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1.发明授权公开(公告)号：US10431416B2
公开(公告)日：2019-10-01
申请号：US15753685
申请日：2015-08-21
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Yusuke Ominami , Akiko Hisada
IPC: H01J37/16 , H01J37/20 , H01J37/28 , H01J37/244
Abstract: In order to observe a water-containing sample with excellent convenience under an air atmosphere or a gas atmosphere, or under a desired pressure, in the present invention, there is provided an observation support unit for observation by irradiating the sample disposed in a non-vacuum space separated by a diaphragm from an inner space of a charged particle optical lens barrel that generates a charged particle beam, with the charged particle beam. The observation support unit includes a main body portion for covering a hole portion that forms an observation region where the sample is observed, and the sample, and the observation support unit is directly mounted between the sample and the diaphragm, that is, on the sample.
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公开(公告)号：US10157724B2
公开(公告)日：2018-12-18
申请号：US15855370
申请日：2017-12-27
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Shinsuke Kawanishi , Yusuke Ominami
Abstract: In a scanning electron microscope, an atmospheric pressure space having a specimen arranged therein and a vacuum space arranged on a charged particle optical system side are isolated from each other using an isolation film that transmits charged particle beams. The scanning electron microscope has an electron optical lens barrel, a chassis, and an isolation film. The electron optical lens barrel radiates a primary electron beam onto a specimen. The chassis is directly bonded to the inside of the electron optical lens barrel and has an inside that turns into a lower vacuum state than the inside of the electron optical lens barrel at least during the radiation of the primary electron beam. The isolation film isolates a space in an atmospheric pressure atmosphere having a specimen mounted therein and the inside of the chassis in a lower vacuum state, and transmits the primary charged particle beam.
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公开(公告)号：US09741526B2
公开(公告)日：2017-08-22
申请号：US14912521
申请日：2014-03-10
Applicant: Hitachi High-Technologies Corporation
Inventor： Yusuke Ominami , Masako Nishimura , Shinsuke Kawanishi , Hiroyuki Suzuki
CPC classification number: H01J37/16 , H01J37/18 , H01J37/20 , H01J37/263 , H01J37/28 , H01J2237/164 , H01J2237/202 , H01J2237/28
Abstract: Disclosed is a charged particle beam apparatus wherein a partitioning film capable of transmitting a charged particle beam is provided between a charged particle optical system and a sample, said charged particle beam apparatus eliminating a contact between the sample and the partitioning film even in the cases where the sample has recesses and protrusions. On the basis of detection signals or an image generated on the basis of the detection signals, a distance between a sample and a partitioning film is monitored, said detection signals being outputted from a detector that detects secondary charged particles discharged from the sample due to irradiation of a primary charged particle beam.
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公开(公告)号：US08921786B2
公开(公告)日：2014-12-30
申请号：US14191769
申请日：2014-02-27
Applicant: Hitachi High-Technologies Corporation
Inventor： Yusuke Ominami , Sukehiro Ito , Tomohisa Ohtaki
CPC classification number: H01J37/18 , H01J37/16 , H01J37/185 , H01J37/20 , H01J37/244 , H01J37/28 , H01J2237/16 , H01J2237/164 , H01J2237/1825 , H01J2237/2007 , H01J2237/2608
Abstract: Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant changes to the configuration of a conventional high vacuum charged particle microscope. In a charged particle beam apparatus configured such that a thin film (10) is used to separate a vacuum environment and an air atmosphere (or a gas environment), an attachment (121) capable of holding the thin film (10) and whose interior can be maintained at an air atmosphere or a gas environment is inserted into a vacuum chamber (7) of a high vacuum charged particle microscope. The attachment (121) is vacuum-sealed and fixed to a vacuum partition of the vacuum sample chamber. Image quality is further improved by replacing the atmosphere in the attachment with helium or a light-elemental gas that has a lower mass than atmospheric gases such as nitrogen or water vapor.
