HEAT ACTIVATED NANOMETER-SCALE PUMP
    51.
    发明公开
    HEAT ACTIVATED NANOMETER-SCALE PUMP 审中-公开
    热泵活化纳米范围内

    公开(公告)号:EP1910217A2

    公开(公告)日:2008-04-16

    申请号:EP06787919.7

    申请日:2006-07-19

    Abstract: A pump is provided that includes a nanometer- scale beam that is suspended in a housing. The housing may include a number of apertures such that molecules can move in and out of the housing. The nanometer- scale beam may be suspended as a jump rope or as a cantilever. The movement of the nanometer- scale beam may be mechanically stopped from moving in a particular way (e.g. , towards a particular end of the housing) . Thus, for example, the beam and the stop work together to pump molecules in the direction that the beam bounces off the stop. The speed and movement of the nanometer- scale beam can also be influenced either electrostatically or electromagnetically . As such, the speed and direction that a working substance is pumped by a nanometer- scale beam may be electrically controlled.

    MIKROMECHANISCHES BAUELEMENT UND ENTSPRECHENDES HERSTELLUNGSVERFAHREN

    公开(公告)号:EP1334060A1

    公开(公告)日:2003-08-13

    申请号:EP01992685.6

    申请日:2001-10-06

    Abstract: The invention relates to the production of a micromechanical component, comprising a substrate (10), made from a substrate material with a first doping type (p), a micromechanical functional structure arranged in the substrate (10) and a cover layer for the at least partial covering of the micromechanical functional structure. The micromechanical functional structure comprises regions (15; 15a; 15b; 15c; 730; 740; 830) made from the substrate material with a second doping type (n), at least partially surrounded by a cavity (50; 50a-f) and the cover layer comprises a porous layer (30) made from the substrate material.

    Abstract translation: 本发明涉及微机械部件的制造,该微机械部件包括由具有第一掺杂类型(p)的衬底材料制成的衬底(10),布置在衬底(10)中的微机械功能结构和用于at 微机械功能结构的至少部分覆盖。 微机械功能结构包括至少部分地由空腔(50; 50a-f)围绕的具有第二掺杂类型(n)的由衬底材料制成的区域(15; 15a; 15b; 15c; 730; 740; 830); 覆盖层包括由基底材料制成的多孔层(30)。

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