公开(公告)号：US20180010988A1

公开(公告)日：2018-01-11

申请号：US15643493

申请日：2017-07-07

Applicant: NATIONAL CHENG KUNG UNIVERSITY

Inventor： Shih-Wen TSENG

IPC: G01N1/31 ,  H01J37/26 ,  H01J37/20

CPC classification number: G01N1/312 ,  G01N1/2813 ,  H01J37/20 ,  H01J37/261

Abstract: The present invention provides a packaging unit for liquid sample loading devices applied in an electron microscope. The liquid sample loading devices may be easily, rapidly, precisely and stably aligned and packaged by an engagement of an upper jig and a bottom jig as well as a first fixing pillar supported in a slide track of the packaging unit. Accordingly, efficiency and a yield of packaging the liquid sample loading devices may be improved. In addition, the packaging unit for the liquid sample loading devices of the present invention may directly package a liquid sample, and thus the liquid sample may maintain its original state.

公开(公告)号：US20170350798A1

公开(公告)日：2017-12-07

申请号：US15646701

申请日：2017-07-11

Applicant: Bridget Carragher ,  Clinton S. Potter ,  Tilak Jain ,  Peter Kahn ,  Peter Wiktor

Inventor： Bridget Carragher ,  Clinton S. Potter ,  Tilak Jain ,  Peter Kahn ,  Peter Wiktor

IPC: G01N1/28 ,  G01N1/42 ,  H01J37/26

CPC classification number: G01N1/28 ,  G01N1/2813 ,  G01N1/42 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/2001 ,  H01J2237/2802

Abstract: The invention provides methods and devices for preparing frozen vitrified samples for transmission electron microscopy. By reducing the volume of sample from microliter scale to picoliter scale, the requirement for blotting of excess fluid is minimized or eliminated.

公开(公告)号：US09837245B2

公开(公告)日：2017-12-05

申请号：US14657234

申请日：2015-03-13

Applicant: Ho Seob Kim ,  Byeng Jin Kim ,  Do Jin Seong

Inventor： Ho Seob Kim ,  Byeng Jin Kim ,  Do Jin Seong

IPC: G21K5/10 ,  H01J37/26 ,  H01J37/20 ,  H01J37/10 ,  H02N2/00 ,  H02N2/02

CPC classification number: H01J37/261 ,  H01J37/10 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/10 ,  H01J2237/20207 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/20264 ,  H01J2237/2602 ,  H02N2/006 ,  H02N2/026

Abstract: Disclosed herein is a micro stage using a piezoelectric element that can be reliably operated even in a vacuum environment. In a particle column requiring a high precision, for example, a microelectronic column, the micro stage can be used as a stage with micro or nano degree precision for alignment of parts of the column, or for moving a sample, and so on.

公开(公告)号：US09818578B2

公开(公告)日：2017-11-14

申请号：US14626234

申请日：2015-02-19

Applicant: PROTOCHIPS, INC.

Inventor： Daniel Stephen Gardiner ,  William Bradford Carpenter ,  John Damiano, Jr. ,  Franklin Stampley Walden, II ,  David P. Nackashi

IPC: G01L7/00 ,  G01N21/03 ,  G01K11/32 ,  H01J37/26 ,  H01J37/16 ,  G01L11/02 ,  H01J37/20 ,  G01L19/04

CPC classification number: H01J37/261 ,  G01K11/32 ,  G01L11/025 ,  G01L19/04 ,  H01J37/16 ,  H01J37/20 ,  H01J37/3178 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2801

Abstract: An apparatus and a method for measuring and monitoring the properties of a fluid, for example, pressure, temperature, and chemical properties, within a sample holder for an electron microscope. The apparatus includes at least one fiber optic sensor used for measuring temperature and/or pressure and/or pH positioned in proximity of the sample.

