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公开(公告)号：US09627174B2
公开(公告)日：2017-04-18
申请号：US14973424
申请日：2015-12-17
Applicant: FEI Company
Inventor： Gregory A. Schwind , N. William Parker
CPC classification number: H01J37/21 , H01J27/205 , H01J37/08 , H01J2237/006 , H01J2237/082 , H01J2237/0827 , H01J2237/31749
Abstract: A high brightness ion source with a gas chamber includes multiple channels, wherein the multiple channels each have a different gas. An electron beam is passed through one of the channels to provide ions of a certain species for processing a sample. The ion species can be rapidly changed by directing the electrons into another channel with a different gas species and processing a sample with ions of a second species. Deflection plates are used to align the electron beam into the gas chamber, thereby allowing the gas species in the focused ion beam to be switched quickly.
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公开(公告)号：US20160104599A1
公开(公告)日：2016-04-14
申请号：US14973424
申请日：2015-12-17
Applicant: FEI Company
Inventor： Gregory A. Schwind , N. William Parker
CPC classification number: H01J37/21 , H01J27/205 , H01J37/08 , H01J2237/006 , H01J2237/082 , H01J2237/0827 , H01J2237/31749
Abstract: A high brightness ion source with a gas chamber includes multiple channels, wherein the multiple channels each have a different gas. An electron beam is passed through one of the channels to provide ions of a certain species for processing a sample. The ion species can be rapidly changed by directing the electrons into another channel with a different gas species and processing a sample with ions of a second species. Deflection plates are used to align the electron beam into the gas chamber, thereby allowing the gas species in the focused ion beam to be switched quickly.
Abstract translation: 具有气室的高亮度离子源包括多个通道，其中多个通道各自具有不同的气体。 电子束通过一个通道以提供某种物质的离子用于处理样品。 可以通过将电子引导到具有不同气体种类的另一个通道并用第二种离子的离子处理样品来快速改变离子种类。 偏转板用于将电子束对准气体室，从而允许聚焦离子束中的气体物质快速切换。
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公开(公告)号：US20160020062A1
公开(公告)日：2016-01-21
申请号：US14334293
申请日：2014-07-17
Applicant: FEI Company
Inventor： N. William Parker , Marcus Straw , Jorge Filevich
CPC classification number: H01J37/12 , H01J37/244 , H01J37/26 , H01J37/261 , H01J2237/12 , H01J2237/24415 , H01J2237/2445 , H01J2237/2602
Abstract: A transmissive lens in a charged particle beam column for detecting X-rays and light is provided. The final lens may include elements that are transmissive for X-rays for EDS imaging and analysis or elements that are transmissive for light for cathodoluminescent (CL) imaging and analysis. The final lens may be constructed and arranged to include elements that are transmissive for both X-rays and light for combined EDS and CL imaging and analysis.
Abstract translation: 提供了用于检测X射线和光的带电粒子束列中的透射透镜。 最终的透镜可以包括对于用于EDS成像和分析的X射线透射的元件或对于用于阴极发光（CL）成像和分析的光透射的元件。 最终的透镜可被构造和布置为包括用于X射线和光的透射的元件以用于组合的EDS和CL成像和分析。
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4.发明授权System and method for simultaneous detection of secondary electrons and light in a charged particle beam system 有权在带电粒子束系统中同时检测二次电子和光的系统和方法公开(公告)号：US09040909B2
公开(公告)日：2015-05-26
申请号：US13681746
申请日：2012-11-20
Applicant: FEI Company
Inventor： N. William Parker , Mark W. Utlaut
IPC: G01N23/00 , G01N23/225 , G01N21/64 , H01J37/22 , H01J37/28
CPC classification number: G01N21/6428 , G01N21/6458 , G01N21/6486 , G01N23/225 , H01J37/228 , H01J37/28 , H01J37/285 , H01J2237/206 , H01J2237/2443 , H01J2237/24455 , H01J2237/2448 , H01J2237/2803 , H01J2237/2857
Abstract: A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (GoIs), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (PoIs) coded for by the GoIs. One goal of biologists is more precise localization of PoIs within cells. The invention is a method and system for enabling more rapid and precise PoI localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels.
