System method and apparatus for selecting and controlling light source bandwidth
    82.
    再颁专利
    System method and apparatus for selecting and controlling light source bandwidth 有权
    选择和控制光源带宽的系统方法和装置

    公开(公告)号:USRE45249E1

    公开(公告)日:2014-11-18

    申请号:US13778006

    申请日:2013-02-26

    Applicant: Cymer, LLC

    Abstract: The bandwidth selection mechanism includes a first actuator mounted on a second face of a dispersive optical element, the second face being opposite from a reflective face, the first actuator having a first end coupled to a first end block and a second end coupled to a second end block, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block to bend the body of the dispersive optical element along the longitudinal axis of the body and in a first direction normal to the reflective face of the dispersive optical element. The bandwidth selection mechanism also includes a second actuator being operative to apply equal and opposite forces to bend the body along the longitudinal axis of the body, in a second direction perpendicular to the reflective face of the dispersive optical element.

    Abstract translation: 所述带宽选择机构包括安装在分散光学元件的第二面上的第一致动器,所述第二面与反射面相对,所述第一致动器具有联接到第一端块的第一端和耦合到第二端的第二端 第一致动器可操作以对第一端块和第二端块施加相等且相反的力,以沿着主体的纵向轴线并沿垂直于反射面的第一方向弯曲分散光学元件的主体 的色散光学元件。 带宽选择机构还包括第二致动器,其可操作以在垂直于分散光学元件的反射面的第二方向上施加相等且相反的力沿着身体的纵向轴线弯曲身体。

    System method and apparatus for selecting and controlling light source bandwidth
    83.
    发明授权
    System method and apparatus for selecting and controlling light source bandwidth 有权
    选择和控制光源带宽的系统方法和装置

    公开(公告)号:US08144739B2

    公开(公告)日:2012-03-27

    申请号:US12605306

    申请日:2009-10-23

    Abstract: The bandwidth selection mechanism includes a first actuator mounted on a second face of a dispersive optical element, the second face being opposite from a reflective face, the first actuator having a first end coupled to a first end block and a second end coupled to a second end block, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block to bend the body of the dispersive optical element along the longitudinal axis of the body and in a first direction normal to the reflective face of the dispersive optical element. The bandwidth selection mechanism also includes a second actuator being operative to apply equal and opposite forces to bend the body along the longitudinal axis of the body, in a second direction perpendicular to the reflective face of the dispersive optical element.

    Abstract translation: 所述带宽选择机构包括安装在分散光学元件的第二面上的第一致动器,所述第二面与反射面相对,所述第一致动器具有联接到第一端块的第一端和耦合到第二端的第二端 第一致动器可操作以对第一端块和第二端块施加相等且相反的力,以沿着主体的纵向轴线并沿垂直于反射面的第一方向弯曲分散光学元件的主体 的色散光学元件。 带宽选择机构还包括第二致动器,其可操作以在垂直于分散光学元件的反射面的第二方向上施加相等且相反的力沿着身体的纵向轴线弯曲身体。

    Atomic emission spectrometer with background compensation
    85.
    发明授权
    Atomic emission spectrometer with background compensation 失效
    具有背景补偿的原子发射光谱仪

    公开(公告)号:US5087123A

    公开(公告)日:1992-02-11

    申请号:US526779

    申请日:1990-05-17

    Abstract: A method of and a device for multi-element measurement of elements in a sample with correction for background emission. The method starts with atomizing a sample and then exciting the transformed atoms to emit light containing characteristic spectral lines for each element, followed by generating a spectrum of spectral lines characteristic of the elements, followed by measuring the intensity of selected spectral lines falling within a predetermined measuring range without changing their intensity. The next steps are sensing the background emission adjacent the selected spectral lines simultaneously with measuring the intensity of selected spectral lines and determining the concentration of each element from the measured intensity of the corresponding spectral line and sensed background emission.

    Abstract translation: 用于多元素测量样本中的元素的方法和装置,其具有用于背景发射的校正。 该方法开始于对样品进行雾化,然后激发转化的原子以发射含有每个元素的特征谱线的光,随后产生元素特征谱带的频谱,随后测量落在预定的范围内的所选谱线的强度 测量范围而不改变它们的强度。 接下来的步骤是通过测量所选谱线的强度同时测量与所选谱线相邻的背景发射,并从相应光谱线的测量强度和感测到的背景辐射确定每个元素的浓度。

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