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    Electrostatically actuated devices
    22.
    发明公开
    Electrostatically actuated devices 有权
    Elektrostatischgesteuerte Vorrichtungen

    公开(公告)号：EP1199174A1

    公开(公告)日：2002-04-24

    申请号：EP01308476.9

    申请日：2001-10-03

    Applicant: Xerox Corporation

    Inventor： Kubby, Joel A. ,  Eklund, Elliott A. ,  Gulvin, Peter M.

    IPC: B41J2/14

    CPC classification number: F04B43/043 ,  B41J2/14314 ,  B81B3/0051 ,  B81B2201/036 ,  B81B2201/045 ,  B81B2201/052 ,  B81B2203/0127 ,  B81B2203/053

    Abstract: An electrostatic injet head (10) having an inner structure (56) on the bottom of the top (53) of the membrane (50) for isolating it for the conductor (40), and an outer structure (58), away from the center of the membrane (50), on the bottom of the top (53) of the membrane (50) to stop excessive flexing of the membrane (50) leading to inter-electrode contact. The invention can be used in various silicon-based actuators, including fluid pumps and optical switching devices.

    Abstract translation: 在所述膜（50）的顶部（53）的底部具有用于将所述导体（40）隔离的内部结构（56）的静电喷射头（10）和远离所述导体（40）的外部结构（58） 在膜（50）的顶部（53）的底部上的膜（50）的中心，以阻止膜（50）的过度弯曲，导致电极间接触。 本发明可用于各种基于硅的致动器，包括流体泵和光学开关装置。

    HEAT ACTIVATED NANOMETER-SCALE PUMP
    26.
    发明申请
    HEAT ACTIVATED NANOMETER-SCALE PUMP 审中-公开
    热活化纳米级泵

    公开(公告)号：WO2007012028A3

    公开(公告)日：2007-04-19

    申请号：PCT/US2006028113

    申请日：2006-07-19

    Applicant: PINKERTON JOSEPH P

    Inventor： PINKERTON JOSEPH P

    IPC: B81B3/00

    CPC classification number: B81B3/0051 ,  B81B2201/036 ,  B81B2203/0118 ,  F04B19/00 ,  F04B19/006

    Abstract: A pump is provided that includes a nanometer- scale beam that is suspended in a housing. The housing may include a number of apertures such that molecules can move in and out of the housing. The nanometer- scale beam may be suspended as a jump rope or as a cantilever. The movement of the nanometer- scale beam may be mechanically stopped from moving in a particular way (e.g. , towards a particular end of the housing) . Thus, for example, the beam and the stop work together to pump molecules in the direction that the beam bounces off the stop. The speed and movement of the nanometer- scale beam can also be influenced either electrostatically or electromagnetically . As such, the speed and direction that a working substance is pumped by a nanometer- scale beam may be electrically controlled.

    Abstract translation: 提供的泵包括悬挂在壳体中的纳米级光束。 壳体可以包括多个孔，使得分子可以移入和移出壳体。 纳米级光束可以悬挂为跳绳或悬臂。 纳米级光束的运动可以机械地停止以特定方式移动（例如朝向壳体的特定端）。 因此，例如，光束和光阑一起工作以在光束从光阑上反弹的方向上泵吸分子。 纳米级光束的速度和移动也可以通过静电或电磁方式影响。 因此，工作物质被纳米级光束泵浦的速度和方向可以被电控制。

    MICROMECHANICAL COMPONENT AND CORRESPONDING PRODUCTION METHOD
    28.
    发明申请
    MICROMECHANICAL COMPONENT AND CORRESPONDING PRODUCTION METHOD 审中-公开
    微机械结构及相应方法

    公开(公告)号：WO02036484A1

    公开(公告)日：2002-05-10

    申请号：PCT/DE2001/003839

    申请日：2001-10-06

    IPC: G01P15/125 ,  B81B3/00 ,  B81C1/00 ,  H01L29/84

    CPC classification number: B81C1/00595 ,  B81B2201/0235 ,  B81B2201/036 ,  B81C2201/0114 ,  B81C2201/0115 ,  B81C2201/0136 ,  B81C2203/0136

    Abstract: The invention relates to the production of a micromechanical component, comprising a substrate (10), made from a substrate material with a first doping type (p), a micromechanical functional structure arranged in the substrate (10) and a cover layer for the at least partial covering of the micromechanical functional structure. The micromechanical functional structure comprises regions (15; 15a; 15b; 15c; 730; 740; 830) made from the substrate material with a second doping type (n), at least partially surrounded by a cavity (50; 50a-f) and the cover layer comprises a porous layer (30) made from the substrate material.

    Abstract translation: 本发明提供具有与第一掺杂型（p）制成的基质材料构成的基板（10）上的微机械部件; 一个在设置于微机械功能结构的衬底（10）; 和用于至少部分地覆盖所述微机械功能结构的盖。 微机械功能结构包括区域（15; 830 15A; 15B; 15C; 730; 740），其通过一腔体（50; 50A-f）至少部分地用第二掺杂类型（n）的衬底材料的被包围，并且 覆盖层具有在基板材料的多孔层（30）。

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