公开(公告)号：US08804115B2

公开(公告)日：2014-08-12

申请号：US12989591

申请日：2009-04-27

Applicant: Bing Yu ,  Nirmala Ramanujam

Inventor： Bing Yu ,  Nirmala Ramanujam

IPC: G01J3/00 ,  G01J3/40 ,  G01J3/42 ,  G01J3/28 ,  G01N21/47 ,  G01J3/02 ,  G01N21/27 ,  G01N21/49

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/28 ,  G01J2003/2866 ,  G01N21/274 ,  G01N21/474 ,  G01N21/49 ,  G01N2201/082

Abstract: Systems and methods for performing optical spectroscopy using a self-calibrating fiber optic probe are disclosed. One self-calibrating fiber optic probe includes a sensing channel for transmitting illumination light to a specimen and for collecting spectral data of the specimen. The spectral data includes the illumination light diffusely reflected from the specimen at one or more wavelengths. The self-calibrating fiber optic probe may also include a calibration channel for transmitting calibration light. The calibration light and the illumination light are generated simultaneously from a common light source. The calibration channel collects calibration spectral data associated with the calibration light contemporaneously with the collection of the spectral data of the specimen.

Abstract translation: 公开了使用自校准光纤探针执行光谱的系统和方法。 一个自校准光纤探针包括用于将照明光传输到样本并用于收集样本的光谱数据的感测通道。 光谱数据包括在一个或多个波长处从样本漫反射的照明光。 自校准光纤探针还可以包括用于传送校准光的校准通道。 校准光和照明光从公共光源同时产生。 校准通道与样品的光谱数据的收集同时收集与校准光相关联的校准光谱数据。

公开(公告)号：US08593631B2

公开(公告)日：2013-11-26

申请号：US13275572

申请日：2011-10-18

Applicant: Hideaki Hirai ,  Masanori Kobayashi

Inventor： Hideaki Hirai ,  Masanori Kobayashi

IPC: G01J3/40 ,  G01J3/45 ,  G01B9/02

CPC classification number: G01J3/2823 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/0259 ,  G02B5/1814 ,  G02B5/20

Abstract: A spectral image acquiring apparatus includes an optical filter on which light is incident; an image sensor including a two-dimensionally disposed pixel array for detecting the light via the optical filter; and a signal processing unit generating a difference-value image based on a detection signal from the image sensor. The optical filter includes a diffraction grating having a lattice pattern corresponding to one or more pixels on the image sensor. The signal processing unit calculates a difference value in an amount of received light between two adjacent pixels based on the detection signal from the image sensor, and generates the difference-value image based on the difference value. The difference value between the two adjacent pixels is varied depending on a difference in an interference point on the image sensor corresponding to a diffraction angle of the light that has passed through the diffraction grating.

Abstract translation: 光谱图像获取装置包括光入射的滤光器; 图像传感器，包括用于经由滤光器检测光的二维布置的像素阵列; 以及信号处理单元，其基于来自图像传感器的检测信号生成差值图像。 光学滤波器包括具有对应于图像传感器上的一个或多个像素的格子图案的衍射光栅。 信号处理单元基于来自图像传感器的检测信号计算两个相邻像素之间的接收光量的差值，并基于差值生成差值图像。 两个相邻像素之间的差值取决于对应于已经通过衍射光栅的光的衍射角的图像传感器上的干涉点的差异。

公开(公告)号：US08570498B2

公开(公告)日：2013-10-29

申请号：US12780546

申请日：2010-05-14

Applicant: Carl W. Dirk

Inventor： Carl W. Dirk

IPC: G01N1/00 ,  G01J3/40

CPC classification number: G01J3/46 ,  G01J2001/0276 ,  G01J2003/1282 ,  G01N21/255 ,  G01N21/29

Abstract: Customized spectral profiles, and filters and illuminants having a customized spectral profile, optimized to reduce light in one or more wavelength regions for which one or more pigments are relatively more susceptible to perceptible changes in appearance.

