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    43.
    发明专利
    未知

    公开(公告)号：DE68922061T2

    公开(公告)日：1995-08-31

    申请号：DE68922061

    申请日：1989-09-29

    Applicant: CANON KK

    Inventor： EBINUMA RYUICHI ,  KARIYA TAKAO ,  MIZUSAWA NOBUTOSHI ,  UDA KOJI ,  SAKAMOTO EIJI ,  UZAWA SHUNICHI

    IPC: G03F7/20 ,  G05D23/19 ,  H05K7/20

    Abstract: A temperature controlling device suitably usable in a semiconductor microcircuit manufacturing exposure apparatus for exposing a semiconductor wafer to a mask to print a pattern of the mask on the wafer, is disclosed. The device includes a constant-temperature liquid medium supplying system for controlling temperature of a liquid at high precision, a distributing system for distributing the supplied liquid medium into plural flow passages, to supply the liquid medium to plural subjects of control such as, for example, a mask stage, a wafer stage and the like. The device further includes a plurality of temperature controls each being provided in corresponding one of the flow passages, for correction of any variance in temperature of the distributed liquid medium, resulting from pressure loss energies in the respective flow passages. Thus, temperatures of plural subjects of control can be controlled efficiently and with a simple structure.

    44.
    发明专利
    未知

    公开(公告)号：DE69018556D1

    公开(公告)日：1995-05-18

    申请号：DE69018556

    申请日：1990-09-19

    Applicant: CANON KK

    Inventor： NOSE NORIYUKI ,  EBINUMA RYUICHI ,  OZAWA KUNITAKA ,  KARIYA TAKAO ,  UZAWA SHUNICHI

    IPC: G03F9/00 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30

    Abstract: An exposure apparatus includes a light source for exposing a wafer (2) through a mask (1); a light blocking device (4) being movable and effective to block light from the light source to limit an exposure zone; a positional deviation detecting system (6) for detecting positional deviation between the mask and the wafer; and a drive control system (31,61) for moving the light blocking device to execute position control therefor, on the basis of a detection signal from the positional deviation detecting system.

    45.
    发明专利
    未知

    公开(公告)号：DE68922061D1

    公开(公告)日：1995-05-11

    申请号：DE68922061

    申请日：1989-09-29

    Applicant: CANON KK

    Inventor： EBINUMA RYUICHI ,  KARIYA TAKAO ,  MIZUSAWA NOBUTOSHI ,  UDA KOJI ,  SAKAMOTO EIJI ,  UZAWA SHUNICHI

    IPC: G03F7/20 ,  G05D23/19 ,  H05K7/20

    Abstract: A temperature controlling device suitably usable in a semiconductor microcircuit manufacturing exposure apparatus for exposing a semiconductor wafer to a mask to print a pattern of the mask on the wafer, is disclosed. The device includes a constant-temperature liquid medium supplying system for controlling temperature of a liquid at high precision, a distributing system for distributing the supplied liquid medium into plural flow passages, to supply the liquid medium to plural subjects of control such as, for example, a mask stage, a wafer stage and the like. The device further includes a plurality of temperature controls each being provided in corresponding one of the flow passages, for correction of any variance in temperature of the distributed liquid medium, resulting from pressure loss energies in the respective flow passages. Thus, temperatures of plural subjects of control can be controlled efficiently and with a simple structure.

    46.
    发明专利
    未知

    公开(公告)号：DE3770285D1

    公开(公告)日：1991-07-04

    申请号：DE3770285

    申请日：1987-01-29

    Applicant: CANON KK

    Inventor： HATANAKA KATSUNORI ,  UZAWA SHUNICHI ,  NAKAGAWA KATSUMI ,  KOMATSU TOSHIYUKI

    IPC: H04N1/40 ,  H04N3/15

    Abstract: A photoelectric conversion apparatus in which a charge accumulated on a capacitor provided for each of a plurality of photoelectric conversion elements is matrix-transferred, and the matrix-transferred signal is serially output by switch array means.A matrix wiring unit for the matrix transfer is arranged on the side opposite to the photoelectric conversion elements so as not to cross signal lines extending from the capacitors.The switch array means comprises first switch means for sequentially transferring the matrix-­transferred signal, first readout means for reading out the input signal transferred by the first switch means, second switch means which is arranged in correspondence with the first switch means and is operated synchronously with the corresponding first switch means, second readout means for reading out an output from the second switch means, and differential amplifier means for receiving the outputs from the first and second readout means and outputting a signal corresponding a difference therebetween.

    49.
    发明专利
    未知

    公开(公告)号：DE3112865A1

    公开(公告)日：1981-12-24

    申请号：DE3112865

    申请日：1981-03-31

    Applicant: CANON KK

    Inventor： HIRAI YUTAKA ,  HATANAKA KATSUNORI ,  AYATA NAOKI ,  UZAWA SHUNICHI

    IPC: H01L27/146 ,  H04N1/03 ,  H04N1/028 ,  H04N3/15 ,  H01L27/14

    Abstract: A photoelectric converter in solid-state assembly, comprising the following sections juxtaposed integrally on the same substrate: a photoelectric converting section constituted of a number of photoelectric converting elements arranged in an array, each element having a light-receiving surface for input of light-information; a charge accumulating section constituted of a number of accumulating means, each being provided for each of said photoelectric converting elements, for accumulation of charge signals photoelectrically converted by corresponding photoelectric converting elements; a transistor section for transfer constituted of a number of transistors for transfer, each being provided for each of said accumulating means, to perform a switching operation for transfer of the signals accumulated in corresponding accumulating means; and a BBD transfer section for outputting the signals transferred from each of said accumulating means by arrangement in time series thereof; said BBD section being constituted of a number of transistor and a number of capacitors; and said photoelectric converting elements, said transistors for transfer and the transistors constituting said BBD transfer section being constituted of thin semiconductor films.

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