公开(公告)号：US20160336138A1

公开(公告)日：2016-11-17

申请号：US14713573

申请日：2015-05-15

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Shengwu Chang ,  Jeff Burgess ,  William Leavitt ,  Michael St Peter ,  Matt Mosher ,  Joe Olson ,  Frank Sinclair

IPC: H01J27/08 ,  H01J9/18 ,  H01J9/385 ,  H01J27/02

CPC classification number: H01J27/08 ,  H01J3/04 ,  H01J5/02 ,  H01J9/18 ,  H01J9/385 ,  H01J27/024 ,  H01J37/08

Abstract: Provided herein are approaches for improving ion beam extraction stability and ion beam current for an ion extraction system. In one approach, a source housing assembly may include a source housing surrounding an ion source including an arc chamber, the source housing having an extraction aperture plate mounted at a proximal end thereof. The source housing assembly further includes a vacuum liner disposed within an interior of the source housing to form a barrier around a set of vacuum pumping apertures. As configured, openings in the source housing assembly, other than an opening in the extraction aperture plate, are enclosed by the extraction aperture plate and the vacuum liner, thus ensuring appendix arcs or extraneous ions produced outside the arc chamber remain within the source housing. Just those ions produced within the arc chamber exit the source housing through the opening of the extraction aperture plate.

Abstract translation: 本文提供了用于改进离子提取系统的离子束提取稳定性和离子束电流的方法。 在一种方法中，源壳体组件可以包括围绕包括电弧室的离子源的源壳体，源壳体具有安装在其近端处的抽吸孔板。 源壳体组件还包括设置在源壳体的内部中以在一组真空泵浦孔周围形成屏障的真空衬套。 根据构造，源壳体组件中除了抽吸孔板中的开口之外的开口被提取孔板和真空衬套包围，从而确保在电弧室外产生的附加电弧或外来离子保留在源壳体内。 恰好在电弧室内产生的那些离子通过提取孔板的开口离开源壳体。

公开(公告)号：US09305733B2

公开(公告)日：2016-04-05

申请号：US14263970

申请日：2014-04-28

Applicant: COLORADO STATE UNIVERSITY RESEARCH FOUNDATION

Inventor： Lauren P. Rand ,  John D. Williams ,  Rafael A. Martinez

IPC: H01J1/14 ,  H01J27/14 ,  H01J1/02 ,  H01J27/08

CPC classification number: H01J1/025 ,  F03H1/0068 ,  H01J1/14 ,  H01J27/08 ,  H01J27/146 ,  H01J2237/08

Abstract: The use of the electride form of 12CaO-7Al2O3, or C12A7, as a low work function electron emitter in a hollow cathode discharge apparatus is described. No heater is required to initiate operation of the present cathode, as is necessary for traditional hollow cathode devices. Because C12A7 has a fully oxidized lattice structure, exposure to oxygen does not degrade the electride. The electride was surrounded by a graphite liner since it was found that the C12A7 electride converts to it's eutectic (CA+C3A) form when heated (through natural hollow cathode operation) in a metal tube.

Abstract translation: 描述了在空心阴极放电装置中使用12CaO-7Al2O3或C12A7的电子形式作为低功函电子发射体。 根据传统的空心阴极器件的需要，不需要加热器来启动本阴极的操作。 因为C12A7具有完全氧化的晶格结构，所以暴露于氧气不会降低电极。 电极被石墨衬垫包围，因为发现当在金属管中加热（通过天然空心阴极操作）时，C12A7电致转变成它的共晶（CA + C3A）形式。

公开(公告)号：US09155180B1

公开(公告)日：2015-10-06

申请号：US13647826

申请日：2012-10-09

Applicant: KLA-Tencor Corporation

Inventor： Karl R. Umstadter

IPC: H05H1/00 ,  H01J27/08 ,  G03F7/20 ,  H01J17/30

CPC classification number: H05H1/00 ,  G03F7/70916 ,  H01J17/30 ,  H01J27/08 ,  H05G2/003

Abstract: The disclosure is directed to a system and method of fueling and mitigating debris for an illumination source. An illumination system may include a plasma-based illumination source. The illumination system may provide illumination along an illumination path emanating from an illumination origin of the illumination source. A gas jet nozzle may be disposed at a selected distance from the illumination origin or proximate to the illumination origin. The gas jet nozzle may be configured to provide fuel gas to fuel the plasma-based illumination source. The gas jet nozzle may be further configured to provide fuel gas in a selected direction substantially opposite to a direction of illumination emanating from the illumination origin to remove at least a portion of debris from the illumination path.

