Abstract:
본 발명은 자기정렬된 에미터/베이스 구조를 가지는 실리콘-게르마늄(SiGe) 이종접합 바이폴라 트랜지스터의 제조 방법에 관한 것이다. 베이스 상부에 고농도의 이온이 도핑된 다결정 혹은 비정질 실리콘막으로 익스트린식 베이스 역할을 하는 베이스 전극을 형성한다. 다결정 혹은 비정질 실리콘막은 증착시 두께 조절이 용이하여 익스트린식 베이스의 저항값을 충분히 감소시킬 수 있다. 익스트린식 베이스의 두께는 인트린식 베이스의 두께에 영향을 미치지 않기 때문에 인트린식 베이스는 얇게 형성하고, 익스트린식 베이스는 두껍게 형성하여 소자의 전기적 특성을 극대화시킬 수 있다.
Abstract:
PURPOSE: An MIM(Metal/Insulator/Metal) emitter of field emission display and a method for manufacturing the same are provided to deposit an etch stopper on a tunneling insulation film of an MIM emitter through a simple process method. CONSTITUTION: A method for manufacturing an MIM(Metal/Insulator/Metal) emitter of field emission display comprises a step of patterning a lower electrode(116) on a substrate(110), a step of forming a tunneling insulation film(120) and a field insulation film(118) on the lower electrode, a step of forming an etch stopper(123) made of a ZnO thin film on the field insulation film and the tunneling insulation film, a step of etching a protection layer(126), a bus electrode(124), and a contact electrode(122) by forming the contact electrode, the bus electrode, and the protecting layer in order, a step of wet-etching the etch stopper, the contact electrode, the bus electrode, and the protecting layer as a mask, and a step of forming an upper electrode(128) on the tunneling insulation film.
Abstract:
According to a power rectifying device in the embodiments of the present invention, a gate electrode, a source region and a body region are commonly connected to a first terminal. A substrate beside the body region is connected to a second terminal. Thereby, a power rectifying device having two terminals is realized. The gate electrode may have a spacer shape. Thereby, the channel depth of the channel region of the trench structure of the power rectifying device can be accurately controlled by controlling the width of the gate electrode.
Abstract:
Disclosed are a display tag apparatus and a method for high-recognition capable of removing the reduction in tag recognition due to various physical phenomena, capable of preventing damage to a product in which a tag is attached due to a result of the non-recognition of the tag, and capable of reducing time consumption for recognition and confirmation by rapidly classifying the tags by confirming the recognition condition of an RFID tag with a binocular method by attaching the manual RFID tag to a power save type display. According to an embodiment of the present invention, a user is able to rapidly identify the information of the tag with the binocular method by attaching the RFID tag to the display, is able to identify the tag located within the recognition range, and is able to identify the color, symbol, text of the tag with the binocular method.
Abstract:
PURPOSE: An RFID(Radio Frequency Identification) reader, RFID tag, RFID communication method, and system thereof are provided to execute wireless communication through a serial communication protocol without using specific wireless communication protocols. CONSTITUTION: An RFID tag(220) includes tag information. The RFID tag provides interfaces by using a serial communication protocol. An RFID reader(210) reads the tag information by using the serial communication protocol from the RFID tag. The RFID tag includes a tag control module. The tag control module provides the RFID reader and the interfaces by using an I2C(Inter-Integrated Circuit) or an UART(Universal Asynchronous Receiver Transmitter).
Abstract:
PURPOSE: A horizontally shaped diffusion furnace is provided to form a gate insulating layer with a superior thin film by uniformly injecting reaction gas in top, down, left and right direction of silicon wafer substrate. CONSTITUTION: A reaction chamber(21) comprises a reacting gas inlet. In the reaction chamber, the thermal diffusion process about the silicon wafer substrate is executed. A heating part heats the inside of the reaction chamber. A loading part(23) loads a plurality of silicon wafer substrates. A carrying part(24) transfers the loading part to the inside of the reaction chamber. A nitrogen gas injecting part(25) injects the nitrogen gas into the inside of the loading part.
Abstract:
PURPOSE: A high voltage LDMOS transistor and a manufacturing method thereof are provided to improve a breakdown voltage without an increase of an on-resistance by including a trench of a multi-wall filled with an oxide film in a drift area. CONSTITUTION: A gate(209) is formed on a substrate. A source(211) and a drain(210) are separately placed on the substrate to the either side with placing the gate in the interval. A drift area is formed between the gate and the drain. A plurality of trenches(213) is arranged to the lateral direction in the drift area. A plurality of trenches is filled with an oxide film. A field oxide film(207) is formed between the gate and the drain on the substrate.
Abstract:
PURPOSE: A silicon photomultiplier and a manufacturing method thereof are provided to enhance accuracy about location information with suppressing a cross talk by separating an interval of a micro pixel through trench isolation. CONSTITUTION: An active layer(22) is formed on upper part of a substrate(21). A production and an amplification of current by an input light are included on the active layer. A trench controls a cross talk between contiguous micro pixels by filling in inside with a material including an electrical insulation and a light-reflection function. An anode electrode(28) and a cathode electrode(29) are respectively formed on an upper side of the active layer. An insulating layer(27) is formed on the rest upper side of the active layer in which the anode electrode and cathode electrode are not formed.