公开(公告)号：US09568418B1

公开(公告)日：2017-02-14

申请号：US14313987

申请日：2014-06-24

Applicant: Photon Systems

Inventor： William F. Hug ,  Ray D. Reid ,  Rohit Bhartia ,  Arthur L. Lane

IPC: G01N21/64 ,  G01N21/33 ,  G01J3/26 ,  G01N21/65

CPC classification number: G01N21/33 ,  G01J3/10 ,  G01J3/36 ,  G01J3/44 ,  G01N21/64 ,  G01N21/645 ,  G01N21/65 ,  G01N27/44721 ,  G01N2021/6421 ,  G01N2021/6471 ,  G01N2201/06113 ,  G01N2201/0612 ,  G01N2201/068

Abstract: Spectroscopic chemical analysis methods and apparatus are disclosed which employ deep ultraviolet (e.g. in the 200 nm to 300 nm spectral range) electron beam pumped wide bandgap semiconductor lasers, incoherent wide bandgap semiconductor light emitting devices, and hollow cathode metal ion lasers to perform non-contact, non-invasive detection of unknown chemical analytes. These deep ultraviolet sources enable dramatic size, weight and power consumption reductions of chemical analysis instruments. In some embodiments, Raman spectroscopic detection methods and apparatus use ultra-narrow-band angle tuning filters, acousto-optic tuning filters, and temperature tuned filters to enable ultra-miniature analyzers for chemical identification. In some embodiments Raman analysis is conducted along with photoluminescence spectroscopy (i.e. fluorescence and/or phosphorescence spectroscopy) to provide high levels of sensitivity and specificity in the same instrument.

Abstract translation: 公开了使用深紫外线（例如在200nm至300nm光谱范围内）的电子束泵浦宽带隙半导体激光器，非相干宽带隙半导体发光器件和空心阴极金属离子激光器的光谱化学分析方法和装置， 接触，未知化学分析物的非侵入性检测。 这些深紫外线源可以显着降低化学分析仪器的体积，重量和功耗。 在一些实施例中，拉曼光谱检测方法和装置使用超窄带角度调谐滤波器，声光调谐滤波器和温度调节滤波器，以使超微型分析仪能够进行化学鉴定。 在一些实施方案中，拉曼分析与光致发光光谱（即荧光和/或磷光光谱）一起进行，以在相同的仪器中提供高水平的灵敏度和特异性。

公开(公告)号：US20170030835A1

公开(公告)日：2017-02-02

申请号：US15303514

申请日：2015-04-14

Applicant: The Regents of the University of California

Inventor： James W. CHAN ,  Lingbo KONG

IPC: G01N21/65

CPC classification number: G01N21/65 ,  G01J3/06 ,  G01J3/44 ,  G01N2201/06113 ,  G01N2201/068

Abstract: Methods and systems for reconstructing individual spectra acquired from laser interrogation spots in a 2D array illuminating a particle are described. A particle is positioned in a 2D array that includes multiple laser interrogation spots. The laser interrogation spots of the particle are detected in the 2D array using a spectrometer. Multifocal spectral patterns are generated based on the laser interrogation spots, and an individual spectrum for each laser interrogation spot is reconstructed based on the plurality of multifocal spectral patterns.

Abstract translation: 描述了用于重建从照射粒子的2D阵列中的激光询问点获得的各个光谱的方法和系统。 颗粒位于包括多个激光询问点的2D阵列中。 使用光谱仪在2D阵列中检测粒子的激光询问点。 基于激光询问点生成多焦点光谱图，并且基于多个多焦点光谱图来重构每个激光询问点的单个光谱。

公开(公告)号：US20170023487A1

公开(公告)日：2017-01-26

申请号：US15003062

申请日：2016-01-21

Applicant: Lockheed Martin Corporation

Inventor： Brian P. Boesch

IPC: G01N21/87 ,  G01N21/55

CPC classification number: G01N21/87 ,  G01N21/55 ,  G01N2021/6469 ,  G01N2201/06113 ,  G01N2201/0637 ,  G01N2201/068 ,  G01R33/032 ,  G01R33/1284 ,  G01R33/26 ,  G01R33/60

Abstract: Methods and configurations are disclosed for an efficient collection of fluorescence emitted by the nitrogen vacancies of a diamond of a DNV sensor. Some implementations may include a diamond having a nitrogen vacancy and a reflector positioned about the diamond to reflect a portion of light emitted from the diamond. In some implementations the reflector may be parabolic or ellipsoidal. In some implementations, DNV sensor may have a reflector and a concentrator. Other implementations may include a diamond with a nitrogen vacancy and a reflector positioned about the diamond to reflect a portion of light emitted from the diamond using a dielectric mirror film applied to the reflector. Still other implementations may have a diamond with a nitrogen vacancy and a dielectric mirror film coated on the diamond.

