公开(公告)号：EP1812965A4

公开(公告)日：2012-04-18

申请号：EP05815611

申请日：2005-10-24

Applicant: ADVANCED TECH MATERIALS

Inventor： DIETZ JAMES ,  BISHOP STEVEN E ,  MCMANUS JAMES V ,  LURCOTT STEVEN M ,  WODJENSKI MICHAEL J ,  KAIM ROBERT ,  DIMEO FRANK JR

IPC: H01L21/44 ,  B67D7/06 ,  B67D99/00 ,  C23C16/30 ,  F17C11/00 ,  G01F22/02 ,  G01M3/32 ,  H01L21/31

CPC classification number: G01N33/00 ,  F17C11/00 ,  G01F15/063 ,  G01F22/02 ,  G01F23/0076 ,  G01M3/32 ,  G01M3/3236 ,  G06Q10/087 ,  G06Q30/04 ,  G06Q50/04 ,  H01L21/561 ,  H01L21/568 ,  H01L21/6835 ,  H01L22/10 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/48 ,  H01L24/82 ,  H01L25/03 ,  H01L25/0652 ,  H01L25/16 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/24011 ,  H01L2224/2518 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01058 ,  H01L2924/01076 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/14 ,  H01L2924/19042 ,  H05K1/185 ,  H05K3/4602 ,  H05K2203/0165 ,  H05K2203/085 ,  H05K2203/1469 ,  Y02P90/30 ,  Y10T29/4913 ,  Y10T29/49133 ,  Y10T29/49165 ,  Y10T29/53183 ,  H01L2224/45099

公开(公告)号：EP1807224A4

公开(公告)日：2014-02-19

申请号：EP05823352

申请日：2005-10-21

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK JR ,  DIETZ JAMES ,  OLANDER W KARL ,  KAIM ROBERT ,  BISHOP STEVEN E ,  NEUNER JEFFREY W ,  ARNO JOSE I

IPC: B08B7/00 ,  B08B7/04 ,  H01J37/32

CPC classification number: C23G5/00 ,  C23C14/564 ,  H01J37/08 ,  H01J37/32862 ,  H01J2237/022 ,  H01J2237/31701

公开(公告)号：EP1044055A4

公开(公告)日：2003-04-23

申请号：EP99902085

申请日：1999-01-07

Applicant: ADVANCED TECH MATERIALS

Inventor： DIETZ JAMES ,  MCMANUS JAMES V

IPC: F17C7/00 ,  B01J4/00 ,  B67D3/00 ,  F17C11/00 ,  H01L21/265 ,  B01D53/04

CPC classification number: F17C11/00 ,  Y02E60/321

Abstract: An apparatus for storage and dispensing of a gas, comprising a gas storage and dispensing vessel holding a physical sorbent medium and gas adsorbed on the physical sorbent medium, wherein a carrier gas, e.g., helium, hydrogen, argon, etc., is flowed through the vessel to effect desorption of the sorbate gas and entrainment of the desorbed gas in the carrier gas stream. The storage and dispensing system of the invention may be employed to provide the dispensed sorbate gas to a downstream locus of use in applications such as epitaxial film formation and ion implantation, in the manufacture of semiconductor devices.

Abstract translation: 一种用于储存和分配气体的设备（10），包括容纳物理吸附介质（16）和吸附在物理吸附介质（16）上的气体的气体储存和分配容器（12），其中载气（例如氦气 ，氢气，氩气等通过容器（12）流动，以实现山梨酸盐气体的解吸并将解吸的气体夹带在载气流中。 本发明的储存和分配系统（10）可以用于在半导体器件的制造中将分配的山梨酸盐气体提供给诸如外延膜形成和离子注入等应用中的下游使用场所。

公开(公告)号：EP2021528A4

公开(公告)日：2011-03-23

申请号：EP07761374

申请日：2007-04-26

Applicant: ADVANCED TECH MATERIALS

Inventor： DIMEO FRANK JR ,  DIETZ JAMES ,  OLANDER W KARL ,  KAIM ROBERT ,  BISHOP STEVEN E ,  NEUNER JEFFREY W ,  ARNO JOSE I ,  MARGANSKI PAUL J ,  SWEENEY JOSEPH D ,  ELDRIDGE DAVID ,  YEDAVE SHARAD ,  BYL OLEG ,  STAUF GREGORY T

IPC: C25B7/00

CPC classification number: C23C14/564 ,  C23C16/4405 ,  H01J37/32412 ,  H01J37/32862

公开(公告)号：EP1558363A4

公开(公告)日：2007-01-24

申请号：EP03777881

申请日：2003-10-27

Applicant: ADVANCED TECH MATERIALS

Inventor： STURM EDWARD ,  WANG LUPING ,  DIETZ JAMES

IPC: B01D53/04

CPC classification number: B01D53/04 ,  B01D2253/102 ,  B01D2259/40083 ,  B01D2259/40086 ,  B01D2259/40088 ,  B01D2259/4525 ,  Y10S95/901

Abstract: A germane storage and dispensing system, in which germane gas is sorptively retained on an activated carbon sorbent medium in a vessel containing adsorbed and free germane gas. The activated carbon sorbent medium is deflagration-resistant in relation to the germane gas adsorbed thereon, i.e., under deflagration conditions of 65 DEG C and 650 torr, under which free germane gas undergoes deflagration, the activated carbon sorbent medium does not sustain deflagration of the adsorbed germane gas or thermally desorb the germane gas so that it undergoes subsequent deflagration. The deflagration-resistance of the activated carbon sorbent medium is promoted by pre-treatment of the sorbent material to remove extraneous sorbables therefrom and by maintaining the fill level of the sorbent medium in the gas storage and dispensing vessel at a substantial value, e.g., of at least 30 %.