公开(公告)号：DE50112976D1

公开(公告)日：2007-10-18

申请号：DE50112976

申请日：2001-05-22

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  MARKSTEINER STEPHAN ,  NESSLER WINFRIED ,  ELBRECHT LUEDER ,  TIMME HANS-JOERG

IPC: C23C14/58 ,  H01L41/22 ,  C23C16/56 ,  H01C17/24 ,  H01J37/305 ,  H01L41/09 ,  H01L41/187 ,  H03H3/04

Abstract: Production of a layer having a locally adapted and/or predefined layer thickness profile comprises applying a layer onto a substrate; determining a removal profile for the applied layer; and guiding an ion beam once over the layer so that the layer is locally etched at the site of the ion beam corresponding to the removal profile and a layer having a locally adapted and/or predefined layer thickness profile is produced. Preferably the spread of the ion beam is more than 1, preferably more than 5 mm, or less than 100 mm, preferably less than 50 mm. The ion beam is an argon ion beam with a gauss-like current density distribution. The ion beam is guided in traces over the layer and the trace distance is less than the half-width spread of the beam.

公开(公告)号：DE19949611B4

公开(公告)日：2007-05-31

申请号：DE19949611

申请日：1999-10-14

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  HANDTMANN MARTIN

IPC: G01C19/56

Abstract: An angular rate sensor includes a ring that is kept floating by electrostatic forces between electrodes without the ring being mechanically or electrically contacted. The ring is divided into segments of differing radial dimensions which cooperate with a multi-phase drive from segmented electrodes to exert a torque on the floating ring which causes the ring to rotate. A control of the position of the ring and a detection of the Coriolis force that occurs are achieved by the voltages applied to the electrodes.

公开(公告)号：DE50112082D1

公开(公告)日：2007-04-05

申请号：DE50112082

申请日：2001-11-06

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  MARKSTEINER STEPHAN ,  NESSLER WINFRIED ,  ELBRECHT LUEDER

IPC: H03H9/58 ,  H03H9/02 ,  H03H9/60

Abstract: The invention relates to bulk acoustic wave filters including at least two bulk acoustic wave resonators. Each of these resonators includes at least one first electrode, a piezoelectric layer, and a second electrode. At least two of the bulk acoustic wave resonators have effective resonator surfaces which differ in their surface form and/or surface content. The inventive design of the bulk acoustic wave resonators enables optimal suppression of interference modes without influencing the impedance level of the filter.

公开(公告)号：DK1317797T3

公开(公告)日：2007-03-19

申请号：DK01976209

申请日：2001-09-10

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  ELBRECHT LUEDER ,  MARKSTEINER STEPHAN ,  TIMME HANS-JOERG ,  NESSLER WINFRIED

IPC: H03H9/17

Abstract: The resonator comprises a first electrode (E1), a second electrode (E2) and a piezoelectric layer (P) arranged between the above. A first acoustic compression layer (V1) is arranged between the piezoelectric layer (E1) and the first electrode (E1) with a higher acoustic impedance than the first electrode (E1).

公开(公告)号：DE102005028927B4

公开(公告)日：2007-02-15

申请号：DE102005028927

申请日：2005-06-22

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  HANDTMANN MARTIN

IPC: H03H9/15

Abstract: The bulk acoustic wave (BAW) apparatus has two BAW resonators (72,74) connected in antiparallel, such that the resonators have same polarization direction. The top electrode (72T) of BAW resonator (72) is electrically connected to the bottom electrode (74B) of BAW resonator (74) and electrical terminal (76) of BAW apparatus. The bottom electrode (72B) of BAW resonator (72) is electrically connected to the top electrode (74T) of BAW resonator (74) and electrical terminal (78) of BAW apparatus. Independent claims are also included for the following: (1) method of reducing non-linear properties within BAW apparatus; and (2) BAW filter.

公开(公告)号：DE59913964D1

公开(公告)日：2006-12-14

申请号：DE59913964

申请日：1999-11-04

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  HIEROLD CHRISTOFER ,  OPPERMANN KLAUS-GUENTER ,  GLEHR MANFRED

IPC: G01B7/16 ,  G01L5/00 ,  G01N27/22

Abstract: A micromechanical sensor is described which contains electrodes that are disposed on a substrate, and electrode bars made of silicon that can move with regard to the electrodes. A deformation of the substrate is measured by determining differential changes in a capacity of the electrode bars in comparison to adjacently disposed electrodes. Two groups of electrode bars are preferably used which are interlocked with one another in an alternating comb-like manner, which, are separate from one another, and are interconnected at the ends thereof in an electrically conductive manner, and which are anchored on the substrate.

公开(公告)号：DE102004062312B3

公开(公告)日：2006-06-01

申请号：DE102004062312

申请日：2004-12-23

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT

IPC: H03H9/15 ,  H03H9/02

Abstract: A piezoelectric layer (PL) (11) fits between first (7a) and second (7b) electrodes. A compensating layer (13) fits between the first electrode and the PL. Compensating material has a second resonance frequency temperature coefficient with a second polarity sign (PS) opposed to a first PS. An independent claim is also included for a method for producing a piezoelectric resonator.

公开(公告)号：AT311689T

公开(公告)日：2005-12-15

申请号：AT01917108

申请日：2001-03-23

Applicant: INFINEON TECHNOLOGIES AG ,  NOKIA CORP

Inventor： AIGNER ROBERT ,  TIKKA PASI ,  ELLAE JUHA

IPC: H03H9/64 ,  H03H9/00 ,  H03H9/17 ,  H03H9/54 ,  H03H9/46

Abstract: The present invention provides a filter device constructed of a combined ladder and lattice filter topology. The filter device synergistically combines the good features of both types of filters. Using the filter device, an integrated unbalanced-to-balanced filter device can be realized. Accordingly, a substantial decrease in the number of components can be achieved. Furthermore, the filter device can be integrated with further components, preferably active RF-components, on a single chip.

公开(公告)号：DE50300607D1

公开(公告)日：2005-07-07

申请号：DE50300607

申请日：2003-01-23

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  FRANOSCH MARTIN ,  MECKES ANDREAS ,  OPPERMANN KLAUS-GUENTER ,  STRASSER MARC

IPC: B81B7/00 ,  H03H9/10

公开(公告)号：DE50010475D1

公开(公告)日：2005-07-07

申请号：DE50010475

申请日：2000-09-28

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  ELBRECHT LUEDER ,  MARKSTEINER STEPHAN ,  SAENGER ANNETTE ,  TIMME HANS-JOERG

IPC: A61B8/00 ,  G10K11/20 ,  H03H3/02

Abstract: An acoustic mirror is described which is formed of at least one first insulating layer, a first metal layer disposed thereon, a second insulating layer disposed thereon and a second metal layer disposed thereon. An auxiliary layer is produced on the first insulating layer whereby a recess extending as far as the first insulating layer is created therein. The first metal layer is substantially deposited and removed by chemical/mechanical polishing until the parts of the first metal layer disposed outside the recess are no longer present. The second metal layer is also produced in a recess with the aid of chemical/mechanical polishing. More than two insulating layers and two metal layers can be provided. The first metal layer and the second metal layer can be produced in the same recess.