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公开(公告)号：KR1020170113491A
公开(公告)日：2017-10-12
申请号：KR1020170076420
申请日：2017-06-16
Applicant: 한국표준과학연구원
IPC: H01J37/05 , H01J37/12 , H01J49/44 , G01N23/225 , H01J37/21
Abstract: 본발명은하전입자선의진로를편향시키는원통형정전렌즈를대칭으로배열하고그 사이에에너지선택조리개(aperture)를배치하여중심에너지범위의하전입자선을선택하는것이가능한하전입자선장치에관한것으로, 모노크로미터중앙전극및 상기중앙전극을중심으로전방부와후방부에배열되는복수개의전극이절연을통해서로고정되는일체화구조를취하기때문에, 전방부와후방부에각각의렌즈를별도로마련하는경우에비해광축에대해오프셋을조정하는기구가간소해지는장점을가지며, 광학계의대칭성에의해출사면에서이차수차가상쇄된다.
Abstract translation: 涉及能够布置的圆柱形静电透镜用于偏转发明当然银河的该带电粒子射线装置的带电粒子线对称和设置在所述选择的带电粒子束之间的能量选择孔（开口）中的能量范围内，单声道的中心 因为色度米中心电极，并采取集成结构，其被固定到所述多个经由绝缘，其被布置在所述前部和相对于所述中心电极的背面部电极，在提供的情况下，各透镜分开的前部和后部 用于调节相对于光轴的偏移的机构被简化，并且二阶差被发射表面上的光学系统的对称性抵消。
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公开(公告)号：KR101554594B1
公开(公告)日：2015-09-22
申请号：KR1020130148855
申请日：2013-12-02
Applicant: 한국표준과학연구원
IPC: H01J37/147 , H01J37/21 , H01J37/317
CPC classification number: H01J37/147 , H01J37/21 , H01J37/317
Abstract: 본발명은하전입자빔을방출하는하전입자소스, 상기하전입자소스쪽에구비되며, 전기장또는자기장에의해상기하전입자빔을집속하여주는하나이상의중간집속렌즈, 및최종집속렌즈로서시료쪽에구비되며, 시료위에집속되는빔 스폿인하전입자빔 프로브를형성시키는대물렌즈를포함하는집속렌즈군, 상기하전입자소스및 집속렌즈군을내부에구비하며, 상기하전입자소스로부터방출된하전입자빔이대물렌즈를거쳐시료에조사되는통로인어퍼처를구비하는진공챔버, 상기하전입자빔의조사방향을제어하여바꾸어주는하나이상의편향기, 및관찰또는가공하려는시료를지지하며, 상기시료를이동할수 있는시료스테이지를포함하는하전입자빔 프로브형성장치및 이를이용하여시료를관찰또는가공하는방법에관한것이다.
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公开(公告)号：KR1020150064311A
公开(公告)日：2015-06-11
申请号：KR1020130148855
申请日：2013-12-02
Applicant: 한국표준과학연구원
IPC: H01J37/147 , H01J37/21 , H01J37/317
CPC classification number: H01J37/147 , H01J37/21 , H01J37/317
Abstract: 본발명은하전입자빔을방출하는하전입자소스, 상기하전입자소스쪽에구비되며, 전기장또는자기장에의해상기하전입자빔을집속하여주는하나이상의중간집속렌즈, 및최종집속렌즈로서시료쪽에구비되며, 시료위에집속되는빔 스폿인하전입자빔 프로브를형성시키는대물렌즈를포함하는집속렌즈군, 상기하전입자소스및 집속렌즈군을내부에구비하며, 상기하전입자소스로부터방출된하전입자빔이대물렌즈를거쳐시료에조사되는통로인어퍼처를구비하는진공챔버, 상기하전입자빔의조사방향을제어하여바꾸어주는하나이상의편향기, 및관찰또는가공하려는시료를지지하며, 상기시료를이동할수 있는시료스테이지를포함하는하전입자빔 프로브형성장치및 이를이용하여시료를관찰또는가공하는방법에관한것이다.
Abstract translation: 本发明涉及一种用于形成带电粒子束探针的装置和一种通过使用该装置来监测或处理样品的方法。 它包括一个聚焦透镜接地，它包括一个发射一个电荷粒子束的电荷粒子源，至少一个中间聚焦透镜，形成在电荷粒子源中，并通过电场或磁场聚焦电荷粒子束; 透镜，其被用作要形成于样品的最终聚焦透镜，并形成作为聚焦在样品上的束斑的电荷粒子束;真空室，其包括电荷粒子源和聚焦透镜组，并且具有孔径， 从充电粒子源发射的电荷粒子束通过物镜的路径，至少一个控制电荷粒子束的照射方向并改变其的照射方向的偏转器，以及支持待监测或处理的样品的样品台， 可以移动样品。
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公开(公告)号：KR101212001B1
公开(公告)日：2012-12-13
申请号：KR1020090114739
申请日：2009-11-25
Applicant: 한국표준과학연구원
Abstract: 본발명은샘플홀더이동시스템및 그시스템을이용하여샘플홀더를이동하는방법에대한것이다. 보다상세하게는, 샘플홀더이동시스템에있어서,끝단둘레에나사가구비된워엄기어; 워엄기어와연결되어워엄기어를워엄기어길이방향축을중심으로회전시키는구동부;하단에워엄기어가결합되고, 일측이개방되고일정곡률로만곡된내부공간을구비하는기저단; 원호형태로구비되고, 일정곡률로만곡된안쪽면과일정곡률로만곡되고톱니를구비한바깥면을포함하고, 기저단의내부공간에삽입되어톱니와워엄기어의나사가맞물리게되는원호형스테이지; 및원호형스테이지의안쪽면일부에결합되어고정되고, 샘플홀더를장착하는장착부재;를포함하여, 구동부의구동으로원호형스테이지가일정곡률의중심축을기준으로회전운동을하게되는것을특징으로하는샘플홀더이동시스템에관한것이다.
