公开(公告)号：US08816299B1

公开(公告)日：2014-08-26

申请号：US13798927

申请日：2013-03-13

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： James P. Buonodono ,  Michael Esposito

IPC: G21K5/08

CPC classification number: H01L21/68 ,  H01J37/20 ,  H01J37/3171 ,  H01J2237/2005 ,  H01J2237/20207 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/20242 ,  H01L21/67213 ,  H01L21/68764 ,  H01L21/68792

Abstract: A workpiece adjustment assembly is disclosed. The assembly can include a shaft, a spherical bearing, and a wafer support. A spherical housing receives the spherical bearing and allows the bearing to rotate therein. The housing and bearing may form an air bearing. A seal may be formed in the housing to prevent gas from the air bearing and the ambient atmosphere from migrating to a process chamber side of the housing. A set of spherical air pads may be positioned on an ambient side of the bearing to press the bearing against the housing when the process chamber is not under vacuum conditions. The seal can include a set of differentially pumped grooves. The spherical bearing enables the wafer manipulation end, and a wafer attached thereto, to be moved with four degrees of freedom. The arrangement facilitates isocentric scanning of a workpiece. Methods for using the assembly are also disclosed.

Abstract translation: 公开了一种工件调整组件。 组件可以包括轴，球面轴承和晶片支撑件。 球形壳体接收球面轴承并允许轴承在其中旋转。 外壳和轴承可以形成空气轴承。 可以在壳体中形成密封件，以防止来自空气轴承和周围空气的气体迁移到壳体的处理室侧。 当处理室不在真空条件下时，一组球形空气垫可以定位在轴承的环境侧上，以将轴承压靠在壳体上。 密封件可以包括一组差异泵浦的凹槽。 球面轴承使得晶片操纵端和附接到其上的晶片以四个自由度移动。 该装置有助于工件的等中心扫描。 还公开了使用组件的方法。

公开(公告)号：US08044374B2

公开(公告)日：2011-10-25

申请号：US12494269

申请日：2009-06-30

Applicant: Geoffrey Ryding ,  Theodore H. Smick ,  Kenneth Harry Purser ,  Hilton Glavish ,  Joeph Daniel Gillespie

Inventor： Geoffrey Ryding ,  Theodore H. Smick ,  Kenneth Harry Purser ,  Hilton Glavish ,  Joeph Daniel Gillespie

IPC: H01J37/317

CPC classification number: H01J37/20 ,  H01J37/05 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/057 ,  H01J2237/061 ,  H01J2237/082 ,  H01J2237/166 ,  H01J2237/2001 ,  H01J2237/2005 ,  H01J2237/201 ,  H01J2237/202

Abstract: A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and the wheel is formed with tensioned spokes supporting a rim carrying the wafer supports. The spokes may be used for carrying cooling fluid to and from the wafer supports. In one embodiment, a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel.

Abstract translation: 用于从硅晶片剥离硅的氢离子注入机使用大的扫描轮，围绕其周边承载50个以上的晶圆并围绕一个轴线旋转。 在一个实施例中，车轮的旋转轴线是固定的，并且车轮形成有支撑承载晶片支架的轮辋的张紧轮辐。 轮辐可以用于将冷却流体携带到晶片支撑件和从晶片支撑件传送冷却流体。 在一个实施例中，氢离子的带状光束被向下指向轮的外围边缘。 带状束在轮上的晶片的整个径向宽度上延伸。

公开(公告)号：US07928380B2

公开(公告)日：2011-04-19

申请号：US12342897

申请日：2008-12-23

Applicant: Mitsuo Suga ,  Hidetoshi Nishiyama

Inventor： Mitsuo Suga ,  Hidetoshi Nishiyama

IPC: G01N23/02

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/2004 ,  H01J2237/2005 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/262 ,  H01J2237/28

Abstract: A sample holder used in SEM (scanning electron microscopy) or TEM (transmission electron microscopy) permitting observation and inspection at higher resolution. The holder has a frame-like member provided with an opening that is covered with a film. The film has a first surface on which a sample is held. The thickness D of the film and the length L of the portion of the film providing a cover over the opening in the frame-like member satisfy a relationship given by L/D

