公开(公告)号：EP2091063A3

公开(公告)日：2010-04-21

申请号：EP08019777.5

申请日：2008-11-12

Applicant: Hitachi Ltd.

Inventor： Kasai, Hiroto ,  Harada, Ken

IPC: H01J37/26 ,  H01J37/20 ,  H01J37/141

CPC classification number: H01J37/26 ,  H01J37/141 ,  H01J37/20 ,  H01J2237/14 ,  H01J2237/20 ,  H01J2237/201 ,  H01J2237/2802

Abstract: An electron beam observation device includes a mechanism which disposes a specimen at an upstream side in an electron beam traveling direction outside an objective lens, from which an image is transferred under a magnification of 1/5 to 1/30, in addition to an inside of the objective lens in which a specimen is disposed at a time of ordinary observation.

公开(公告)号：EP1780765A3

公开(公告)日：2009-04-08

申请号：EP06123224.5

申请日：2006-10-31

Applicant: FEI COMPANY

Inventor： Tappel, Hendrik ,  Hees. van, Ian ,  Lankers, Danny ,  Giannuzzi, Lucille ,  Veen, van, Gerard ,  Young, Richard

IPC: H01J37/20 ,  H01L21/68 ,  H01J37/30

CPC classification number: H01L21/68 ,  G01R31/2898 ,  H01J37/20 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20242 ,  H01L21/68764

Abstract: A particle-optical apparatus comprising:
- A first source, for generating a first irradiating beam along a first axis;
- A second source, for generating a second irradiating beam along a second axis that intersects the first axis at a beam intersection point, the first and second axes defining a beam plane,
- A stage assembly (3) for positioning a sample in the vicinity of the beam intersection point, provided with:

- A sample table to which the sample can be mounted;
- A set of actuators, arranged so as to effect translation of the sample table along directions substantially parallel to an X-axis perpendicular to the beam plane, a Y-axis parallel to the beam plane, and a Z-axis parallel to the beam plane, said X-axis, Y-axis and Z-axis being mutually orthogonal and passing through the beam intersection point,

wherein the set of actuators is further arranged to effect:
- rotation of the sample table about a rotation axis substantially parallel to the Z-axis, and;
- rotation of the sample table about a flip axis substantially perpendicular to the Z-axis,

whereby the flip axis can itself be rotated about the rotation axis.

公开(公告)号：EP1782435A2

公开(公告)日：2007-05-09

申请号：EP05773762.9

申请日：2005-07-21

Applicant: Omniprobe, Inc.

Inventor： MOORE, Thomas M. ,  ZAYKOVA-FELDMAN, Lyudmila

IPC: G21K7/00

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/2005 ,  H01J2237/2006 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/26 ,  H01J2237/262 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: We disclose a gripper and associated apparatus and methods for delivering nano-manipulator probe tips inside a vacuum chamber. The gripper includes a tube; a compression cylinder inside of and coaxial with the tube; and at least one elastic ring adjacent to the compression cylinder. There is a vacuum seal coaxial with the compression cylinder for receiving and sealing against a probe tip. An actuator is connected to the compression cylinder for compressing the elastic ring and causing it to grip the probe tip. Thus the probe tip can be gripped, transferred to a different location in the vacuum chamber, and released there. Samples attached to the probe tips will be transferred to a TEM sample holder, shown in several embodiments, that includes a bar having opposed ends; an arm attached to each opposed end of the bar; one or more slots for receiving a probe tip; and, each slot having an inner part and an outer part, where the inner part is smaller than the outer part. The TEM sample holders just described are inserted into a carrier cassette. A cassette for transferring one or more TEM sample holders comprises a platform; at least one bar extending upwardly from the platform; the bar having a groove for receiving and holding a TEM sample holder. A rotatable magazine holds one or more probe tips and selectively releases the tips. The magazine includes a cartridge having a plurality of longitudinal openings for receiving probe tips and dispensing probe tips.

公开(公告)号：WO2018089578A1

公开(公告)日：2018-05-17

申请号：PCT/US2017/060770

申请日：2017-11-09

Applicant: PRESIDENT AND FELLOWS OF HARVARD COLLEGE

Inventor： GRAHAM, Brett, Jesse ,  LEE, Wei-Chung, Allen ,  HILDEBRAND, David, Grant, Colburn

IPC: A61B16/00 ,  G01N1/06 ,  H01J37/26

CPC classification number: G01N35/00009 ,  G01N1/06 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/201 ,  H01J2237/204

Abstract: An imaging system is directed to electron microscopy of collected samples and includes a feed reel configured to initially store a tape with the collected samples. The imaging system further includes a pick-up reel configured to receive the tape from the feed reel, and an imaging-path element extending between the feed reel and the pick-up reel. The imaging-path element has a first end near the feed reel and a second end near the pick-up reel, the first end being connected to the second end via an intermediate section of the imaging-path element along which the tape translates linearly from the feed reel to the pick-up reel.

