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    Diaphragm Mounting Member and Charged Particle Beam Device
    74.
    发明申请
    Diaphragm Mounting Member and Charged Particle Beam Device 有权
    隔膜安装构件和带电粒子束装置

    公开(公告)号：US20160203941A1

    公开(公告)日：2016-07-14

    申请号：US14911681

    申请日：2014-03-10

    Applicant: HITACHI-TECHNOLOGIES CORPORATION

    Inventor： Shinsuke KAWANISHI ,  Yusuke OMINAMI ,  Hiroyuki SUZUKI ,  Masahiko AJIMA

    IPC: H01J37/20 ,  G01M3/02 ,  H01J37/26

    CPC classification number: H01J37/20 ,  G01M3/02 ,  H01J37/16 ,  H01J37/18 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/2608 ,  H01J2237/2802

    Abstract: Conventional devices have been difficult to use due to insufficient consideration being given to factors such as the cost necessary for diaphragm replacement and the convenience of the work. In the present invention, a diaphragm mounting member installed in a charged particle beam device for radiating a primary charged particle beam through a diaphragm separating a vacuum space and an atmospheric pressure space onto a sample placed in the atmospheric pressure space is provided with a diaphragm installation portion to which a TEM membrane is mounted and a casing fixing portion mounted on a casing of the charged particle beam device. The diaphragm installation portion has a positioning structure for positioning a platform on which the diaphragm is held.

    Abstract translation: 由于对膜片更换所需的成本和工作的便利性等因素的考虑不足，常规装置难以使用。 在本发明中，安装在带电粒子束装置中的隔膜安装构件设置有隔膜装置，该带电粒子束装置通过将分离真空空间和大气压空间的隔膜分离到放置在大气压空间中的样品上的一次带电粒子束， 安装有TEM膜的部分和安装在带电粒子束装置的壳体上的壳体固定部。 隔膜安装部具有用于定位保持隔膜的平台的定位结构。

    Electron Microscope and Sample Movement Device
    75.
    发明申请
    Electron Microscope and Sample Movement Device 审中-公开
    电子显微镜和样品移动装置

    公开(公告)号：US20150243472A1

    公开(公告)日：2015-08-27

    申请号：US14422436

    申请日：2013-06-26

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Hideki Kikuchi ,  Kota Ueda ,  Kouichirou Saitou

    IPC: H01J37/20 ,  H01J37/26 ,  H01J37/18

    CPC classification number: H01J37/20 ,  H01J37/185 ,  H01J37/26 ,  H01J2237/2006 ,  H01J2237/204

    Abstract: The present invention is intended to reduce drift in a sample which occurs because of distortion in an O-ring which seals off from the atmosphere a sample chamber in which vacuum is retained. Provided is an electron microscope, wherein a sample holder (2) is inserted in a column (1), comprising: an O-ring (4) which makes airtight the column (1) of the electron microscope and the sample holder (2); a slider tube (30) which slides in the longitudinal direction of the sample holder (2) and positions the sample holder in the longitudinal direction; a bellows (32) which makes airtight the slider tube (30) and the column (1); a means (10) for driving the slider (30) in the longitudinal direction of the sample holder (2); and a holder umping part (40) which positions the sample holder (2) in the longitudinal direction. The electron microscope further comprises a sample movement device which has an elastic material (31) which connects the holder umping part (40) and the slider tube (30).

    Abstract translation: 本发明旨在减少由于在保持真空的样品室中与大气密封的O形环中的变形而导致的样品中的漂移。 本发明提供一种电子显微镜，其中样品架（2）插入柱（1）中，包括：使电子显微镜的柱（1）和样品架（2）气密的O形环（4） ; 滑动管（30），其在样品保持架（2）的长度方向上滑动，并沿长度方向定位样品保持架; 使滑动管（30）和柱（1）气密的波纹管（32）; 用于沿所述样品架（2）的纵向方向驱动所述滑块（30）的装置（10）; 以及将样品保持器（2）沿长度方向定位的保持器凹部（40）。 电子显微镜还包括样品移动装置，其具有连接保持器凹部（40）和滑动管（30）的弹性材料（31）。

    Slider bearing for use with an apparatus comprising a vacuum chamber
    77.
    发明授权
    Slider bearing for use with an apparatus comprising a vacuum chamber 有权
    用于与包括真空室的设备一起使用的滑块轴承

    公开(公告)号：US08598524B2

    公开(公告)日：2013-12-03

    申请号：US12303715

    申请日：2007-04-26

    Applicant: Johannes Antonius Hendricus Wilhelmus Gerardus Persoon ,  Andreas Theodorus Engelen ,  Siegfried Lichtenegger ,  Petrus Henricus Joannes Van Dooren

