SINE-COSINE OPTICAL FREQUENCY ENCODER DEVICES BASED ON OPTICAL POLARIZATION PROPERTIES

    公开(公告)号:US20180372517A1

    公开(公告)日:2018-12-27

    申请号:US15975757

    申请日:2018-05-09

    Abstract: Optical polarization-based devices and techniques are provided to enable low cost construction and easy signal processing to measure the light frequency via measurements of signals associated with a delay between the two orthogonal polarizations after passing through a DGD element and the retardation value of the DGD element without directly measuring the optical frequency. The optical detection may be designed in various configurations. In particular, for example, the optical detection may split the optical output of the DGD into two optical beams with two different optical detectors so that the final frequency information can be deducted into a pair of sine and cosine functions, such as a pair of sine and cosine functions of measured optical signal levels and the retardation value of the DGD element.

    Rotating-element spectroscopic ellipsometer and method for measurement precision prediction of rotating-element spectroscopic ellipsometer, recording medium storing program for executing the same, and computer program stored in medium for executing the same
    89.
    发明授权
    Rotating-element spectroscopic ellipsometer and method for measurement precision prediction of rotating-element spectroscopic ellipsometer, recording medium storing program for executing the same, and computer program stored in medium for executing the same 有权
    旋转元件分光椭偏仪和旋转元件分光椭偏仪的测量精度预测方法,用于执行旋转元件分光椭偏仪的记录介质存储程序和存储在用于执行该程序的介质中的计算机程序

    公开(公告)号:US09581498B2

    公开(公告)日:2017-02-28

    申请号:US14969096

    申请日:2015-12-15

    CPC classification number: G01J3/447 G01J4/04 G01N21/211 G01N2021/213

    Abstract: Provided are a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same, and more particularly, a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer capable of calculating the measurement precision of the rotating-element spectroscopic ellipsometer based on a theoretical equation on standard deviations of ellipsometric parameters for a sample, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same.

    Abstract translation: 本发明提供了一种旋转元件分光椭偏仪和旋转元件分光椭偏仪的精度预测方法,用于执行旋转元件分光椭偏仪的记录介质存储程序以及存储在其执行介质的计算机程序, 旋转元件分光椭偏仪和用于测量旋转元件分光椭偏仪的精度预测的方法,其能够基于关于样品的椭偏参数的标准偏差的理论等式计算旋转元件分光椭偏仪的测量精度,记录 用于执行该存储程序的介质存储程序和存储在用于执行该程序的介质中的计算机程序。

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