公开(公告)号：US3983446A

公开(公告)日：1976-09-28

申请号：US160045

申请日：1971-07-06

Applicant: George V. Miram ,  Gerhard B. Kuehne

Inventor： George V. Miram ,  Gerhard B. Kuehne

IPC: H01J3/02 ,  H01J23/065 ,  H01J29/02 ,  H01J29/46

CPC classification number: H01J3/029 ,  H01J23/065 ,  H01J3/026 ,  H01J3/027

Abstract: The electron gun includes a spherically concave cathode emitter with a pair of axially spaced spherically concave focus and control grids closely spaced overlaying the cathode emitter for controlling the beam current. The grids are supported from a common thermally conductive tubular grid support structure via the intermediary of first and second annular members one of which is a thermally conductive insulator. One or more of the grids are serrated about their peripheries to define a plurality of radially directed fingers bonded to the end of a respective annular grid support member. In an alternative embodiment, the end of the annular grid support member, as bonded to the serrated grid, is castellated to accommodate differences in thermal expansion between the grid and the annular grid support member.

Abstract translation: 电子枪包括球形凹阴极发射器，其具有一对轴向间隔开的球形凹焦点和控制栅格，其紧密间隔地覆盖阴极发射器以控制束电流。 栅格由通常的导热管状栅格支撑结构经由第一和第二环形构件的介质支撑，其中一个是导热绝缘体。 一个或多个栅格围绕它们的周边锯齿以限定结合到相应的环形栅格支撑构件的端部的多个径向指向的指状物。 在替代实施例中，环形格栅支撑构件的结合到锯齿形格栅的端部被浇铸以适应栅格和环形栅格支撑构件之间的热膨胀差异。

公开(公告)号：US3026438A

公开(公告)日：1962-03-20

申请号：US74008258

申请日：1958-06-05

Applicant: RCA CORP

Inventor： WARNE JR THOMAS P

IPC: H01J3/02 ,  H01J29/48

CPC classification number: H01J3/026 ,  H01J29/485

公开(公告)号：US1212610A

公开(公告)日：1917-01-16

申请号：US1914815600

申请日：1914-01-31

Applicant: PYLE NAT ELECTRIC HEADLIGHT CO

Inventor： DAKE CHARLES W

CPC classification number: H01J3/026

公开(公告)号：US20170263435A1

公开(公告)日：2017-09-14

申请号：US15068160

申请日：2016-03-11

Applicant: Agilent Technologies, Inc.

Inventor： J. Daniel Geist ,  John Calhoun

IPC: H01K1/18 ,  H01K3/06 ,  H01K3/02 ,  H01K1/14 ,  H01K1/04

CPC classification number: H01K1/18 ,  H01J1/15 ,  H01J1/18 ,  H01J3/026 ,  H01K1/04 ,  H01K1/14 ,  H01K3/02 ,  H01K3/06 ,  H05B3/0033 ,  H05B3/16

Abstract: A filament assembly includes a core and a filament. At least a central portion of the filament is disposed on the core. At least the central portion may be straight or may have a high-resistance configuration such as one in which the filament follows a path that changes direction. A thermionically emissive layer may be disposed on the core so as to encapsulate at least the central portion. The filament assembly may be utilized in any application requiring the production of electrons.

公开(公告)号：US08933414B2

公开(公告)日：2015-01-13

申请号：US13779142

申请日：2013-02-27

Applicant: FEI Company

Inventor： Mostafa Maazouz

IPC: H01J37/05 ,  H01J49/10 ,  H01J49/26 ,  G01R31/305 ,  H01J37/04 ,  H01J3/02

CPC classification number: H01J37/07 ,  H01J3/026 ,  H01J37/04 ,  H01J37/06 ,  H01J37/10 ,  H01J37/1477 ,  H01J37/21 ,  H01J37/248 ,  H01J37/3056 ,  H01J37/3178 ,  H01J2237/0473 ,  H01J2237/04735 ,  H01J2237/04756 ,  H01J2237/1518 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/31749

Abstract: The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential than the final beam energy inside that section of the column. At low kV potential, the aberrations and coulomb interactions are reduced, which results in significant improvements in spot size.

Abstract translation: 本发明提供了一种带电粒子束系统，其中聚焦离子束列的中间部分被偏压到高的负电压，允许光束以比该塔的该部分内的最终光束能量更高的电位移动。 在低kV电位下，像差和库仑相互作用减小，这导致光斑尺寸的显着改善。

公开(公告)号：US20060164001A1

公开(公告)日：2006-07-27

申请号：US11331111

申请日：2006-01-13

Applicant: Jun Iba ,  Yasuo Ohashi ,  Hisanobu Azuma ,  Takahiro Hachisu ,  Masanori Takahashi

Inventor： Jun Iba ,  Yasuo Ohashi ,  Hisanobu Azuma ,  Takahiro Hachisu ,  Masanori Takahashi

IPC: H01J63/04 ,  H01J1/62

CPC classification number: H01J3/026 ,  H01J31/127

Abstract: There provided is an electron beam apparatus of preventing surface creeping discharge from newly arising due to discharge that arises between an anode electrode and an electron-emitting device. In an electron-emitting device including a scan signal device electrode and an information signal device electrode, a portion of the scan signal device electrode is covered by an insulating layer of insulating scan signal wiring from information signal wiring, an additional electrode is connected to the scan signal device electrode at an end portion of the insulating layer and the additional electrode is configured so that energy Ee being lost due to melting of the additional electrode is larger than energy Ea of discharge current flowing in to the electron-emitting device.