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公开(公告)号：KR1020120127054A
公开(公告)日：2012-11-21
申请号：KR1020110045281
申请日：2011-05-13
Applicant: 한국표준과학연구원
CPC classification number: H01J49/0004 , H01J49/142 , H01J49/164 , H01J49/40 , H01J49/406 , H01J49/0418 , H01J49/067 , H01J49/408
Abstract: PURPOSE: A flight time based mass microscope system is provided to change lens conditions by measuring mass imaging analysis of a sample with a TOF(Time of flight) base microscope mode. CONSTITUTION: A laser input unit(110) radiates laser beam to a sample. An ion gun assembly(120) radiates ion beam to the sample. A sample inlet chamber(130) introduces the sample through a sample inlet unit(131). The sample is arranged on a sample plate(140). A sample plate manipulator(150) controls the location of the sample plate. A CCD(Charge Coupled Device) camera takes a photograph of an image of the sample. A source lens assembly controls focus of the laser beam or the ion beam. A position measuring TOF detector measures the location of secondary ion generated in the sample.
Abstract translation: 目的：提供基于飞行时间的质量显微镜系统，通过测量具有TOF（飞行时间）基底显微镜模式的样品的质量成像分析来改变透镜状态。 构成：激光输入单元（110）向样品辐射激光束。 离子枪组件（120）将离子束辐射到样品。 样品入口室（130）将样品引入样品入口单元（131）。 样品被布置在样品板（140）上。 样品板机械手（150）控制样品板的位置。 CCD（电荷耦合器件）相机拍摄样品的图像。 源透镜组件控制激光束或离子束的焦点。 位置测量TOF检测器测量样品中产生的二次离子的位置。
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Patent Agency Ranking
公开(公告)号：KR1020110059981A
公开(公告)日：2011-06-08
申请号：KR1020090116440
申请日：2009-11-30
Applicant: 한국표준과학연구원
Abstract: PURPOSE: A 7-axis manipulator and a sample-holder moving method using the 7-axis manipulator are provided to precisely move the sample holder by linearly moving or rotating the sample holder on different directions and different axes by seven driving units. CONSTITUTION: A 7-axis manipulator comprises first to seventh driving units, a base unit(510), first and second stages(520,650) and a sample holder(640). The first driving unit linearly reciprocates a connecting member(130) on a first axis(110) of a lead screw(120). The second driving unit rotates a central axis member(210). The third and fourth driving units linearly reciprocates first and second moving members(320,420) on second and third axes(310,410), respectively. The base unit is coupled to the second moving member. Saw teeth is formed on the outer surface of the first stage and a fixed member is formed on the inner surface of the first stage.
Abstract translation: 目的：提供使用7轴机械手的7轴机械手和样品架移动方法，通过七个驱动单元在不同方向和不同轴线上线性移动或旋转样品架来精确移动样品架。 构成：7轴操纵器包括第一至第七驱动单元，基座单元（510），第一和第二平台（520,650）和样品架（640）。 第一驱动单元使连接构件（130）在导螺杆（120）的第一轴线（110）上线性地往复运动。 第二驱动单元旋转中心轴构件（210）。 第三和第四驱动单元分别在第二和第三轴（310,410）上线性往复运动第一和第二移动构件（320,420）。 基座单元联接到第二移动构件。 在第一阶段的外表面上形成锯齿，并且在第一阶段的内表面上形成固定构件。
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公开(公告)号：KR1020110059980A
公开(公告)日：2011-06-08
申请号：KR1020090116439
申请日：2009-11-30
Applicant: 한국표준과학연구원
Abstract: PURPOSE: A sample holder two-axis stage system is provided to enable the rotation and movement of a sample holder to which a specimen is fixed in the direction of an axis of a sample holder. CONSTITUTION: A sample holder two-axis stage system(10) comprises: a first driving unit(100) for rotating a first gear(110) around a first axis(120); a second gear(300) rotated by the first driving unit while going in gear with the first gear; a sample holder(200) to which a specimen is fixed; a transfer stage(400) in which the lower surface thereof is bent downward in a constant curvature; a body(500) in which the transfer stage is inserted; a ball bearing member equipped between the transfer stage and the body; and a second driving unit(700) for rotating the transfer stage around a third axis by the ball bearing member.