Abstract translation: 公开了用于生物样品中荧光标记如荧光蛋白或量子点的成像和定位的方法和系统。 使用重组遗传学技术将“记者”基因插入许多物种已经很成熟。 特别地，绿色荧光蛋白（GFP）及其从蓝色到黄色的遗传修饰的变体易于在感兴趣的基因（GoI）的位点处接合到许多基因组中，其中GFP表达对功能没有明显的影响 的由GoI编码的感兴趣的蛋白质（PoI）。 生物学家的一个目标是更精确地定位细胞内的PoI。 本发明是一种方法和系统，用于使得能够使用带电粒子束对GFP的损伤进行更快速和精确的PoI定位。 提出了用于实现该方法的系统的多个实施例，以及相对不受高统计噪声水平影响的图像处理方法。
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公开(公告)号：US09349564B2
公开(公告)日：2016-05-24
申请号：US14334293
申请日：2014-07-17
Applicant: FEI Company
Inventor： N. William Parker , Marcus Straw , Jorge Filevich
IPC: H01J37/12 , H01J37/26 , H01J37/244
CPC classification number: H01J37/12 , H01J37/244 , H01J37/26 , H01J37/261 , H01J2237/12 , H01J2237/24415 , H01J2237/2445 , H01J2237/2602
Abstract: A transmissive lens in a charged particle beam column for detecting X-rays and light is provided. The final lens may include elements that are transmissive for X-rays for EDS imaging and analysis or elements that are transmissive for light for cathodoluminescent (CL) imaging and analysis. The final lens may be constructed and arranged to include elements that are transmissive for both X-rays and light for combined EDS and CL imaging and analysis.
Abstract translation: 提供了用于检测X射线和光的带电粒子束列中的透射透镜。 最终的透镜可以包括对于用于EDS成像和分析的X射线透射的元件或对于用于阴极发光（CL）成像和分析的光透射的元件。 最终的透镜可被构造和布置为包括用于X射线和光的透射的元件以用于组合的EDS和CL成像和分析。
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Patent Agency Ranking
6.发明申请SYSTEM AND METHOD FOR SIMULTANEOUS DETECTION OF SECONDARY ELECTRONS AND LIGHT IN A CHARGED PARTICLE BEAM SYSTEM 审中-公开用于同时检测充电颗粒束系统中二次电子和光的系统和方法公开(公告)号：US20140131573A1
公开(公告)日：2014-05-15
申请号：US13681746
申请日：2012-11-20
Applicant: FEI COMPANY
Inventor： N. William Parker , Mark W. Utlaut
IPC: G01N23/225
CPC classification number: G01N21/6428 , G01N21/6458 , G01N21/6486 , G01N23/225 , H01J37/228 , H01J37/28 , H01J37/285 , H01J2237/206 , H01J2237/2443 , H01J2237/24455 , H01J2237/2448 , H01J2237/2803 , H01J2237/2857
Abstract: A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (GoIs), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (PoIs) coded for by the GoIs. One goal of biologists is more precise localization of PoIs within cells. The invention is a method and system for enabling more rapid and precise PoI localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels.
Abstract translation: 公开了用于生物样品中荧光标记如荧光蛋白或量子点的成像和定位的方法和系统。 使用重组遗传学技术将“记者”基因插入许多物种已经很成熟。 特别地，绿色荧光蛋白（GFP）及其从蓝色到黄色的遗传修饰的变体易于在感兴趣的基因（GoI）的位点处接合到许多基因组中，其中GFP表达对功能没有明显的影响 的由GoI编码的感兴趣的蛋白质（PoI）。 生物学家的一个目标是更精确地定位细胞内的PoI。 本发明是一种方法和系统，用于使得能够使用带电粒子束对GFP的损伤进行更快速和精确的PoI定位。 提出了用于实现该方法的系统的多个实施例，以及相对不受高统计噪声水平影响的图像处理方法。
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公开(公告)号：US20180190467A1
公开(公告)日：2018-07-05
申请号：US15901858
申请日：2018-02-21
Applicant: FEI Company
Inventor： N. William Parker , Mark W. Utlaut , Laurens Franz Taemsz Kwakman , Thomas G. Miller
IPC: H01J35/08 , G21K7/00 , G01N23/046
CPC classification number: H01J35/08 , G01N23/046 , G01N2223/204 , G01N2223/419 , G21K7/00 , H01J35/14 , H01J2235/081 , H01J2235/086
Abstract: An x-ray target, a method of using the x-ray target, and a computer program product with instructions for carrying out a method of using the x-ray target. The x-ray target includes a substrate made from a soft x-ray producing material and a high aspect ratio structure made from a hard x-ray producing material. The hard x-ray producing material is embedded in the substrate, formed on the substrate, cantilevered out from the edge of the substrate, or any combination thereof. The high aspect ratio structure comprises a plurality of high aspect ratio structures arranged in one or more grids or arrays, and the high aspect ratio structures in one of the one or more grids or arrays are arranged to form a Hadamard matrix structure.