Abstract translation: 公开了用于有效收集由DNV传感器的金刚石的氮空位发射的荧光的方法和构造。 一些实施方案可以包括具有氮空位的金刚石和围绕金刚石定位的反射器以反射从金刚石发射的光的一部分。 在一些实施方案中，反射器可以是抛物线形或椭球形的。 在一些实施方式中，DNV传感器可以具有反射器和集中器。 其他实施方案可以包括具有氮空位的金刚石和围绕金刚石定位的反射器，以使用施加到反射器的电介质镜膜反射从金刚石发射的一部分光。 还有其它实施方案可以具有氮空位的金刚石和涂覆在金刚石上的电介质镜膜。

公开(公告)号：US20170023482A1

公开(公告)日：2017-01-26

申请号：US15206965

申请日：2016-07-11

Applicant: UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE

Inventor： MARCUS T. CICERONE ,  CHARLES H. CAMP, JR.

IPC: G01N21/65 ,  G01N21/27 ,  G02B21/26 ,  G02B21/36 ,  G02B21/00 ,  G02B21/06

CPC classification number: G01N21/65 ,  G01J3/28 ,  G01J3/44 ,  G01N21/27 ,  G01N2021/653 ,  G01N2021/655 ,  G01N2201/06113 ,  G01N2201/0636 ,  G01N2201/068 ,  G02B21/06 ,  G02B21/16 ,  G02B21/365

Abstract: A plural color broadband coherent anti-Stokes Raman scattering (CARS) microscope includes: a first light source to produce a first light including a narrowband radiation; a second light source to produce a second light including a broadband radiation; a third light source to: receive the first light from the first light source; receive the second light from the second light source; and produce a third light comprising the narrowband radiation and the broadband radiation by combining the first light and the second light such that the first light and second light are spatially overlapped and temporally overlapped; and a primary objective to: receive the third light from the third light source; communicate the third light to a sample; and subject the sample to simultaneous interpulse CARS stimulation and intrapulse CARS stimulation by irradiation with the narrowband radiation and the broadband radiation in the third light.

Abstract translation: 多色彩色宽带相干反斯托克斯拉曼散射（CARS）显微镜包括：第一光源，用于产生包括窄带辐射的第一光; 产生包括宽带辐射的第二光的第二光源; 第三光源，用于：从第一光源接收第一光; 从第二光源接收第二光; 并且通过组合所述第一光和所述第二光来产生包括所述窄带辐射和所述宽带辐射的第三光，使得所述第一光和所述第二光在空间上重叠并在时间上重叠; 并且主要目的是：从第三光源接收第三光; 将第三盏灯传达给样品; 并通过在第三个光线中的窄带辐射和宽带辐射照射，使样本同时进行脉冲CARS刺激和脉冲内CARS刺激。

公开(公告)号：US09528934B2

公开(公告)日：2016-12-27

申请号：US14613526

申请日：2015-02-04

Applicant: CANON KABUSHIKI KAISHA

Inventor： Shigeki Kato

IPC: G01N21/55 ,  G01N21/17 ,  G01N21/57 ,  G01N21/88 ,  G01N21/47

CPC classification number: G01N21/57 ,  G01N21/4738 ,  G01N21/55 ,  G01N21/8806 ,  G01N2021/1736 ,  G01N2021/1748 ,  G01N2021/556 ,  G01N2201/061 ,  G01N2201/068 ,  G01N2201/12

Abstract: A measuring apparatus includes an illumination device including a surface light source, a detector configured to detect a light intensity distribution formed on a light-receiving surface by reflected light, and a processor configured to obtain the reflection characteristic based on first data of the light intensity distribution detected by the detector. The processor is configured to estimate, based on the first data, second data of a light intensity distribution formed by specular reflected light and third data of a light intensity distribution formed by diffuse reflected light in a case where a point light source is disposed at each position in a light-emitting region of the surface light source, and to estimate, based on the second data and the third data, a light intensity distribution formed by reflected light from the surface.

