公开(公告)号：KR1020000062948A

公开(公告)日：2000-10-25

申请号：KR1020000013793

申请日：2000-03-18

Applicant: 가부시끼가이샤 도시바

Inventor： 나카모토마사유키 ,  이노우에아츠오

IPC: H01J9/02

CPC classification number: H01J9/025 ,  H01J31/127 ,  H01J2201/30407 ,  H01J2201/30423

Abstract: 본발명은전계방출소자의제조방법및 디스플레이장치에관한것으로서, 기판(14)에대하여서로다른이송방향으로부터절삭을실시함으로써돌기(에미터형상(2))를형성하는것으로, 전계방출의균일성이나전계방출효율이뛰어나고생산성이높은전계방출형냉음극을얻는것을특징으로한다.

公开(公告)号：KR1020100062965A

公开(公告)日：2010-06-10

申请号：KR1020090118410

申请日：2009-12-02

Applicant: 캐논 가부시끼가이샤

Inventor： 아오끼나오후미 ,  니시다쇼지

IPC: H01J1/304 ,  H01J9/02

CPC classification number: H01J9/025 ,  H01J1/304 ,  H01J1/3044 ,  H01J1/3046 ,  H01J31/127 ,  H01J2201/30423 ,  H01J2201/30426 ,  H01J2201/30446 ,  H01J2201/30492 ,  H01J2201/30496 ,  H01J2329/0423 ,  H01J2329/0439 ,  H01J2329/0471 ,  H01J2329/0473

Abstract: PURPOSE: A method for manufacturing an electron emitting device and a method for manufacturing an image display device are provided to improve the quality of a display image in the image display device by obtaining a stable current emitted from the electron emitting device. CONSTITUTION: A metal oxide layer(4) including the same metal oxide as the metal included in a structure body is formed. The substrate including the metal is installed. A low work function layer(5) is installed on the metal oxide layer and is made of multi crystalline layers.

Abstract translation: 目的：提供一种用于制造电子发射器件的方法和用于制造图像显示器件的方法，以通过获得从电子发射器件发射的稳定电流来提高图像显示器件中的显示图像的质量。 构成：形成包含与包含在结构体中的金属相同的金属氧化物的金属氧化物层（4）。 安装包含金属的基板。 低功函数层（5）安装在金属氧化物层上并由多晶层制成。

公开(公告)号：KR100205051B1

公开(公告)日：1999-06-15

申请号：KR1019950054549

申请日：1995-12-22

Applicant: 한국전자통신연구원

Inventor： 박종문 ,  남기수 ,  구진근 ,  현영철 ,  박민

IPC: H01J1/304 ,  H01J9/02

CPC classification number: H01J9/025 ,  H01J2201/30423

Abstract: 본 발명은 필드에미션 디스플레이 소자의 제조방법에 관한 것으로 전자방출음극과 게이트 전극의 간격을 적절히 조절할 수 있으며 균일한 형상을 갖는 전자방출음극을 형성하는 방법을 포함하는 필드 에미션 디스플레이 소자의 제조방법에 관한 것이다. 상술한 본 발명의 특징은 트렌치의 측벽을 통해 노출된 게이트 전극용 막을 열산화하여 열산화막을 형성하고 전자방출음극을 정의하기 위한 식각공정시 상기 게이트 전극의 측면에 형성되어 있는 열산화막을 제거함으로써 게이트 전극과 게이트 절연막을 공간적으로 분리한다. 이러한 방법에 따르면 게이트 전극의 측면에 형성되는 열산화막을 정밀하게 제어할 수 있어 게이트 전극과 전자방출음극간의 간격을 정확하게 조절할 수 있으며, 전자방출음극의 형상을 균일화할 수 있다.

公开(公告)号：US20120091881A1

公开(公告)日：2012-04-19

申请号：US13252001

申请日：2011-10-03

Applicant: Eiji Ozaki ,  Taiko Motoi ,  Ryoji Fujiwara ,  Akiko Kitao

Inventor： Eiji Ozaki ,  Taiko Motoi ,  Ryoji Fujiwara ,  Akiko Kitao

IPC: H01J19/24 ,  H01J1/304

CPC classification number: H01J29/467 ,  H01J1/3046 ,  H01J31/127 ,  H01J2201/30423 ,  H01J2329/4608

Abstract: The present invention provides an electron emitting device that includes a cathode, and a gate onto which electrons field-emitted from the cathode are irradiated. The gate includes at least a layer containing molybdenum and oxygen provided at a portion onto which the electrons field-emitted from the cathode are irradiated. The layer has peaks in a range of 397 eV through 401 eV, a range of 414 eV through 418 eV, a range of 534 eV through 538 eV, and a range of 540 eV through 547 eV, respectively, in a spectrum measured by electron energy loss spectroscopy using a transmission electron microscope.

