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    IMPROVED RECONSTRUCTION ALGORITHMS OF ELECTRON-BASED HOLOGRAMS
    12.
    发明公开
    IMPROVED RECONSTRUCTION ALGORITHMS OF ELECTRON-BASED HOLOGRAMS 审中-公开

    公开(公告)号：EP3839640A1

    公开(公告)日：2021-06-23

    申请号：EP20213660.2

    申请日：2020-12-14

    Applicant: FEI Company

    Inventor： Liu, Kun ,  Bahm, Alan ,  Straw, Marcus

    IPC: G03H1/08 ,  G03H5/00 ,  G06T7/00 ,  G03H1/04 ,  G06T5/00 ,  G03H1/00

    Abstract: Apparatuses and methods for improved reconstructions of electron-based holograms are disclosed herein. An example method at least includes forming a hologram of a sample and a known object, forming a reconstruction of the known object using a reconstruction algorithm, comparing the reconstruction of the known object to a reference reconstruction of the known object, and adjusting the reconstruction algorithm based on the comparison of the reconstruction of the known object to the reference reconstruction of the known object. The example method may further include forming a reconstruction of the sample using the adjusted reconstruction algorithm.

    charged particle beam system
    13.
    发明授权
    charged particle beam system 有权
    系统带电粒子

    公开(公告)号：EP2450934B1

    公开(公告)日：2016-04-20

    申请号：EP11187990.4

    申请日：2011-11-07

    Applicant: FEI Company

    Inventor： Toth, Milos ,  Emerson, Mark ,  Straw, Marcus

    IPC: H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J37/305

    CPC classification number: H01J37/20 ,  H01J37/18 ,  H01J37/244 ,  H01J2237/024 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2445

    Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photon yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.

    A method for coincident alignment of a laser beam and a charged particle beam
    14.
    发明公开
    A method for coincident alignment of a laser beam and a charged particle beam 有权
    一种用于匹配的激光束的对准方法和带电粒子束

    公开(公告)号：EP2706556A3

    公开(公告)日：2016-03-09

    申请号：EP13183272.7

    申请日：2013-09-06

    Applicant: FEI COMPANY

    Inventor： Straw, Marcus ,  Emerson, Mark

    IPC: H01J37/22 ,  H01J37/304 ,  H01J37/305

    CPC classification number: H01J37/3045 ,  G21K5/00 ,  G21K5/08 ,  H01J37/226 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/28

    Abstract: A method and apparatus for aligning a laser beam (216) coincident with a charged particle beam (350). The invention described provides a method for aligning the laser beam through the center of an objective lens (214) and ultimately targeting the eucentric point of a multi-beam system (300). The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber (360) of the charged particle system.

    Abstract translation: 一种用于对准的激光束（216）用带电粒子束（350）重合的方法和装置。 描述的本发明提供了用于通过物镜（214）和最终目标的多波束系统（300）的共心点的中心对准的激光束的方法。 该装置利用了激光束对准系统的部件内，并且带电粒子系统的真空腔室（360）之外的被定位。

    Laser-induced deposition on a seed layer
    16.
    发明公开
    Laser-induced deposition on a seed layer 审中-公开
    Laserinsduzierte Abscheidung au e einer Keimschicht

    公开(公告)号：EP2703520A1

    公开(公告)日：2014-03-05

    申请号：EP13182113.4

    申请日：2013-08-29

    Applicant: FEI COMPANY

    Inventor： Randolph, Steven ,  Straw, Marcus

    IPC: C23C16/02 ,  C23C16/04 ,  C23C16/18

    CPC classification number: C23C16/0281 ,  C23C16/047 ,  C23C16/18

    Abstract: A method of creating a layer of a target deposit-material, in a first target pattern, on a substrate surface. The substrate surface is placed in a vacuum and exposed to a first chemical vapor, having precursor molecules for a seed deposit-material, thereby forming a first substrate surface area that has adsorbed the precursor molecules. Then, a charged particle beam is applied to the first substrate surface area in a second target pattern, largely identical to the first target pattern thereby forming a seed layer in a third target pattern. The seed layer is exposed to a second chemical vapor, having target deposit-material precursor molecules, which are adsorbed onto the seed layer. Finally, a laser beam is applied to the seed layer and neighboring area, thereby forming a target deposit-material layer over and about the seed layer, where exposed to the laser beam.

