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    Discrete Frequency Spectroscopy and Instrumentation
    72.
    发明申请
    Discrete Frequency Spectroscopy and Instrumentation 有权
    离散频谱和仪器仪表

    公开(公告)号：US20110080581A1

    公开(公告)日：2011-04-07

    申请号：US12900172

    申请日：2010-10-07

    Applicant: Rohit Bhargava ,  Brian T. Cunningham

    Inventor： Rohit Bhargava ,  Brian T. Cunningham

    IPC: G01J3/28 ,  G01J3/40

    CPC classification number: G01J3/12 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0275 ,  G01J3/0286 ,  G01J3/0289 ,  G01N21/35

    Abstract: Described herein are spectrometers comprising one or more wavelength-selective filters, such as guided mode resonance filters. Some of the spectrometers described herein are configured for obtaining absorbance spectra in a discrete fashion by measuring absorbances of a sample at multiple discrete wavelengths or wavelength bands. In another aspect, methods are also provided for obtaining spectra, images and chemical maps of samples in a discrete fashion.

    Abstract translation: 这里描述的是包括一个或多个波长选择滤光器的光谱仪，例如导模谐振滤波器。 这里描述的一些光谱仪被配置为通过测量在多个离散波长或波长带上的样品的吸光度以离散的方式获得吸收光谱。 在另一方面，还提供了用于以离散方式获得样品的光谱，图像和化学图谱的方法。

    Method and System for Using Reflectometry Below Deep Ultra-Violet (DUV) Wavelengths for Measuring Properties of Diffracting or Scattering Structures on Substrate Work Pieces
    74.
    发明申请
    Method and System for Using Reflectometry Below Deep Ultra-Violet (DUV) Wavelengths for Measuring Properties of Diffracting or Scattering Structures on Substrate Work Pieces 有权
    用于测量基底工件上衍射或散射结构特性的深紫外（DUV）波长的方法和系统

    公开(公告)号：US20100290033A1

    公开(公告)日：2010-11-18

    申请号：US12844851

    申请日：2010-07-28

    Applicant: Phillip Walsh ,  Dale Harrison

    Inventor： Phillip Walsh ,  Dale Harrison

    IPC: G01J3/00 ,  G01N21/55 ,  G01N21/47

    CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/36 ,  G01N21/274 ,  G01N21/4788

    Abstract: A method and apparatus is disclosed for using below deep ultra-violet (DUV) wavelength reflectometry for measuring properties of diffracting and/or scattering structures on semiconductor work-pieces is disclosed. The system can use polarized light in any incidence configuration, but one technique disclosed herein advantageously uses un-polarized light in a normal incidence configuration. The system thus provides enhanced optical measurement capabilities using below deep ultra-violet (DUV) radiation, while maintaining a small optical module that is easily integrated into other process tools. A further refinement utilizes an r-θ stage to further reduce the footprint.

    Abstract translation: 公开了一种用于使用下面的深紫外（DUV）波长反射测量法来测量半导体工件上的衍射和/或散射结构的性质的方法和装置。 该系统可以使用任何入射配置的偏振光，但是本文公开的一种技术有利地使用正常入射配置中的非偏振光。 因此，该系统使用下面的深紫外（DUV）辐射提供增强的光学测量能力，同时保持容易集成到其它工艺工具中的小型光学模块。 进一步细化利用r-＆thetas; 阶段进一步减少占地面积。

    SPECTROMETER FOR MEASURING MOVING SAMPLE MATERIAL AND THE METHOD
    75.
    发明申请
    SPECTROMETER FOR MEASURING MOVING SAMPLE MATERIAL AND THE METHOD 有权
    用于测量移动样品材料的光谱仪及其方法

    公开(公告)号：US20100284005A1

    公开(公告)日：2010-11-11

    申请号：US12676984

    申请日：2008-09-03

    Applicant: Jouko Malinen ,  Kari Kataja ,  Sini Kivi ,  Hannu Vasama ,  Reijo Kuusela

    Inventor： Jouko Malinen ,  Kari Kataja ,  Sini Kivi ,  Hannu Vasama ,  Reijo Kuusela

    IPC: G01J3/28

    CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0232 ,  G01J3/0286 ,  G01J3/2803 ,  G01N21/31 ,  G01N21/85 ,  G01N21/86

    Abstract: An optical or infrared spectrometer is suitable for on-line measurements for industrial, agricultural, field, commercial and other applications. Optical spectrometers are very useful for various analytical measurements. On-line operation is needed for obtaining real-time information, which is useful e.g. for process automation and quality control needs. The invention is based on optical design optimized for measuring moving samples at a distance and includes a light guide for signal homogenization, a linear variable filter for defining multiple measurement wavelengths as well as a linear detector array for detecting optical signals relating to the different wavelengths. There is an element for cooling and stabilizing the operating temperature of both the linear detector array and the linear variable filter, while the spectrometer is operating in variable environmental conditions. Thanks to the optical signal chain designed to maximize the radiance at the detector, the proposed spectrometer can provide high signal-to-noise ratio and high speed.

