公开(公告)号：US20130168781A1

公开(公告)日：2013-07-04

申请号：US13338425

申请日：2011-12-28

Applicant: Joseph V. Mantese ,  Antonio M. Vincitore

Inventor： Joseph V. Mantese ,  Antonio M. Vincitore

IPC: H01L29/66 ,  H01L21/02

CPC classification number: H01J33/02 ,  G08B17/11 ,  H01J1/3044 ,  H01J9/025 ,  H01J2201/30415 ,  H01J2201/3048

Abstract: A microelectromechanical system (MEMS) assembly includes at least one emission source; a top wafer having a plurality of side walls and a generally horizontal portion, the horizontal portion having a thickness between a first side and a directly opposed second side, at least one window in the horizontal portion extending between the first and second sides and a transmission membrane across the at least one window; and a bottom wafer having a first portion with a first substantially planar surface, an intermediate surface directly opposed to the first substantially planar surface, a second portion with a second substantially planar surface, the at least one emission source provided on the second substantially planar surface; where the top wafer bonds to the bottom wafer at the intermediate surface and encloses a cavity within the top wafer and the bottom wafer.

Abstract translation: 微机电系统（MEMS）组件包括至少一个发射源; 具有多个侧壁和大致水平部分的顶部晶片，所述水平部分具有在第一侧和直接相对的第二侧之间的厚度，所述水平部分中的至少一个窗口在所述第一侧和第二侧之间延伸， 膜穿过至少一个窗口; 以及底部晶片，其具有第一部分和第二基本上平坦的表面，与所述第一基本上平坦的表面直接相对的中间表面，具有第二基本平坦表面的第二部分，所述至少一个发射源设置在所述第二基本上平坦的表面上 ; 其中顶部晶片在中间表面处接合到底部晶片并且在顶部晶片和底部晶片内包围空腔。

公开(公告)号：WO2012035277A1

公开(公告)日：2012-03-22

申请号：PCT/FR2011/052135

申请日：2011-09-16

Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) ,  MONTHIOUX, Marc ,  HOUDELLIER, Florent

Inventor： MONTHIOUX, Marc ,  HOUDELLIER, Florent

IPC: H01J37/073 ,  H01J37/28 ,  H01J1/304

CPC classification number: H01J29/485 ,  B82Y20/00 ,  H01J1/3044 ,  H01J3/022 ,  H01J9/025 ,  H01J37/073 ,  H01J37/28 ,  H01J2201/30411 ,  H01J2201/30415 ,  H01J2201/30426 ,  H01J2201/30434 ,  H01J2201/30469 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/26

Abstract: Cette invention concerne un canon à électrons à émission de champ comportant une pointe d'émission d'électrons, une anode extractrice, ainsi que des moyens permettant de créer une différence de potentiel électrique entre la pointe d'émission et l'anode extractrice. La pointe d'émission comporte une pointe métallique et un cône d'extrémité obtenu par dépôt chimique en phase vapeur sur un nanofilament, le cône étant aligné et soudé sur la pointe métallique. Application à un microscope électronique en transmission.

Abstract translation: 本发明涉及一种场发射电子枪，其包括电子发射尖端，提取器阳极，以及用于在发射尖端和提取器阳极之间产生电位差的装置。 发射尖端包括金属尖端和通过化学气相沉积在纳米丝上产生的端锥，锥体对准并焊接到金属尖端上。 本发明可用于透射电子显微镜。

公开(公告)号：WO2010139740A3

公开(公告)日：2011-01-27

申请号：PCT/EP2010057734

申请日：2010-06-02

Applicant: THALES SA ,  ECOLE POLYTECH ,  ROBERT CEDRIC ,  LEGAGNEUX PIERRE ,  PONARD PASCAL ,  ANDRE FREDERIC ,  COJOCARU COSTEL SORIN ,  SCHNELL JEAN-PHILIPPE

