公开(公告)号：US20170254755A1

公开(公告)日：2017-09-07

申请号：US15061769

申请日：2016-03-04

Applicant: Applied Materials, Inc.

Inventor： Tae Seung CHO ,  Junghoon KIM ,  Soonwook JUNG ,  Soonam PARK ,  Dmitry LUBOMIRSKY

IPC: G01N21/68 ,  H01J37/32 ,  H01J37/10

CPC classification number: G01N21/68 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/0237 ,  G01J3/0289 ,  G01J3/06 ,  G01J3/443 ,  G01N21/73 ,  G01N2201/0638 ,  G01N2201/068 ,  H01J37/10 ,  H01J37/32458 ,  H01J37/32935 ,  H01J37/32963 ,  H01J37/32972 ,  H01J2237/103 ,  H01J2237/3341

Abstract: Implementations of the present disclosure relate to a plasma chamber having an optical device for measuring emission intensity of plasma species. In one implementation, the plasma chamber includes a chamber body defining a substrate processing region therein, the chamber body having a sidewall, a viewing window disposed in the sidewall, and a plasma monitoring device coupled to the viewing window. The plasma monitoring device includes an objective lens and an aperture member having a pinhole, wherein the aperture member is movable relative to the objective lens by an actuator to adjust the focal point in the plasma using principles of optics, allowing only the light rays from the focal point in the plasma to reach the pinhole. The plasma monitoring device therefore enables an existing OES (coupled to the plasma monitoring device through an optical fiber) to monitor emission intensity of the species at any specific locations of the plasma.

公开(公告)号：US09721195B2

公开(公告)日：2017-08-01

申请号：US15185373

申请日：2016-06-17

Applicant: Seiko Epson Corporation

Inventor： Takeshi Nozawa

IPC: H04N1/00 ,  H04N1/60 ,  G06K15/02 ,  G01J3/02 ,  G01J3/06 ,  G01J3/12 ,  G01J3/28 ,  G01J3/46 ,  G01J3/52 ,  G01J3/26

CPC classification number: G06K15/027 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/06 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/46 ,  G01J3/463 ,  G01J3/52 ,  G01J2003/061 ,  G01J2003/1226 ,  G01J2003/2826 ,  H04N1/00015 ,  H04N1/00023 ,  H04N1/00034 ,  H04N1/00045 ,  H04N1/00068 ,  H04N1/00082 ,  H04N1/6036 ,  H04N1/6044

Abstract: A printer includes a spectroscope that has a variable wavelength interference filter which incidents light from a measurement region, and a light receiving section which receives light from the variable wavelength interference filter and which outputs a detection signal according to an amount of received light, a carriage moving unit which relatively moves the spectroscope along one direction with respect to a measurement target of spectrometry and moves the measurement region with respect to the measurement target, and a timing detection circuit which has a differential circuit that differentiates the detection signal and outputs a differentiation signal, wherein in a case where the measurement target is a color patch, spectrometry in which the amount of received light is detected starts based on the differential signal.

公开(公告)号：US20170108378A1

公开(公告)日：2017-04-20

申请号：US15292244

申请日：2016-10-13

Applicant: Beijing information Science & Technology University

Inventor： Lianqing Zhu ,  Wei He ,  Xiaoping Lou ,  Feng Liu ,  Mingli Dong ,  Fei Luo ,  Wei Zhuang

IPC: G01J3/18 ,  G02B26/08 ,  G02B6/02 ,  G02F2/00

CPC classification number: G01J3/1895 ,  G01J3/0208 ,  G01J3/027 ,  G01J3/06 ,  G01J3/28 ,  G01J2003/064 ,  G01J2003/066 ,  G02B6/02076 ,  G02B26/0816 ,  G02F2/00

