MINIMIZING GRAZING INCIDENCE REFLECTIONS FOR RELIABLE EUV POWER MEASUREMENTS
    61.
    发明申请
    MINIMIZING GRAZING INCIDENCE REFLECTIONS FOR RELIABLE EUV POWER MEASUREMENTS 有权
    最小化可靠的电压测量的雷击事件反射

    公开(公告)号:US20160054174A1

    公开(公告)日:2016-02-25

    申请号:US14463605

    申请日:2014-08-19

    Abstract: A light source includes a light generating chamber and a collector disposed in the light generating chamber. A target material generator configured to propel a quantity of target material toward an irradiation region is disposed in front of a reflective surface of the collector. A plurality of photodetector modules is disposed external to the light generating chamber, with each of the photodetector modules being directed toward the irradiation region. A plurality of tubes is disposed between a corresponding photodetector module and the irradiation region. Each tube has a centerline directed toward the irradiation region, and each tube has a roughened inner surface. The surface roughness of the roughened inner surface is sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface. A method of generating light and a method of measuring light energy also are described.

    Abstract translation: 光源包括设置在光产生室中的发光室和集电体。 被配置为向照射区域推送一定量的目标材料的目标材料发生器设置在集电体的反射表面的前面。 多个光检测器模块设置在光产生室的外部,每个光检测器模块指向照射区域。 在相应的光电检测器模块和照射区域之间设置多个管。 每个管具有朝向照射区域的中心线,并且每个管具有粗糙的内表面。 粗糙的内表面的表面粗糙度足以导致消除光的放射,而不是从粗糙的内表面反射出来。 还描述了产生光的方法和测量光能的方法。

    Passive infrared detector
    63.
    发明授权
    Passive infrared detector 有权
    被动红外探测器

    公开(公告)号:US09116037B2

    公开(公告)日:2015-08-25

    申请号:US11974425

    申请日:2007-10-12

    Abstract: An infrared detector (301) is provided which comprises a pyroelectric detector (303) having first and second sensing elements (345), an aperture stop (311), and a Fresnel lens array (305). The detector may be used as a passive infrared sensor unit for detecting intrusion into large openings.

    Abstract translation: 提供一种红外检测器(301),其包括具有第一和第二感测元件(345),孔径光阑(311)和菲涅耳透镜阵列(305)的热电检测器(303)。 检测器可以用作被动红外传感器单元,用于检测入侵大开口。

    OPTICAL SENSOR AND ELECTRONIC DEVICE WITH THE SAME
    64.
    发明申请
    OPTICAL SENSOR AND ELECTRONIC DEVICE WITH THE SAME 有权
    光传感器和电子设备

    公开(公告)号:US20150198479A1

    公开(公告)日:2015-07-16

    申请号:US14590091

    申请日:2015-01-06

    Abstract: An optical sensor and an electronic device having an optical sensor. The optical sensor includes: an optical waveguide containing a photochromic material; a light emitter that emits visible light to be incident on the optical waveguide; and a light receiver that detects the visible light emitted from the light emitter and progressing through the optical waveguide. A transmittance of the optical waveguide in relation to the visible light may be changed by the photochromic material as the optical waveguide is exposed to UV light. The optical sensor and the electronic device having the same may be variously implemented according to exemplary embodiments.

    Abstract translation: 一种具有光学传感器的光学传感器和电子设备。 光学传感器包括:含有光致变色材料的光波导; 发射入射在光波导上的可见光的发光体; 以及光接收器,其检测从光发射器发射并在光波导中前进的可见光。 当光波导暴露于紫外光时,光波导相对于可见光的透射率可以由光致变色材料改变。 根据示例性实施例,可以对光学传感器和具有该光学传感器和电子设备的电子设备进行各种实现。

    Method for the detection of the irradiance distribution in an extreme ultraviolet light source device and an extreme ultraviolet light source device
    66.
    发明授权
    Method for the detection of the irradiance distribution in an extreme ultraviolet light source device and an extreme ultraviolet light source device 有权
    用于检测极紫外光源装置和极紫外光源装置中的辐照度分布的方法

    公开(公告)号:US08841625B2

    公开(公告)日:2014-09-23

    申请号:US13284277

    申请日:2011-10-28

    Applicant: Daiki Yamatani

    Inventor: Daiki Yamatani

    Abstract: An extreme ultraviolet light source device, comprising a collector mirror focusing extreme ultraviolet radiation at a focal point, wherein a porous plate having a plurality of through holes arranged such that only radiation focusing at said focal point passes is provided insertably between said collector mirror and said focal point on an optical axis of said collector mirror, and a detection means is provided to receive radiation having passed through said porous plate and to detect an intensity of said received radiation, and a method for detecting an irradiance distribution in an extreme ultraviolet light source device.

