公开(公告)号：US20130001443A1

公开(公告)日：2013-01-03

申请号：US13634071

申请日：2011-03-11

Applicant: Yong Woon Park ,  In Soo Ko ,  Sung Ju Park ,  Yong Jeong Park ,  Seung Hwan Kim ,  Ju Ho Hong ,  Sung Ik Moon

Inventor： Yong Woon Park ,  In Soo Ko ,  Sung Ju Park ,  Yong Jeong Park ,  Seung Hwan Kim ,  Ju Ho Hong ,  Sung Ik Moon

IPC: H01J9/26 ,  G21K5/00

CPC classification number: H01J37/06 ,  H01J3/024 ,  H01J3/027 ,  H01J37/075 ,  H01J2237/0473 ,  H01J2237/061 ,  H01J2237/166 ,  Y10T29/49004

Abstract: The present invention relates to an apparatus for generating an electron beam, comprising: a cathode; a housing which has an opening formed at one side thereof such that the cathode is coupled to the opening, and which has a resonant cavity formed therein; and a gasket interposed between the cathode and the housing such that the gasket is compressed in accordance with the coupling strength between the cathode and the housing so as to shut off the resonant cavity from the outside.

Abstract translation: 本发明涉及一种用于产生电子束的装置，包括：阴极; 壳体，其一侧形成有开口，所述开口与所述开口相连并且在其中形成有谐振腔; 以及插入在阴极和壳体之间的衬垫，使得衬垫根据阴极和壳体之间的耦合强度被压缩，以便将谐振腔从外部截止。

公开(公告)号：US06707240B1

公开(公告)日：2004-03-16

申请号：US09890959

申请日：2001-09-28

Applicant: Mamoru Nakasuji ,  Kazuya Okamoto

Inventor： Mamoru Nakasuji ,  Kazuya Okamoto

IPC: H01J115

CPC classification number: H01J3/024 ,  H01J37/075 ,  H01J2237/3175

Abstract: An electron gun includes a plate-like main cathode 77 having an electron emitting surface 79 and a sub-cathode 81 provided toward the rear surface of the main cathode to heat the main cathode 77 by imparting an electron bombardment. The sub-cathode 81 is constituted of filaments 83 and 85 coiled in a double helix structure and the diameter of the sub-cathode 81 is larger than the diameter of the main cathode 77. As a result, the temperature at the peripheral area of the electron emitting surface 79 can be set higher than the temperature at the center, to achieve an electron beam with a uniform intensity distribution.

Abstract translation: 电子枪包括具有电子发射表面79的板状主阴极77和朝向主阴极的后表面设置的副阴极81，以通过施加电子轰击来加热主阴极77。 副阴极81由以双螺旋结构卷绕的细丝83和85构成，并且副阴极81的直径大于主阴极77的直径。因此， 电子发射表面79可以被设置为高于中心处的温度，以实现具有均匀强度分布的电子束。

公开(公告)号：US06399934B1

公开(公告)日：2002-06-04

申请号：US09642525

申请日：2000-08-18

Applicant: Jeffrey S. Sullivan ,  Steven Coyle ,  Andres Fernandez ,  Marian Mankos

Inventor： Jeffrey S. Sullivan ,  Steven Coyle ,  Andres Fernandez ,  Marian Mankos

IPC: H01J4014

CPC classification number: H01J3/024 ,  H01J37/073

Abstract: An electron source is disclosed in which control signals having transition times less than about 10 nanoseconds and electrically isolated from a gated photocathode control an electron beam supplied by the gated photocathode. In one embodiment, the electron source includes a transmissive substrate, a photoemitter on the substrate, a gate insulator on the photoemitter, a gate electrode on the gate insulator, a housing enclosing the photoemitter and the gate electrode, a light source located outside the housing, and a detector located in the housing to receive light from the light source. The detector is electrically coupled to control a voltage applied to one of the gate electrode or the photoemitter.

Abstract translation: 公开了一种电子源，其中具有小于约10纳秒的转换时间和与门控光电阴极电隔离的控制信号控制由门控光电阴极提供的电子束。 在一个实施例中，电子源包括透射衬底，衬底上的光发射器，光发射器上的栅极绝缘体，栅极绝缘体上的栅极电极，封装光电发生器和栅电极的壳体，位于壳体外部的光源 以及位于壳体中的用于接收来自光源的光的检测器。 检测器电耦合以控制施加到栅极电极或光电发射器之一的电压。

公开(公告)号：US3388280A

公开(公告)日：1968-06-11

申请号：US54371166

申请日：1966-04-19

Applicant: VICTOR E. DE LUCIA

Inventor： DE LUCIA VICTOR E

IPC: H01J1/20 ,  H01J3/02 ,  H01J29/04

CPC classification number: H01J1/20 ,  H01J3/024 ,  H01J29/04

公开(公告)号：US2814751A

公开(公告)日：1957-11-26

申请号：US49466755

申请日：1955-03-16

Applicant: EITEL MCCULLOUGH INC

Inventor： MURDOCK CLAYTON E ,  WOERNER JOHN J

IPC: H01J3/02 ,  H01J29/02

CPC classification number: H01J3/027 ,  H01J3/024 ,  H01J29/02

公开(公告)号：US20150270088A1

公开(公告)日：2015-09-24

申请号：US14621526

申请日：2015-02-13

Applicant: JEOL Ltd.

