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公开(公告)号:GB2453283B
公开(公告)日:2012-01-11
申请号:GB0822743
申请日:2007-06-26
Applicant: INTEL CORP
Inventor: MA QING , CHOU TSUNG-KUAN ALLEN , RAO VALLURI R
IPC: H01L45/00 , B81B3/00 , G11C16/02 , H01L21/8247 , H01L27/108 , H01L27/115 , H01L27/24
Abstract: An apparatus comprising a substrate, a heater formed on the substrate, and a phase-change layer formed on the heater. The heater comprises a heater layer and first and second electrodes electrically coupled to the heater layer. A process comprising forming a heater on a substrate and forming a phase-change layer on the heater. The heater comprises a heater layer and first and second electrodes electrically coupled to the heater layer.
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公开(公告)号:DE60332351D1
公开(公告)日:2010-06-10
申请号:DE60332351
申请日:2003-08-13
Applicant: INTEL CORP
Inventor: MA QING
Abstract: A microelectromechanical system (MEMS) that includes a first electro-thermal actuator, a second electro-thermal actuator and a beam having a first side and a second side. The first electro-thermal actuator applies a force to the first side of the beam as current passes through the first electro-thermal actuator and the second electro-thermal actuator applies a force to the second side of the beam as current passes through the second electro-thermal actuator.
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公开(公告)号:AT467221T
公开(公告)日:2010-05-15
申请号:AT01908665
申请日:2001-01-22
Applicant: INTEL CORP
Inventor: CHENG PENG , MA QING
IPC: H01G5/16
Abstract: The invention relates to a variable capacitor and method of making it. The variable capacitor comprises a fixed charge plate disposed in a substrate, a movable charge plate disposed above the fixed charge plate, and a stiffener affixed to the movable charge plate. The movable charge plate may be patterned to form a movable actuator plate where the fixed charge plate is elevated above a fixed actuator plate.
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公开(公告)号:DE60138416D1
公开(公告)日:2009-05-28
申请号:DE60138416
申请日:2001-08-10
Applicant: INTEL CORP
Inventor: MU XIAO-CHUN , MA QING , FUJIMOTO HARRY
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公开(公告)号:AT422103T
公开(公告)日:2009-02-15
申请号:AT05853644
申请日:2005-12-09
Applicant: INTEL CORP
Inventor: MA QING , LIN XINTIAN , BETTNER ALLEN
IPC: H01Q13/10
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公开(公告)号:MY137043A
公开(公告)日:2008-12-31
申请号:MYPI20032608
申请日:2003-07-11
Applicant: INTEL CORP
Inventor: WANG LI-PENG , BAR-SADEH EYAL , RAO VALLURI R , HECK JOHN , MA QING , TRAN QUAN , TALALAYEVSKY ALEXANDER , GINSBURG EYAL
Abstract: A FILM BULK ACOUSTIC RESONATOR FILTER (10) MAY BE FORMED WITH A PLURALITY OF INTERCONNECTED SERIES AND SHUNT FILM BULK ACOUSTIC RESONATORS (38) FORMED ON THE SAME MEMBRANE (35). EACH OF THE FILM BULK ACOUSTIC RESONATORS (38) MAY BE FORMED FROM A COMMON LOWER CONDUCTIVE LAYER WHICH IS DEFINED TO FORM THE BOTTOM ELECTRODE (32) OF EACH FILM BULK ACOUSTIC RESONATOR (38). A COMMON TOP CONDUCTIVE LAYER MAY BE DEFINED TO FORM EACH TOP ELECTRODE (36) OF EACH FILM BULK ACOUSTIC RESONATOR (38). A COMMON PIEZOELECTRIC FILM LAYER (34), THAT MAYOR MAY NOT BE PATTERNED, FORMS A CONTINUOUS OR DISCONTINUOUS FILM. FIG 1 & 9.
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公开(公告)号:MY134508A
公开(公告)日:2007-12-31
申请号:MYPI20032216
申请日:2003-06-13
Applicant: INTEL CORP
Inventor: MA QING , CHOU TSUNG-KUAN ALLEN
IPC: B81C1/00 , H01P5/12 , B81B7/00 , B81B7/02 , H01L21/3205 , H01L21/768 , H01L21/822 , H01L23/52 , H01L23/522 , H01L23/66 , H01L27/04
Abstract: A CONDUCTIVE BRIDGE (16) IN A SECOND CONDUCTIVE LAYER MAY BE UTILIZED TO JOIN A PAIR OF SPACED APART CONDUCTIVE STRIPS (12) IN A FIRST CONDUCTIVE LAYER. A GAP (44) BETWEEN THE FIRST AND SECOND STRIPS (12) MAY BE BRIDGED BY THE BRIDGE (16) WHILE ISOLATING BOTH THE FIRST AND SECOND STRIPS (12) AND THE BRIDGE (16) ITSELF FROM ANOTHER CONDUCTOR (18) WHICH EXTENDS THROUGH THE GAP (44) BETWEEN THE FIRST AND SECOND STRIPS (12).(FIG 1)
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公开(公告)号:DE60311125T2
公开(公告)日:2007-10-25
申请号:DE60311125
申请日:2003-07-11
Applicant: INTEL CORP
Abstract: Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.
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公开(公告)号:DE60123659T2
公开(公告)日:2007-08-16
申请号:DE60123659
申请日:2001-11-26
Applicant: INTEL CORP
Inventor: MA QING , RAO R , CHENG PENG
Abstract: The present invention relates to a stepped micro electromechanical structure (MEMS) capacitor that is actuated by a plurality of MEMS switches. The MEMS switches may be within the stepped capacitor circuit, or they may be actuated by an independent circuit. The stepped capacitor may also be varied with intermediate steps of capacitance by providing at least one variable capacitor in the stepped MEMS capacitor structure.
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公开(公告)号:GB2422720B
公开(公告)日:2006-12-20
申请号:GB0518966
申请日:2003-06-18
Applicant: INTEL CORP
Inventor: MA QING , CHOU TSUNG-KUAN ALLEN
IPC: B81C1/00 , H01L23/522 , B81B7/00 , B81B7/02 , H01L21/3205 , H01L21/768 , H01L21/822 , H01L23/52 , H01L23/66 , H01L27/04
Abstract: A conductive bridge (16) in a second conductive layer may be utilized to join a pair of spaced apart conductive strips (12) in a first conductive layer. A gap (44) between the first and second strips (12) may be bridged by the bridge (16) while isolating both the first and second strips (12) and the bridge (16) itself from another conductor (18) which extends through the gap (44) between the first and second strips (12).
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