Abstract translation: 成像系统涉及收集的样品的电子显微镜，并且包括配置为初始存储具有收集的样品的胶带的进料卷筒。 成像系统还包括构造成从供给卷轴接收带的拾取卷轴和在供给卷轴和拾取卷轴之间延伸的成像路径元件。 成像路径元件具有靠近馈送卷轴的第一端和靠近拾取卷轴的第二端，第一端经由成像路径元件的中间部分连接到第二端，带沿着该中间部分线性地从 送料卷筒送到拾取卷筒。

公开(公告)号：WO2014022844A3

公开(公告)日：2014-03-27

申请号：PCT/US2013053567

申请日：2013-10-02

Applicant: AXCELIS TECH INC ,  LEE WILLIAM ,  REYNOLDS WILLIAM ,  STONE STANLEY

Inventor： LEE WILLIAM ,  REYNOLDS WILLIAM ,  STONE STANLEY

IPC: H01J37/317 ,  H01J37/18 ,  H01J37/20 ,  H01L21/67 ,  H01L21/68

CPC classification number: H01J37/18 ,  H01J37/20 ,  H01J37/3171 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/31705 ,  H01L21/02002 ,  H01L21/67109 ,  H01L21/67201 ,  H01L21/67213 ,  H01L21/67742 ,  H01L21/67766

Abstract: An ion implantation system provides ions to a workpiece positioned in a vacuum environment of a process chamber on a cooled chuck. A pre-chill station within the process chamber has a chilled workpiece support configured to cool the workpiece to a first temperature, and a post-heat station within the process chamber, has a heated workpiece support configured to heat the workpiece to a second temperature. The first temperature is lower than a process temperature, and the second temperature is greater than an external temperature. A workpiece transfer arm is further configured to concurrently transfer two or more workpieces between two or more of the chuck, a load lock chamber, the pre-chill station, and the post-heat station.

Abstract translation: 离子注入系统向位于冷却卡盘上的处理室的真空环境中的工件提供离子。 处理室内的预冷站具有配置成将工件冷却到第一温度的冷却工件支撑件，并且处理室内的后加热站具有加热工件支撑件，该加热工件支撑件构造成将工件加热到第二温度。 第一温度低于处理温度，第二温度高于外部温度。 工件传送臂还被构造成在两个或更多个夹盘，加载锁定室，预冷站和后加热站之间同时传送两个或更多个工件。

公开(公告)号：WO2006021961A2

公开(公告)日：2006-03-02

申请号：PCT/IL2005/000919

申请日：2005-08-25

Applicant: QUANTOMIX LTD. ,  SPRINZAK, David ,  KARNI, Yiftah ,  RONEN, Yitzhak

Inventor： SPRINZAK, David ,  KARNI, Yiftah ,  RONEN, Yitzhak

CPC classification number: H01J37/20 ,  G01N23/2204 ,  H01J2237/2004 ,  H01J2237/2006 ,  H01J2237/2007 ,  H01J2237/201

Abstract: A sample container assembly for use in a microscope including a sample enclosure, an electron beam permeable, fluid impermeable, membrane sealing the sample enclosure from a volume outside the sample enclosure and a pressure controller assembly communicating between the sample enclosure and a volume outside the sample enclosure.

Abstract translation: 用于显微镜的样品容器组件，包括样品外壳，电子束可透过的不透液体的膜，将样品外壳从样品外壳外部的体积密封，以及在样品外壳和样品外部的体积之间连通的压力控制器组件 外壳。

公开(公告)号：WO03104846A2

公开(公告)日：2003-12-18

申请号：PCT/IL0300454

申请日：2003-06-01

Applicant: QUANTOMIX LTD ,  SPRINZAK DAVID ,  NECHUSHTAN AMOTZ ,  ZIK ORY ,  GILEADI OFER

Inventor： SPRINZAK DAVID ,  NECHUSHTAN AMOTZ ,  ZIK ORY ,  GILEADI OFER

IPC: G01N23/203 ,  B01L3/00 ,  G01N1/36 ,  G01N23/00 ,  G01N23/225 ,  G01N25/00 ,  G02B20060101 ,  G21K5/08 ,  G21K7/00 ,  H01J3/14 ,  H01J37/20 ,  H01J37/22 ,  H01J37/244 ,  H01J37/252 ,  H01J37/256 ,  H01J37/28 ,  G02B

CPC classification number: B01L3/50855 ,  B01L3/508 ,  B01L2200/0689 ,  B01L2300/042 ,  B01L2300/0654 ,  B01L2300/0829 ,  G01N1/36 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/2003 ,  H01J2237/2006 ,  H01J2237/201 ,  H01J2237/2608

Abstract: A SEM compatible sample container including a sample enclosure including an electron beam permeable, fluid impermeable membrane, and a peripheral enclosure sealed to the membrane and defining with the membrane the sample enclosure, and a sample enclosure closure including quick-connect attachment functionality for sealing engagement with the sample enclosure.