Abstract translation: 定制的光谱分布，以及具有定制的光谱分布的滤光器和光源，其被优化以减少一个或多个波长区域中的光，其中一个或多个颜料相对更易受外观的可察觉的变化的影响。

公开(公告)号：US20120224174A1

公开(公告)日：2012-09-06

申请号：US13468372

申请日：2012-05-10

Applicant: Pete Huening ,  Robert H. Hart ,  Eric L. Buckland

Inventor： Pete Huening ,  Robert H. Hart ,  Eric L. Buckland

IPC: G01J3/40

CPC classification number: G01J3/1838 ,  A61B5/0066 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0286 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/2803 ,  G01N2021/1787 ,  G02B5/32

Abstract: A spectrometer is provided including a camera and an axial symmetric camera mount configured to receive the camera and to rotate. The spectrometer furthers include an input for providing optical radiation to a spectrometer system; a diffraction grating for dispersing the optical radiation along a prescribed plane; at least one lens for focusing wavelength-dispersed light onto at least one array of a detector of optical radiation, wherein the camera has at least one linear array of elements for detecting optical radiation; a mechanical housing, wherein the axial symmetric camera mount is configured to couple the camera to the mechanical housing; and a means for rotating the camera coupled to the mechanical housing about an axis. Related systems and methods are also provided.

Abstract translation: 提供了一种光谱仪，其包括相机和被配置为接收相机并旋转的轴向对称相机底座。 光谱仪还包括用于向光谱仪系统提供光辐射的输入; 用于沿着规定平面分散光学辐射的衍射光栅; 至少一个透镜，用于将波长分散的光聚焦到光学辐射检测器的至少一个阵列上，其中所述照相机具有用于检测光学辐射的元件的至少一个线性阵列; 机械壳体，其中所述轴向对称相机底座被配置为将所述照相机耦合到所述机械壳体; 以及用于围绕轴线旋转耦合到机械壳体的相机的装置。 还提供了相关系统和方法。

公开(公告)号：US20120021539A1

公开(公告)日：2012-01-26

申请号：US13189913

申请日：2011-07-25

Applicant: Arnold Allenic ,  Stephan Paul George, II ,  Sreenivas Jayaraman ,  Oleh Karpenko ,  Chong Lim

Inventor： Arnold Allenic ,  Stephan Paul George, II ,  Sreenivas Jayaraman ,  Oleh Karpenko ,  Chong Lim

IPC: H01L21/66 ,  G01J4/00 ,  G01R31/26 ,  G01N21/55 ,  G01J3/28 ,  G01J3/40 ,  G01N21/00

CPC classification number: H01L22/12 ,  G01B11/0683 ,  G01N21/8422 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A metrology system for gauging and spatially mapping a semiconductor material on a substrate can be used in controlling deposition and thermal activation processes.

Abstract translation: 用于在衬底上测量和空间映射半导体材料的计量系统可用于控制沉积和热激活过程。

公开(公告)号：US20120004884A1

公开(公告)日：2012-01-05

申请号：US12864132

申请日：2008-01-23

Applicant: Bernard Fillol ,  Philippe Gremillet ,  Jean-Marie Magain ,  Jean Tretout ,  Frédéric Weimann

Inventor： Bernard Fillol ,  Philippe Gremillet ,  Jean-Marie Magain ,  Jean Tretout ,  Frédéric Weimann

IPC: G06F15/00 ,  G01J3/40

CPC classification number: G01J3/02 ,  G01J3/0278 ,  G01J3/51 ,  G01J3/513

Abstract: The disclosure relates to a device and a method for the space-colorimetric measurement of a three-dimensional object, in order to digitally model the low-relief and the colorimetric coordinates of this object according to multiple analysis points. In order to do so, the measuring device of the disclosure combines a lighting means with at least four optical detection means, including at least two twin detection means sensitive to substantially identical light wavelength ranges, in order to determine by stereoscopic effect the low-relief of the object analysed. The disclosure thus proposes a device for the space-colorimetric measurement of a three-dimensional object, that comprises a detection head including a lighting means for the object and at least four detection means for detecting the light reflected by the object, wherein said device further includes a unit for processing the information received by the detection means. At least two twin detection means are sensitive to substantially identical light wavelength ranges.

