公开(公告)号：US09373506B2

公开(公告)日：2016-06-21

申请号：US14467153

申请日：2014-08-25

Applicant: YOKOGAWA ELECTRIC CORPORATION ,  WASEDA UNIVERSITY

Inventor： Yukihiro Shintani ,  Toshiyuki Saruya ,  Hiroshi Kawarada

IPC: H01L29/15 ,  H01L21/04 ,  C23C16/27 ,  C23C16/56 ,  G01N27/414 ,  H01L21/3065 ,  H01L29/66

CPC classification number: H01L21/042 ,  C23C16/27 ,  C23C16/56 ,  G01N27/4145 ,  H01L21/3065 ,  H01L29/66045

Abstract: A method for treating a surface of a diamond thin film according to one aspect of the present invention performs one of a first substitution process for substituting part of hydrogen-terminals of a diamond thin film with fluorine-terminals in the absence of a fluorocarbon deposition on the surface of diamond thin film and a second substitution process for substituting part of hydrogen-terminals of a diamond thin film with fluorine-terminals in the presence of the fluorocarbon deposition on the surface of diamond thin film based on required surface properties of the diamond thin film.

Abstract translation: 根据本发明的一个方面的用于处理金刚石薄膜的表面的方法，在不存在碳氟化合物沉积的情况下进行用氟端子取代金刚石薄膜的一部分氢端子的第一取代过程 基于金刚石薄片的所需表面性质，在金刚石薄膜的表面上，在金刚石薄膜的表面上，在金刚石薄膜的表面上存在金刚石薄膜的表面和第二取代过程，用于在氟碳沉积的存在下用氟端子取代金刚石薄膜的一部分氢端子 电影。

公开(公告)号：US20250076113A1

公开(公告)日：2025-03-06

申请号：US18815266

申请日：2024-08-26

Applicant: Yokogawa Electric Corporation

Inventor： Risa Hara ,  Toshiyuki Saruya ,  Kodai Murayama ,  Takeaki Ishii

IPC: G01J3/02

Abstract: A spectroscopic analysis device (1) according to the present disclosure includes an irradiator (10) configured to irradiate irradiation light on an object to be measured, a light receiver (40) configured to receive reflected light based on the irradiation light from the object to be measured, and a controller (80) configured to analyze, based on the reflected light, an optical property of the object to be measured. The controller (80) is configured to acquire environment information on a measurement environment, including an observation window (W) that guides the irradiation light to the object to be measured, and to correct a parameter indicating the optical property according to the environment information.

公开(公告)号：US11940326B2

公开(公告)日：2024-03-26

申请号：US17406653

申请日：2021-08-19

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Kodai Murayama ,  Toshiyuki Saruya ,  Fumie Watanabe ,  Risa Hara

IPC: G01J3/42 ,  G01J3/02 ,  G01N21/31 ,  G01N21/359

CPC classification number: G01J3/42 ,  G01J3/0218 ,  G01N21/359 ,  G01N2021/3155

Abstract: A spectroscopic analysis device includes: a film that contacts a sample subject to spectroscopic analysis; a first irradiator that irradiates a first irradiation light having transition energy to decompose attached material attached to a boundary surface of the film; and an optical waveguide that transmits the first irradiation light irradiated from the first irradiator. A first evanescent wave, based on the first irradiation light, is generated on a front surface of the optical waveguide, and is then projected on an attached region of the attached material.

公开(公告)号：US12050128B2

公开(公告)日：2024-07-30

申请号：US17755550

申请日：2020-10-20

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Kodai Murayama ,  Toshiyuki Saruya ,  Fumie Watanabe ,  Risa Hara

IPC: G01J3/10 ,  G01J3/02 ,  G01N21/65 ,  G01J3/28

CPC classification number: G01J3/108 ,  G01J3/0294 ,  G01N21/658 ,  G01J3/28 ,  G01J2003/2879

Abstract: A spectroscopic analysis device (1) according to the present disclosure includes a controller (40) that acquires refractive index information on a sample (S) based on information on a first spectroscopic spectrum in a first wavelength band in which only a resonance spectrum of surface plasmon occurs within a spectroscopic spectrum, determines, based on the acquired refractive index information, an incidence angle of irradiation light (L1) irradiated by an irradiator (10) with respect to a membrane (M) such that the peak wavelength of the resonance spectrum and the peak wavelength of an absorption spectrum of the sample (S) match in a second spectroscopic spectrum in a second wavelength band in which the resonance spectrum and the absorption spectrum occur within the spectroscopic spectrum, and analyzes the state of the sample (S) from information on the second spectroscopic spectrum obtained based on the determined incidence angle.