Inventor： Takashi Satoh

IPC: H01J3/08 ,  H01J3/02

CPC classification number: H01J3/08 ,  B22F3/1055 ,  B23K15/002 ,  B23K15/0026 ,  B23K15/0086 ,  B23K15/06 ,  B33Y30/00 ,  H01J3/02 ,  H01J3/024 ,  H01J3/027 ,  H01J37/063 ,  H01J37/305 ,  H01J2237/06308 ,  H01J2237/065 ,  H01J2237/3128 ,  Y02P10/295

Abstract: There is disclosed a method of controlling an electron gun without causing decreases in brightness of the electron beam if a current-limiting aperture cannot be used. The electron gun (10) has a cathode (11), a Wehnelt electrode (12), a control electrode (13), an anode (14), and a controller (22). The Wehnelt electrode (12) has a first opening (12c) in which the tip of the cathode is inserted, and focuses thermal electrons emitted from the tip of the cathode (11). The thermal electrons emitted from the tip of the cathode (11) are caused to pass into a second opening (13c) by the control electrode (13). The anode (14) accelerates the thermal electrons emitted from the cathode (11) such that the thermal electrons passed through the second opening (13c) pass through a third opening (14b) and impinge as an electron beam (B1) on a powdered sample (8). The controller (22) sets the bias voltage and the control voltage based on combination conditions of the bias voltage and control voltage to maintain the brightness of the beam constant.

Abstract translation: 如果不能使用限流孔，则公开了一种控制电子枪而不引起电子束亮度降低的方法。 电子枪（10）具有阴极（11），Wehnelt电极（12），控制电极（13），阳极（14）和控制器（22）。 Wehnelt电极（12）具有插入阴极顶端的第一开口（12c），并聚焦从阴极（11）的尖端发射的热电子。 从阴极（11）的顶端发射的热电子被控制电极（13）通入第二开口（13c）。 阳极（14）加速从阴极（11）发射的热电子，使得穿过第二开口（13c）的热电子通过第三开口（14b）并作为电子束（B1）撞击在粉末样品上 （8）。 控制器（22）基于偏置电压和控制电压的组合条件设置偏置电压和控制电压，以保持光束的亮度恒定。

公开(公告)号：US08742344B2

公开(公告)日：2014-06-03

申请号：US14026385

申请日：2013-09-13

Applicant: Ebara Corporation

Inventor： Masahiro Hatakeyama ,  Yasushi Toma ,  Shoji Yoshikawa ,  Kiwamu Tsukamoto

IPC: G01N23/00 ,  G21K7/00

CPC classification number: H01J37/22 ,  G01N23/2251 ,  G01N2223/204 ,  G01N2223/611 ,  H01J3/024 ,  H01J37/075 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/2448 ,  H01J2237/2806

Abstract: An inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles. The primary optical system includes a photoelectron generator having a photoelectronic surface. The base material of the photoelectronic surface is made of material having a higher thermal conductivity than the thermal conductivity of quartz. A central portion of the inspection object is provided with a central flat portion 390. The periphery of the central flat portion 390 is provided with peripheral flat portion 392 via a step 391. The periphery of the step 391 is provided with an electric field correction plate 400. A surface voltage equivalent to a surface voltage applied to the inspection object is applied to an electrode 401 on the electric field correction plate 400.

Abstract translation: 检查装置包括：用于产生任何带电粒子和电磁波作为光束的光束产生装置; 主光学系统，其将光束引导到保持在工作室中的检查对象中，并用该光束照射检查对象; 第二光学系统，其检测从检查对象发生的次级带电粒子; 以及基于检测到的二次带电粒子形成图像的图像处理系统。 主光学系统包括具有光电子表面的光电子发生器。 光电子表面的基材由具有比石英热导率更高的导热性的材料制成。 检查对象的中央部设置有中央平坦部390.中央平坦部390的周边经由台阶391设置有周边平坦部392.台阶部391的外周设有电场校正板 将与施加到检查对象的表面电压等效的表面电压施加到电场校正板400上的电极401。

公开(公告)号：US5097178A

公开(公告)日：1992-03-17

申请号：US655882

申请日：1991-02-14

Applicant: Susumu Nishihara

Inventor： Susumu Nishihara

IPC: H05H9/00 ,  H01J3/02 ,  H01J23/06 ,  H01J37/06 ,  H01J49/08

CPC classification number: H01J3/024 ,  H01J23/06

Abstract: A RF electron gun, such as for use in a linear electron accelerator, having a cathode activating device which, in one embodiment, includes means for altering the phase of the accelerating electric field to accelerate emitted electrons in the reverse direction to cause them to strike the cathode, thereby activating the cathode. In another embodiment, laser light is directed onto the cathode for activation thereof and, in a further embodiment, the electric field is positioned and directed at the cathode to cause the activation thereof.

