公开(公告)号：US10323985B2

公开(公告)日：2019-06-18

申请号：US15793800

申请日：2017-10-25

Applicant: TruTag Technologies, Inc.

Inventor： Ron R. Nissim ,  Timothy Learmonth ,  Mark Hsu ,  Hod Finkelstein

IPC: G01J3/45 ,  G01J3/02 ,  G01J3/26 ,  G01J3/28

Abstract: A system for determining a calibrated spectral measurement includes a tunable Fabry-Perot etalon, a detector, and a processor. The tunable Fabry-Perot etalon has a settable gap. The detector measures light intensity. The processor is configured to determine the calibrated spectral measurement. The calibrated spectral measurement is based at least in part on a measurement set of detected light intensities for a plurality of settable gaps and a reconstruction matrix. The reconstruction matrix is based at least in part on calibration measurements. For a calibration measurement, a settable gap is selected and a set of input monochromatic source wavelengths is used to measure responses at a detector after transmission through the Fabry-Perot etalon. Each input monochromatic source wavelength is also measured using a radiometer to scale detector measurements.

公开(公告)号：US10317283B2

公开(公告)日：2019-06-11

申请号：US16075346

申请日：2017-02-02

Applicant: JASCO CORPORATION

Inventor： Tetsuji Sunami ,  Takashi Shimamura ,  Norio Wakimoto ,  Jun Koshobu

IPC: G01J5/02 ,  G01J3/45 ,  G01N21/35 ,  G01J3/28 ,  G01J3/453 ,  G01N21/31 ,  G01N21/25 ,  G01N21/00 ,  G01J3/02

Abstract: A method for measuring spectrum by Fourier-transforming an interferogram of an infrared interference wave acquired with an interferometer, including a step of over-sampling intensity signals of the interference wave at positions (D1, D2, . . . ) of a movable mirror set on the basis of a wavelength λ1 of a semi-conductor laser, and a step of interpolating intensity signals (I1′, I2′, . . . ) that would be obtained when the interference wave is sampled at positions (D1′, D2′, . . . ) of the movable mirror set on the basis of a wavelength λ0 of a He—Ne laser, by using the over-sampled intensity signals (I1, I2, . . . ), for calculating the spectrum with the interferogram based on the interpolated intensity signals (I1′, I2′, . . . ) and for an efficient use of conventional stored spectrum data which are measured based on the wavelength λ0.

公开(公告)号：US10288483B2

公开(公告)日：2019-05-14

申请号：US15651935

申请日：2017-07-17

Applicant: Cymer, LLC

Inventor： Brian Edward King

IPC: G01B9/02 ,  G01J3/45 ,  G01J3/26

Abstract: A method is performed for estimating the optical spectrum of a light beam. The method includes: projecting the light beam onto distinct spatial areas of a spectrometer, wherein each spatial area receives a different filtered version of the optical spectrum; detecting a characteristic of the projected light beam at each of the distinct spatial areas of the spectrometer; receiving a two-dimensional matrix in which each entry of the matrix provides a relationship between one or more spatial areas and each spectral feature, wherein the two-dimensional matrix is related to the input-output relationship of the spectrometer; and estimating the optical spectrum of the light beam based on an analysis that uses both the detected light beam characteristics and the received two-dimensional matrix.

公开(公告)号：US20190072431A1

公开(公告)日：2019-03-07

申请号：US16082616

申请日：2017-03-03

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masaki HIROSE ,  Katsumi SHIBAYAMA ,  Takashi KASAHARA ,  Toshimitsu KAWAI ,  Hiroki OYAMA

IPC: G01J3/26 ,  G01J1/04 ,  G01J3/45 ,  G02F1/21 ,  G01J3/02 ,  G02B26/00

Abstract: A light detection device includes a Fabry-Perot interference filter provided with a light transmitting region on a predetermined line, a light detector disposed on one side with respect to the Fabry-Perot interference filter on the line, a package having an opening positioned on the other side with respect to the Fabry-Perot interference filter on the line, a light transmitting member provided in the package such that the opening is blocked, and a temperature control element having an endothermic region thermally connected to the Fabry-Perot interference filter and the light detector. The endothermic region is positioned on one side with respect to the light detector on the line.

公开(公告)号：US20190056270A1

公开(公告)日：2019-02-21

申请号：US15768548

申请日：2017-03-02

Applicant: CI SYSTEMS (ISRAEL) LTD.

Inventor： Dario CABIB

IPC: G01J3/45 ,  G01J3/427 ,  G01J3/433

CPC classification number: G01J3/45 ,  G01J3/0205 ,  G01J3/26 ,  G01J3/427 ,  G01J3/4338 ,  G01J3/4531 ,  G01J3/4532 ,  G01J2003/425 ,  G02B27/50

Abstract: An interference fringe pattern generator forms an interference fringe pattern from the light rays diffused from a region of an object positioned against a background. A planar array of detector pixels is arranged to capture an image of the interference fringe pattern. A storage medium records information indicative of intensity values of the image of the interference fringe pattern captured by a selected group of pixels of the planar array of detector pixels. The information is recorded as a function of the optical path difference values traversed by the diffused light rays through the interference fringe pattern generator for each of the pixels in the selected group of pixels. A processor determines the spectral characteristics of the object based on the information indicative of the intensity values recorded by the storage medium and the optical path difference values traversed by the diffused light rays.