公开(公告)号：US09818576B2

公开(公告)日：2017-11-14

申请号：US15022436

申请日：2014-10-31

Applicant: Hitachi High-Technologies Corporation

Inventor： Takashi Kubo ,  Hiroyuki Kobayashi

IPC: H01J37/22 ,  H01J37/26 ,  H01J37/10

CPC classification number: H01J37/222 ,  H01J37/10 ,  H01J37/22 ,  H01J37/261 ,  H01J37/263 ,  H01J2237/045 ,  H01J2237/103 ,  H01J2237/221 ,  H01J2237/248 ,  H01J2237/2602

Abstract: To improve the workability of the task of adjusting the position of a limit field diaphragm. An electron microscope provided with an image-capturing means for capturing an image of an observation visual field prior to insertion of a limit field diaphragm as a map image, a recording means for recording the map image, an extraction means for capturing an image of the observation visual field after insertion of the limit field diaphragm and extracting the outline of the diaphragm, a drawing means for drawing the outline on the map image, and a display means for displaying the image drawn by the drawing means.

公开(公告)号：US20170250054A1

公开(公告)日：2017-08-31

申请号：US15440327

申请日：2017-02-23

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Motohiro TAKAHASHI ,  Yoshimasa FUKUSHIMA ,  Katsunori ONUKI ,  Tetsuya NIIBORI

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/16 ,  H01J37/261 ,  H01J2237/0216

Abstract: There is proposed a column supporting structure that includes a viscoelastic sheet, a supporting plate which holds the viscoelastic sheet, and a fixation portion which connects the supporting plate to each lens barrel. The viscoelastic sheet is disposed to extend in a plane perpendicular to one lens barrel or the other lens barrel.

公开(公告)号：US20170229276A1

公开(公告)日：2017-08-10

申请号：US15503571

申请日：2015-08-14

Applicant: Max-Planck-Gesellschaft Zur Foerderung der Wissenschaften e. V.

Inventor： Julian HIRSCHT

IPC: H01J37/02 ,  H01J37/248 ,  H01J37/073 ,  H01J37/26

CPC classification number: H01J37/023 ,  H01J37/065 ,  H01J37/073 ,  H01J37/248 ,  H01J37/26 ,  H01J37/261 ,  H01J37/295 ,  H01J2237/06333 ,  H01J2237/06341 ,  H01J2237/16

Abstract: A high voltage feedthrough assembly (100) for providing an electric potential in a vacuum environment comprises a flange connector (10) being adapted for a connection with a vacuum vessel (201), wherein the flange connector (10) has an inner side (11) facing to the vacuum vessel (201) and an outer side (12) facing to an environment of the vacuum vessel 201, a vacuumtight insulator tube (20) having a longitudinal extension with a first end (21) facing to the flange connector (10) and a second end (22) being adapted for projecting into the vacuum vessel (201), and an electrode device (30) coupled to the second end (22) of the insulator tube (20), wherein the electrode device (30) has a front electrode (31), including a photocathode or a field emitter tip and facing to the vacuum vessel (201) and a cable adapter (32) for receiving a high-voltage cable (214), wherein a flexible tube connector (40) is provided for a vacuum-tight coupling of the insulator tube (20) with the flange connector (10), and a manipulator device (50) is connected with the insulator tube (20) for adjusting a geometrical arrangement of the insulator tube (20) relative to the flange connector (10). Furthermore, an electron diffraction or imaging apparatus (transmission electron microscope, TEM) 200 for static and/or time-resolved diffraction, including (nano-) crystallography, and real space imaging for structural investigations including the high voltage feedthrough assembly (100) and a method of manipulating an electrode device (30) in a vacuum environment are described.