Abstract translation: 目的：提供样品架双轴平台系统，以使得样品固定器沿着样品架的轴线方向固定的样品架的旋转和移动。 构成：样品架双轴平台系统（10）包括：第一驱动单元（100），用于围绕第一轴线（120）旋转第一齿轮（110）; 第二齿轮（300），与所述第一齿轮一起转动，由所述第一驱动单元旋转; 固定有试样的样品架（200）; 传送台（400），其下表面以恒定的曲率向下弯曲; 其中插入转移台的主体（500）; 设置在转印台和主体之间的滚珠轴承构件; 以及第二驱动单元（700），用于通过滚珠轴承部件使转印台围绕第三轴旋转。
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公开(公告)号：KR1020100134546A
公开(公告)日：2010-12-23
申请号：KR1020100127420
申请日：2010-12-14
IPC: G01J3/02 , G01N23/225 , H01J49/02
Abstract: PURPOSE: A medium energy ion scattering spectrometer is provided to finely analyze the movement of elements on the surface and the interface by accurately measuring the scattering angle and the scattering position of ion beam. CONSTITUTION: A medium energy ion scattering spectrometer includes ion beam(10), a collimator(20), an accelerator(30), an ion beam pulse generator(40), a deflector, and a detector(60). The ion beam generates ion. Based on the ion, parallel beam is obtained using the collimator. The accelerator accelerates the parallel beam to obtain energy. The ion beam pulse generator pulses the accelerated ion beam. The deflector regulates the focus of the ion beam radiation. The detector detects the spectral signal of the ion beam pulse.
Abstract translation: 目的：提供中等能量离子散射光谱仪，通过精确测量离子束的散射角和散射位置，精细分析表面和界面上元素的运动。 构成：中等能量离子散射光谱仪包括离子束（10），准直仪（20），加速器（30），离子束脉冲发生器（40），偏转器和检测器（60）。 离子束产生离子。 基于离子，使用准直仪获得平行光束。 加速器加速平行光束以获得能量。 离子束脉冲发生器脉冲加速离子束。 偏转器调节离子束辐射的焦点。 检测器检测离子束脉冲的光谱信号。
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公开(公告)号：KR1020100013562A
公开(公告)日：2010-02-10
申请号：KR1020080075139
申请日：2008-07-31
IPC: G01J3/02
Abstract: PURPOSE: A medium energy ion scattering spectrometer is provided to precisely analyze the movement of atoms at a surface and interface by measuring accurate scattering angle and position of ion beam according to time. CONSTITUTION: A medium energy ion scattering spectrometer comprises an ion source(10), a collimator(20) which turns ion from the ion source into collimated beam, an accelerator(30), an ion beam pulse generator(40) which makes the accelerated ion beam into pulses to create ion beam flux, a concentration objective lens(50), a detector(60), and a data analyzer which transmits a detected spectral signal and analyzes data.
Abstract translation: 目的：提供中等能量离子散射光谱仪，通过根据时间测量离子束的精确散射角和位置来精确分析表面和界面处原子的运动。 构成：中等能量离子散射光谱仪包括离子源（10），将离子源从离子源转换成准直光束的准直器（20），加速器（30），离子束脉冲发生器（40） 离子束成脉冲以产生离子束通量，浓度物镜（50），检测器（60）和数据分析器，其传输检测到的光谱信号并分析数据。
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公开(公告)号：KR100642276B1
公开(公告)日：2006-11-03
申请号：KR1020040017717
申请日：2004-03-16
Applicant: 한국표준과학연구원
IPC: G21K1/06
Abstract: 본 발명은 X-선 모노크로메타 크리스탈의 미세조절장치에 관한 것으로, 보다 상세하게는 한 쌍으로 구비되는 고정블럭에 각각 두 개의 제 1미세조정볼트와 한 개의 제 2미세조정볼트를 통해 크리스탈의 곡면을 형성하고, 이렇게 형성된 곡면의 뒤틀림을 보정하여 최소화하기 위한 X-선 모노크로메타 크리스탈의 미세조절장치에 관한 것이다. 따라서, 본 발명에 의하면, 고정블럭을 "ㄴ" 형상의 2개로 형성하고 각각을 제 1미세조정볼트 및 제 2미세조정볼트로 3개소에서 상/하 구동하게 함으로써 크리스탈의 곡률 형성뿐만 아니라 형성된 곡면의 뒤틀림을 보정할 수 있어 크리스탈의 각 부위의 곡률 반경에 대한 편차를 최소화하여 보다 정밀한 극미세구조의 분석 및 해석을 가능하게 할 수 있다. 그리고 본 발명에 의하면, 기초판의 저면에 길이방향으로 도브테일 형상의 밑판을 구성함으로써 본 발명에 따른 장치의 장착 및 고정시에 크리스탈에 가해지는 외력을 최소로 하여 크리스탈에 형성된 곡률 반경이 그대로 유지되도록 할 수 있다.
X-선, 모노크로메타, 크리스탈, XIEES, 피치, 곡률
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