公开(公告)号：US20160363538A1

公开(公告)日：2016-12-15

申请号：US15121632

申请日：2015-02-24

Applicant: HORIBA JOBIN YVON SAS

Inventor： Bertrand DUTERTRE ,  Denis CATTELAN ,  Emmanuel FRETEL

IPC: G01N21/65 ,  G01J3/02 ,  G02B27/00 ,  G02B21/00 ,  G02B21/16 ,  G01J3/44 ,  G02B21/02

CPC classification number: G01N21/65 ,  G01J3/0205 ,  G01J3/44 ,  G01N2021/656 ,  G01N2201/06113 ,  G01N2201/063 ,  G01N2201/068 ,  G02B21/0048 ,  G02B21/0064 ,  G02B21/0076 ,  G02B21/02 ,  G02B21/16 ,  G02B27/0025

Abstract: An optical apparatus for Raman scattering microscopy, includes a laser source (10) suitable for emitting a laser beam (11) at an excitation wavelength λ, a microscope objective (14) suitable for receiving the laser beam (11) and focusing the laser beam in an image plane of the microscope objective (14), the focused laser beam (21) being intended to illuminate a sample (20), an optical system suitable for collecting a Raman scattering optical beam (22), and detection elements (16, 17) suitable for detecting the Raman scattering beam (22) collected. More particularly, the Raman scattering microscopy apparatus further includes an adaptive optics system (31, 32, 33) positioned on an optical path of the excitation laser beam (11), on an optical path of the Raman scattering beam (22) or on an optical path common to the excitation laser beam (11) and the Raman scattering beam (22).

Abstract translation: 一种用于拉曼散射显微镜的光学装置，包括适于发射激发波长λ的激光束（11）的激光源（10），适于接收激光束（11）并将激光束聚焦的显微镜物镜（14） 在显微镜物镜（14）的像平面中，聚焦激光束（21）旨在照射样品（20），适于收集拉曼散射光束（22）的光学系统和检测元件（16， 17）适用于检测所收集的拉曼散射光束（22）。 更具体地，拉曼散射显微镜装置还包括位于激光激光束（11）的光路上的自适应光学系统（31,32,33），在拉曼散射光束（22）的光路上，或者在 激光激光束（11）和拉曼散射光束（22）共用的光路。

公开(公告)号：US20160356764A1

公开(公告)日：2016-12-08

申请号：US15090948

申请日：2016-04-05

Applicant: Automotive Coalition for Traffic Safety, Inc.

Inventor： Hans Göran Evald Martin ,  Henrik Rödjegård ,  Jan-Åke Henning ,  Pavel Zyrianov

IPC: G01N33/497 ,  G01N21/3504 ,  G01N33/00

CPC classification number: G01N33/4972 ,  G01N21/031 ,  G01N21/0332 ,  G01N21/314 ,  G01N21/3504 ,  G01N33/0026 ,  G01N33/0031 ,  G01N33/004 ,  G01N2021/158 ,  G01N2021/3196 ,  G01N2201/068 ,  G01N2201/128

Abstract: Systems, apparatus and methods determine the presence of a volatile substance in expired breath. Alcohol concentrations can be determined from expired breath through the use of electromagnetic detection. The systems, apparatus and methods allow measurements of volatile substances to be done accurately and quickly over a wide range of temperatures, and are easily incorporated into vehicles.

Abstract translation: 系统，装置和方法确定呼吸中呼吸中存在挥发性物质。 酒精浓度可以通过使用电磁检测从呼气呼气确定。 系统，装置和方法允许在宽范围的温度下准确且快速地测量挥发性物质，并且容易地并入车辆中。

公开(公告)号：US09513228B2

公开(公告)日：2016-12-06

申请号：US14377753

申请日：2012-10-22

Applicant: Hitachi High-Technologies Corporation

Inventor： Yukihiro Shibata ,  Kei Shimura ,  Sachio Uto ,  Toshifumi Honda

IPC: G01N21/00 ,  G01N21/94 ,  G01N21/956 ,  G01N21/95 ,  G03F7/20 ,  G01N21/88 ,  G01N21/958

CPC classification number: G01N21/8806 ,  G01N21/8851 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/958 ,  G01N2021/8822 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/068 ,  G01N2201/0697 ,  G01N2201/12 ,  G03F7/7065

Abstract: To increase the illumination efficiency by facilitating the change of the incident angle of illumination light with a narrow illumination width according to an inspection object and enabling an illumination region to be effectively irradiated with light, provided is a defect inspection method for obliquely irradiating a sample mounted on a table that is moving continuously in one direction with illumination light, collecting scattered light from the sample obliquely irradiated with the illumination light, detecting an image of the surface of the sample formed by the scattered light, processing a signal obtained by detecting the image formed by the scattered light, and extracting a defect candidate, wherein the oblique irradiation of the light is implemented by linearly collecting light emitted from a light source, and obliquely projecting the collected light onto the surface of the sample, thereby illuminating a linear region on the surface of the sample.

