公开(公告)号：EP2600380A1

公开(公告)日：2013-06-05

申请号：EP12194516.6

申请日：2012-11-28

Applicant: FEI Company

Inventor： Routh, Jr., Brian

IPC: H01J37/08 ,  H01J37/077 ,  H01J37/05 ,  H01J27/16 ,  H01J37/304 ,  H01J37/305

CPC classification number: H01J37/285 ,  G01T1/28 ,  H01J27/16 ,  H01J37/05 ,  H01J37/077 ,  H01J37/08 ,  H01J37/10 ,  H01J37/1471 ,  H01J37/265 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305 ,  H01J37/3056 ,  H01J2237/0817 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/31749

Abstract: A single column inductively coupled plasma source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the ICP to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.

Abstract translation: 具有用户可选择配置的单列电感耦合等离子体源以离子模式工作，用于FIB操作或SEM操作的电子模式。 配备了X射线检测器，能量色散X射线光谱分析是可能的。 用户可以选择性地配置ICP以在离子模式或FIB模式下准备样品，然后基本上翻转开关选择电子模式或SEM模式，并使用EDS或其他类型的分析来分析样品。

公开(公告)号：EP2933821A1

公开(公告)日：2015-10-21

申请号：EP15163360.9

申请日：2015-04-13

Applicant: FEI Company

Inventor： Routh, Jr., Brian ,  Brogden, Valerie ,  Schmidt, Michael

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  G01N1/44 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/08 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/2602 ,  H01J2237/31745

Abstract: A TEM grid provides posts having steps, the steps increasing the number of samples that can be attached to the grid. In some embodiments, each post includes a one sided stair step configuration. A method of extracting multiple samples includes extracting samples and attaching the samples to the different stair steps on the posts.

Abstract translation: TEM网格提供具有步骤的帖子，步骤增加可以附加到网格的样本数量。 在一些实施例中，每个柱包括单面阶梯构造。 提取多个样本的方法包括提取样本并将样本附加到帖子上的不同阶梯步骤。

公开(公告)号：EP3018693A1

公开(公告)日：2016-05-11

申请号：EP15192862.9

申请日：2015-11-04

Applicant: FEI Company

Inventor： Brogden, Valerie ,  Blackwood, Jeff ,  Schmidt, Michael ,  Trivedi, Dhruti ,  Young, Richard ,  Miller, Tom ,  Routh, Jr., Brian ,  Stone, Stacey ,  Templeton, Todd

IPC: H01J37/304 ,  G01N1/28

CPC classification number: H01J37/3023 ,  G01N1/286 ,  G01N2001/2873 ,  H01J37/28 ,  H01J37/285 ,  H01J37/3045 ,  H01J37/31 ,  H01J2237/208 ,  H01J2237/31745

Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.

Abstract translation: 描述了有助于自动提取薄片并将薄片附着到样品网格上以在透射电子显微镜上观察的技术。 本发明的一些实施例涉及使用机器视觉来确定薄片，探针和/或TEM网格的位置，以将探针附着到薄片和将薄片附接到TEM网格。 便于使用机器视觉的技术包括成形探针尖端，使其位置可以被图像识别软件容易地识别。 图像减法技术可用于确定附着于探针的薄片的位置，以将薄片移动到TEM网格以进行附着。 在一些实施例中，参考结构在探头上或薄片上铣削以便于图像识别。

公开(公告)号：EP2600380B1

公开(公告)日：2016-04-20

申请号：EP12194516.6

申请日：2012-11-28

Applicant: FEI Company

Inventor： Routh, Jr., Brian

IPC: H01J37/08 ,  H01J37/077 ,  H01J37/05 ,  H01J27/16 ,  H01J37/304 ,  H01J37/305 ,  H01J37/26 ,  H01J37/30 ,  G01T1/28

CPC classification number: H01J37/285 ,  G01T1/28 ,  H01J27/16 ,  H01J37/05 ,  H01J37/077 ,  H01J37/08 ,  H01J37/10 ,  H01J37/1471 ,  H01J37/265 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305 ,  H01J37/3056 ,  H01J2237/0817 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/31749

公开(公告)号：EP3018693B1

公开(公告)日：2018-12-26

申请号：EP15192862.9

申请日：2015-11-04

Applicant: FEI Company

Inventor： Brogden, Valerie ,  Blackwood, Jeff ,  Schmidt, Michael ,  Trivedi, Dhruti ,  Young, Richard ,  Miller, Tom ,  Routh, Jr., Brian ,  Stone, Stacey ,  Templeton, Todd

IPC: H01J37/304 ,  G01N1/28

CPC classification number: H01J37/3023 ,  G01N1/286 ,  G01N2001/2873 ,  H01J37/28 ,  H01J37/285 ,  H01J37/3045 ,  H01J37/31 ,  H01J2237/208 ,  H01J2237/31745

Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.

公开(公告)号：EP2933820A1

公开(公告)日：2015-10-21

申请号：EP14172692.7

申请日：2014-06-17

Applicant: FEI COMPANY

Inventor： Routh, Jr., Brian ,  Brogden, Valerie ,  Schmidt, Michael

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  G01N1/44 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/08 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/2602 ,  H01J2237/31745

Abstract: A TEM grid provides posts having steps, the steps increasing the number of samples that can be attached to the grid. In some embodiments, each post includes a one sided stair step configuration. A method of extracting multiple samples includes extracting samples and attaching the samples to the different stair steps on the posts.

Abstract translation: TEM网格提供具有步骤的帖子，步骤增加可以附加到网格的样本数量。 在一些实施例中，每个柱包括单面阶梯构造。 提取多个样本的方法包括提取样本并将样本附加到帖子上的不同阶梯步骤。