32.
    发明专利
    未知

    公开(公告)号:DE60332351D1

    公开(公告)日:2010-06-10

    申请号:DE60332351

    申请日:2003-08-13

    Applicant: INTEL CORP

    Inventor: MA QING

    Abstract: A microelectromechanical system (MEMS) that includes a first electro-thermal actuator, a second electro-thermal actuator and a beam having a first side and a second side. The first electro-thermal actuator applies a force to the first side of the beam as current passes through the first electro-thermal actuator and the second electro-thermal actuator applies a force to the second side of the beam as current passes through the second electro-thermal actuator.

    33.
    发明专利
    未知

    公开(公告)号:AT467221T

    公开(公告)日:2010-05-15

    申请号:AT01908665

    申请日:2001-01-22

    Applicant: INTEL CORP

    Inventor: CHENG PENG MA QING

    Abstract: The invention relates to a variable capacitor and method of making it. The variable capacitor comprises a fixed charge plate disposed in a substrate, a movable charge plate disposed above the fixed charge plate, and a stiffener affixed to the movable charge plate. The movable charge plate may be patterned to form a movable actuator plate where the fixed charge plate is elevated above a fixed actuator plate.

    38.
    发明专利
    未知

    公开(公告)号:DE60311125T2

    公开(公告)日:2007-10-25

    申请号:DE60311125

    申请日:2003-07-11

    Applicant: INTEL CORP

    Inventor: MA QING SHIM DONG

    Abstract: Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.

    39.
    发明专利
    未知

    公开(公告)号:DE60123659T2

    公开(公告)日:2007-08-16

    申请号:DE60123659

    申请日:2001-11-26

    Applicant: INTEL CORP

    Abstract: The present invention relates to a stepped micro electromechanical structure (MEMS) capacitor that is actuated by a plurality of MEMS switches. The MEMS switches may be within the stepped capacitor circuit, or they may be actuated by an independent circuit. The stepped capacitor may also be varied with intermediate steps of capacitance by providing at least one variable capacitor in the stepped MEMS capacitor structure.

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