公开(公告)号：US20050073680A1

公开(公告)日：2005-04-07

申请号：US10877622

申请日：2004-06-24

Applicant: Michael Chrisp ,  Scott Lerner

Inventor： Michael Chrisp ,  Scott Lerner

IPC: G01J3/18 ,  G01J3/28 ,  G02B17/08

CPC classification number: G01J3/18 ,  G01J3/0208 ,  G01J3/0297 ,  G01J3/2823 ,  G02B17/0856 ,  G02B19/0028 ,  G02B19/0076 ,  G02B19/009

Abstract: A compact imaging spectrometer comprises an entrance slit, a catadioptric lens with a mirrored surface, a grating, and a detector array. The entrance slit directs light to the mirrored surface of the catadioptric lens; the mirrored surface reflects the light back through the lens to the grating. The grating receives the light from the catadioptric lens and diffracts the light to the lens away from the mirrored surface. The lens transmits the light and focuses it onto the detector array.

Abstract translation: 紧凑型成像光谱仪包括入射狭缝，具有镜面的反射折射透镜，光栅和检测器阵列。 入口狭缝将光引导到反射折射透镜的镜面; 镜面将镜头的光线反射回光栅。 光栅接收来自反射折射透镜的光，并将光衍射到镜片远离镜面。 镜头透射光并将其聚焦到探测器阵列上。

公开(公告)号：US12066327B2

公开(公告)日：2024-08-20

申请号：US17886409

申请日：2022-08-11

Applicant: ROCKLEY PHOTONICS LIMITED

Inventor： Casimir Wierzynski

IPC: G01J3/02 ,  G01J3/42

CPC classification number: G01J3/0297 ,  G01J3/42

Abstract: A method for determining a calibration function includes: calculating a first distance, between a distribution of target spectra and a comparison distribution of spectra; calibrating the distribution of target spectra with a first preliminary calibration function to form a first distribution of calibrated target spectra; calculating a second distance, between the first distribution of calibrated target spectra and the comparison distribution of spectra; determining that the second distance is less than the first distance; and setting the calibration function equal to the first preliminary calibration function.

公开(公告)号：US20240230417A1

公开(公告)日：2024-07-11

申请号：US18520254

申请日：2023-11-27

Applicant: Rebellion Photonics, Inc.

Inventor： Robert Timothy KESTER ,  Nathan Adrian HAGEN

IPC: G01J5/53 ,  G01J3/02 ,  G01J3/12 ,  G01J3/26 ,  G01J3/28 ,  G01J3/36 ,  G01J5/00 ,  G01J5/0802 ,  G01J5/0804 ,  G01J5/0806 ,  G01J5/20 ,  G01J5/80 ,  G01N21/17 ,  G01N21/3504 ,  H04N3/09 ,  H04N5/33 ,  H04N23/11 ,  H04N25/67 ,  H04N25/671 ,  H04N25/673

CPC classification number: G01J5/53 ,  G01J3/0208 ,  G01J3/0232 ,  G01J3/0256 ,  G01J3/0297 ,  G01J3/12 ,  G01J3/26 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J5/0014 ,  G01J5/0802 ,  G01J5/0804 ,  G01J5/0806 ,  G01J5/20 ,  G01N21/3504 ,  H04N3/09 ,  H04N5/33 ,  H04N23/11 ,  H04N25/67 ,  H04N25/671 ,  H04N25/673 ,  G01J2003/2826 ,  G01J2003/283 ,  G01J2005/0077 ,  G01J5/80 ,  G01N2021/1793 ,  G01N2021/3531 ,  G01N2201/06106 ,  G01N2201/068 ,  G01N2201/127

Abstract: Various embodiments disclosed herein describe a divided-aperture infrared spectral imaging (DAISI) system that is adapted to acquire multiple IR images of a scene with a single-shot (also referred to as a snapshot). The plurality of acquired images having different wavelength compositions that are obtained generally simultaneously. The system includes at least two optical channels that are spatially and spectrally different from one another. Each of the at least two optical channels are configured to transfer IR radiation incident on the optical system towards an optical FPA unit comprising at least two detector arrays disposed in the focal plane of two corresponding focusing lenses. The system further comprises at least one temperature reference source or surface that is used to dynamically calibrate the two detector arrays and compensate for a temperature difference between the two detector arrays.

