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公开(公告)号：US20150332891A1
公开(公告)日：2015-11-19
申请号：US14704453
申请日：2015-05-05
Applicant: MART PETRUS MARIA BIERHOFF , BART BUIJSSE , CORNELIS SANDER KOOIJMAN , HUGO VAN LEEUWEN , HENDRIK GEZINUS TAPPEL , COLIN AUGUST SANFORD , SANDER RICHARD MARIE STOKS , STEVEN BERGER , BEN JACOBUS MARIE BORMANS , KOEN ARNOLDUS WILHELMUS DRIESSEN , JOHANNES ANTONIUS HENDRICUS W. G. PERSOON
Inventor： MART PETRUS MARIA BIERHOFF , BART BUIJSSE , CORNELIS SANDER KOOIJMAN , HUGO VAN LEEUWEN , HENDRIK GEZINUS TAPPEL , COLIN AUGUST SANFORD , SANDER RICHARD MARIE STOKS , STEVEN BERGER , BEN JACOBUS MARIE BORMANS , KOEN ARNOLDUS WILHELMUS DRIESSEN , JOHANNES ANTONIUS HENDRICUS W. G. PERSOON
CPC classification number: H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.
Abstract translation: 用于操作扫描电子显微镜装置的用户界面，其将较低倍率参考图像和较高放大倍率的图像组合在同一屏幕上，使得不被用于电子显微镜的高放大倍数的用户容易地确定样品在哪里更容易 正在获取图像并了解该图像与其余样本之间的关系。 此外，其他屏幕（例如存档屏幕和设置屏幕）允许用户比较保存的图像并分别调整系统的设置。
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2.发明授权Method for centering an optical element in a TEM comprising a contrast enhancing element 有权在包括对比度增强元件的TEM中对准光学元件的方法公开(公告)号：US08633456B2
公开(公告)日：2014-01-21
申请号：US13367251
申请日：2012-02-06
Applicant: Bart Buijsse , Peter Christiaan Tiemeijer , Martinus Petrus Maria Bierhoff
CPC classification number: H01J37/26 , H01J37/265 , H01J2237/1501 , H01J2237/2614
Abstract: A method for adjusting or aligning one or more optical elements in a Transmission Electron Microscope (TEM) is disclosed. The TEM is equipped with an objective lens for guiding a beam of electrons to a sample, a diffraction plane in which at least a beam of unscattered electrons is focused and a structure to enhance the Contrast Transfer Function (CTF) which is situated in the diffraction plane or an image thereof.
Abstract translation: 公开了一种用于在透射电子显微镜（TEM）中调整或对准一个或多个光学元件的方法。 TEM配备有用于将电子束引导到样品的物镜，其中至少一束不散射电子被聚焦的衍射平面和用于增强位于衍射中的对比度传递函数（CTF）的结构 平面或其图像。
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公开(公告)号：US07456413B2
公开(公告)日：2008-11-25
申请号：US11169274
申请日：2005-06-28
Applicant: Bart Buijsse , Mark Theo Meuwese , Maria Van Wely-Dieleman , Sjoerd Antonius Maria Mentink , Theodorus Hubertus Josephus Bisschops
Inventor： Bart Buijsse , Mark Theo Meuwese , Maria Van Wely-Dieleman , Sjoerd Antonius Maria Mentink , Theodorus Hubertus Josephus Bisschops
IPC: G01F23/00
CPC classification number: H01J37/18 , H01J37/20 , H01J2237/2003 , H01J2237/2605
Abstract: The invention relates to an apparatus for evacuating samples. A sample 4 is hereby placed in a cavity 3 of a sheet 1 with a smooth surface 2. A sole plate 5 Is placed upon this smooth surface 2, whereby the smooth surface 2 and the sole plate 5 placed thereupon together form a vacuum seal. The sole plate 5, upon which a vacuum column 6 is mounted, can be slid across the smooth surface 2. By sliding the sole plate 5 over the cavity 4, the cavity 4 is evacuated in several steps.In an embodiment of the invention, the vacuum column 6 takes the form of an ESEM (Environmental Scanning Electron Microscope). In this way, it is possible to inspect the evacuated sample 4 with the ESEM.
Abstract translation: 本发明涉及抽样样品的装置。 样品4因此被放置在具有光滑表面2的片材1的空腔3中。 将底板5放置在该光滑表面2上，由此将光滑表面2和放置在其上的底板5一起形成真空密封。 其上安装有真空塔6的底板5可以滑过光滑表面2。 通过将底板5滑动在空腔4上方，空腔4以几个步骤排空。 在本发明的一个实施方案中，真空塔6采用ESEM（环境扫描电子显微镜）的形式。 以这种方式，可以用ESEM检查抽空的样品4。
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公开(公告)号：US07301157B2
公开(公告)日：2007-11-27
申请号：US11237475
申请日：2005-09-28
Applicant: Bart Buijsse , Mark Theo Meuwese , Bernardus Jacobus Marie Bormans , Hendrik Nicolaas Slingerland , Hendrik Gezinus Tappel
Inventor： Bart Buijsse , Mark Theo Meuwese , Bernardus Jacobus Marie Bormans , Hendrik Nicolaas Slingerland , Hendrik Gezinus Tappel
IPC: G01F23/00
CPC classification number: H01J37/20 , H01J37/18 , H01J37/226 , H01J37/28 , H01J2237/20214
Abstract: A cluster tool includes multiple tools for microscopic processing of a sample positioned around a rotatable base. A sample holder on the base rotates the sample between the working areas of the tools. A slidable vacuum seal maintains a vacuum in a sample chamber for tools that require a vacuum.