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公开(公告)号：US09934930B2
公开(公告)日：2018-04-03
申请号：US14645689
申请日：2015-03-12
Applicant: FEI Company
Inventor： N. William Parker , Mark W. Utlaut , Laurens Franz Taemsz Kwakman , Thomas G. Miller
CPC classification number: H01J35/08 , G01N23/046 , G01N2223/204 , G01N2223/419 , G21K7/00 , H01J35/14 , H01J2235/081 , H01J2235/086
Abstract: An x-ray target, a method of using the x-ray target, and a computer program product with instructions for carrying out a method of using the x-ray target. The x-ray target includes a substrate made from a soft x-ray producing material and a high aspect ratio structure made from a hard x-ray producing material. The hard x-ray producing material is embedded in the substrate, formed on the substrate, cantilevered out from the edge of the substrate, or any combination thereof. The high aspect ratio structure comprises a plurality of high aspect ratio structures arranged in one or more grids or arrays, and the high aspect ratio structures in one of the one or more grids or arrays are arranged to form a Hadamard matrix structure.
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公开(公告)号：US09494516B2
公开(公告)日：2016-11-15
申请号：US14721775
申请日：2015-05-26
Applicant: FEI Company
Inventor： N. William Parker , Mark W. Utlaut
IPC: G01N23/00 , G01N21/64 , H01J37/22 , H01J37/28 , G01N23/225 , H01J37/285
CPC classification number: G01N21/6428 , G01N21/6458 , G01N21/6486 , G01N23/225 , H01J37/228 , H01J37/28 , H01J37/285 , H01J2237/206 , H01J2237/2443 , H01J2237/24455 , H01J2237/2448 , H01J2237/2803 , H01J2237/2857
Abstract: A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (GoIs), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (PoIs) coded for by the GoIs. One goal of biologists is more precise localization of PoIs within cells. The invention is a method and system for enabling more rapid and precise PoI localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels.
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10.发明申请FUNCTIONALIZED GRIDS FOR LOCATING AND IMAGING BIOLOGICAL SPECIMENS AND METHODS OF USING THE SAME 审中-公开用于定位和成像生物样本的功能性网格及其使用方法公开(公告)号：US20160032281A1
公开(公告)日：2016-02-04
申请号：US14449088
申请日：2014-07-31
Applicant: FEI Company
Inventor： Mark Utlaut , N. William Parker
CPC classification number: C12N15/1065 , B01J2219/00605 , B01J2219/00623 , B01J2219/00722 , C12Q1/6806 , H01J37/20 , H01J2237/2004 , H01J2237/2802
Abstract: A functionalized specimen support for use in charged particle microscopy is provided that includes a specimen support surface configured to support specimens during an interrogation of the specimens with a charged particle microscope, the specimen support surface having functionalized sites, each functionalized site configured to maintain position of a portion of one of the specimens at the functionalized site by way of attachment, attraction, or a combination thereof.
Abstract translation: 提供了一种用于带电粒子显微镜的功能化样品支架，其包括：样品支撑表面，其构造成在带有电荷的微粒显微镜的询问期间支撑样品，所述样品支撑表面具有功能化位点，每个功能化位置被配置为保持位置 通过附着，吸引或其组合在功能化位点处的一个样品的一部分。
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