公开(公告)号：US09691587B2

公开(公告)日：2017-06-27

申请号：US14319071

申请日：2014-06-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd

Inventor： Shiang-Bau Wang

IPC: H01L21/02 ,  H01L21/311 ,  H01J37/26 ,  H01L21/66

CPC classification number: H01J37/261 ,  H01J37/3178 ,  H01L22/12 ,  H01L22/30

Abstract: A method for forming a dimension measurement apparatus calibration standard over a substrate is provided. The method includes forming strip structures over the substrate. The method includes depositing a calibration material layer over the substrate and the strip structures. The calibration material layer and the strip structures are made of different materials. The method includes removing the calibration material layer over top surfaces of the strip structures to expose the strip structures. The method includes removing the strip structures. The calibration material layer remaining over sidewalls of the strip structures forms linear calibration structures.

公开(公告)号：US09601305B2

公开(公告)日：2017-03-21

申请号：US14538332

申请日：2014-11-11

Applicant: Howard Hughes Medical Institute

Inventor： John H. Price ,  Dravida Bock

IPC: H01J37/20 ,  G01N1/28 ,  H01J37/26 ,  H01J37/02 ,  H01J37/18 ,  G01N35/00 ,  G01N1/32

CPC classification number: H01J37/20 ,  G01N1/32 ,  G01N35/00732 ,  H01J37/023 ,  H01J37/185 ,  H01J37/261 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/20278 ,  H01J2237/20285 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/26 ,  H01J2237/2602

Abstract: An electron microscope specimen sample holder including a thin sheet base member with a first surface and an opposing second surface, the first surface defining a seat and support surface for a specimen holding film held by the sample holder, the base member including an aperture through the second surface exposing the holding film held by the sample holder, and including a grip engagement zone defined at least on part of the first surface arranged to engage a gripping device, and wherein at least one of the first or second surface has machine readable structures formed thereon arranged in patterns embodying data that defines at least one predetermined characteristic of the sample holder.

公开(公告)号：US09595419B1

公开(公告)日：2017-03-14

申请号：US14522563

申请日：2014-10-23

Applicant: Multibeam Corporation

Inventor： Kevin M. Monahan ,  Michael C. Smayling ,  Theodore A. Prescop ,  David K. Lam

IPC: H01J37/22 ,  H01J37/26

CPC classification number: H01J37/3045 ,  G03F1/42 ,  G03F1/86 ,  G03F9/7076 ,  G03F9/7084 ,  H01J37/222 ,  H01J37/261 ,  H01J37/265 ,  H01J37/3005 ,  H01J37/3177 ,  H01J2237/063 ,  H01J2237/2611 ,  H01J2237/2826 ,  H01J2237/30444 ,  H01J2237/31762 ,  H01J2237/31764 ,  H01J2237/31774

Abstract: The present application discloses methods, systems and devices for using charged particle beam tools to pattern and inspect a substrate. The inventors have discovered that it is highly advantageous to use patterns generated using the Hadamard transform as alignment and registration marks (Hadamard targets) for multiple-column charged particle beam lithography and inspection tools. Further, superior substrate alignment and layer-to-layer pattern registration accuracy can be achieved using Hadamard targets patterned in edge-proximal portions of the substrate that are typically stripped bare of resist prior to lithography, in addition to Hadamard targets patterned in inner substrate portions. High-order Hadamard targets can also be patterned and imaged to obtain superior column performance metrics for applications such as super-rapid beam calibration DOE, column matching, and column performance tracking. Superior alignment and registration, and column parameter optimization, allow significant yield gains.

Abstract translation: 本申请公开了使用带电粒子束工具来图案化和检查衬底的方法，系统和装置。 本发明人已经发现使用Hadamard变换产生的图案作为用于多列带电粒子束光刻和检查工具的对准和对准标记（Hadamard靶）是非常有利的。 此外，除了在内部衬底部分中图案化的Hadamard靶之外，还可以使用在光刻之前通常剥离光刻胶的基板的边缘近端部分图案化的Hadamard靶，从而实现优异的衬底对准和层间图案配准精度 。 高阶Hadamard靶也可以进行图案化和成像，以获得诸如超快速光束校准DOE，色谱柱匹配和色谱柱性能跟踪等应用的卓越色谱柱性能指标。 优异的对齐和注册以及列参数优化，可显着提高收益。