    Abstract translation: 光学或红外光谱仪适用于工业，农业，现场，商业和其他应用的在线测量。 光谱仪对于各种分析测量非常有用。 需要在线操作来获得实时信息，这是有用的。 用于过程自动化和质量控制需求。 本发明基于优化的光学设计，用于在一定距离测量移动样品，并且包括用于信号均匀化的光导，用于定义多个测量波长的线性可变滤波器以及用于检测与不同波长相关的光信号的线性检测器阵列。 在光谱仪工作在可变环境条件下，有一个用于冷却和稳定线性检测器阵列和线性可变滤波器的工作温度的元件。 由于设计了最大化检测器辐射度的光信号链，所提出的光谱仪可以提供高信噪比和高速度。

    System and Method for Canceling Dark Photocurrent in a Color Sensor Circuit
    76.
    发明申请
    System and Method for Canceling Dark Photocurrent in a Color Sensor Circuit 有权
    在彩色传感器电路中取消暗光电流的系统和方法

    公开(公告)号：US20100277624A1

    公开(公告)日：2010-11-04

    申请号：US12832303

    申请日：2010-07-08

    Applicant: Boon Keat Tan ,  Chi Mun Ho ,  Kevin Len Li Lim

    Inventor： Boon Keat Tan ,  Chi Mun Ho ,  Kevin Len Li Lim

    IPC: H04N9/64

    CPC classification number: G01J1/46 ,  G01J1/0252 ,  G01J3/0286 ,  G01J2001/444 ,  H04N5/361 ,  H04N9/045

    Abstract: A system and method for canceling dark photocurrent in a color sensor circuit is disclosed. A color sensor is described including a color sensor circuit, a dark color sensor circuit, and a differential amplifier circuit. The color sensor circuit receives photocurrent from a color component of a light input. The color sensor circuit outputs a first voltage indicating intensity of the color component. The dark color sensor circuit receives dark photocurrent and outputs a second voltage indicating an offset voltage. The differential amplifier circuit is coupled to the color sensor circuit and to the dark color sensor circuit. The differential amplifier circuit receives the first and second voltages and outputs a final output that cancels contributions of the offset voltage in the first voltage due to the dark photocurrent.

    Abstract translation: 公开了一种在彩色传感器电路中消除暗光电流的系统和方法。 描述了一种颜色传感器，其包括颜色传感器电路，深色传感器电路和差分放大器电路。 颜色传感器电路从光输入的颜色分量接收光电流。 颜色传感器电路输出指示颜色分量的强度的第一电压。 深色传感器电路接收暗光电流并输出指示偏移电压的第二电压。 差分放大器电路耦合到彩色传感器电路和暗色传感器电路。 差分放大器电路接收第一和第二电压，并输出由于暗光电流而消除第一电压中的偏移电压的贡献的最终输出。

    System and method for canceling dark photocurrent in a color sensor circuit
    77.
    发明授权
    System and method for canceling dark photocurrent in a color sensor circuit 有权
    在彩色传感器电路中消除暗光电流的系统和方法

    公开(公告)号：US07773134B2

    公开(公告)日：2010-08-10

    申请号：US10801204

    申请日：2004-03-15

    Applicant: Boon Keat Tan ,  Chi Mun Ho ,  Kevin Len Li Lim

    Inventor： Boon Keat Tan ,  Chi Mun Ho ,  Kevin Len Li Lim

    IPC: H04N9/64 ,  H04N5/217

    CPC classification number: G01J1/46 ,  G01J1/0252 ,  G01J3/0286 ,  G01J2001/444 ,  H04N5/361 ,  H04N9/045

    Abstract: A system and method for canceling dark photocurrent in a color sensor circuit is disclosed. A color sensor is described including a color sensor circuit, a dark color sensor circuit, and a differential amplifier circuit. The color sensor circuit receives photocurrent from a color component of a light input. The color sensor circuit outputs a first voltage indicating intensity of the color component. The dark color sensor circuit receives dark photocurrent and outputs a second voltage indicating an offset voltage. The differential amplifier circuit is coupled to the color sensor circuit and to the dark color sensor circuit. The differential amplifier circuit receives the first and second voltages and outputs a final output that cancels contributions of the offset voltage in the first voltage due to the dark photocurrent.