Abstract translation: 本公开涉及一种用于加注和减轻照明源的碎屑的系统和方法。 照明系统可以包括基于等离子体的照明源。 照明系统可以沿着从照明源的照明原点发出的照明路径提供照明。 气体喷嘴可以设置在距照明原点或接近照明原点的选定距离处。 气体喷嘴可以被配置为提供燃料气体来燃料基于等离子体的照明源。 气体喷嘴可以进一步构造成在与从照明原点发出的照明方向基本相反的选定方向上提供燃料气体，以从照明路径去除至少一部分碎片。

公开(公告)号：US09134074B2

公开(公告)日：2015-09-15

申请号：US13645006

申请日：2012-10-04

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Neil J. Bassom

IPC: H01J27/08 ,  F28D15/04 ,  F28D15/02 ,  H01J37/02 ,  H01J37/317

CPC classification number: F28D15/0266 ,  F28D15/0275 ,  F28D15/0283 ,  F28D15/04 ,  H01J27/08 ,  H01J37/02 ,  H01J37/3171 ,  H01J2237/002

Abstract: A method and apparatus are disclosed for controlling a semiconductor process temperature. In one embodiment a thermal control device includes a heat source and a housing comprising a vapor chamber coupled to the heat source. The vapor chamber includes an evaporator section and a condenser section. The evaporator section has a first wall associated with the heat source, the first wall having a wick for drawing a working fluid from a lower portion of the vapor chamber to the evaporator section. The condenser section coupled to a cooling element. The vapor chamber is configured to transfer heat from the heat source to the cooling element via continuous evaporation of the working fluid at the evaporator section and condensation of the working fluid at the condenser section. Other embodiments are disclosed and claimed.

Abstract translation: 公开了一种用于控制半导体工艺温度的方法和装置。 在一个实施例中，热控制装置包括热源和包括耦合到热源的蒸气室的壳体。 蒸气室包括蒸发器部分和冷凝器部分。 蒸发器部分具有与热源相关联的第一壁，第一壁具有用于将工作流体从蒸气室的下部抽吸到蒸发器部分的芯。 冷凝器部分联接到冷却元件。 蒸气室被配置成通过蒸发器部分处的工作流体的连续蒸发以及在冷凝器部分处的工作流体的冷凝将热量从热源传递到冷却元件。 公开和要求保护其他实施例。

公开(公告)号：US20150240794A1

公开(公告)日：2015-08-27

申请号：US14628254

申请日：2015-02-22

Applicant: GIL BERL

Inventor： GIL BERL

IPC: F03H1/00 ,  H01J27/02 ,  H01J27/08

CPC classification number: F03H1/0081 ,  F03H1/0037 ,  F03H1/0043 ,  F03H1/0056

Abstract: An ion thruster, comprising: a discharge chamber for accelerating ions towards one direction; an inflow opening for intake of a propellant into the discharge chamber; a discharge cathode, shaped in a form of a propeller, for releasing electrons in the discharge chamber, thereby ionizing the propellant in the discharge chamber, wherein the discharge cathode is rotatable around an axis, thereby propelling inward to the discharge chamber the propellant thereof; an outflow opening for exhausting the ions from the discharge chamber; and an accelerator electrode, shaped in a form of a propeller, for accelerating the ions towards the one direction of the outflow opening, wherein the accelerator electrode is rotatable around an axis, thereby propelling outward from the discharge chamber the ions and neutral atoms thereof; wherein the ion thruster comprises electromagnetic coils for generating a magnetic field inside the discharge chamber.

Abstract translation: 一种离子推进器，包括：用于将离子朝向一个方向加速的放电室; 用于将推进剂吸入排放室的流入开口; 形成为螺旋桨形式的放电阴极，用于在放电室中释放电子，从而使放电室中的推进剂离子化，其中放电阴极可绕轴线旋转，从而向内推进放电室其推进剂; 用于从排出室排出离子的流出开口; 以及加速器电极，其形状为螺旋桨形式，用于将离子朝向流出口的一个方向加速，其中加速器电极可绕轴线旋转，从而从放电室向外推动其离子和中性原子; 其中离子推进器包括用于在放电室内产生磁场的电磁线圈。

公开(公告)号：US20050211923A1

公开(公告)日：2005-09-29

申请号：US10857449

申请日：2004-06-01

Applicant: Peter Banks

Inventor： Peter Banks

IPC: H01J27/08 ,  H01J37/08 ,  H01J37/32

CPC classification number: H01J27/08 ,  H01J37/08 ,  H01J2237/31701

Abstract: The invention relates to methods of controlling the effect of ions of an ionisable source gas that can react with interior surfaces of an arc chamber, by introducing ions of a displacement gas into the arc chamber, where the displacement gas ions are more chemically reactive with the material of the interior surfaces than the ions of the source gas. The source gas ions may typically be oxygen ions and the displacement gas ions are then typically fluorine ions where the interior surfaces comprise tungsten. The fluorine ions may, by way of example, be sourced from fluorine, silicon tetrafluoride or nitrogen trifluoride.