公开(公告)号：US20190033132A1

公开(公告)日：2019-01-31

申请号：US16151103

申请日：2018-10-03

Applicant: VERIFOOD, LTD.

Inventor： Damian GOLDRING ,  Dror SHARON ,  Guy BRODETZKI ,  Amit RUF ,  Menahem KAPLAN ,  Sagee ROSEN ,  Omer KEILAF ,  Uri KINROT ,  Kai ENGELHARDT ,  Ittai NIR

IPC: G01J3/10 ,  G01N33/02 ,  G01J3/02 ,  G01N21/25 ,  G01J5/10 ,  G01J5/02 ,  G01J3/45 ,  G01J3/36 ,  G01J3/28 ,  G01J3/26 ,  G01J3/12

Abstract: A spectrometer comprises a plurality of isolated optical channels comprising a plurality of isolated optical paths. The isolated optical paths decrease cross-talk among the optical paths and allow the spectrometer to have a decreased length with increased resolution. In many embodiments, the isolated optical paths comprise isolated parallel optical paths that allow the length of the device to be decreased substantially. In many embodiments, each isolated optical path extends from a filter of a filter array, through a lens of a lens array, through a channel of a support array, to a region of a sensor array. Each region of the sensor array comprises a plurality of sensor elements in which a location of the sensor element corresponds to the wavelength of light received based on an angle of light received at the location, the focal length of the lens and the central wavelength of the filter.

公开(公告)号：US10190866B2

公开(公告)日：2019-01-29

申请号：US15679241

申请日：2017-08-17

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Zhongxiao Li

IPC: G01J3/45 ,  G01B9/02 ,  G02F1/1335 ,  G02F1/1339 ,  G02F1/139 ,  G02F1/29

Abstract: The embodiments of the present disclosure relate to a Fabry-Perot cavity, a manufacturing method thereof, an interferometer and a measuring method for wavelength of light. The Fabry-Perot cavity includes two parallel substrates and a liquid crystal layer between the two parallel substrates, and a sealed cavity is defined between the two substrates; wherein the two substrates comprise a first substrate and a second substrate, light could enter through the first substrate and run out from the second substrate via the liquid crystal layer, and a deflection angle of the liquid crystal layer could be changed by applying various voltage between the two substrates.

公开(公告)号：US10184832B2

公开(公告)日：2019-01-22

申请号：US15031786

申请日：2014-10-31

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Katsumi Shibayama ,  Takashi Kasahara ,  Masaki Hirose ,  Toshimitsu Kawai

IPC: G01J3/26 ,  G01J3/02 ,  G01J3/45

Abstract: A spectral sensor includes a Fabry-Perot interference filter which is provided with an opening to pass light transmitted according to a distance between a first mirror and a second mirror along a facing direction; a light detector which has a light reception unit to receive the light having passed through the opening; a wiring substrate on which the light detector is mounted; and a plurality of spacers which support the filter on the wiring substrate, such that a second space continuous with a first space in the opening and including the first space when viewed from the facing direction is formed between the filter and the wiring substrate. The light detector is disposed in the second space. The light reception unit is disposed in a region corresponding to the first space in the second space, when viewed from the facing direction.

公开(公告)号：US10180355B2

公开(公告)日：2019-01-15

申请号：US15375190

申请日：2016-12-12

Applicant: Keyence Corporation

Inventor： Shoma Kuga

IPC: G01N21/00 ,  G01J3/45 ,  G01J3/46 ,  G01B11/00 ,  G01B11/06 ,  G01D5/26 ,  G01J3/52 ,  G01J3/02

Abstract: Provided are a multi-wavelength photoelectric measurement device, a confocal measurement device, an interference measurement device, and a color measurement device capable of measuring the characteristic amount of a measurement object such as the thickness, distance, displacement, or color with high accuracy using multi-wavelength light such as white light. The multi-wavelength photoelectric measurement device includes a laser light source, a light source optical member for concentrating light from the laser light source, a phosphor excited by light concentrated by the light source optical member, an optical fiber unit that includes one or a plurality of optical fibers and the phosphor disposed on a first end, receives light emitted by the phosphor from the first end, and transmits the received light toward a second end, and a head optical member that concentrates light emitted from the second end of the optical fiber unit toward a measurement object.

公开(公告)号：US10175107B2

公开(公告)日：2019-01-08

申请号：US15031780

申请日：2014-10-31

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Katsumi Shibayama ,  Takashi Kasahara ,  Masaki Hirose ,  Toshimitsu Kawai

IPC: G01J3/45 ,  G01J3/26 ,  G01J3/02 ,  G01J5/04 ,  G01J5/20 ,  G02B26/00

Abstract: A spectral sensor 1A includes a Fabry-Perot interference filter 10 which has a light transmission region 11; a light detector 3 which detects light having transmitted the light transmission region 11; spacers 4A and 4B which support the Fabry-Perot interference filter 10 in a surrounding region of the light transmission region 11; and a die bond resin 5 which adheres the Fabry-Perot interference filter 10 and the spacers 4A and 4B to each other. The die bond resin 5 has one opening A2 communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region 11.