Abstract translation: 本公开涉及一种用于三维物体的空间比色测量的装置和方法，以便根据多个分析点对该物体的低浮雕和比色坐标进行数字模拟。 为了这样做，本公开的测量装置将照明装置与至少四个光学检测装置组合，包括至少两个对基本相同的光波长范围敏感的双检测装置，以便通过立体效果确定低浮雕 的对象分析。 因此，本公开提出了一种用于三维物体的空间比色测量的装置，其包括检测头，该检测头包括用于物体的照明装置和用于检测由物体反射的光的至少四个检测装置，其中所述装置进一步 包括用于处理由检测装置接收的信息的单元。 至少两个双检测装置对基本相同的光波长范围是敏感的。

公开(公告)号：US20110299063A1

公开(公告)日：2011-12-08

申请号：US13104028

申请日：2011-05-10

Applicant: Hirofumi Ninomiya ,  Akio Kawaguchi

Inventor： Hirofumi Ninomiya ,  Akio Kawaguchi

IPC: G01N21/87 ,  G01J3/40

CPC classification number: G01N21/87 ,  G01N21/251 ,  G01N21/47 ,  G01N21/4785 ,  G01N21/645

Abstract: A device for measuring properties of scatterers which measures properties of a scatterer from a stereoscopic scattering distribution of the scatterer upon receiving an electromagnetic wave with a certain wavelength distribution is provided. In the device, a scatterer to be measured is placed on a specimen platform; the electromagnetic wave is irradiated onto the scatterer from at least either any one or more directions, or one or more continuous directions of a hypothetical spherical surface having the above-mentioned focal point as its center; scattering waves scattered by the scatterer and reflected off the paraboloidal mirror or projected onto the paraboloidal screen are imaged by the imaging means as planar imaging data; and from thus obtained imaging data, a stereoscopic distribution of the scattering waves generated by the scatterer is obtained so as to measure properties of the scatterer from the distribution result.

Abstract translation: 提供了一种用于测量在接收到具有一定波长分布的电磁波时散射体的立体散射分布测量散射体属性的散射体的属性的装置。 在该装置中，待测量的散射体放置在试样平台上; 电磁波从具有上述焦点的中心的假想球面的至少任一个或多个方向或一个或多个连续方向照射到散射体上; 由散射体散射并从抛物面镜反射或投影到抛物面上的散射波通过成像装置成像为平面成像数据; 并根据这样获得的成像数据，获得由散射体产生的散射波的立体分布，以从分布结果测量散射体的性质。

公开(公告)号：US20110228116A1

公开(公告)日：2011-09-22

申请号：US12661369

申请日：2010-03-16

Applicant: Eli Margalith

Inventor： Eli Margalith

IPC: H04N5/228 ,  G01J3/40 ,  G01J3/00

CPC classification number: G01J3/2803 ,  G01J2003/1282 ,  G01N21/255 ,  G01N21/39 ,  G01N21/8901 ,  G01N21/8903 ,  G01N21/93

Abstract: A spectral imaging system for collecting spectral information of a two dimensional heterogeneous objects while in motion relative to the imaging system without the use of a spectrograph, filters or any dispersive optics. The system includes a pulsed light source tunable in wavelength for producing short pulses of wavelength tuned light at a plurality of selected narrow band wavelengths within a spectral range and one or more optical components for conveying or directing the short pulses of light to a two dimensional region that is substantially stationary with respect to the imaging system and through which the two dimensional target is moving. The system also includes a many pixel camera synchronized with the tunable pulsed light source. The camera is adapted to detect light in the selected narrow band wavelengths produced by the tunable pulsed light source and reflected from or transmitted through the two dimensional target in motion relative to the imaging system and to provide image frame information with each frame at a defined wavelength band. A processor processes information from said tunable light source and said camera and to produce multi-spectral images of the target.