Abstract: A fiber grating demodulation system for enhancing spectral resolution by finely adjusting an imaging focus mirror, includes a laser pump source, a wavelength division multiplexer, a fiber Bragg grating, a diaphragm, a slit, a collimating mirror, a light splitting grating, an imaging focus mirror, a linear array detector. The laser pump source, the wavelength division multiplexer, the fiber Bragg grating are connected in sequence, the wavelength division multiplexer is connected to the diaphragm. Light emitted from the laser pump source is multiplexed by the wavelength division multiplexer and then enters the fiber Bragg grating, a reflection spectrum of the fiber Bragg grating enters the slit of the fiber grating demodulation system as injected light. After passing through the slit, the injected light is reflected by the collimating mirror, the light splitting grating, and the imaging focus mirror in sequence, and is finally converged to the linear array detector.

公开(公告)号：US20170045722A1

公开(公告)日：2017-02-16

申请号：US15304632

申请日：2015-04-17

Applicant: HORIBA JOBIN YVON SAS

Inventor： Emmanuel FRETEL ,  Damien ANDREZEJEUSKY ,  Rene BOIDIN ,  Philippe DE BETTIGNIES

IPC: G02B21/00 ,  G02B26/10 ,  G01N21/65

CPC classification number: G02B21/0048 ,  G01J3/06 ,  G01J3/44 ,  G01N21/65 ,  G01N2021/656 ,  G02B21/0032 ,  G02B21/0076 ,  G02B26/101 ,  G02B26/105

Abstract: An optical beam scanning microscopy apparatus includes a light source adapted to emit an optical beam (2) and a microscope objective (1) adapted for focusing the optical beam (2) in an object plane (11). The microscopy apparatus includes first and second reflecting optical elements (M-X1, M-X2) disposed in series on the optical path of the optical beam (2) between the light source and the microscope objective (1), first elements of angular tilting (21, 25) adapted for tilting the first reflecting optical elements (M-X1, M-XY1) according to a first predetermined rotation angle (RX1), and second elements of angular tilting (22, 26) adapted for tilting the second reflecting optical elements (M-X2, M-XY2) according to a second rotation angle (RX2), in such a way as to angularly tilt the axis (12) of the optical beam (2) by pivoting about the center (O) of the pupil of the microscope objective (1).

Abstract translation: 光束扫描显微镜装置包括适于发射光束（2）的光源和适于将光束（2）聚焦在物平面（11）中的显微镜物镜（1）。 显微镜装置包括在光源和显微镜物镜（1）之间的光束（2）的光路上串联布置的第一和第二反射光学元件（M-X1，M-X2），第一和第二反射光学元件 （21,25），其适于使第一反射光学元件（M-X1，M-XY1）根据第一预定旋转角度（RX1）倾斜;以及第二角度倾斜元件（22,26），其适于倾斜第二反射 根据第二旋转角度（RX2）的光学元件（M-X2，M-XY2），以通过围绕中心（O）枢转来使光束（2）的轴线（12）成角度地倾斜的方式 显微镜物镜（1）的瞳孔。

公开(公告)号：US20170010153A1

公开(公告)日：2017-01-12

申请号：US15115497

申请日：2015-01-30

Applicant: HORIBA INSTRUMENTS INCORPORATED

Inventor： Nicolas VEZARD ,  Beth FINAMORE ,  Jeremy GOLDSTONE ,  Gregoire VERRIER

IPC: G01J3/02 ,  G01J3/04 ,  G01J3/06 ,  G01J3/28 ,  G01J3/18

CPC classification number: G01J3/0229 ,  G01J3/0202 ,  G01J3/0218 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/06 ,  G01J3/18 ,  G01J3/2823 ,  G01J3/36 ,  G01J2003/064 ,  G01J2003/1828

Abstract: A system and method for spectroscopic mapping, with configurable spatial resolution, of an object include a fiber optic bundle having a plurality of optical fibers arranged in a first array at an input end with each of the plurality of optical fibers spaced one from another and arranged in at least one linear array at an output end. A first mask defining a plurality of apertures equal to or greater in number than the plurality of optical fibers is positioned between an object to be imaged and the input end of the fiber optic bundle. An imaging spectrometer is positioned to receive light from the output end of the fiber optic bundle and to generate spectra of the object. A sensor associated with the imaging spectrometer converts the spectra to electrical output signals for processing by an associated computer.