Abstract translation: 提供一种能够在空气气氛或气体环境中观察观察目标样品的带电粒子束装置或带电粒子显微镜，而不会对传统的高真空带电粒子显微镜的构造进行显着变化。 在构成为使用薄膜（10）分离真空环境和空气气氛（或气体环境）的带电粒子束装置中，能够保持薄膜（10）的附件（121），其内部 可以在空气气氛中保持，或者将气体环境插入到高真空带电粒子显微镜的真空室（7）中。 附件（121）被真空密封并固定到真空样品室的真空隔板。 通过用氦气或具有比大气气体如氮气或水蒸气更低的质量的轻质气体代替附件中的气氛来进一步改善图像质量。
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公开(公告)号：US09633817B2
公开(公告)日：2017-04-25
申请号：US14911681
申请日：2014-03-10
Applicant: Hitachi High-Technologies Corporation
Inventor： Shinsuke Kawanishi , Yusuke Ominami , Hiroyuki Suzuki , Masahiko Ajima
CPC classification number: H01J37/20 , G01M3/02 , H01J37/16 , H01J37/18 , H01J37/26 , H01J37/28 , H01J2237/188 , H01J2237/2002 , H01J2237/2006 , H01J2237/2605 , H01J2237/2608 , H01J2237/2802
Abstract: Conventional devices have been difficult to use due to insufficient consideration being given to factors such as the cost necessary for diaphragm replacement and the convenience of the work. In the present invention, a diaphragm mounting member installed in a charged particle beam device for radiating a primary charged particle beam through a diaphragm separating a vacuum space and an atmospheric pressure space onto a sample placed in the atmospheric pressure space is provided with a diaphragm installation portion to which a TEM membrane is mounted and a casing fixing portion mounted on a casing of the charged particle beam device. The diaphragm installation portion has a positioning structure for positioning a platform on which the diaphragm is held.
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Patent Agency Ranking
6.发明授权公开(公告)号：US09508527B2
公开(公告)日：2016-11-29
申请号：US14646159
申请日：2013-11-26
Applicant: Hitachi High-Technologies Corporation
Inventor： Yusuke Ominami , Takashi Ohshima , Sukehiro Ito
CPC classification number: H01J37/16 , H01J37/18 , H01J37/20 , H01J37/228 , H01J37/244 , H01J37/28 , H01J2237/2003 , H01J2237/2004 , H01J2237/2006 , H01J2237/2007 , H01J2237/201 , H01J2237/20235 , H01J2237/2445 , H01J2237/24455 , H01J2237/24475 , H01J2237/2608 , H01J2237/2801
Abstract: This charged particle beam device irradiates a primary charged particle beam generated from a charged particle microscope onto a sample arranged on a light-emitting member that makes up at least a part of a sample base, and, in addition to obtaining charged particle microscope images by the light-emitting member detecting charged particles transmitted through or scattered inside the sample, obtains optical microscope images by means of an optical microscope while the sample is still arranged on the sample platform.
Abstract translation: 该带电粒子束装置将由带电粒子显微镜产生的初级带电粒子束照射到构成至少一部分试样基底的发光部件上的试样上，除了通过以下方式获得带电粒子显微镜图像 检测通过或散射在样品内的带电粒子的发光部件在样品仍然配置在样品平台上的同时通过光学显微镜获得光学显微镜图像。
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公开(公告)号：US09362083B2
公开(公告)日：2016-06-07
申请号：US14420942
申请日：2013-07-08
Applicant: Hitachi High-Technologies Corporation
Inventor： Yusuke Ominami , Shinsuke Kawanishi , Hiroyuki Suzuki , Kohtaro Hosoya , Masanari Furiki
CPC classification number: H01J37/18 , H01J37/16 , H01J37/20 , H01J37/261 , H01J37/28 , H01J2237/1825 , H01J2237/2448 , H01J2237/2602 , H01J2237/2605
Abstract: There is provided a charged particle beam apparatus having the function of permitting observation of a sample in a gas atmosphere or in a liquid state, the apparatus being intended to let a dry sample be observed as it is getting saturated with an introduced liquid and to prevent a charged particle beam from getting scattered by an unwanted liquid introduced between a diaphragm and the sample. This invention provides a structure including an inlet-outlet part (300) that brings in and out a desired liquid or gas in the direction of the underside or the side of the sample (6), the structure being arranged so that the sample (6) is irradiated with a primary charged particle beam while the sample (6) and the diaphragm (10) are kept out of contact with each other.