Abstract translation: SEM兼容样品容器，其包括样品外壳，其包括电子束可透过的流体不可渗透的膜，以及密封到膜上的周边外壳，并且用隔膜限定样品外壳，以及样品外壳封闭件，包括用于密封接合的快速连接附接功能 与样品外壳。

公开(公告)号：WO9620495A3

公开(公告)日：1996-09-06

申请号：PCT/NL9500444

申请日：1995-12-28

Applicant: UNIV DELFT TECH ,  STICHTING SCHEIKUNDIG ONDERZOE ,  STICHTING TECH WETENSCHAP ,  ZANDBERGEN HENDRIK WILLEM ,  LATENSTEIN VAN VOORST ANDRE ,  WESTRA CORNELIS ,  HOVELING GERARDUS HENDRIKUS

Inventor： ZANDBERGEN HENDRIK WILLEM ,  LATENSTEIN VAN VOORST ANDRE ,  WESTRA CORNELIS ,  HOVELING GERARDUS HENDRIKUS

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/2001 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204

Abstract: A specimen holder for an electron microscope, comprising a bar-shaped body provided adjacent one end with means for receiving a specimen, with means being present for screening the specimen from the environment at least temporarily in airtight and moisture-proof manner in a first position, which screening means comprise at least one elastic seal surrounding the bar-shaped body at least in the first position, and supporting means for arranging the specimen holder in a service position. In a second position, wherein the screening means have been removed from the first position, the bar-shaped body with the specimen-receiving means is supported by the supporting means without intermediacy of the elastic seal. The invention further relates to a device for mounting a specimen in an electron microscope.

公开(公告)号：WO1996020495A2

公开(公告)日：1996-07-04

申请号：PCT/NL1995000444

申请日：1995-12-28

Applicant: TECHNISCHE UNIVERSITEIT DELFT ,  STICHTING SCHEIKUNDIG ONDERZOEK IN NEDERLAND ,  STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN ,  ZANDBERGEN, Hendrik, Willem ,  LATENSTEIN VAN VOORST, André ,  WESTRA, Cornelis ,  HOVELING, Gerardus, Hendrikus

Inventor： TECHNISCHE UNIVERSITEIT DELFT ,  STICHTING SCHEIKUNDIG ONDERZOEK IN NEDERLAND ,  STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/2001 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204

Abstract: A specimen holder for an electron microscope, comprising a bar-shaped body provided adjacent one end with means for receiving a specimen, with means being present for screening the specimen from the environment at least temporarily in airtight and moisture-proof manner in a first position, which screening means comprise at least one elastic seal surrounding the bar-shaped body at least in the first position, and supporting means for arranging the specimen holder in a service position. In a second position, wherein the screening means have been removed from the first position, the bar-shaped body with the specimen-receiving means is supported by the supporting means without intermediacy of the elastic seal. The invention further relates to a device for mounting a specimen in an electron microscope.

Abstract translation: 一种用于电子显微镜的样本保持器，包括邻近一端设置的条形体，其具有用于接收样本的装置，具有用于至少临时以气密和防湿的方式在第一位置从环境中筛选样本的装置 该筛选装置至少包括至少一个围绕杆状体的弹性密封件至少在第一位置，以及支撑装置，用于将试样保持器布置在使用位置。 在第二位置，其中筛选装置已经从第一位置移除，具有试样接收装置的条形体由支撑装置支撑而不中间地弹性密封。 本发明还涉及一种用于将样品安装在电子显微镜中的装置。

公开(公告)号：WO2012145751A3

公开(公告)日：2013-01-17

申请号：PCT/US2012034682

申请日：2012-04-23

Applicant: FEI CO ,  GOTTLIEB PAUL

Inventor： GOTTLIEB PAUL

IPC: G01N1/28 ,  H01J37/20

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/286 ,  G01N1/36 ,  H01J2237/2007 ,  H01J2237/201

Abstract: Mineral samples for use in analytical instruments are created by a system that greatly reduces the sample preparation time and facilitates automation. For example, in some implementations, rather than grinding to expose the interior of mineral particles in sample plug containing mineral particles in an epoxy compound, the sample plug is sliced with a saw, which more rapidly provides in many applications a sufficiently smooth surface on the exposed particle surfaces for observation. Rather than slowly mixing a slow curing epoxy to avoid introducing bubbles into the sample plug, some implementations use a fast settle fixative and a mechanical mixture that avoid bubbles.

Abstract translation: 用于分析仪器的矿物样品由大大降低样品准备时间并便于自动化的系统创建。 例如，在一些实施方案中，不是研磨以暴露含有环氧化合物中的矿物颗粒的样品塞中的矿物颗粒的内部，用锯切片样品塞，其在许多应用中更快地提供足够光滑的表面 暴露的颗粒表面进行观察。 不是缓慢地混合缓慢固化的环氧树脂，以避免将气泡引入到样品塞中，一些实施方案使用快速沉降固定剂和避免气泡的机械混合物。