公开(公告)号：WO2014067754A2

公开(公告)日：2014-05-08

申请号：PCT/EP2013071080

申请日：2013-10-09

Applicant: ASML NETHERLANDS BV

Inventor： NIHTIANOV STOYAN ,  KOK HAICO ,  WEHRENS MARTIJN

IPC: G03F7/20

CPC classification number: H01L27/1464 ,  G03F7/70558 ,  G03F7/7085 ,  H01L27/14609 ,  H01L27/14643 ,  H01L27/14689 ,  H01L31/028 ,  H01L31/035281 ,  H01L31/1804

Abstract: A backside illuminated sensor comprising a supporting substrate, a semiconductor layer which comprises a photodiode comprising a region of n-doped semiconductor provided at a first surface of the semiconductor layer, and a region of p-doped semiconductor, wherein a depletion region is formed between the region of n-doped semiconductor and the region of p-doped semiconductor, and a layer of p-doping protective material provided on a second surface of the semiconductor layer, wherein the first surface of the semiconductor layer is fixed to a surface of the supporting substrate.

Abstract translation: 一种背照式传感器，包括支撑衬底，包括光电二极管的半导体层，所述光电二极管包括设置在所述半导体层的第一表面处的n掺杂半导体区域和p掺杂半导体区域，其中耗尽区域形成在 n掺杂半导体区域和p掺杂半导体区域，以及设置在半导体层的第二表面上的p-掺杂保护材料层，其中半导体层的第一表面被固定到 支撑基材。

公开(公告)号：NL2007367A

公开(公告)日：2012-05-02

申请号：NL2007367

申请日：2011-09-07

Applicant: ASML NETHERLANDS BV

Inventor： VOOGD ROBBERT JAN ,  KOK HAICO ,  MOEST BEARRACH ,  GILS PETER

IPC: G03F7/20

公开(公告)号：NL2011568A

公开(公告)日：2014-05-06

申请号：NL2011568

申请日：2013-10-08

Applicant: ASML NETHERLANDS BV

Inventor： NIHTIANOV STOYAN ,  KOK HAICO ,  WEHRENS MARTIJN

IPC: G03F7/20 ,  H01L31/0216

公开(公告)号：NL2010477A

公开(公告)日：2013-11-25

申请号：NL2010477

申请日：2013-03-19

Applicant: ASML NETHERLANDS BV

Inventor： LAURENT THIBAULT ,  JACOBS JOHANNES HENRICUS WILHELMUS ,  KOK HAICO ,  VIJVER YURI ,  WAL JOHANNES ,  KNARREN BASTIAAN ,  VOOGD ROBBERT JAN ,  WESTERLAKEN JAN STEVEN CHRISTIAAN ,  RIJDT HANS ,  KOOIKER EELCO ,  HURKENS-MERTENS WILHELMINA MARGARETA JOZEF ,  TEILLET YOHANN BRUNO YVON

IPC: G03F7/20

公开(公告)号：NL2005217A

公开(公告)日：2011-02-22

申请号：NL2005217

申请日：2010-08-11

Applicant: ASML NETHERLANDS BV

Inventor： CORBEIJ WILHELMUS ,  KERKHOF MARCUS ,  KOK HAICO

IPC: G03F7/20