Abstract translation: 一种用于在不使用光谱仪，滤光器或任何色散光学器件的情况下相对于成像系统运动地收集二维异质物体的光谱信息的光谱成像系统。 该系统包括可调波长的脉冲光源，用于在光谱范围内产生多个选定的窄带波长的波长调谐光的短脉冲，以及用于将短脉冲光输送或引导到二维区域的一个或多个光学部件 相对于成像系统基本上是静止的，并且二维目标物通过其移动。 该系统还包括与可调谐脉冲光源同步的许多像素摄像机。 相机适于检测由可调谐脉冲光源产生的所选窄带波长的光，并相对于成像系统在相对于成像系统运动的相对于二维目标物体反射或透射通过二维目标物并且以确定的波长的每帧提供图像帧信息 带。 处理器处理来自所述可调谐光源和所述相机的信息并产生所述目标的多光谱图像。

公开(公告)号：US20110222056A1

公开(公告)日：2011-09-15

申请号：US13037941

申请日：2011-03-01

Applicant: Manabu Seo ,  Naohiro Kamijo ,  Kohei Shimbo ,  Yoichi Kubota

Inventor： Manabu Seo ,  Naohiro Kamijo ,  Kohei Shimbo ,  Yoichi Kubota

IPC: G01J3/40

CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/0229 ,  G01J3/2803 ,  G01J3/502

Abstract: A spectroscopic characteristics acquisition unit includes a light emitting unit to illuminate a measurement target; a lens array including lenses to receive reflected light reflected from the measurement target; a light blocking member having a pinhole array including openings; a focusing unit to focus light coming from the pinhole array; a diffraction unit to diffract the light to different directions depending on wavelength of light received by the focusing unit; and a light receiving unit to receive the reflected light diffracted by the diffraction unit. The light receiving unit includes a spectroscopic sensor array having spectroscopy sensors including pixels. Each of the lenses constituting the lens array corresponds to one of the openings of the pinhole array. The numerical aperture NA of the lens in the arrangement direction in the lens array satisfies the formula NA>sin(θmax) with respect to the maximum angle of view θmax of the focusing unit.

Abstract translation: 光谱特性获取单元包括照亮测量对象的发光单元; 透镜阵列，包括用于接收从测量对象反射的反射光的透镜; 具有包括开口的针孔阵列的遮光构件; 聚焦单元，用于聚焦来自针孔阵列的光; 衍射单元，用于根据由聚焦单元接收的光的波长将光衍射到不同的方向; 以及光接收单元，用于接收由衍射单元衍射的反射光。 光接收单元包括具有包括像素的光谱传感器的光谱传感器阵列。 构成透镜阵列的每个透镜对应于针孔阵列的一个开口。 透镜阵列中的透镜在排列方向上的数值孔径NA相对于最大视角和焦距满足公式NA> sin（＆amp; max; max）;聚焦单元的最大值。

公开(公告)号：US20110063611A1

公开(公告)日：2011-03-17

申请号：US12638231

申请日：2009-12-15

Applicant: Thomas H. Chyba ,  Thomas Stewart McKechnie

Inventor： Thomas H. Chyba ,  Thomas Stewart McKechnie

IPC: G01J3/44 ,  G01J3/40 ,  H01J40/02 ,  G02B5/04

CPC classification number: G01J3/02 ,  G01J1/04 ,  G01J1/0477 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0294 ,  G01J3/36 ,  G01J3/44

Abstract: Systems and methods for increasing the quantum efficiency of a photocathode used in an intensified an intensified array detector with a photocathode, such as a charge-coupled device (ICCD) are presented. A quantum efficiency enhancement device is disposed in front of an ICCD and is configured to enable or facilitate an increase in the angle of incidence of incoming rays incident on the photocathode. The ICCD itself may be tilted to achieve an increased angle of incidence, and such tilting is preferably only in a direction in which pixel columns of the ICCD extend such that a plane of incidence of incoming light to the ICCD is perpendicular to a direction of wavelength dispersion. The quantum efficiency enhancement device may include re-imaging optics, an optical tilt compensator and optical coupler.

Abstract translation: 提出了用于增强光电阴极强化阵列检测器（如电荷耦合器件（ICCD））中使用的光电阴极的量子效率的系统和方法。 量子效率增强装置设置在ICCD的前面，并且被配置为能够或有助于增加入射到光电阴极上的入射角的入射角。 ICCD本身可以倾斜以实现增加的入射角，并且这种倾斜优选仅在ICCD的像素列延伸的方向上，使得到ICCD的入射光的入射平面垂直于波长的方向 分散。 量子效率增强器件可以包括重新成像光学器件，光学倾斜补偿器和光耦合器。