公开(公告)号：US20240027268A1

公开(公告)日：2024-01-25

申请号：US18265559

申请日：2021-12-06

Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO

Inventor： Gerard Christiaan Jurjen OTTER ,  James Peter Robert DAY ,  Niels DIJKHUIZEN ,  Ralph Claude SNEL ,  Marcela PELICA PASCOA

IPC: G01J3/02 ,  G01J1/42

CPC classification number: G01J3/0297 ,  G01J3/0205 ,  G01J1/42 ,  G01J2001/4266

Abstract: A method and device (10) for making a calibrated measurement of light from an object (E). In a first measurement window (W1), object light (LE) is received from the object (E) onto a beam splitter (11) which splits the light into a signal path (Ps) and a reference path (Pr). A first signal (S1=T·LE·Hs) is measured by a signal detection element (15s) in the signal path (Ps). A second signal (S2=R·LE·Hr) is measured by a reference detection element (15r) in the reference path (Pr). In a second measurement window (W2), calibration light (LC) is received onto the beam splitter (11). A third signal (S3=R·LC·Hs) is measured by the signal detection element (15s) in the signal path (Ps). A fourth signal (S4=T·LC·Hr) is measured by the reference detection element (15r) in the reference path (Pr). A measurement value of the object light (LE) is determined based on the measured signals (S1,S2,S3,S4).

公开(公告)号：US11874169B2

公开(公告)日：2024-01-16

申请号：US17042197

申请日：2020-01-09

Applicant: HEFEI INSTITUTE OF PHYSICAL SCIENCE, CHINESE ACADEMY OF SCIENCES

Inventor： Yingjian Wang ,  Yufei Chu ,  Dong Liu ,  Decheng Wu ,  Zhenzhu Wang ,  Kunming Xing ,  Zhiqiang Kuang ,  Bangxin Wang ,  Zhiqing Zhong ,  Aiyuan Fan ,  Chenbo Xie

IPC: G01J3/26 ,  G01J3/02 ,  G01J3/45

CPC classification number: G01J3/26 ,  G01J3/0208 ,  G01J3/0297 ,  G01J3/45

Abstract: This application relates to a device for measuring a transmittance curve of an Fabry-Perot using a frequency comb light source and a method using the same. The device includes the following components sequentially arranged in an optical path: a single frequency pulse laser generating single frequency pulse laser; a frequency comb laser converting received single frequency pulse laser into frequency comb laser; and an Fabry-Perot to be detected receiving laser output from the frequency comb laser; where the device further includes a first receiving unit receiving laser from an output end of the frequency comb laser and performing component and spectrum analysis, and a second receiving unit receiving laser from an output end of the Fabry-Perot to be detected and performing component and spectrum analysis.

公开(公告)号：US20230304860A1

公开(公告)日：2023-09-28

申请号：US18124912

申请日：2023-03-22

Applicant: Si-Ware Systems

Inventor： Yasser M. Sabry ,  Bassem Mortada ,  Samir Abozyd ,  Mostafa Medhat ,  Mai Said ,  Bassam Saadany ,  Youssri Helmy ,  Ahmed Badr ,  Marcal Plans Pujolras

IPC: G01J3/02 ,  G06N20/00 ,  G01J3/45

CPC classification number: G01J3/0297 ,  G06N20/00 ,  G01J3/45 ,  G01J2003/2879

Abstract: Aspects relate to a spectral modeling system for building chemometrics (calibration) models for spectral devices targeting ultra-wide-scale deployment. The spectral modeling system includes a spectral converter for generating a plurality of artificial spectra using spectral data of a plurality of samples measured by a subset of a plurality of spectral devices and spectral device characteristics representing spectral variations in the plurality of spectral devices. The spectral modeling system further includes a chemometrics engine for generating a chemometrics model for one or more parameters associated with the plurality of samples based on the spectral data and the plurality of artificial spectra.

