81B7/0051 , B81B2201/0257 , B81B2201/0264 , B81B2201/0271 , B81C1/00246 , B81C2201/0132 , B81C2201/0133 , B81C2201/0176 , B81C2201/0181 , B81C2201/112 , B81C2203/0714 , B81C2203/0735
Abstract: Representative methods for sealing MEMS devices include depositing insulating material over a substrate, forming conductive vias in a first set of layers of the insulating material, and forming metal structures in a second set of layers of the insulating material. The first and second sets of layers are interleaved in alternation. A dummy insulating layer is provided as an upper-most layer of the first set of layers. Portions of the first and second set of layers are etched to form void regions in the insulating material. A conductive pad is formed on and in a top surface of the insulating material. The void regions are sealed with an encapsulating structure. At least a portion of the encapsulating structure is laterally adjacent the dummy insulating layer, and above a top surface of the conductive pad. An etch is performed to remove at least a portion of the dummy insulating layer.
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公开(公告)号:US20170297901A1
公开(公告)日:2017-10-19
申请号:US15498009
申请日:2017-04-26
Inventor: FU-CHUN HUANG , LI-CHEN YEN , TZU-HENG WU , YI-HENG TSAI , CHUN-REN CHENG
CPC classification number: B81B3/0086 , B81B3/0008 , B81B2203/0307 , B81B2207/015 , B81B2207/07 , B81C1/00246 , B81C2201/0132 , B81C2201/0181 , B81C2203/035
Abstract: A method of manufacturing a semiconductor structure includes receiving a first substrate including a dielectric layer disposed over the first substrate; forming a sensing structure and a bonding structure over the dielectric layer; disposing a conductive layer on the sensing structure; disposing a barrier layer over the dielectric layer; removing a first portion of the barrier layer to at least partially expose the conductive layer on the sensing structure; and removing a second portion of the barrier layer to at least partially expose the bonding structure.
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公开(公告)号:US20170260042A1
公开(公告)日:2017-09-14
申请号:US15066799
申请日:2016-03-10
Inventor: Yu-Chia Liu , Chia-Hua Chu , Chun-Wen Cheng
CPC classification number: B81B7/0006 , B81B7/0051 , B81B2201/0257 , B81B2201/0264 , B81B2201/0271 , B81C1/00246 , B81C2201/0132 , B81C2201/0133 , B81C2201/0176 , B81C2201/0181 , B81C2201/112 , B81C2203/0714 , B81C2203/0735
Abstract: Representative methods for sealing MEMS devices include depositing insulating material over a substrate, forming conductive vias in a first set of layers of the insulating material, and forming metal structures in a second set of layers of the insulating material. The first and second sets of layers are interleaved in alternation. A dummy insulating layer is provided as an upper-most layer of the first set of layers. Portions of the first and second set of layers are etched to form void regions in the insulating material. A conductive pad is formed on and in a top surface of the insulating material. The void regions are sealed with an encapsulating structure. At least a portion of the encapsulating structure is laterally adjacent the dummy insulating layer, and above a top surface of the conductive pad. An etch is performed to remove at least a portion of the dummy insulating layer.
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公开(公告)号:US20160264408A1
公开(公告)日:2016-09-15
申请号:US15031957
申请日:2014-10-15
Applicant: Swansea University
CPC classification number: B81C1/00111 , A61M37/0015 , A61M2037/003 , A61M2037/0053 , B81B2201/055 , B81C2201/0132 , B81C2201/0133 , B81C2201/0159 , B81C2201/0176 , B81C2201/0181 , C23C16/402
Abstract: A method of forming microneedles where through a series of coating and etching processes microneedles are formed from a surface as an array. The microneedles have a bevelled end and bore which are formed as part of the process with no need to use a post manufacturing process to finish the microneedle.
Abstract translation: 一种形成微针的方法,其中通过一系列涂层和蚀刻处理微针从表面形成为阵列。 微针具有倾斜的端部和孔,其形成为该过程的一部分,而不需要使用后制造工艺来完成微针。
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公开(公告)号:US20140004374A1
公开(公告)日:2014-01-02
申请号:US14017510
申请日:2013-09-04
Applicant: Microfabrica Inc.
Inventor: Adam L. Cohen
CPC classification number: C25D5/10 , B33Y10/00 , B33Y70/00 , B81C1/00126 , B81C2201/0181 , B81C2201/0197 , B81C2201/032 , C25D1/00 , C25D1/003 , C25D5/022 , C25D5/12 , C25D5/22 , C25D17/06 , H01L21/2885 , H05K3/241 , Y10T428/12486 , Y10T428/239
Abstract: An electroplating method that includes: a) contacting a first substrate with a first article, which includes a substrate and a conformable mask disposed in a pattern on the substrate; b) electroplating a first metal from a source of metal ions onto the first substrate in a first pattern, the first pattern corresponding to the complement of the conformable mask pattern; and c) removing the first article from the first substrate, is disclosed. Electroplating articles and electroplating apparatus are also disclosed.