Abstract translation: 用于SEM（扫描电子显微镜）或TEM（透射电子显微镜）中的样品架，允许以更高分辨率观察和检查。 保持器具有设置有被膜覆盖的开口的框架状构件。 该膜具有保持样品的第一表面。 膜的厚度D和在框状构件的开口上设置盖的膜的部分的长度L满足由L / D <200,000给出的关系。

公开(公告)号：US20100327181A1

公开(公告)日：2010-12-30

申请号：US12494269

申请日：2009-06-30

Applicant: Geoffrey Ryding ,  Theodore H. Smick ,  Kenneth Harry Purser ,  Hilton Glavish ,  Joeph Daniel Gillespie

Inventor： Geoffrey Ryding ,  Theodore H. Smick ,  Kenneth Harry Purser ,  Hilton Glavish ,  Joeph Daniel Gillespie

IPC: H01J37/20 ,  H01J27/00

CPC classification number: H01J37/20 ,  H01J37/05 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/057 ,  H01J2237/061 ,  H01J2237/082 ,  H01J2237/166 ,  H01J2237/2001 ,  H01J2237/2005 ,  H01J2237/201 ,  H01J2237/202

Abstract: A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and the wheel is formed with tensioned spokes supporting a rim carrying the wafer supports. The spokes may be used for carrying cooling fluid to and from the wafer supports. In one embodiment, a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel.

Abstract translation: 用于从硅晶片剥离硅的氢离子注入机使用大的扫描轮，围绕其周边承载50个以上的晶圆并围绕一个轴线旋转。 在一个实施例中，车轮的旋转轴线是固定的，并且车轮形成有支撑承载晶片支架的轮辋的张紧轮辐。 轮辐可以用于将冷却流体携带到晶片支撑件和从晶片支撑件传送冷却流体。 在一个实施例中，氢离子的带状光束被向下指向轮的外围边缘。 带状束在轮上的晶片的整个径向宽度上延伸。

公开(公告)号：US20060075972A1

公开(公告)日：2006-04-13

申请号：US11258670

申请日：2005-10-25

Applicant: Seiyo Nakashima ,  Michiko Nishiwaki ,  Yukinori Aburatani ,  Satoshi Okada ,  Eisuke Nishitani ,  Kazuhiro Nakagomi ,  Kazuhito Ikeda ,  Kazuhiro Shimeno ,  Gakuji Ohta ,  Katsuhisa Kasanami

Inventor： Seiyo Nakashima ,  Michiko Nishiwaki ,  Yukinori Aburatani ,  Satoshi Okada ,  Eisuke Nishitani ,  Kazuhiro Nakagomi ,  Kazuhito Ikeda ,  Kazuhiro Shimeno ,  Gakuji Ohta ,  Katsuhisa Kasanami

IPC: C23C16/00

CPC classification number: H01L21/68721 ,  C23C16/4584 ,  C23C16/46 ,  H01J2237/2005 ,  H01J2237/32 ,  H01L21/67109 ,  H01L21/68742 ,  H01L21/68785 ,  H01L21/68792

Abstract: A substrate processing apparatus comprises a processing chamber; a susceptor on which a substrate to be processed is to be placed; and a heating unit disposed below the susceptor for heating the substrate to be processed placed on the susceptor. The susceptor and the heating unit are accommodated in the processing chamber, and in a state in which the susceptor and the heating unit are relatively rotated, the substrate to be processed is processed. At least the susceptor is lifted and lowered in the processing chamber, and a substrate to be processed lifting and lowering apparatus for lifting and lowering the substrate to be processed with respect to at least a portion of the susceptor is disposed in the processing chamber.

公开(公告)号：US20050053481A1

公开(公告)日：2005-03-10

申请号：US10916261

申请日：2004-08-10

Applicant: James Rietzel

Inventor： James Rietzel

IPC: H01J37/34 ,  F04B1/00 ,  F04B49/00

CPC classification number: H01J37/3405 ,  H01J2237/166 ,  H01J2237/18 ,  H01J2237/188 ,  H01J2237/2005

Abstract: A system for sealing between a rotating part and a stationary part has two seals in series with a cavity formed between them that is pumped to a low pressure. Failure of either seal is detected by a change in pressure in the cavity. An alarm may be triggered when cavity pressure rises above a threshold, or when it remains above a threshold for more than a predetermined period of time. Multiple cavities connected to a common pump allow cavities to be selectively isolated so that a cavity experiencing a leak is identified.