Abstract translation: 本发明涉及通过将置换气体的离子引入电弧室来控制可与电弧室的内表面反应的可离子化源气体的离子的影响的方法，其中置换气体离子与 内表面的材料比源气体的离子。 源气体离子通常可以是氧离子，而置换气体离子通常是氟离子，其中内表面包括钨。 例如，氟离子可以来自氟，四氟化硅或三氟化氮。

公开(公告)号：US20050199799A1

公开(公告)日：2005-09-15

申请号：US11009485

申请日：2004-12-13

Applicant: Yasuaki Takada ,  Hisashi Nagano ,  Masao Suga ,  Hideo Kashima ,  Izumi Waki

Inventor： Yasuaki Takada ,  Hisashi Nagano ,  Masao Suga ,  Hideo Kashima ,  Izumi Waki

IPC: G01N27/62 ,  H01J27/08 ,  H01J49/10 ,  H01J49/12 ,  H01J49/26

CPC classification number: H01J49/0095 ,  H01J49/0422 ,  H01J49/168

Abstract: A mass spectrometric apparatus capable of generating and detecting positive and negative ions stably at the same time. The apparatus preferably comprises: an opening through which a sample gas is introduced; an ion source to generate ions of the sample gas; and a mass spectrometer to analyze the mass of the generated ions. The ion source utilized with the mass spectrometric device comprises: a first needle electrode on which a voltage is applied in order to generate positive ions of the sample gas introduced through the opening; a first counter electrode having a first opening through which the sample gas and the positive ions pass; a second counter electrode disposed opposite the first counter electrode having a second opening through which the sample gas and the positive ions pass; a second needle electrode on which voltage is applied in order to generate negative ions of the sample gas; and a vent through which the sample gas is ejected. Generated ions are then introduced into a vacuum region via an aperture and subjected to mass analysis.

Abstract translation: 能够同时稳定地产生和检测正离子和负离子的质谱仪。 该装置优选地包括：开口，样品气体通过该开口被引入; 用于产生样品气体的离子的离子源; 和用于分析所产生的离子质量的质谱仪。 与质谱仪一起使用的离子源包括：第一针电极，其上施加电压以产生通过开口引入的样品气体的正离子; 第一对电极，其具有第一开口，样品气体和正离子通过该第一开口; 与第一对置电极相对配置的第二对置电极，具有第二开口，样品气体和正离子通过该第二开口; 施加电压以产生样品气体的负离子的第二针状电极; 以及排出样品气体的排气口。 然后将产生的离子经由孔引入真空区域并进行质量分析。

公开(公告)号：US06943345B2

公开(公告)日：2005-09-13

申请号：US10456939

申请日：2003-06-06

Applicant: Frank T. Hartley

Inventor： Frank T. Hartley

IPC: G01N27/62 ,  C12M1/00 ,  C12M1/42 ,  C12N15/09 ,  G01N1/28 ,  G01N33/483 ,  G01N33/50 ,  H01J27/00 ,  H01J27/02 ,  H01J27/08 ,  H01J37/08 ,  H01J49/04 ,  H01J49/10 ,  H01J49/16 ,  H01J49/40

CPC classification number: H01J49/168 ,  G01N2223/612 ,  H01J3/027 ,  H01J3/04 ,  H01J27/02 ,  H01J27/26 ,  H01J37/08 ,  H01J49/0018 ,  H01J49/0427 ,  H01J2237/061 ,  H01J2237/0815 ,  H01J2237/317

Abstract: A soft ionization device is disclosed that comprises a series of electrodes having spacing less than the means free path of the molecules to be ionized. In some embodiments, the soft ionization device is used in various applications that require ion or electron sources such as biological or chemical reactors, ion milling, and numerous replacements for conventional hot cathode systems. In another embodiment, a valence spectrometer is disclosed that is configured to variably ionize molecules by their valiancy. In other embodiments, the ionization device is coupled to a spectrometer for the characterization of biological matter. Also disclosed is a preconditioner for preparing biological matter to be ionized.