Inventor： ROBERT CEDRIC ,  LEGAGNEUX PIERRE ,  PONARD PASCAL ,  ANDRE FREDERIC ,  COJOCARU COSTEL SORIN ,  SCHNELL JEAN-PHILIPPE

IPC: H01J1/304

CPC classification number: H01J1/304 ,  H01J2201/30415 ,  H01J2201/30434 ,  H01J2201/30469

Abstract: The invention relates in general terms to the field of "cold cathode" electronic cathodes including an electrically conductive flat substrate (2) and an emitter comprising a tip (1) with a micrometric or nanometric diameter arranged vertically above the surface of the substrate. The cathode according to the invention comprises a single annular electrode (6) electrically insulated from the substrate by an insulating layer (3) and centred on the emitter, the source comprising a means for applying a potential difference of several dozen volts between the substrate and the annular electrode, enough to cause the emission of an electronic beam from the tip of the emitter, the annular electrode being large enough to focus said electronic beam. A source of an electronic beam can comprise a plurality of identical cathodes arranged in a specific pattern.

Abstract translation: 本发明一般涉及“冷阴极”电子阴极领域，包括导电平面基底（2）和发射体，其包括垂直于基底表面布置的具有微米或纳米直径的尖端（1）。 根据本发明的阴极包括通过绝缘层（3）与衬底电绝缘并以发射器为中心的单个环形电极（6），源极包括用于在衬底和衬底之间施加几十伏特的电位差的装置 环形电极足以引起来自发射器尖端的电子束的发射，环形电极足够大以聚焦所述电子束。 电子束的源可以包括以特定图案布置的多个相同的阴极。

公开(公告)号：WO2010139740A2

公开(公告)日：2010-12-09

申请号：PCT/EP2010/057734

申请日：2010-06-02

Applicant: THALES ,  ECOLE POLYTECHNIQUE ,  ROBERT, Cédric ,  LEGAGNEUX, Pierre ,  PONARD, Pascal ,  ANDRE, Frédéric ,  COJOCARU, Costel Sorin ,  SCHNELL, Jean-Philippe

Inventor： ROBERT, Cédric ,  LEGAGNEUX, Pierre ,  PONARD, Pascal ,  ANDRE, Frédéric ,  COJOCARU, Costel Sorin ,  SCHNELL, Jean-Philippe

IPC: H01J1/304

CPC classification number: H01J1/304 ,  H01J2201/30415 ,  H01J2201/30434 ,  H01J2201/30469

Abstract: Le domaine général de l'invention est celui des cathodes électroniques de type « cathode froide » comprenant un substrat plan (2) électriquement conducteur et un émetteur comportant une pointe (1) de diamètre micrométrique ou nanométrique disposée verticalement au-dessus de la surface du substrat. La cathode selon l'invention comporte une et une seule électrode annulaire (6) isolée électriquement du substrat par une couche d'isolant (3) et centrée sur l'émetteur, la source comportant des moyens permettant d'appliquer une différence de potentiel de plusieurs dizaines de volts entre le substrat et l'électrode annulaire, suffisante pour provoquer l'émission d'un faisceau électronique à la pointe de l'émetteur, l'électrode annulaire étant de dimension suffisante pour assurer la focalisation dudit faisceau électronique. Une source de faisceau électronique peur comporter une pluralité de cathodes identiques agencées selon un motif particulier.

Abstract translation: 本发明一般涉及“冷阴极”电子阴极领域，包括导电平面基底（2）和发射体，其包括垂直于基底表面布置的具有微米或纳米直径的末端（1）。 根据本发明的阴极包括通过绝缘层（3）与衬底电绝缘并以发射器为中心的单个环形电极（6），源极包括用于在衬底和衬底之间施加几十伏特的电位差的装置 环形电极足以引起来自发射器尖端的电子束的发射，环形电极足够大以聚焦所述电子束。 电子束的源可以包括以特定图案布置的多个相同的阴极。