Abstract translation: 本发明提供一种电子发射器件，其包括阴极和从阴极发射的电子被照射到其上的栅极。 栅极包括至少一层含有钼和氧的层，其设置在从阴极发射的电子被照射的部分上。 该层在通过电子测量的光谱中分别具有在397eV至401eV的范围内的峰值，414eV至418eV的范围，534eV至538eV的范围以及540eV至547eV的范围内的峰值 使用透射电子显微镜的能量损失光谱。

公开(公告)号：US08154188B2

公开(公告)日：2012-04-10

申请号：US12694474

申请日：2010-01-27

Applicant: Takanori Suwa ,  Toshihiko Takeda ,  Tamayo Hiroki

Inventor： Takanori Suwa ,  Toshihiko Takeda ,  Tamayo Hiroki

IPC: H01J1/304 ,  H01J19/02 ,  H01J19/38

CPC classification number: H01J3/021 ,  H01J1/3046 ,  H01J31/127 ,  H01J2201/30423 ,  H01J2203/0216 ,  H01J2203/0272 ,  H01J2329/0423 ,  H01J2329/4613 ,  H01J2329/4673 ,  H01J2329/4682

Abstract: An electron beam apparatus is provided having an electron emitting device which has a simple configuration, exhibits high electron emission efficiency, operates stably, and in which emitted electrons are effectively converged. The electron beam apparatus includes: an insulator having a notch on its surface; a gate positioned on the surface of the insulator; at least one cathode having a protruding portion protruding from an edge of the notch toward the gate, and positioned on the surface of the insulator so that the protruding portion is opposed to the gate; and an anode arranged to be opposed to the protruding portion via the gate, wherein the gate is formed on the surface of the insulator so that at least a part of a region opposed to the cathode is projected outward and recessed portions are provided in which ends of the gate are recessed and interpose the projected region.

Abstract translation: 提供了一种具有电子发射器件的电子束装置，该电子发射器件具有简单的结构，表现出高的电子发射效率，稳定地工作，并且其中发射的电子被有效地收敛。 电子束装置包括：在其表面上具有凹口的绝缘体; 位于绝缘体表面上的门; 至少一个阴极，其具有从所述凹口的边缘向所述栅极突出的突出部分，并且位于所述绝缘体的所述表面上，使得所述突出部分与所述栅极相对; 以及经由所述栅极与所述突出部相对的阳极，其中，所述栅极形成在所述绝缘体的表面上，使得与所述阴极相对的区域的至少一部分向外突出，并且设置有凹部， 的栅极凹进并插入投影区域。

公开(公告)号：US08148888B2

公开(公告)日：2012-04-03

申请号：US12898171

申请日：2010-10-05

Applicant: Yohei Hashizume

Inventor： Yohei Hashizume

IPC: H01J1/30

CPC classification number: H01J1/3046 ,  H01J29/04 ,  H01J31/127 ,  H01J2201/30423 ,  H01J2329/0423

Abstract: A device includes a substrate, an insulating member disposed on a surface of the substrate, a gate, and a cathode. The insulating member has an upper surface apart from the surface of the substrate, and a side surface rising from the surface of the substrate between the upper surface and the surface of the substrate. The gate is disposed on the upper surface of the insulating member. The cathode is disposed on the side surface of the insulating member and has a portion opposing the gate. The side surface of the insulating member on which the cathode is disposed has a protruding portion protruding from an imaginary line connecting a position where the portion opposing the gate lies and a position where the insulating member rises from the surface of the substrate.

Abstract translation: 一种器件包括衬底，设置在衬底的表面上的绝缘构件，栅极和阴极。 所述绝缘构件具有与所述基板的表面分离的上表面，以及在所述基板的上表面和所述表面之间从所述基板的表面起升的侧面。 栅极设置在绝缘构件的上表面上。 阴极设置在绝缘构件的侧表面上并且具有与栅极相对的部分。 绝缘构件的设置有阴极的侧面具有突出部，该突出部从连接着与栅极相对的部分的位置的虚拟线和从基板的表面上升的位置突出。

公开(公告)号：US20110309737A1

公开(公告)日：2011-12-22

申请号：US13114424

申请日：2011-05-24

Applicant: Satoshi Tsutsui ,  Toshiharu Sumiya ,  Takahiro Hachisu

Inventor： Satoshi Tsutsui ,  Toshiharu Sumiya ,  Takahiro Hachisu

IPC: H01J1/304 ,  H01J9/34 ,  H01J1/00 ,  H01J9/02

CPC classification number: H01J1/3046 ,  H01J9/025 ,  H01J29/04 ,  H01J31/127 ,  H01J2201/30423 ,  H01J2329/0423

Abstract: The electron-emitting device is configured such that an inclination angle θ2 of a lower portion from a height-direction intermediate portion to the lower end is larger than the inclination angle θ1 of an upper portion from a lower edge of the concave portion to a height-direction intermediate portion. And, an electric resistance of a lower cathode portion which is a portion of the lower portion of the cathode is larger than that of an upper cathode portion which is a portion of the upper portion of the cathode.

