公开(公告)号：NL2006969A

公开(公告)日：2012-01-24

申请号：NL2006969

申请日：2011-06-20

Applicant: ASML NETHERLANDS BV

Inventor： POSTMA SYTSE ,  KERKHOF MARCUS ,  MOEST BEARRACH ,  MATIAS SERRAO VASCO MIGUEL

IPC: G03F7/20

公开(公告)号：NL2005479A

公开(公告)日：2011-05-18

申请号：NL2005479

申请日：2010-10-07

Applicant: ASML NETHERLANDS BV

Inventor： GRAAF ROELOF ,  DZIOMKINA NINA ,  KERKHOF MARCUS ,  LEENDERS MARTINUS ,  LIEBREGTS PAULUS ,  ROOIJ GERARDUS ,  HOUBEN MARTIJN ,  BADAM VIJAY ,  SONDAG-HUETHORST JEANNET ,  KRUIJF NIEK

IPC: G03F7/20

Abstract: A sealing member is provided to prevent immersion liquid ingress to a gap between components. The sealing member has a plastic or polymer sealing portion that is adhered to the components forming the gap being sealed. The sealing member is constructed so as to reduce the force-coupling, in particular the time-related force-coupling, between the components being sealed.

公开(公告)号：NL2005389A

公开(公告)日：2011-04-26

申请号：NL2005389

申请日：2010-09-23

Applicant: ASML NETHERLANDS BV

Inventor： KERKHOF MARCUS ,  VENEMA WILLEM ,  MOEST BEARRACH ,  MATIAS VASCO ,  BOMHOF CEDRAN

IPC: G03F7/20 ,  G03F9/00

公开(公告)号：NL2005217A

公开(公告)日：2011-02-22

申请号：NL2005217

申请日：2010-08-11

Applicant: ASML NETHERLANDS BV

Inventor： CORBEIJ WILHELMUS ,  KERKHOF MARCUS ,  KOK HAICO

IPC: G03F7/20