Abstract translation: 具有可配置空间分辨率的对象的光谱映射的系统和方法包括具有多个光纤的光纤束，所述光纤束具有在输入端以第一阵列布置的多个光纤，所述多个光纤中的每一个彼此间隔开并布置 在输出端的至少一个线性阵列。 限定数量等于或大于多个光纤的多个孔的第一掩模位于待成像对象与光纤束的输入端之间。 成像光谱仪定位成从光纤束的输出端接收光并产生物体的光谱。 与成像光谱仪相关联的传感器将光谱转换成电输出信号以供相关计算机处理。

公开(公告)号：US09523610B2

公开(公告)日：2016-12-20

申请号：US14666249

申请日：2015-03-23

Applicant: MKS Technology

Inventor： Mark Watson ,  Shane Buller ,  Keith Carron

IPC: G01J3/44 ,  G01N33/543 ,  G01N21/65 ,  G01J3/06

CPC classification number: G01J3/4406 ,  G01J3/06 ,  G01J3/44 ,  G01J2003/062 ,  G01J2003/064 ,  G01N21/65 ,  G01N21/658 ,  G01N33/54313 ,  G01N33/54373 ,  G01N2201/0612

Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.

公开(公告)号：US20160216154A1

公开(公告)日：2016-07-28

申请号：US15006681

申请日：2016-01-26

Applicant: H2Optx Inc.

Inventor： Rudolf J. Hofmeister ,  Donald A. Ice ,  Scott W. Tandy

IPC: G01J3/42 ,  G01J3/06 ,  G01J3/10 ,  G01J3/44

CPC classification number: G01J3/42 ,  B01D46/0002 ,  B01D46/42 ,  G01J3/00 ,  G01J3/0202 ,  G01J3/0205 ,  G01J3/0237 ,  G01J3/0267 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/06 ,  G01J3/10 ,  G01J3/2823 ,  G01J3/44 ,  G01N1/06 ,  G01N21/01 ,  G01N21/25 ,  G01N21/253 ,  G01N21/33 ,  G01N21/3504 ,  G01N21/3577 ,  G01N21/65 ,  G01N23/00 ,  G01N33/15 ,  G01N35/10 ,  G01N2021/0106 ,  G01N2201/0231

Abstract: An example embodiment may include a hyperspectral analyzation subassembly configured to obtain information for a sample. The hyperspectral analyzation subassembly may include one or more transmitters configured to generate electromagnetic radiation electromagnetically coupled to the sample, one or more sensors configured to detect electromagnetic radiation electromagnetically coupled to the sample, and an electromagnetically transmissive window. At least one of the sensors may be configured to detect electromagnetic radiation from the sample via the window. The hyperspectral analyzation subassembly may include an analyzation actuation subassembly configured to actuate at least a portion of the hyperspectral analyzation subassembly in one or more directions of movement with respect to the sample.

Abstract translation: 示例性实施例可以包括被配置为获取样本的信息的超光谱分析子组件。 超光谱分析子组件可以包括被配置为产生电磁耦合到样品的电磁辐射的一个或多个发射器，配置成检测电磁耦合到样品的电磁辐射的一个或多个传感器和电磁透射窗口。 传感器中的至少一个可经配置以经由窗口检测来自样品的电磁辐射。 超光谱分析子组件可以包括分析致动子组件，其被配置为致动相对于样品的一个或多个运动方向的高光谱分析子组件的至少一部分。

公开(公告)号：US09291500B2

公开(公告)日：2016-03-22

申请号：US14166995

申请日：2014-01-29

Applicant: RAYTHEON COMPANY

Inventor： Ian S. Robinson ,  John D. Bloomer

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/447 ,  G01J3/45 ,  G01J3/453 ,  G01J3/06

CPC classification number: G01J3/0224 ,  G01J3/021 ,  G01J3/027 ,  G01J3/06 ,  G01J3/2823 ,  G01J3/447 ,  G01J3/45 ,  G01J3/4535 ,  G01J2003/2826

Abstract: A multimode configurable imaging spectropolarimeter in which the polarimetry function can be activated and deactivated on demand.