公开(公告)号：US20220065697A1

公开(公告)日：2022-03-03

申请号：US17406653

申请日：2021-08-19

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Kodai Murayama ,  Toshiyuki Saruya ,  Fumie Watanabe ,  Risa Hara

IPC: G01J3/42 ,  G01J3/02 ,  G01N21/359

Abstract: A spectroscopic analysis device includes: a film that contacts a sample subject to spectroscopic analysis; a first irradiator that irradiates a first irradiation light having transition energy to decompose attached material attached to a boundary surface of the film; and an optical waveguide that transmits the first irradiation light irradiated from the first irradiator. A first evanescent wave, based on the first irradiation light, is generated on a front surface of the optical waveguide, and is then projected on an attached region of the attached material.

公开(公告)号：US11821835B2

公开(公告)日：2023-11-21

申请号：US17218961

申请日：2021-03-31

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Risa Hara ,  Toshiyuki Saruya ,  Kodai Murayama ,  Fumie Watanabe

IPC: G01N21/31 ,  G01N21/25

CPC classification number: G01N21/3103 ,  G01N2021/258

Abstract: A spectroscopic analysis device includes a detector and a processor. The detector detects measurement light obtained by irradiating, with irradiation light, a sample that contains a contained substance disposed on a film on which surface plasmons are generated. The measurement light includes information on an optical spectrum of the sample, and the information includes a resonance spectrum of the surface plasmons and an absorption spectrum of the sample. The processor calculates: a peak wavelength in a wavelength band in which the resonance spectrum and the absorption spectrum are generated; a peak absorbance of the contained substance based on an absorption band of the contained substance; and a ratio of the contained substance to the sample based on the peak wavelength and the peak absorbance.

公开(公告)号：US11650155B2

公开(公告)日：2023-05-16

申请号：US17390074

申请日：2021-07-30

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Yuta Suzuki ,  Yuma Kitagawa ,  Toshiyuki Saruya ,  Nobuhiko Kanbara

IPC: G01N21/61

CPC classification number: G01N21/61 ,  G01N2201/068 ,  G01N2201/0612 ,  G01N2201/121

Abstract: A gas analysis system, includes: a light-emitting element that emits a laser light modulated by a predetermined modulation frequency; and a light-receiving element that: receives the laser light that has passed through a measurement target gas; and upon receiving the laser light, outputs a received signal having an N-frequency that is n times the predetermined modulation frequency, wherein n is an integer no less than 2; and a signal processing device that: calculates a third component by removing, from a first component having the N-frequency, a second component, wherein the second component is a component of optical interference noise arising on an optical path of the laser light from the light-emitting element to the light-receiving element and has the same frequency as the first component; and calculates, based on a magnitude of the third component, a concentration of the measurement target gas.

公开(公告)号：US20220034807A1

公开(公告)日：2022-02-03

申请号：US17390074

申请日：2021-07-30

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Yuta Suzuki ,  Yuma Kitagawa ,  Toshiyuki Saruya ,  Nobuhiko Kanbara

IPC: G01N21/61

Abstract: A gas analysis system, includes: a light-emitting element that emits a laser light modulated by a predetermined modulation frequency; and a light-receiving element that: receives the laser light that has passed through a measurement target gas; and upon receiving the laser light, outputs a received signal having an N-frequency that is n times the predetermined modulation frequency, wherein n is an integer no less than 2; and a signal processing device that: calculates a third component by removing, from a first component having the N-frequency, a second component, wherein the second component is a component of optical interference noise arising on an optical path of the laser light from the light-emitting element to the light-receiving element and has the same frequency as the first component; and calculates, based on a magnitude of the third component, a concentration of the measurement target gas.

公开(公告)号：US20210302306A1

公开(公告)日：2021-09-30

申请号：US17218961

申请日：2021-03-31

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Risa Hara ,  Toshiyuki Saruya ,  Kodai Murayama ,  Fumie Watanabe

IPC: G01N21/31

Abstract: A spectroscopic analysis device includes a detector and a processor. The detector detects measurement light obtained by irradiating, with irradiation light, a sample that contains a contained substance disposed on a film on which surface plasmons are generated. The measurement light includes information on an optical spectrum of the sample, and the information includes a resonance spectrum of the surface plasmons and an absorption spectrum of the sample. The processor calculates: a peak wavelength in a wavelength band in which the resonance spectrum and the absorption spectrum are generated; a peak absorbance of the contained substance based on an absorption band of the contained substance; and a ratio of the contained substance to the sample based on the peak wavelength and the peak absorbance.