    Abstract translation: 在基板表面上以第一目标图案形成目标沉积物层的方法。 将基板表面放置在真空中并暴露于具有用于种子沉积物材料的前体分子的第一化学蒸气，从而形成吸附了前体分子的第一基底表面区域。 然后，将带电粒子束以与第一目标图案大致相同的第二目标图案施加到第一基板表面区域，从而形成第三目标图案中的种子层。 种子层暴露于第二化学蒸气，其具有吸附在种子层上的目标沉积物前体分子。 最后，将激光束施加到种子层和相邻区域，从而在暴露于激光束的种子层上方和周围形成目标沉积物层。

    Gas-assisted laser ablation
    17.
    发明公开
    Gas-assisted laser ablation 有权
    Gasunterstützte激光烧蚀

    公开(公告)号：EP2700470A1

    公开(公告)日：2014-02-26

    申请号：EP13193643.7

    申请日：2010-08-04

    Applicant: FEI COMPANY

    Inventor： Toth, Milos ,  Straw, Marcus

    IPC: B23K26/12 ,  B23K26/16 ,  B23K26/36 ,  B23K26/06

    CPC classification number: B29C35/08 ,  B23K26/0624 ,  B23K26/12 ,  B23K26/126 ,  B23K26/127 ,  B23K26/16 ,  B23K26/36 ,  B41M5/24

    Abstract: An improved apparatus for laser processing that prevents material redeposition during laser ablation but allows material to be removed at a high rate. In a preferred embodiment, laser ablation is performed in a chamber (140, 501) filled with high pressure precursor (etchant) gas so that sample particles ejected during laser ablation will react with the precursor gas in the gas atmosphere of the sample chamber. When the ejected particles (108) collide with precursor gas particles (202), the precursor is dissociated, forming a reactive component that binds the ablated material. In turn, the reaction between the reactive dissociation by-product and the ablated material forms a new, volatile compound (204) that can be pumped away in a gaseous state rather than redepositing onto the sample (104).

    Abstract translation: 一种用于激光加工的改进的装置，其防止在激光烧蚀期间的材料再沉积，但允许以高速率去除材料。 在优选实施例中，在填充有高压前体（蚀刻剂）气体的室（140,501）中进行激光烧蚀，使得在激光烧蚀期间喷射的样品颗粒将与样品室的气体气氛中的前体气体反应。 当排出的颗粒（108）与前体气体颗粒（202）碰撞时，前体解离，形成结合烧蚀材料的反应性组分。 反过来，反应性离解副产物与烧蚀材料之间的反应形成新的挥发性化合物（204），其可以气态泵送而不是重新沉积到样品（104）上。

    System for protecting light optical components during laser ablation
    18.
    发明公开
    System for protecting light optical components during laser ablation 有权
    装置和方法用于保护光的光学部件在激光烧蚀

    公开(公告)号：EP2644308A1

    公开(公告)日：2013-10-02

    申请号：EP13161507.2

    申请日：2013-03-28

    Applicant: FEI COMPANY

    Inventor： Straw, Marcus

    IPC: B23K26/00 ,  B23K26/12 ,  B23K26/36 ,  B23K26/03

    CPC classification number: B23K26/1224 ,  B23K26/0078 ,  B23K26/03 ,  B23K26/361

    Abstract: A method of and an apparatus (300) to perform laser ablation in the vicinity of a charged particle beam (308) while simultaneously protecting the light optical components (316) of the apparatus (300) utilized to perform the ablation from being coated with debris resulting from the ablation process. A protective transparent screen (400) is used to shield the laser optical components(316). A preferred screen 400) could be replaced or repositioned without breaking vacuum in the sample chamber (340) and would not be particularly susceptible to undesirable charging effects.

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