Abstract translation: 公开了一种软电离装置，其包括具有小于待离子化分子的平均自由程的间隔的一系列电极。 在一些实施例中，软电离装置用于需要离子或电子源（例如生物或化学反应器，离子研磨）和常规热阴极系统的多种替代品的各种应用中。 在另一个实施方案中，公开了一种化学光谱仪，其被配置为通过它们的缬氨酸可变地离子化分子。 在其它实施方案中，将离子化装置耦合到用于表征生物物质的光谱仪。 还公开了用于制备待离子化的生物物质的预处理剂。

公开(公告)号：US06940074B2

公开(公告)日：2005-09-06

申请号：US10786229

申请日：2004-02-26

Applicant: Frank T. Hartley

Inventor： Frank T. Hartley

IPC: G01N27/62 ,  C12M1/00 ,  C12M1/42 ,  C12N15/09 ,  G01N1/28 ,  G01N33/483 ,  G01N33/50 ,  H01J27/00 ,  H01J27/02 ,  H01J27/08 ,  H01J37/08 ,  H01J49/04 ,  H01J49/10 ,  H01J49/16 ,  H01J49/40

CPC classification number: H01J49/168 ,  G01N2223/612 ,  H01J3/027 ,  H01J3/04 ,  H01J27/02 ,  H01J27/26 ,  H01J37/08 ,  H01J49/0018 ,  H01J49/0427 ,  H01J2237/061 ,  H01J2237/0815 ,  H01J2237/317

Abstract: Devices are disclosed that incorporate an ionization device for generating ions and electrons having first and second conductive electrodes that are separated by less than the mean-free-path of molecules being ionized. Electrons generated by the ionization device may be used for applications such as light sources, electron bombardment sensors, thyratrons, vacuum tubes, plasma displays, and microwave switches, and ions generated by the ionization device may be used, inter alia, in connection with ion focused milling devices, maskless ion implantation devices, ion beam lithography devices, semiconductor mask modification devices, and semiconductor chip wiring devices. Methods of use and manufacture are also provided.

Abstract translation: 公开了包括用于产生离子的电离装置的装置，该离子和电子具有通过小于被离子化的分子的平均自由路径分开的第一和第二导电电极。 由电离装置产生的电子可用于诸如光源，电子轰击传感器，闸流管，真空管，等离子体显示器和微波开关等应用，并且离子化装置产生的离子尤其可以用于离子 聚焦铣削装置，无掩模离子注入装置，离子束光刻装置，半导体掩模修改装置和半导体芯片布线装置。 还提供了使用和制造方法。

公开(公告)号：US20050133738A1

公开(公告)日：2005-06-23

申请号：US11015492

申请日：2004-12-16

Applicant: Young-Byeong Joo

Inventor： Young-Byeong Joo

IPC: H01J27/08 ,  H01J37/08 ,  H01J37/317 ,  H01L21/265

CPC classification number: H01J37/3171 ,  H01J37/08 ,  H01J2237/082

Abstract: A filament includes a filament rod having an electron-emitting portion, a pair of leads, and a pair of connection portions. The electron-emitting portion is disposed in the arc chamber. The leads extend from the sidewall of the arc chamber to the outside of the arc chamber. The leads are connected to a filament power source. The connecting portions extend from the sidewall of the arc chamber to the inside of the arc chamber. The connection portions are connected between the electron-emitting portion and the leads. The connection portions have an electrical resistance less than that of the electron-emitting portion. Thus, electrons are thermoelectrically emitted into the arc chamber from the electron emission portion rather than the connection portions. An electron emission rate may also be increased. In addition, since the filament has a longer useful life, downtime of an ion implanter including the ion source may be decreased.

Abstract translation: 灯丝包括具有电子发射部分，一对引线和一对连接部分的细丝棒。 电子发射部分设置在电弧室中。 引线从电弧室的侧壁延伸到电弧室的外部。 引线连接到灯丝电源。 连接部分从电弧室的侧壁延伸到电弧室的内部。 连接部分连接在电子发射部分和引线之间。 连接部分的电阻小于电子发射部分的电阻。 因此，电子从电子发射部分而不是连接部分热电发射到电弧室中。 电子发射率也可以增加。 此外，由于灯丝具有更长的使用寿命，所以可以减少包括离子源的离子注入机的停机时间。