Abstract translation: 提供了具有允许在气体气氛或液体状态下观察样品的功能的带电粒子束装置，该装置旨在使干燥的样品在被引入的液体饱和时被观察，并且防止 带电粒子束由于在膜片和样品之间引入的不需要的液体而被散射。 本发明提供了一种结构，其包括入口 - 出口部分（300），该入口 - 出口部分（300）沿着样品（6）的下侧或侧面的方向引入和排出所需的液体或气体，该结构被布置成使得样品 ）在样品（6）和隔膜（10）彼此不接触的同时用初级带电粒子束照射。
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公开(公告)号：US09263232B2
公开(公告)日：2016-02-16
申请号：US14395263
申请日：2013-04-11
Applicant: Hitachi High-Technologies Corporation
Inventor： Yusuke Ominami , Shinsuke Kawanishi , Tomohisa Ohtaki , Masahiko Ajima , Sukehiro Ito
CPC classification number: H01J37/261 , H01J37/09 , H01J37/10 , H01J37/147 , H01J37/16 , H01J37/18 , H01J37/28 , H01J2237/0245 , H01J2237/043 , H01J2237/063 , H01J2237/10 , H01J2237/162 , H01J2237/164 , H01J2237/2003 , H01J2237/2448 , H01J2237/2602 , H01J2237/2605
Abstract: A charged particle beam device (1) includes a charged particle optical lens barrel (10), a support housing (20) equipped with the charged particle optical lens barrel (10) thereon, and an insertion housing (30) inserted in the support housing (20). A first aperture member (15) is disposed in the vicinity of the center of the magnetic field of an objective lens, and a second aperture member (15) is disposed so as to externally close an opening part provided at the upper side of the insertion housing (30). Further, when a primary charged particle beam (12) is irradiated to a sample (60) arranged under the lower side of the second aperture member (31), secondary charged particles thus emitted are detected by a detector (16).
Abstract translation: 带电粒子束装置（1）包括带电粒子光学透镜镜筒（10），在其上装有带电粒子光学透镜镜筒（10）的支撑壳体（20）和插入支撑壳体 （20）。 第一孔径构件（15）设置在物镜的磁场的中心附近，并且第二孔径构件（15）设置成外部封闭设置在插入件的上侧的开口部分 住房（30）。 此外，当将初级带电粒子束（12）照射到布置在第二孔径构件（31）的下侧下方的样品（60）时，由检测器（16）检测如此发射的二次带电粒子。
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公开(公告)号：USD748706S1
公开(公告)日：2016-02-02
申请号：US29511491
申请日：2014-12-11
Applicant: Hitachi High-Technologies Corporation
Designer： Yusuke Ominami , Shinsuke Kawanishi
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10.发明授权Charged particle beam device, position adjusting method for diaphragm, and diaphragm position adjusting jig 有权带电粒子束装置，隔膜位置调整方法和隔膜位置调整夹具公开(公告)号：US09251996B2
公开(公告)日：2016-02-02
申请号：US14431061
申请日：2013-09-25
Applicant: Hitachi High-Technologies Corporation
Inventor： Shinsuke Kawanishi , Yusuke Ominami , Masahiko Ajima , Hiroyuki Suzuki
CPC classification number: H01J37/20 , H01J37/16 , H01J37/18 , H01J2237/164 , H01J2237/2608
Abstract: In a charged particle beam device that performs observation of a sample under a gas environment in atmospheric pressure or pressure substantially equal to the atmospheric pressure, a diaphragm that separates an atmospheric pressure space, in which the sample is placed, and a vacuum space in an interior of an electron optical lens barrel is made very thin in order to allow an electron beam to transmit therethrough and damaged with a high possibility. Although at the time of replacing the diaphragm, it is necessary to adjust a position of a diaphragm, it is impossible to easily perform the adjustment of the position of the diaphragm by a conventional method. In a charged particle beam device with a configuration in which a thin film that separates a vacuum environment and an atmospheric environment or a gas environment is employed, a detachable diaphragm that partitions a space, in which a sample is placed, in such a manner that pressure in the space in which the sample is placed is maintained at a level larger than pressure in an interior of a housing, and that allows transmission or passage of a primary charged particle beam therethrough, and a movable member that can move the diaphragm in a state where the pressure in the space, in which the sample is placed, and the pressure in the interior of the housing are maintained as they are, are provided.
Abstract translation: 在大气压或基本上等于大气压的气体环境下对样品进行观察的带电粒子束装置中，分离放置样品的大气压力空间的膜片和 电子光学镜筒的内部被制成非常薄，以便允许电子束透射并且以很高的可能性被损坏。 虽然在更换隔膜时，需要调节隔膜的位置，但是不可能通过常规方法容易地进行隔膜位置的调节。 在采用分离真空环境和大气环境或气体环境的薄膜的结构的带电粒子束装置中，可以将放置样品的空间分隔开的可拆卸隔膜， 放置样品的空间中的压力保持在比壳体内部的压力大的水平面上，并且允许一次带电粒子束通过其的传播或通过;以及可移动膜片的可动件， 提供其中放置样品的空间中的压力以及壳体内部的压力原样保持的状态。
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