Abstract translation: 为了通过根据检查对象促进具有窄照明宽度的照明光的入射角的改变来提高照明效率，并且能够有效地照射照明区域，所以提供了一种用于倾斜照射安装的样品的缺陷检查方法 在利用照明光在一个方向上连续移动的台上，从倾斜照射照明光的样本收集散射光，检测由散射光形成的样品的表面的图像，处理通过检测图像而获得的信号 通过散射光形成并提取缺陷候选物，其中光的倾斜照射是通过线性收集从光源发射的光，并将收集的光倾斜地投射到样品的表面上，从而照亮线上区域 样品的表面。

公开(公告)号：US09488584B2

公开(公告)日：2016-11-08

申请号：US14730970

申请日：2015-06-04

Applicant: Pacific Biosciences of California, Inc.

Inventor： Nathaniel Joseph McCaffrey ,  Stephen Turner ,  Ravi Saxena ,  Scott Edward Helgesen

IPC: C12Q1/68 ,  G01N21/03 ,  G01N21/64 ,  G01N21/77 ,  B01L3/00 ,  G01N21/75 ,  B82Y20/00 ,  G01N33/543 ,  G02B6/122 ,  G01N21/05

CPC classification number: C12Q1/6874 ,  B01L3/502707 ,  B01L3/502715 ,  B01L2300/0654 ,  B01L2300/0663 ,  B01L2300/0816 ,  B01L2300/168 ,  B82Y20/00 ,  C12Q1/6825 ,  C12Q1/6869 ,  G01N21/03 ,  G01N21/0303 ,  G01N21/05 ,  G01N21/64 ,  G01N21/6428 ,  G01N21/645 ,  G01N21/6452 ,  G01N21/6454 ,  G01N21/6456 ,  G01N21/648 ,  G01N21/75 ,  G01N21/77 ,  G01N33/54373 ,  G01N2021/0346 ,  G01N2021/6434 ,  G01N2021/6439 ,  G01N2021/6441 ,  G01N2021/6463 ,  G01N2021/757 ,  G01N2021/7786 ,  G01N2201/067 ,  G01N2201/068 ,  G01N2201/08 ,  G02B6/1226 ,  Y10T436/143333

Abstract: An analytical assembly within a unified device structure for integration into an analytical system. The analytical assembly is scalable and includes a plurality of analytical devices, each of which includes a reaction cell, an optical sensor, and at least one optical element positioned in optical communication with both the reaction cell and the sensor and which delivers optical signals from the cell to the sensor. Additional elements are optionally integrated into the analytical assembly. Methods for forming and operating the analytical system are also disclosed.

公开(公告)号：US20160290934A1

公开(公告)日：2016-10-06

申请号：US15088081

申请日：2016-03-31

Applicant: KLA-Tencor Corporation

Inventor： Keith Wells ,  Xiaochun Li ,  Lisheng Gao ,  Tao Luo ,  Markus Huber

IPC: G01N21/95 ,  H01L21/66 ,  G06T7/00 ,  H01L21/67

CPC classification number: G01N21/9501 ,  G01N2201/061 ,  G01N2201/06113 ,  G01N2201/068 ,  G06T7/0006 ,  G06T7/0008 ,  G06T7/001 ,  G06T2207/30148 ,  H01L21/67288 ,  H01L22/12

Abstract: Methods and systems for detecting defects on a wafer are provided. One system includes one or more computer subsystems configured for generating a rendered image based on information for a design printed on the wafer. The rendered image is a simulation of an image generated by the optical inspection subsystem for the design printed on the wafer. The computer subsystem(s) are also configured for comparing the rendered image to an optical image of the wafer generated by the optical inspection subsystem. The design is printed on the wafer using a reticle. In addition, the computer subsystem(s) are configured for detecting defects on the wafer based on results of the comparing.

Abstract translation: 提供了用于检测晶片上的缺陷的方法和系统。 一个系统包括被配置为基于印刷在晶片上的设计的信息来生成渲染图像的一个或多个计算机子系统。 渲染图像是由光学检查子系统为印刷在晶片上的设计产生的图像的模拟。 计算机子系统还被配置为将渲染图像与由光学检查子系统产生的晶片的光学图像进行比较。 该设计使用标线印在晶片上。 此外，计算机子系统被配置为基于比较的结果来检测晶片上的缺陷。