Abstract translation: 用于线性电子加速器的RF电子枪具有阴极激活装置，在一个实施例中，阴极激活装置包括用于改变加速电场的相位以加速发射的电子在相反方向上的装置，以使它们发射 阴极，从而激活阴极。 在另一个实施例中，激光被引导到阴极上用于激活它，并且在另一实施例中，电场被定位并且指向阴极以引起其激活。

公开(公告)号：US4786844A

公开(公告)日：1988-11-22

申请号：US31618

申请日：1987-03-30

Applicant: Sherman R. Farrell ,  Richard R. Smith

Inventor： Sherman R. Farrell ,  Richard R. Smith

IPC: H01J27/08 ,  H01J3/02 ,  H01J27/20 ,  H01J33/00 ,  H01J37/06 ,  H01J37/08 ,  H01J7/24

CPC classification number: H01J3/024 ,  H01J33/00

Abstract: An ion plasma electron gun for the generation of electron beams which exhibits electron beam dose uniformity and which is capable of varying the dose received by a material to be irradiated. Positive ions generated by a wire in a plasma discharge chamber are accelerated through an extraction grid onto a second chamber containing a high voltage cold cathode. These positive ions bombard a surface of the cathode, causing the cathode to emit secondary electrons which form an electron beam. After passing through the extraction grid in the plasma discharge chamber, the electron beam exits from the gun by way of a second grid and a foil window supported on the second grid. The gun is constructed so that the electron beam passing through the foil window has a relatively large area and uniform electron distribution which is subsantially the same as the ion distribution of the ion beam impinging upon the cathode. Means are provided for creating a pulse of secondary electrons by varying the period of time in which the secondary electrons are transmitted through the foil.

Abstract translation: 一种用于产生电子束的离子等离子体电子枪，其表现出电子束剂量均匀性，并且能够改变待照射材料接收的剂量。 通过等离子体放电室中的导线产生的正离子通过提取栅格加速到包含高压冷阴极的第二室上。 这些正离子轰击阴极的表面，导致阴极发射形成电子束的二次电子。 在通过等离子体放电室中的提取格栅之后，电子束通过第二格栅和支撑在第二格栅上的箔窗口从枪射出。 枪被构造成使得通过箔窗的电子束具有相对大的面积和均匀的电子分布，其与入射到阴极上的离子束的离子分布几乎相同。 提供了通过改变二次电子通过箔传输的时间周期来产生二次电子脉冲的装置。

公开(公告)号：US4583023A

公开(公告)日：1986-04-15

申请号：US633602

申请日：1984-07-23

Applicant: Herbert W. Friedman ,  Dennis A. Reilly

Inventor： Herbert W. Friedman ,  Dennis A. Reilly

IPC: H01J3/02 ,  H01J11/04

CPC classification number: H01J3/024

Abstract: A preferably fully impregnated dispenser cathode member or the like forming part of an electron tube, electron beam generator or the like is initially heated by any suitable means to a temperature sufficient for low level electron emission from its rear surface. A hot plate member of preferably equal size is disposed behind the cathode and can either be part of or the means for initially heating the cathode member or it can be heated with the cathode member to the aforementioned cathode member's rear surface low level emission temperature. A sustainer voltage is applied between the cathode member and the hot plate member sufficient to draw a current comprising electron flow from the cathode member to the hot plate member across the space separating them. This current flow or back electron beam results in heating of the hot plate member to a temperature sufficient to raise the closely spaced cathode member to, and then maintain it at, the desired emission temperature and simultaneously allow timely termination of the initial heating process since it is needed only initially.

Abstract translation: 形成电子管，电子束发生器等的一部分的优选的完全浸渍的分配器阴极部件等最初被任何合适的装置加热至足以从其后表面进行低电平发射的温度。 优选地相同尺寸的热板构件设置在阴极的后面，并且可以是用于初始加热阴极构件的一部分或者用于初始加热阴极构件的装置，或者它可以被阴极构件加热到上述阴极构件的背面低水平发射温度。 在阴极构件和热板构件之间施加足够的持续电压，以将包括电子流的电流从阴极构件拉出到热板构件，并跨越隔开它们的空间。 该电流或背电子束导致热板构件的加热到足以使紧密排列的阴极构件升高并随后保持在所需发射温度的温度，并同时允许及时终止初始加热过程，因为它 仅在最初才需要