    Inventor： Johannes Antonius Hendricus Wilhelmus Gerardus Persoon ,  Andreas Theodorus Engelen ,  Siegfried Lichtenegger ,  Petrus Henricus Joannes Van Dooren

    IPC: G01N23/00

    CPC classification number: H01J37/28 ,  H01J37/185 ,  H01J37/20 ,  H01J2237/166 ,  H01J2237/184 ,  H01J2237/2006 ,  H01J2237/204

    Abstract: An apparatus for loading a sample into a particle-optical instrument that includes a slider bearing having a base plate in contact with the vacuum chamber at one side, said base plate showing a first through-hole in contact with the vacuum chamber, and a second plate, one side of the second plate in contact with the base plate, said second plate also showing a through-hole, where the faces of the base plate and the second plate facing each other are sufficiently smooth to form a non-elastomeric vacuum seal and where the second plate is a flexible plate and the face of the flexible plate opposite to the base plate is equipped to seal against a cup equipped to hold a sample. Preferably the through-hole in the base plate shows a rim facing the flexible plate with a controlled curvature, the curvature of the rim formed such that the vacuum seal between the base plate and the flexible plate forms on a pre-defined contour and that the Hertzian contact pressure is smaller than a pre-defined maximum contact pressure, the pre-determined maximum contact pressure chosen to minimize particle generation. By forming the second plate as a flexible plate the pressure with which the base plate and the second plate are pressed together is better reproducible than when both plates are rigid. By forming the rim with a controlled radius, particle generation is minimized.

    Abstract translation: 一种用于将样品装载到包括滑动轴承的颗粒光学仪器的装置，该滑动轴承具有与一侧的真空室接触的基板，所述基板显示与真空室接触的第一通孔，第二通孔 板，与基板接触的第二板的一侧，所述第二板还显示通孔，其中基板和第二板的面彼此面对是足够光滑的，以形成非弹性真空密封件 并且其中第二板是柔性板，并且与基板相对的柔性板的表面被装备以密封装备以保持样品的杯。 优选地，基板中的通孔显示出具有受控曲率的面向柔性板的边缘，所述边缘的曲率形成为使得基板和柔性板之间的真空密封形成预定义的轮廓，并且 赫兹接触压力小于预定义的最大接触压力，选择预定的最大接触压力以最小化颗粒产生。 通过将第二板形成为柔性板，将基板和第二板压在一起的压力比两个板刚性时的压力更好。 通过以受控的半径形成轮辋，使颗粒的产生最小化。

    Beam device system comprising a particle beam device and an optical microscope
    78.
    发明授权
    Beam device system comprising a particle beam device and an optical microscope 有权
    光束装置系统，包括粒子束装置和光学显微镜

    公开(公告)号：US08530856B2

    公开(公告)日：2013-09-10

    申请号：US12734613

    申请日：2008-11-11

    Applicant: Bernd Spruck ,  Martin Edelmann ,  John Craven ,  Robert Taylor ,  Martin Kühner

    Inventor： Bernd Spruck ,  Martin Edelmann ,  John Craven ,  Robert Taylor ,  Martin Kühner

    IPC: H01J37/26 ,  G21K5/04

    CPC classification number: H01J37/20 ,  G02B21/0004 ,  H01J37/18 ,  H01J37/228 ,  H01J37/26 ,  H01J2237/2003 ,  H01J2237/2006 ,  H01J2237/204 ,  H01J2237/2608

    Abstract: A beam device, in particular a particle beam device, for analyzing an object is provided, as well as a system comprising a particle beam device and an optical microscope for optically analyzing an object. The beam device simplifies the exchange and reduces the time of the exchange of objects to be examined. The beam device includes at least one beam generator that generates a beam, at least one objective lens that focuses the beam on an object arranged in a holding element. The objective lens comprises at least one connecting element. The holding element may be connected to the connecting element so that the holding element is removable from the connecting element for modification of the object. Alternatively, the holding element may be mounted to a beam column.

    Abstract translation: 提供了用于分析物体的光束装置，特别是粒子束装置，以及包括用于光学分析物体的粒子束装置和光学显微镜的系统。 光束装置简化了交换并减少了被检查物体交换的时间。 光束装置包括产生光束的至少一个光束发生器，将光束聚焦在布置在保持元件中的物体上的至少一个物镜。 物镜包括至少一个连接元件。 保持元件可以连接到连接元件，使得保持元件可从连接元件移除以便对象的修改。 或者，保持元件可以安装到梁柱。

    Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
    80.
    发明授权
    Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope 有权
    界面，在非真空环境中观察物体的方法和扫描电子显微镜

    公开(公告)号：US08164057B2

    公开(公告)日：2012-04-24

    申请号：US12446757

    申请日：2007-10-23

    Applicant: Dov Shachal

    Inventor： Dov Shachal

    IPC: G01N23/00

    CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

    Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

    Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

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