Abstract:
A blackbody radiation device (110) includes a planar filament emission element (102) and a planar detector (104) for respectively producing and detecting radiation having width dl/l less than about 0.1 to test a sample gas, where l is the wavelength of the radiation; a reflector (108); a window (W); an electrical control (118); and a data output element (116).
Abstract:
Described herein are spectrometers comprising one or more wavelength-selective filters, such as guided mode resonance filters. Some of the spectrometers described herein are configured for obtaining absorbance spectra in a discrete fashion by measuring absorbances of a sample at multiple discrete wavelengths or wavelength bands. In another aspect, methods are also provided for obtaining spectra, images and chemical maps of samples in a discrete fashion.
Abstract:
An optical system for receiving and collimating light and for transporting and processing light received in each of N wavelength ranges, including near-ultraviolet, visible, near-infrared and mid-infrared wavelengths, to determine a fraction of light received, and associated dark current, in each wavelength range in each of a sequence of time intervals.
Abstract:
A method and apparatus is disclosed for using below deep ultra-violet (DUV) wavelength reflectometry for measuring properties of diffracting and/or scattering structures on semiconductor work-pieces is disclosed. The system can use polarized light in any incidence configuration, but one technique disclosed herein advantageously uses un-polarized light in a normal incidence configuration. The system thus provides enhanced optical measurement capabilities using below deep ultra-violet (DUV) radiation, while maintaining a small optical module that is easily integrated into other process tools. A further refinement utilizes an r-θ stage to further reduce the footprint.
Abstract:
An optical or infrared spectrometer is suitable for on-line measurements for industrial, agricultural, field, commercial and other applications. Optical spectrometers are very useful for various analytical measurements. On-line operation is needed for obtaining real-time information, which is useful e.g. for process automation and quality control needs. The invention is based on optical design optimized for measuring moving samples at a distance and includes a light guide for signal homogenization, a linear variable filter for defining multiple measurement wavelengths as well as a linear detector array for detecting optical signals relating to the different wavelengths. There is an element for cooling and stabilizing the operating temperature of both the linear detector array and the linear variable filter, while the spectrometer is operating in variable environmental conditions. Thanks to the optical signal chain designed to maximize the radiance at the detector, the proposed spectrometer can provide high signal-to-noise ratio and high speed.
Abstract:
A system and method for canceling dark photocurrent in a color sensor circuit is disclosed. A color sensor is described including a color sensor circuit, a dark color sensor circuit, and a differential amplifier circuit. The color sensor circuit receives photocurrent from a color component of a light input. The color sensor circuit outputs a first voltage indicating intensity of the color component. The dark color sensor circuit receives dark photocurrent and outputs a second voltage indicating an offset voltage. The differential amplifier circuit is coupled to the color sensor circuit and to the dark color sensor circuit. The differential amplifier circuit receives the first and second voltages and outputs a final output that cancels contributions of the offset voltage in the first voltage due to the dark photocurrent.
Abstract:
A system and method for canceling dark photocurrent in a color sensor circuit is disclosed. A color sensor is described including a color sensor circuit, a dark color sensor circuit, and a differential amplifier circuit. The color sensor circuit receives photocurrent from a color component of a light input. The color sensor circuit outputs a first voltage indicating intensity of the color component. The dark color sensor circuit receives dark photocurrent and outputs a second voltage indicating an offset voltage. The differential amplifier circuit is coupled to the color sensor circuit and to the dark color sensor circuit. The differential amplifier circuit receives the first and second voltages and outputs a final output that cancels contributions of the offset voltage in the first voltage due to the dark photocurrent.
Abstract:
A Spectrometer is provided including a camera and an axial symmetric camera mount configured to receive the camera and to rotate. The spectrometer furthers include an input for providing optical radiation to a spectrometer system; a diffraction grating for dispersing the optical radiation along a prescribed plane; at least one lens for focusing wavelength-dispersed light onto at least one array of a detector of optical radiation, wherein the camera has at least one linear array of elements for detecting optical radiation; a mechanical housing, wherein the axial symmetric camera mount is configured to couple the camera to the mechanical housing; and a means for rotating the camera coupled to the mechanical housing about an axis. Related systems and methods are also provided.
Abstract:
In a spectroscopy module 1, a light passing hole 50 through which a light L1 advancing to a spectroscopic portion 4 passes is formed in a light detecting element 5. Therefore, it is possible to prevent the relative positional relationship between the light passing hole 50 and a light detecting portion 5a of the light detecting element 5 from deviating. Moreover, the light detecting element 5 is bonded to a front plane 2a of a substrate 2 with an optical resin adhesive 63. Thus, it is possible to reduce a stress generated onto the light detecting element 5 due to a thermal expansion difference between the light detecting element 5 and the substrate 2. Additionally, the light transmissive plate 16 covers a part of a light incident opening 50a. Thus, a light incident side surface 63a of the optical resin adhesive 63 becomes a substantially flat plane in the light passing hole 50. Therefore, it is possible to make the light L1 appropriately incident into the substrate 2.