公开(公告)号：US20230266168A1

公开(公告)日：2023-08-24

申请号：US18005220

申请日：2021-07-28

Applicant: Cymer, LLC

Inventor： Mohammad Taghi Mohebbi ,  Spencer Ryan Williams

IPC: G01J3/28 ,  G01J3/02 ,  G03F7/20 ,  H01S3/00 ,  H01S3/225 ,  H01S3/10

CPC classification number: G01J3/28 ,  G01J3/0297 ,  G03F7/70516 ,  G03F7/70575 ,  G03F7/70508 ,  G03F7/70591 ,  H01S3/0014 ,  H01S3/225 ,  H01S3/10069 ,  G03F7/70025

Abstract: A method is performed for scheduling a calibration relating to an optical device in a light source. The method can be performed by a calibration system including a calibration apparatus and a prediction controller. The method includes: receiving a property associated with the optical device while the optical device is being calibrated; calculating a current degradation metric based at least on the optical device property, the degradation metric modeling behavior of the optical device; estimating when a degradation of the optical device would exceed a threshold based on the current degradation metric; and scheduling a calibration of the optical device based at least in part on the estimate of optical device degradation.

公开(公告)号：US11692874B2

公开(公告)日：2023-07-04

申请号：US17335814

申请日：2021-06-01

Applicant: Tokyo Electron Limited

Inventor： Yan Chen ,  Xinkang Tian

IPC: G01J3/02 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01J3/0297 ,  G01J3/0208 ,  G01J3/18 ,  G01J3/2803

Abstract: Aspects of the present disclosure provide a method for wavelength calibration of a spectrometer. The method can include receiving a calibration light signal having first spectral components of different first wavelengths; separating and projecting the first spectral components onto pixels of a detector of the spectrometer; establishing a relation between the first wavelengths and pixel numbers of first pixels on which the first spectral components are projected; calculating first residual errors between the first wavelengths and estimated wavelengths that are associated by the relation to the pixel numbers of the first pixels; receiving an optical signal having a second spectral component of a second wavelength; projecting the optical signal onto a second pixel; and calibrating the second wavelength based on a second residual error calculated based on one of the first residual errors that corresponds to a pair of the first pixels between which the second pixel is located.

公开(公告)号：US20190242751A1

公开(公告)日：2019-08-08

申请号：US16126998

申请日：2018-09-10

Applicant: MKS TECHNOLOGY (D/B/A SNOWY RANGE INSTRUMENTS)

Inventor： Keith T. Carron ,  Shane A. Buller ,  Mark A. Watson ,  Sean Patrick Woodward

IPC: G01J3/44 ,  G01J3/02 ,  G01N21/65 ,  G01J3/10

CPC classification number: G01J3/4412 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/027 ,  G01J3/0297 ,  G01J3/10 ,  G01J3/44 ,  G01N21/65 ,  G01N2021/4711 ,  G01N2201/0612 ,  G01N2201/068 ,  G01N2201/12

Abstract: Spectrometers and methods for determining the presence or absence of a material in proximity to and/or combined with another material are provided. In one particular example, a spectrometer is provided that includes a light source, a detector and an optical system. In this implementation, the light source is configured to provide an excitation incident beam. The detector is configured to detect a spectroscopy signal. The optical system is configured to direct the excitation incident beam toward a sample at a non-zero angle from a zero-angle reference. The optical system is further configured to receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector. The detector is configured to remove a spectral interference component of the spectroscopy signal.

公开(公告)号：US20190019310A1

公开(公告)日：2019-01-17

申请号：US16038161

申请日：2018-07-17

Applicant: Purdue Research Foundation

Inventor： Jian Jin

IPC: G06T7/80

CPC classification number: G06T7/85 ,  G01J3/00 ,  G01J3/0297 ,  G01N21/274 ,  G06T2207/10024 ,  G06T2207/10028 ,  H04N17/00

Abstract: A reference imaging system including a planar reference piece. The reference imaging system further includes a three-axis gantry for positioning the planar reference piece at a plurality of points in a 3D coordinate system. Additionally, the reference imaging system includes a yaw actuator for adjusting the yaw angle of the object. Furthermore, the reference imaging system includes a pitch actuator for adjusting the pitch of the object. Moreover, the reference imaging system includes a computer processing unit for controlling the 3D position, pitch and yaw of the planar reference piece.