INTEGRATED CIRCUIT DEVICE WITH DEEP TRENCH ISOLATION REGIONS FOR ALL INTER-WELL AND INTRA-WELL ISOLATION AND WITH A SHARED CONTACT TO A JUNCTION BETWEEN ADJACENT DEVICE DIFFUSION REGIONS AND AN UNDERLYING FLOATING WELL SECTION

    公开(公告)号:CA2757776A1

    公开(公告)日:2010-12-02

    申请号:CA2757776

    申请日:2010-05-04

    Applicant: IBM

    Abstract: Disclosed are embodiments of an improved integrated circuit device structure (200) (e.g., a static random access memory array structure or other integrated circuit device structure incorporating both P-type and N-type devices) (121a and 121b) and a method of forming the structure that uses DTI regions (160) for all inter- well and intra- well isolation and, thereby provides a low-cost isolation scheme that avoids FET width variations due to STI-DTI misalignment. Furthermore, because the DTI regions (160) used for intra- well isolation effectively create some floating well sections, (203) which must each be connected to a supply voltage (e.g., Vdd) (280) to prevent threshold voltage (Vt) variations, the disclosed integrated circuit device also includes a shared contact (280) to a junction between the diffusion regions (221 and 222) of adjacent devices (121a and 121b) and an underlying floating well section (205). This shared contact (280) eliminates the cost and area penalties that would be incurred if a discrete supply voltage contact was required for each floating well section (205).

    112.
    发明专利
    未知

    公开(公告)号:DE10296953B4

    公开(公告)日:2010-04-08

    申请号:DE10296953

    申请日:2002-06-06

    Applicant: IBM

    Abstract: A method for forming a transistor. A semiconductor substrate is provided. The semiconductor substrate is patterned to provide a first body edge. A first gate structure of a first fermi level is provided adjacent the first body edge. The semiconductor substrate is patterned to provide a second body edge. The first and second body edges of the semiconductor substrate define a transistor body. A second gate structure of a second fermi level is provided adjacent the second body edge. A substantially uniform dopant concentration density is formed throughout the transistor body.

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