公开(公告)号：NL2013835A

公开(公告)日：2015-07-21

申请号：NL2013835

申请日：2014-11-20

Applicant: ASML NETHERLANDS BV

Inventor： HOUBEN MARTIJN ,  POIESZ THOMAS

IPC: G03F7/20 ,  H01L21/683

Abstract: A substrate table supports a substrate holder to which a substrate is clamped for exposure. The substrate table has a plurality of e-pins spaced apart from and distributed around the center of the substrate holder to receive, and lower, a substrate onto the substrate holder prior to exposure, and to raise a substrate off the substrate holder after exposure. Tip portions of the e-pins and the corresponding apertures in the substrate holder have a shape in plan including at least one re-entrant, e.g. a cross shape.

公开(公告)号：NL2010762A

公开(公告)日：2013-12-02

申请号：NL2010762

申请日：2013-05-07

Applicant: ASML NETHERLANDS BV

Inventor： LAURENT THIBAULT ,  BLOKS RUUD ,  CORTIE ROGIER ,  HOUBEN MARTIJN ,  JACOBS JOHANNES ,  LAFARRE RAYMOND ,  LEMPENS HAN ,  OVERKAMP JIM ,  PIETERSE GERBEN ,  POLET THEODORUS ,  SIMONS WILHELMUS ,  STEFFENS KOEN ,  TROMP SIEGFRIED ,  VY VAN VUONG

IPC: G03F7/20 ,  H01L21/683

公开(公告)号：NL2009189A

公开(公告)日：2013-02-19

申请号：NL2009189

申请日：2012-07-16

Applicant: ASML NETHERLANDS BV

Inventor： KUNNEN JOHAN ,  HOUBEN MARTIJN ,  LAURENT THIBAULT ,  ABEELEN HENDRIKUS ,  DASSEN ARMAND ,  DERKS SANDER

IPC: G03F7/20 ,  H01L21/68