公开(公告)号：US11651924B1

公开(公告)日：2023-05-16

申请号：US17846498

申请日：2022-06-22

Applicant: FEI Company

Inventor： Kun Liu ,  Chad Rue ,  Alan Stephen Bahm

IPC: H01J37/073 ,  H01J1/304 ,  H01J1/34 ,  H01J19/24

CPC classification number: H01J1/3044 ,  H01J1/34 ,  H01J19/24 ,  H01J37/073 ,  H01J2201/30415 ,  H01J2201/30449 ,  H01J2237/06341

Abstract: Methods of producing microrods for electron emitters and associated microrods and electron emitters. In one example, a method of producing a microrod for an electron emitter comprises providing a bulk crystal ingot, removing a first plate from the bulk crystal ingot, reducing a thickness of the first plate to produce a second plate, and milling the second plate to produce one or more microrods. In another example, a microrod for an electron emitter comprises a microrod tip region that comprises a nanoneedle that in turn comprises a nanorod and a nanoprotrusion tip. The microrod and the nanoneedle are integrally formed from a bulk crystal ingot by sequentially: (i) removing the microrod from the bulk crystal ingot; (ii) coarse processing the microrod tip region to produce the nanorod; and (iii) fine processing the nanorod to produce the nanoprotrusion tip.

公开(公告)号：US20170148603A1

公开(公告)日：2017-05-25

申请号：US15416686

申请日：2017-01-26

Applicant: Hitachi High-Tech Science Corporation

Inventor： Tomokazu Kozakai ,  Osamu Matsuda ,  Yasuhiko Sugiyama ,  Kazuo Aita ,  Fumio Aramaki ,  Anto Yasaka ,  Hiroshi Oba

IPC: H01J1/304 ,  H01J37/08 ,  H01J37/30 ,  H01J37/28 ,  G01Q60/16 ,  G01Q70/08 ,  H01J37/073 ,  H01J37/21

CPC classification number: H01J1/3044 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q60/24 ,  G01Q70/08 ,  G01Q70/16 ,  H01J1/3048 ,  H01J37/073 ,  H01J37/08 ,  H01J37/21 ,  H01J37/28 ,  H01J37/3002 ,  H01J2201/30415 ,  H01J2201/30496 ,  H01J2237/002 ,  H01J2237/006

Abstract: There is provided an iridium tip including a pyramid structure having one {100} crystal plane as one of a plurality of pyramid surfaces in a sharpened apex portion of a single crystal with orientation. The iridium tip is applied to a gas field ion source or an electron source. The gas field ion source and/or the electron source is applied to a focused ion beam apparatus, an electron microscope, an electron beam applied analysis apparatus, an ion-electron multi-beam apparatus, a scanning probe microscope or a mask repair apparatus.

公开(公告)号：US08013505B2

公开(公告)日：2011-09-06

申请号：US12313932

申请日：2008-11-26

Applicant: Yang Wei ,  Liang Liu ,  Shou-Shan Fan

Inventor： Yang Wei ,  Liang Liu ,  Shou-Shan Fan

IPC: H01L21/00 ,  H01J1/02 ,  H01J9/00

CPC classification number: H01J1/304 ,  H01J2201/30415 ,  H01J2201/30434 ,  H01J2201/30469

Abstract: A field emission electron source includes a CNT needle and a conductive base. The CNT needle has an end portion and a broken end portion; the end portion is contacted with and electrically connected to a surface of the conductive base. The CNTs at the broken end portion form a taper-shape structure, wherein one CNT protrudes and is higher than the adjacent CNTs.

