Pixel sensor having doped isolation structure sidewall
    5.
    发明专利
    Pixel sensor having doped isolation structure sidewall 有权
    具有分离隔离结构的PIXEL传感器

    公开(公告)号:JP2006339643A

    公开(公告)日:2006-12-14

    申请号:JP2006148898

    申请日:2006-05-29

    Abstract: PROBLEM TO BE SOLVED: To provide an isolation structure used to isolate a pixel sensor device including a selectively doped sidewall.
    SOLUTION: A new pixel sensor structure formed on a first conductive-type substrate includes a second conductive-type photosensitive device and a first conductive-type surface pinning layer 180a. The isolation structure 101a is formed adjacent to a photosensitive device pinning layer. The isolation structure includes a dopant region containing a first conductive-type material selectively formed along sidewalls 105a, 105b of the isolation structure where the surface pinning layer is adapted so as to electrically connected to a substrate 150 located beneath. A suitable method for forming the dopant region selectively formed along the sidewall of the isolation structure includes an externally diffusing process that the dopant material present in a material layer formed and doped along a selected portion of the isolation structure is driven into the substrate located beneath during annealing.
    COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题:提供用于隔离包括选择性掺杂侧壁的像素传感器装置的隔离结构。 解决方案:形成在第一导电型衬底上的新的像素传感器结构包括第二导电型光敏器件和第一导电型表面钉扎层180a。 隔离结构101a形成在与感光装置钉扎层相邻的位置。 隔离结构包括掺杂区域,该掺杂剂区域包含选择性地沿隔离结构的侧壁105a,105b形成的第一导电型材料,其中表面钉扎层适于电连接到位于下面的基底150。 用于形成沿着隔离结构的侧壁选择性形成的掺杂剂区域的合适方法包括外部扩散过程,其中存在于沿着隔离结构的选定部分形成并掺杂的材料层中的掺杂剂材料被驱动到位于下面的衬底中 退火。 版权所有(C)2007,JPO&INPIT

    SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD

    公开(公告)号:JP2002134631A

    公开(公告)日:2002-05-10

    申请号:JP2001300150

    申请日:2001-09-28

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To provide a semiconductor device that comprises an embedded DRAM device and a logic device, and to provide a its manufacturing method. SOLUTION: This device comprises a monocrystal substrate having an almost flat surface, a first surface region on the flat surface having a silicon on insulator region, a second surface region on the flat surface which is a monocrystal bulk region, an embeded logic device which is formed in the silicon on insulator region, an embedded memory device which is formed in the monocrystal bulk region, and a trench in the bulk monocrystal region.

    METHOD OF ADDING FABRICATION MONITORS TO INTEGRATED CIRCUIT CHIPS
    10.
    发明申请
    METHOD OF ADDING FABRICATION MONITORS TO INTEGRATED CIRCUIT CHIPS 审中-公开
    将制造监控器添加到集成电路卡的方法

    公开(公告)号:WO2006107356A3

    公开(公告)日:2007-11-22

    申请号:PCT/US2005047083

    申请日:2005-12-22

    CPC classification number: H01L22/20 H01L2924/0002 H01L2924/00

    Abstract: An integrated circuit, a method and a system for designing and a method fabricating the integrated circuit. The method including: (a) generating a photomask level design of an integrated circuit design (300) of the integrated circuit, the photomask level design comprising a multiplicity of integrated circuit element shapes; (b) designating regions of the photomask level design between adjacent integrated circuit element shapes, the designated regions large enough to require placement of fill shaped (305) between the adjacent integrated circuit elements based on fill shape rules (310), the fill shapes not required for the operation of the integrated circuit; and (c) placing one or more monitor structure shapes (320) of a monitor structure (315) in at least one of the designated regions, the monitor structure not required for the operation of the integrated circuit.

    Abstract translation: 一种用于设计的集成电路,方法和系统以及制造集成电路的方法。 该方法包括:(a)产生集成电路的集成电路设计(300)的光掩模级设计,光掩模级设计包括多个集成电路元件形状; (b)指定相邻集成电路元件形状之间的光掩模水平设计的区域,所指定的区域足够大,以便基于填充形状规则(310)在相邻集成电路元件之间放置填充形状(305),填充形状不 为集成电路的运行所需; 以及(c)将监视器结构(315)的一个或多个监视器结构形状(320)放置在所述指定区域中的至少一个中,所述监视器结构不是用于所述集成电路的操作所需要的。

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