    Abstract translation: 公开了一种在彩色传感器电路中消除暗光电流的系统和方法。 描述了一种颜色传感器，其包括颜色传感器电路，深色传感器电路和差分放大器电路。 颜色传感器电路从光输入的颜色分量接收光电流。 颜色传感器电路输出指示颜色分量的强度的第一电压。 深色传感器电路接收暗光电流并输出指示偏移电压的第二电压。 差分放大器电路耦合到彩色传感器电路和暗色传感器电路。 差分放大器电路接收第一和第二电压，并输出由于暗光电流而消除第一电压中的偏移电压的贡献的最终输出。

    Volume Phase Grating Spectrometers and Related Methods and Systems
    78.
    发明申请
    Volume Phase Grating Spectrometers and Related Methods and Systems 有权
    体积相位光栅光谱仪及相关方法与系统

    公开(公告)号：US20100014081A1

    公开(公告)日：2010-01-21

    申请号：US12491546

    申请日：2009-06-25

    Applicant: Pete Huening ,  Robert H. Hart ,  Eric L. Buckland

    Inventor： Pete Huening ,  Robert H. Hart ,  Eric L. Buckland

    IPC: G01J3/28 ,  G01D18/00

    CPC classification number: G01J3/1838 ,  A61B5/0066 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0286 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/2803 ,  G01N2021/1787 ,  G02B5/32

    Abstract: A Spectrometer is provided including a camera and an axial symmetric camera mount configured to receive the camera and to rotate. The spectrometer furthers include an input for providing optical radiation to a spectrometer system; a diffraction grating for dispersing the optical radiation along a prescribed plane; at least one lens for focusing wavelength-dispersed light onto at least one array of a detector of optical radiation, wherein the camera has at least one linear array of elements for detecting optical radiation; a mechanical housing, wherein the axial symmetric camera mount is configured to couple the camera to the mechanical housing; and a means for rotating the camera coupled to the mechanical housing about an axis. Related systems and methods are also provided.

    Abstract translation: 提供了一种光谱仪，其包括相机和配置成接收相机并旋转的轴向对称相机底座。 光谱仪还包括用于向光谱仪系统提供光辐射的输入; 用于沿着规定平面分散光学辐射的衍射光栅; 至少一个透镜，用于将波长分散的光聚焦到光学辐射检测器的至少一个阵列上，其中相机具有用于检测光学辐射的至少一个线性阵列的元件; 机械壳体，其中所述轴向对称相机底座被配置为将所述照相机耦合到所述机械壳体; 以及用于围绕轴线旋转耦合到机械壳体的相机的装置。 还提供了相关系统和方法。

    SPECTROSCOPY MODULE
    79.
    发明申请
    SPECTROSCOPY MODULE 失效
    光谱模块

    公开(公告)号：US20090290164A1

    公开(公告)日：2009-11-26

    申请号：US12464259

    申请日：2009-05-12

    Applicant: Katsumi Shibayama ,  Tomofumi Suzuki ,  Takafumi Yokino ,  Anna Yoshida

    Inventor： Katsumi Shibayama ,  Tomofumi Suzuki ,  Takafumi Yokino ,  Anna Yoshida

    IPC: G01J3/45

    CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/0286 ,  G01J3/0297 ,  G01J2003/1213

    Abstract: In a spectroscopy module 1, a light passing hole 50 through which a light L1 advancing to a spectroscopic portion 4 passes is formed in a light detecting element 5. Therefore, it is possible to prevent the relative positional relationship between the light passing hole 50 and a light detecting portion 5a of the light detecting element 5 from deviating. Moreover, the light detecting element 5 is bonded to a front plane 2a of a substrate 2 with an optical resin adhesive 63. Thus, it is possible to reduce a stress generated onto the light detecting element 5 due to a thermal expansion difference between the light detecting element 5 and the substrate 2. Additionally, the light transmissive plate 16 covers a part of a light incident opening 50a. Thus, a light incident side surface 63a of the optical resin adhesive 63 becomes a substantially flat plane in the light passing hole 50. Therefore, it is possible to make the light L1 appropriately incident into the substrate 2.

    Abstract translation: 在光谱模块1中，在光检测元件5中形成有通过向分光部4前进的光L1通过的光通过孔50.因此，能够防止光通过孔50与 光检测元件5的光检测部分5a偏离。 此外，光检测元件5利用光学树脂粘合剂63接合到基板2的前面2a。因此，可以减少由于光的热膨胀差而在光检测元件5上产生的应力 检测元件5和基板2.此外，透光板16覆盖光入射开口50a的一部分。 因此，光学树脂粘合剂63的光入射侧面63a在光通过孔50中变为基本平坦的平面。因此，可以使光L1适当地入射到基板2中。

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