    Abstract translation: 一种极紫外光源装置,包括聚焦镜,其聚焦在焦点处的极紫外线辐射,其中多孔板具有多个通孔,其布置成使得仅在所述焦点通过的聚焦的仅辐射被提供在所述收集镜和所述 所述集光镜的光轴上的焦点,以及检测装置,用于接收通过所述多孔板的辐射并检测所述接收的辐射的强度,以及用于检测极紫外光源中的辐照度分布的方法 设备。

    Optical Shielding Device for Separating Optical Paths
    68.
    发明申请
    Optical Shielding Device for Separating Optical Paths 有权
    用于分离光路的光屏蔽装置

    公开(公告)号:US20130265590A1

    公开(公告)日:2013-10-10

    申请号:US13877217

    申请日:2011-08-08

    Abstract: A sensor unit for detecting reference and measurement radiation for a distance measurement device has a sensor element and an optical shielding device. The sensor element has a first detection region for detecting measurement radiation and a second detection region for detecting reference radiation. The optical shielding device is positioned in relation to the sensor element and fastened, and the optical shielding device optically separates the first and second detection regions from each other. The optical shielding device further comprises a first recess and a second recess which are permeable to optical radiation of a first wavelength range.

    Abstract translation: 用于检测距离测量装置的基准和测量辐射的传感器单元具有传感器元件和光学屏蔽装置。 传感器元件具有用于检测测量辐射的第一检测区域和用于检测参考辐射的第二检测区域。 光屏蔽装置相对于传感器元件定位并被固定,并且光屏蔽装置将第一和第二检测区域彼此光学分离。 光学屏蔽装置还包括可透过第一波长范围的光辐射的第一凹部和第二凹部。

    COMPONENT ANALYZER
    69.
    发明申请
    COMPONENT ANALYZER 审中-公开
    组分分析仪

    公开(公告)号:US20130229646A1

    公开(公告)日:2013-09-05

    申请号:US13779016

    申请日:2013-02-27

    Inventor: Kazunori SAKURAI

    Abstract: A component analyzer includes a casing, a light source unit, a light incident unit guiding light from a test object into the casing, a tunable interference filter extracting light having a predetermined wavelength from the incident light, an imaging unit receiving the extracted light and taking a spectroscopic image, a control unit performing a component analysis of the test object based on the spectroscopic images, and a display displaying a component analysis result. The light incident unit, the imaging unit, and the control unit are provided within the casing. The tunable interference filter includes a fixed substrate having a fixed reflection film and a movable substrate provided to face the fixed substrate and having a movable reflection film opposed to the fixed reflection film across a gap between reflection films, and an electrostatic actuator changing the gap between reflection films.

    Abstract translation: 元件分析仪包括壳体,光源单元,将来自测试对象的光引导到壳体中的光入射单元,从入射光提取具有预定波长的光的可调谐干涉滤光器,接收提取的光并拍摄的成像单元 分光图像,基于分光图像执行测试对象的分量分析的控制单元和显示分量分析结果的显示。 光入射单元,成像单元和控制单元设置在壳体内。 可调谐干涉滤光器包括具有固定反射膜的固定基板和设置成面向固定基板的可移动基板,并且具有穿过反射膜之间的间隙的与固定反射膜相对的可移动反射膜,以及静电致动器, 反射膜。

    Infrared Light Detecting Apparatus and Detecting Method Thereof
    70.
    发明申请
    Infrared Light Detecting Apparatus and Detecting Method Thereof 有权
    红外光检测装置及其检测方法

    公开(公告)号:US20130168552A1

    公开(公告)日:2013-07-04

    申请号:US13342696

    申请日:2012-01-03

    Abstract: An infrared light detecting device and the infrared detecting method thereof. The device comprises a shield, a first photo detector and a second photo detector. The shield for blocking light is located above the first photo detector and the second photo detector. An opening is disposed on the shield above the first photo detector. In addition, there is a gap arranged between the first photo detector and the second photo detector. The first photo detector can detect the light passing through the opening to generate a photo sensing signal and couple an infrared light signal in the photo sensing signal to the second photo detector in order to output the infrared light signal.

    Abstract translation: 一种红外光检测装置及其红外线检测方法。 该装置包括屏蔽件,第一光电检测器和第二光电检测器。 用于阻挡光的屏蔽位于第一光电检测器和第二光电检测器的上方。 开口设置在第一光电检测器上方的屏蔽上。 此外,在第一光电检测器和第二光电检测器之间存在间隙。 第一光检测器可以检测通过开口的光以产生光感测信号,并将感光信号中的红外光信号耦合到第二光检测器,以输出红外光信号。

Patent Agency Ranking