Abstract translation: 用于在旋转部件和固定部件之间进行密封的系统具有与形成在它们之间的空腔串联的两个密封件，其被泵送到低压。 两个密封件的失效都是通过空腔中的压力变化来检测的。 当腔体压力升高到高于阈值时，或者当腔体压力保持高于阈值超过预定时间段时，可以触发警报。 连接到公共泵的多个空腔允许选择性地隔离空腔，从而识别遇到泄漏的空腔。

公开(公告)号：US06805487B1

公开(公告)日：2004-10-19

申请号：US08953638

申请日：1997-10-17

Applicant: Satoru Yuasa ,  Yoshio Tamura ,  Makoto Nakaya ,  Tomoyasu Matsuno ,  Nobuo Nagai

Inventor： Satoru Yuasa ,  Yoshio Tamura ,  Makoto Nakaya ,  Tomoyasu Matsuno ,  Nobuo Nagai

IPC: F16C3372

CPC classification number: H01J37/20 ,  B23Q11/0883 ,  F16C29/02 ,  F16C29/04 ,  F16C32/0603 ,  F16C33/748 ,  F16C2300/62 ,  F16C2322/39 ,  H01J2237/2005 ,  Y10S277/913

Abstract: A holder driving device has: a holder holding a substrate, a shaft supporting the holder, a driver for driving the shaft reciprocatingly and linearly in the direction along the shaft, a bearing unit having mechanical linear motion bearings for supporting the shaft thereon and having one or more stages of exhaust chambers surrounding the shaft; a vacuum pump for vacuum-pumping the exhaust chambers of the bearing unit; and a gas replacement mechanism for supplying dry gas, the humidity of which is lower than that of at least the surrounding atmosphere and the pressure of which is positive, from the outside of the bearing unit to at least the neighborhood of an atmosphere-side entrance portion of a gap between an end portion of the bearing unit one the side opposite to the vacuum vessel and the shaft passing the end portion, so as to replace the atmosphere near the entrance portion by the dry gas.

Abstract translation: 支架驱动装置具有：保持基板的支架，支撑支架的轴，沿着轴往复且直线地驱动轴的驱动器，具有用于将轴支撑在其上的机械直线运动轴承的轴承单元， 或更多级的围绕轴的排气室; 用于真空泵送轴承单元的排气室的真空泵; 以及气体置换机构，用于从其轴承单元的外部至少在气氛侧入口附近供给干燥气体的湿度低于至少周围大气的压力，其压力为正的干燥气体 轴承单元的端部与真空容器相反的一侧的间隙与通过端部的轴之间的间隙部分，以便通过干燥气体代替入口部分附近的气氛。

公开(公告)号：WO2010085466A1

公开(公告)日：2010-07-29

申请号：PCT/US2010/021466

申请日：2010-01-20

Applicant: PLASMA-THERM, LLC ,  REYNOLDS, Glyn

Inventor： REYNOLDS, Glyn

IPC: H01L21/00 ,  H01L21/68 ,  C23F1/00 ,  H01L21/02

CPC classification number: H01L21/6831 ,  H01J37/20 ,  H01J2237/2005

Abstract: The present invention provides an improved electrostatic chuck for a substrate processing system. The electrostatic chuck comprising a main body having a top surface configured to support the substrate, a power supply to apply a voltage to the main body and a sealing ring disposed between the main body and the substrate wherein the sealing ring has a conductive layer.

Abstract translation: 本发明提供一种用于衬底处理系统的改进的静电吸盘。 该静电卡盘包括具有构造成支撑基板的顶表面的主体，向主体施加电压的电源和设置在主体和基板之间的密封环，其中密封环具有导电层。