Abstract translation: 多模式可配置成像分光偏振计，其中可以根据需要激活和去激活偏振功能。

公开(公告)号：US09228898B2

公开(公告)日：2016-01-05

申请号：US14008964

申请日：2012-03-27

Applicant: Sepehr Kiani ,  Peter Lewis Stokes ,  David H. Tracy

Inventor： Sepehr Kiani ,  Peter Lewis Stokes ,  David H. Tracy

IPC: G01J3/28 ,  G01J3/42 ,  G01J3/02 ,  G01J3/06 ,  G01N21/64 ,  G01N15/14 ,  G01J3/44 ,  G01J3/08 ,  G01J3/10 ,  G01J3/14 ,  G01J3/18

CPC classification number: G01J3/42 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0216 ,  G01J3/0248 ,  G01J3/0291 ,  G01J3/06 ,  G01J3/08 ,  G01J3/10 ,  G01J3/14 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/44 ,  G01J3/4406 ,  G01N15/1434 ,  G01N15/1459 ,  G01N15/1484 ,  G01N21/6456

Abstract: The present invention generally pertains to a system, method and kit for the detection and measurement of spectroscopic properties of light from a sample, or the scalable detection and measurement of spectroscopic properties of light from each sample present among multiple samples, simultaneously, wherein the system comprises: an optical train comprising a dispersing element; and an image sensor. The light detected and measured may comprise light scattered from a sample, emitted as chemiluminescence by a chemical process within a sample, selectively absorbed by a sample, or emitted as fluorescence from a sample following excitation.

Abstract translation: 本发明一般涉及一种用于检测和测量来自样品的光的光谱特性的系统，方法和试剂盒，或同时进行多个样品中存在的每个样品的光的光谱特性的可伸缩检测和测量，其中系统 包括：包括分散元件的光学系列; 和图像传感器。 检测和测量的光可以包括从样品散射的光，通过样品内的化学过程作为化学发光发射，被样品选择性吸收，或者在激发后作为荧光从样品中发射。

公开(公告)号：US20150276484A1

公开(公告)日：2015-10-01

申请号：US14674052

申请日：2015-03-31

Applicant: Hitachi High-Tech Science Corporation

Inventor： Osamu Matsuzawa

IPC: G01J3/443 ,  G01N21/73

CPC classification number: G01J3/443 ,  G01J3/06 ,  G01N21/68 ,  G01N21/73

Abstract: An ICP emission spectrometer is schematically configured to include an inductively coupled plasma generation unit, a light condensing unit, a spectroscope, a two-dimensional detection unit and a controller. The two-dimensional detection unit includes a CCD image sensor which has multiple pixels laid in a planar shape and detects emission light by causing the emission light emitted from the spectroscope to be imaged on the multiple pixels. Then, the controller determines a pixel used in detecting the emission light among the multiple pixels in accordance with an imaging shape of detection-targeted emission light.

Abstract translation: ICP发射光谱仪被示意性地配置为包括电感耦合等离子体产生单元，聚光单元，分光镜，二维检测单元和控制器。 二维检测单元包括具有平面形状的多个像素的CCD图像传感器，并且通过使从分光器发射的发射光成像在多个像素上来检测发射光。 然后，控制器根据检测目标发射光的成像形状来确定用于检测多个像素中的发射光的像素。