Abstract translation: 集群工具包括用于对可旋转底座周围定位的样品的微观处理的多个工具。 基座上的样品架在工具的工作区域之间旋转样品。 可滑动的真空密封件在需要真空的工具的样品室中保持真空。
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公开(公告)号：US08309921B2
公开(公告)日：2012-11-13
申请号：US13019216
申请日：2011-02-01
Applicant: Martinus Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W. G. Persoon
Inventor： Martinus Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W. G. Persoon
IPC: H01J37/20 , H01J37/252 , H01J37/28
CPC classification number: H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.
Abstract translation: 紧凑型电子显微镜使用具有形成样品所在的真空区域的一部分的壁的可移除的样品保持器。 通过使用可拆卸的样品架来容纳真空，在成像之前需要排空的空气的体积大大减少，并且显微镜可以被快速排空。 在优选实施例中，滑动真空密封允许样品保持器位于电子柱下方，并且样品保持器首先在真空缓冲器下通过以除去样品保持器中的空气。
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Patent Agency Ranking
6.发明申请Method for Centering an Optical Element in a TEM Comprising a Contrast Enhancing Element 有权在包含对比增强元件的TEM中对准光学元件的方法公开(公告)号：US20120199756A1
公开(公告)日：2012-08-09
申请号：US13367251
申请日：2012-02-06
Applicant: Bart Buijsse , Peter Christiaan Tiemeijer , Martinus Petrus Maria Bierhoff
IPC: H01J3/26
CPC classification number: H01J37/26 , H01J37/265 , H01J2237/1501 , H01J2237/2614
Abstract: A method for adjusting or aligning one or more optical elements in a Transmission Electron Microscope (TEM) is disclosed. The TEM is equipped with an objective lens for guiding a beam of electrons to a sample, a diffraction plane in which at least a beam of unscattered electrons is focused and a structure to enhance the Contrast Transfer Function (CTF) which is situated in the diffraction plane or an image thereof.
Abstract translation: 公开了一种用于调整或对准透射电子显微镜（TEM）中的一个或多个光学元件的方法。 TEM配备有用于将电子束引导到样品的物镜，其中至少一束不散射电子被聚焦的衍射平面和用于增强位于衍射中的对比度传递函数（CTF）的结构 平面或其图像。
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公开(公告)号：US20110133083A1
公开(公告)日：2011-06-09
申请号：US13019216
申请日：2011-02-01
Applicant: MART PETRUS MARIA BIERHOFF , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Ben Jacobus Marie Bormans , Steven Berger , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus WILHELMUS Gerardus Persoon
Inventor： MART PETRUS MARIA BIERHOFF , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Ben Jacobus Marie Bormans , Steven Berger , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus WILHELMUS Gerardus Persoon
IPC: G01N23/225
CPC classification number: H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.
Abstract translation: 紧凑型电子显微镜使用具有形成样品所在的真空区域的一部分的壁的可移除的样品保持器。 通过使用可拆卸的样品架来容纳真空，在成像之前需要排空的空气的体积大大减少，并且显微镜可以被快速排空。 在优选实施例中，滑动真空密封允许样品保持器位于电子柱下方，并且样品保持器首先在真空缓冲器下通过以除去样品保持器中的空气。
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公开(公告)号：US20100194874A1
公开(公告)日：2010-08-05
申请号：US12303717
申请日：2007-06-07
Applicant: Mart Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooljman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stocks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W.G. Persoon
Inventor： Mart Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooljman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stocks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W.G. Persoon
IPC: H04N7/18
CPC classification number: H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.
Abstract translation: 用于操作扫描电子显微镜装置的用户界面，其将较低倍率参考图像和较高放大倍率的图像组合在同一屏幕上，使得不被用于电子显微镜的高放大倍数的用户容易地确定样品在哪里更容易 正在获取图像并了解该图像与其余样本之间的关系。 此外，其他屏幕（例如存档屏幕和设置屏幕）允许用户比较保存的图像并分别调整系统的设置。
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公开(公告)号：US20100171037A1
公开(公告)日：2010-07-08
申请号：US12303611
申请日：2007-06-07
Applicant: Mart Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W. G. Persoon
Inventor： Mart Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W. G. Persoon
IPC: H01J37/28
CPC classification number: H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.
Abstract translation: 紧凑型电子显微镜使用具有形成样品所在的真空区域的一部分的壁的可移除的样品保持器。 通过使用可拆卸的样品架来容纳真空，在成像之前需要排空的空气的体积大大减少，并且显微镜可以被快速排空。 在优选实施例中，滑动真空密封允许样品保持器位于电子柱下方，并且样品保持器首先在真空缓冲器下通过以除去样品保持器中的空气。
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公开(公告)号：US07064325B2
公开(公告)日：2006-06-20
申请号：US11111078
申请日：2005-04-21
Applicant: Bart Buijsse , Theodorus Hubertus Josephus Bisschops , Mark Theo Meuwese
IPC: H01J37/147 , H01J37/26
CPC classification number: H01J37/143
Abstract: The invention describes a particle-optical apparatus arranged to focus a beam (1) of electrically charged particles with the aid of two particle-optical lens systems (10, 20). The lens action is achieved by magnetic fields, which fields are generated by permanent-magnetic materials (13, 23). In contrast to magnetic lenses equipped with a coil, it is not easy in the case of lenses equipped with permanent-magnetic material to alter the focusing magnetic field with the aim of altering the optical power. In an apparatus according to the invention, the optical power of the lens systems is altered by altering the energy with which the beam (1) traverses the lens systems (10, 20). This can easily happen by altering the voltage of electrical power supplies (14, 24).
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