公开(公告)号：WO2006020324A2

公开(公告)日：2006-02-23

申请号：PCT/US2005025745

申请日：2005-07-21

Applicant: MOORE THOMAS M ,  ZAYKOVA-FELDMAN LYUDMILA

Inventor： MOORE THOMAS M ,  ZAYKOVA-FELDMAN LYUDMILA

IPC: G21K7/00

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/2005 ,  H01J2237/2006 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/26 ,  H01J2237/262 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: We disclose a gripper and associated apparatus and methods for delivering nano-manipulator probe tips inside a vacuum chamber. The gripper includes a tube; a compression cylinder inside of and coaxial with the tube; and at least one elastic ring adjacent to the compression cylinder. There is a vacuum seal coaxial with the compression cylinder for receiving and sealing against a probe tip. An actuator is connected to the compression cylinder for compressing the elastic ring and causing it to grip the probe tip. Thus the probe tip can be gripped, transferred to a different location in the vacuum chamber, and released there. Samples attached to the probe tips will be transferred to a TEM sample holder, shown in several embodiments, that includes a bar having opposed ends; an arm attached to each opposed end of the bar; one or more slots for receiving a probe tip; and, each slot having an inner part and an outer part, where the inner part is smaller than the outer part. The TEM sample holders just described are inserted into a carrier cassette. A cassette for transferring one or more TEM sample holders comprises a platform; at least one bar extending upwardly from the platform; the bar having a groove for receiving and holding a TEM sample holder. A rotatable magazine holds one or more probe tips and selectively releases the tips. The magazine includes a cartridge having a plurality of longitudinal openings for receiving probe tips and dispensing probe tips.

Abstract translation: 我们公开了一种夹具和相关的装置和方法，用于在真空室内输送纳米机械手探头尖端。 夹具包括管; 压缩缸内部并与管同轴; 以及与压缩圆筒相邻的至少一个弹性环。 存在与压缩筒同轴的真空密封件，用于接收和密封探针尖端。 致动器连接到压缩气缸，用于压缩弹性环并使其夹持探针尖端。 因此，探针尖端可以被夹持，转移到真空室中的不同位置，并在那里释放。 附接到探针尖端的样品将转移到TEM样品保持器，如几个实施方案中所示，其包括具有相对端的棒; 连接到杆的每个相对端的臂; 用于接收探头尖端的一个或多个狭槽; 并且每个狭槽具有内部部分和外部部分，其中内部部分小于外部部分。 刚刚描述的TEM样品架被插入到载体盒中。 用于转移一个或多个TEM样品保持器的盒子包括平台; 从平台向上延伸的至少一个杆; 该棒具有用于容纳和保持TEM样品保持器的凹槽。 一个可旋转刀库可容纳一个或多个探针尖端并选择性地释放尖端。 该盒包括具有多个用于接收探针尖端并分配探针尖端的多个纵向开口的盒。

公开(公告)号：WO9962097A9

公开(公告)日：2000-03-16

申请号：PCT/US9911355

申请日：1999-05-21

Applicant: EURO CELTIQUE SA ,  MITCHELL JAMES A ,  PALERMO PHILIP J

Inventor： MITCHELL JAMES A ,  PALERMO PHILIP J

IPC: G01Q30/04 ,  G01Q30/08 ,  H01J37/00 ,  H01J37/18 ,  H01J37/20 ,  H01J37/252 ,  H01J37/26 ,  H01J37/28

CPC classification number: G01N23/2204 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2005 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/2605

Abstract: A system is provided for imaging, in an ESE microscope or other variable pressure microscope, a single sample at various time intervals during dissolution of the sample in a liquid. The system includes a sample chamber (10) having a sample well. The sample well includes a first fluid port and a second fluid port for forming a dissolution bath in the sample well. In accordance with the system according to the present invention, the sample chamber (10) is placed into the specimen chamber of the ESE microscope and a sample is deposited into the sample well of the sample chamber. The sample is immersed in a liquid which flows through the sample well via the first and second fluid ports during a dissolution cycle. The liquid is then drained from the sample well via one of the first and second fluid ports during a draining cycle, and then, during an imaging cycle, the sample is imaged by the ESE microscope. The dissolution cycle, the draining cycle, and the imaging cycle all occur while the sample well is inside the specimen chamber (10) of the ESE microscope.

Abstract translation: 提供了一种系统，用于在ESE显微镜或其它可变压力显微镜下，将样品溶解在液体中时以不同的时间间隔成像。 该系统包括具有样品阱的样品室（10）。 样品阱包括用于在样品阱中形成溶解浴的第一流体端口和第二流体端口。 根据本发明的系统，将样品室（10）放置在ESE显微镜的样品室中，并将样品沉积到样品室的样品孔中。 在溶解循环期间，将样品浸入通过第一和第二流体端口流经样品的液体中。 然后在排液循环期间，通过第一和第二流体端口之一从样品阱中排出液体，然后在成像周期期间，通过ESE显微镜对样品进行成像。 当样品井在ESE显微镜的样品室（10）内时，溶解循环，排水循环和成像循环都发生。