Abstract translation: 一种电镀方法,包括:a)使第一衬底与第一制品接触,所述第一制品包括衬底和以衬底形式设置的贴合掩模; b)以第一图案将来自金属离子源的第一金属电镀到所述第一基板上,所述第一图案对应于所述适形掩模图案的所述补体; 和c)从第一基板上去除第一制品。 还公开了电镀制品和电镀装置。
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公开(公告)号:US08617970B2
公开(公告)日:2013-12-31
申请号:US13582134
申请日:2011-02-23
Applicant: Makoto Koto
Inventor: Makoto Koto
IPC: H01L21/20
CPC classification number: H01L21/0262 , B81B2203/0361 , B81C1/00095 , B81C2201/0181 , B82Y10/00 , B82Y40/00 , G01N27/4146 , G01N27/4148 , H01L21/02373 , H01L21/02521 , H01L21/02639 , H01L21/02645 , H01L21/02653 , H01L29/0665 , H01L29/0676
Abstract: The present invention relates to a method of manufacturing a semiconductor device by which the length of nanowires perpendicularly formed can be fabricated with high reproducibility. The method of manufacturing a semiconductor device includes the steps of forming a first layer; forming a stop layer on the first layer, the stop layer having a higher Young's modulus than the first layer; forming a recess by partially removing the first layer and the stop layer; growing nanowires in the recess; forming a planarizing layer; removing the planarizing layer to the level of the stop layer to expose the nanowires from the surface of the planarizing layer; and forming an electrode so as to be in contact with the upper ends of the nanowires.
Abstract translation: 本发明涉及一种制造半导体器件的方法,通过该方法可以以高再现性制造垂直形成的纳米线的长度。 制造半导体器件的方法包括形成第一层的步骤; 在所述第一层上形成停止层,所述停止层具有比所述第一层更高的杨氏模量; 通过部分去除第一层和止挡层形成凹部; 在休息中增长纳米线; 形成平坦化层; 将所述平坦化层去除到所述停止层的水平面以从所述平坦化层的表面露出所述纳米线; 并形成与纳米线的上端接触的电极。
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公开(公告)号:US08603316B2
公开(公告)日:2013-12-10
申请号:US13167451
申请日:2011-06-23
Applicant: Adam L. Cohen
Inventor: Adam L. Cohen
CPC classification number: C25D5/10 , B33Y10/00 , B33Y70/00 , B81C1/00126 , B81C2201/0181 , B81C2201/0197 , B81C2201/032 , C25D1/00 , C25D1/003 , C25D5/022 , C25D5/12 , C25D5/22 , C25D17/06 , H01L21/2885 , H05K3/241 , Y10T428/12486 , Y10T428/239
Abstract: An electroplating method that includes: a) contacting a first substrate with a first article, which includes a substrate and a conformable mask disposed in a pattern on the substrate; b) electroplating a first metal from a source of metal ions onto the first substrate in a first pattern, the first pattern corresponding to the complement of the conformable mask pattern; and c) removing the first article from the first substrate, is disclosed. Electroplating articles and electroplating apparatus are also disclosed.
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公开(公告)号:US20120234688A1
公开(公告)日:2012-09-20
申请号:US13441136
申请日:2012-04-06
Applicant: Adam L. Cohen
Inventor: Adam L. Cohen
CPC classification number: C25D5/10 , B33Y10/00 , B33Y70/00 , B81C1/00126 , B81C2201/0181 , B81C2201/0197 , B81C2201/032 , C25D1/00 , C25D1/003 , C25D5/022 , C25D5/12 , C25D5/22 , C25D17/06 , H01L21/2885 , H05K3/241 , Y10T428/12486 , Y10T428/239
Abstract: An electroplating method that includes: a) contacting a first substrate with a first article, which includes a substrate and a conformable mask disposed in a pattern on the substrate; b) electroplating a first metal from a source of metal ions onto the first substrate in a first pattern, the first pattern corresponding to the complement of the conformable mask pattern; and c) removing the first article from the first substrate, is disclosed. Electroplating articles and electroplating apparatus are also disclosed.
Abstract translation: 一种电镀方法,包括:a)使第一衬底与第一制品接触,所述第一制品包括衬底和以衬底形式设置的贴合掩模; b)以第一图案将来自金属离子源的第一金属电镀到所述第一基板上,所述第一图案对应于所述适形掩模图案的所述补体; 和c)从第一基板上去除第一制品。 还公开了电镀制品和电镀装置。
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60.
公开(公告)号:US20110209970A1
公开(公告)日:2011-09-01
申请号:US13029898
申请日:2011-02-17
Applicant: Takahiro Masuda , Naoki Yoshitake , Kenichi Hinuma , Junya Yamamoto , Takashi Fujisawa , Takeshi Fujiwara
Inventor: Takahiro Masuda , Naoki Yoshitake , Kenichi Hinuma , Junya Yamamoto , Takashi Fujisawa , Takeshi Fujiwara
CPC classification number: H01H1/06 , B81B2201/014 , B81C1/00166 , B81C2201/0177 , B81C2201/0181 , B81C2201/0184 , H01H1/0036 , H01H2001/0052 , Y10T29/49105
Abstract: A switch and a relay include a contact with a smooth contacting surface. A side surface of a fixed contact faces a side surface of a movable contact. The fixed contact has an insulating layer and a base layer stacked on a fixed contact substrate, and a first conductive layer formed thereon through electrolytic plating. The side surface of the first conductive layer that faces the movable contact becomes the fixed contact (contacting surface). The movable contact has an insulating layer and a base layer stacked on the movable contact substrate, and a movable contact formed thereon through electrolytic plating. A side surface of a second conductive layer that faces the fixed contact becomes the movable contact (contacting surface). The fixed contact and the movable contact have surfaces that contact the side surfaces of the mold portion when growing the first and second conductive layers through electrolytic plating.
Abstract translation: 开关和继电器包括具有光滑接触表面的触点。 固定触点的侧表面面对活动触点的侧表面。 固定触点具有层叠在固定接触基板上的绝缘层和基层,以及通过电解电镀形成在其上的第一导电层。 第一导电层的面对可动触点的侧表面成为固定触点(接触面)。 可动触头具有堆叠在可动触点基板上的绝缘层和基极层,以及通过电解电镀形成的可动触点。 面对固定触点的第二导电层的侧表面成为可动触头(接触面)。 固定触点和可动触点具有通过电解电镀生长第一和第二导电层时与模具部分的侧表面接触的表面。
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