Abstract translation: 场发射电子源包括CNT针和导电基底。 CNT针具有端部和断端部; 端部与导电基底的表面接触并电连接。 破碎端部的CNT形成锥形结构，其中一个CNT突出并且高于相邻的CNT。

公开(公告)号：US20100078557A1

公开(公告)日：2010-04-01

申请号：US12570112

申请日：2009-09-30

Applicant: Volker Drexel ,  Ulrich Mantz ,  Bernd Irmer ,  Christian Penzkofer

Inventor： Volker Drexel ,  Ulrich Mantz ,  Bernd Irmer ,  Christian Penzkofer

IPC: G21K5/00 ,  G01N23/00 ,  C23C14/00 ,  C23C14/30

CPC classification number: H01J37/065 ,  H01J1/3044 ,  H01J37/06 ,  H01J2201/30415 ,  H01J2201/30446 ,  H01J2201/30476 ,  H01J2237/06316 ,  H01J2237/06375 ,  H01J2237/065 ,  Y10T29/49888

Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.

Abstract translation: 电子束源的尖端包括承载涂层的芯。 该涂层由具有比形成芯的表面的材料更大的导电性的材料形成。

公开(公告)号：US11935720B1

公开(公告)日：2024-03-19

申请号：US18491725

申请日：2023-10-20

Applicant: Dazhi Chen ,  Zhongwei Chen

Inventor： Dazhi Chen ,  Zhongwei Chen

IPC: H01J1/304

CPC classification number: H01J1/3044 ,  H01J2201/30415 ,  H01J2201/30426 ,  H01J2201/30496

Abstract: A field-emission type electron source includes (i) a single-crystal tungsten rod having a sharpened terminus and (ii) a mass of ZrO formed only on a portion of the surface, or the entire surface, of the sharpened terminus. In preferred design, the single-crystal tungsten rod is placed in a gaseous medium that consists of oxygen and a non-oxygen gas. The molar ratio between oxygen and the non-oxygen gas is greater than 1:1.

公开(公告)号：US09017562B2

公开(公告)日：2015-04-28

申请号：US13726971

申请日：2012-12-26

Applicant: 38th Research Institute, China Electronics Technology Group Corporation

Inventor： Huarong Liu

IPC: C25F3/00 ,  C03C15/00 ,  C23F4/02 ,  H01J1/00 ,  H01J1/304 ,  H01J9/02 ,  H01J37/04 ,  H01J37/06 ,  H01J37/08 ,  B82Y99/00 ,  H01J27/26 ,  H01J37/073

CPC classification number: C23F4/02 ,  B82Y99/00 ,  H01J1/00 ,  H01J1/3044 ,  H01J9/025 ,  H01J27/26 ,  H01J37/04 ,  H01J37/06 ,  H01J37/073 ,  H01J37/08 ,  H01J2201/30415 ,  H01J2237/0807

Abstract: The present disclosure provides a method for manufacturing a particle source, comprising: placing a metal wire in vacuum, introducing active gas and catalyst gas, adjusting a temperature of the metal wire, and applying a positive high voltage V to the metal wire to dissociate the active gas at the surface of the metal wire, in order to generate at a peripheral surface of the head of the metal wire an etching zone in which field induced chemical etching (FICE) is performed; increasing by the FICE a surface electric field at the top of the metal wire head to be greater than the to evaporation field of the material for the metal wire, so that metal atoms at the wire apex are evaporated off; after the field evaporation is activated by the FICE, causing mutual adjustment between the FICE and the field evaporation, until the head of the metal wire has a shape of combination of a base and a tip on the base; and stopping the FICE and the field evaporation when the head of the metal wire takes a predetermine shape.

Abstract translation: 本公开提供了一种制造颗粒源的方法，包括：将金属丝放置在真空中，引入活性气体和催化剂气体，调节金属丝的温度，以及向金属丝施加正高电压V以使 在金属线的表面处的活性气体，以在金属线的头部的外周表面上产生进行场诱导化学蚀刻（FICE）的蚀刻区域; 通过FICE增加金属丝头顶部的表面电场大于金属线材料的蒸发场，使金属丝顶端的金属原子蒸发掉; 在通过FICE激活场蒸发之后，引起FICE和场蒸发之间的相互调节，直到金属丝的头部具有基部和底部的尖端的组合的形状; 并且当金属丝的头部具有预定形状时，停止FICE和场蒸发。