Abstract translation: 电子发射器件被配置为使得从高度方向中间部分到下端的下部的倾斜角度＆amp;θ2大于从凹部的下边缘的上部的倾斜角度＆amp; 部分到高度方向中间部分。 并且，作为阴极的下部的一部分的下阴极部的电阻大于作为阴极的上部的一部分的上阴极部的电阻。

公开(公告)号：US20110241533A1

公开(公告)日：2011-10-06

申请号：US12526811

申请日：2009-04-10

Applicant: Norihiko Ochi ,  Kenichi Iwata

Inventor： Norihiko Ochi ,  Kenichi Iwata

IPC: H01J1/62 ,  H01J9/02

CPC classification number: H01J1/3046 ,  H01J31/127 ,  H01J2201/30423 ,  H01J2329/0423

Abstract: An electron-emitting device has at least a cathode electrode, an electron-emitting member which is electrically connected to the cathode electrode, and a resistive layer which is provided between the cathode electrode and the electron-emitting member. The resistive layer is composed of the same material as that of the electron-emitting member, and film density of the resistive layer is lower than film density of the electron-emitting member.

Abstract translation: 电子发射器件至少具有阴极，与阴极电连接的电子发射元件，以及设置在阴极和电子发射元件之间的电阻层。 电阻层由与电子发射部件相同的材料构成，电阻层的膜密度低于电子发射部件的膜密度。

公开(公告)号：US20110074744A1

公开(公告)日：2011-03-31

申请号：US12890395

申请日：2010-09-24

Applicant: Satoru Nitobe ,  Takashi Shiozawa ,  Takanori Suwa ,  Shigeyuki Takagi ,  Toshiharu Sumiya

Inventor： Satoru Nitobe ,  Takashi Shiozawa ,  Takanori Suwa ,  Shigeyuki Takagi ,  Toshiharu Sumiya

IPC: G09G5/00 ,  H01J9/02

CPC classification number: H01J9/025 ,  H01J1/304 ,  H01J1/3046 ,  H01J3/021 ,  H01J31/127 ,  H01J2201/30423 ,  H01J2203/0204 ,  H01J2329/0423

Abstract: Provided is an electron-emitting device including an insulating member and a gate stacked on a substrate. A cathode is disposed on a side surface of the insulating member. The cathode has a plurality of protrusions provided along a corner of the insulating member. The gate has a plurality of protrusions extending toward the cathode.

Abstract translation: 提供一种电子发射器件，其包括堆叠在衬底上的绝缘构件和栅极。 阴极设置在绝缘构件的侧面上。 阴极具有沿着绝缘构件的角部设置的多个突起。 门具有朝向阴极延伸的多个突起。

公开(公告)号：US07875469B2

公开(公告)日：2011-01-25

申请号：US12001631

申请日：2007-12-12

Applicant: Heinz H. Busta

Inventor： Heinz H. Busta

IPC: H01L21/00

CPC classification number: H01J1/3042 ,  H01J1/3046 ,  H01J9/025 ,  H01J35/065 ,  H01J2201/30403 ,  H01J2201/30423

Abstract: A method of operating and process for fabricating an electron source. A conductive rod is covered by an insulating layer, by dipping the rod in an insulation solution, for example. The rod is then covered by a field emitter material to form a layered conductive rod. The rod may also be covered by a second insulating material. Next, the materials are removed from the end of the rod and the insulating layers are recessed with respect to the field emitter layer so that a gap is present between the field emitter layer and the rod. The layered rod may be operated as an electron source within a vacuum tube by applying a positive bias to the rod with respect to the field emitter material and applying a higher positive bias to an anode opposite the rod in the tube. Electrons will accelerate to the charged anode and generate soft X-rays.

Abstract translation: 一种用于制造电子源的操作和处理方法。 导电棒被绝缘层覆盖，例如通过将棒浸入绝缘溶液中。 然后将杆用场发射体材料覆盖以形成层状导电棒。 杆也可以被第二绝缘材料覆盖。 接下来，从杆的端部去除材料，并且绝缘层相对于场发射极层凹陷，使得在场发射极层和杆之间存在间隙。 层叠的杆可以通过相对于场致发射体材料向杆施加正偏压并且向与管中的杆相对的阳极施加更高的正偏压而在真空管内作为电子源来操作。 电子将加速到带电阳极并产生软X射线。