Abstract translation: 提供了一种电子束装置，其防止由于在阳极电极和电子发射器件之间产生的放电而新出现的表面蠕变放电。 在包括扫描信号器件电极和信息信号器件电极的电子发射器件中，扫描信号器件电极的一部分被来自信息信号布线的绝缘扫描信号布线的绝缘层覆盖，附加电极连接到 在绝缘层的端部处的扫描信号器件电极和附加电极被配置为使得由于附加电极的熔化而损失的能量Ee大于流入电子发射器件的放电电流的能量Ea。

公开(公告)号：US3808498A

公开(公告)日：1974-04-30

申请号：US24689572

申请日：1972-04-24

Applicant: JEOL LTD

Inventor： FUJISAWA M

IPC: G01Q30/02 ,  H01J3/02 ,  H01J37/06 ,  H01J37/065 ,  H01J37/07 ,  H01J37/24 ,  H01J19/38

CPC classification number: H01J3/026 ,  H01J37/065 ,  H01J37/07 ,  H01J37/241

Abstract: This specification discloses an electron beam generating source having a control electrode comprising electrically conductive and nonconductive or slightly conductive layers, said nonconductive or slightly conductive layer facing an anode. The surface of said conductive layer in contact with said nonconductive or slightly conductive layer faces a cathode, thereby preventing electron emission from said contact surface and so by eliminating or almost entirely eliminating micro discharge.

Abstract translation: 本说明书公开了一种具有控制电极的电子束产生源，该控制电极包括导电和非导电或稍微导电的层，所述非导电或微导电层面向阳极。 与所述非导电或略导电层接触的所述导电层的表面面向阴极，从而防止从所述接触表面发射电子，因此通过消除或几乎完全消除微量放电。

公开(公告)号：US3706002A

公开(公告)日：1972-12-12

申请号：US3706002D

申请日：1970-11-16

Applicant: VARIAN ASSOCIATES

Inventor： MIRAM GEORGE V ,  KUEHNE GERHARD B

IPC: H01J3/02 ,  H01J23/065 ,  H01J25/10

CPC classification number: H01J3/027 ,  H01J3/026 ,  H01J23/065

Abstract: A HIGH POWER MICROWAVE BEAM TUBE IS DISCLOSED EMPLOYING AN IMPROVED ELECTRON GUN. THE ELECTRON GUN INCLUDES AN OUTWARDLY FLARED HIGH VOLTAGE ELECTRICAL INSULATOR FOR INSULATING THE ANODE RELATIVE TO THE CATHODE. THE OUTWARDLY FLARED INSULATOR INCLUDES AN EXTERNAL SHOULDER PORTION ENCIRCLING THE FLARED MEBER, SUCH SHOULDER BEING DISPOSED INTERMEDIATE THE LENGTH OF THE FLARED MEMBER AND BEING JOINED TO A PORTION OF THE ENVELOPE OF THE GUN TO BE OPERATED AT A POTENTIAL POSITIVE WITH RESPECT TO THE CATHODE POTENTIAL. A FLUID ENCLOSURE ENCLOSES THE WIDE END OF THE FLARED INSULATOR FOR CONTAINING A FLUID COOLANT IN HEAT EXCHANGING RELATION WITH PORTIONSOF THE VACUUM ENVELOPE OF THE GUN FOR COOLING THE GUN IN USE.

公开(公告)号：US3631290A

公开(公告)日：1971-12-28

申请号：US3631290D

申请日：1970-08-17

Applicant: IBM

Inventor： LOEFFLER KARL H

IPC: H01J1/15 ,  H01J3/02 ,  H01J1/14 ,  H01J19/08

CPC classification number: H01J1/15 ,  H01J3/026 ,  H01J3/027

Abstract: A thermionic cathode comprising a lanthanum hexaboride (LaB6) emitter and an emission current-intercepting plate made of rhenium containing an aperture disposed adjacent the emitter. The separation between the emitter and plate is set as small as possible without physical contact between them, typically 0.1 mm. The beam emitted through the aperture has high brightness and low energy spread. To prevent corrosion of the emitter it is housed in a cavity which is exposed to the vacuum of the apparatus only through the aperture.

公开(公告)号：US582378A

公开(公告)日：1897-05-11

申请号：US582378D

CPC classification number: H01J3/026