PROJECTING PART IMPROVING MASK FOR IMPROVING PROCESS WINDOW

    公开(公告)号:JP2000284466A

    公开(公告)日:2000-10-13

    申请号:JP2000069197

    申请日:2000-03-13

    Abstract: PROBLEM TO BE SOLVED: To provide a mask pattern capable of increasing the depth of focus and exposure latitude while maintaining or improving the resolution for the characteristics desired to be imaged. SOLUTION: The surface of a substrate 18 is provided with plural elongated structures 13 which are arranged nearly parallel to each other and plural projecting parts 14 below the resolution which extend transversely into the spaces between these elongated structures from the elongated structures. The plural projecting parts 14 have nearly the same sizes in the direction parallel to the elongated structures 13. The plural projecting parts 14 are periodically arranged apart spaced intervals in the direction parallel to the elongated structures 13. The elongated structures 13 and the projecting parts 14 are formed of energy absorption materials containing at least one among chromium, carbon and molybdenum.

    SEMICONDUCTOR MEMORY
    72.
    发明专利

    公开(公告)号:JP2000251468A

    公开(公告)日:2000-09-14

    申请号:JP2000034052

    申请日:2000-02-10

    Abstract: PROBLEM TO BE SOLVED: To increase data speed or band width by arranging a pre-fetch circuit so that data speed among each hierarchy stage is all equalized substantially and controlling a latch so that the respective data speed at each hierarchy stage is all maintained. SOLUTION: Stages A-C have different data speed/signal time (data speed/bit) a, b, c respectively. Data speed at each stage is determined by data speed/signal path (selected by the number of signal path that is the number of pre-fetch). Pre-fetch is constituted between stages A-B of m>=int(a/b), pre-fetch is constituted between stages B-C of n>=int(b/c), and integers m, n are adjusted as desired. In order to vary pre-fetch depth at each stage, a pointer is designed so as to correspond to pre-fetch depth. A pointer signal is supplied by using a control circuit 214, the control circuit 214 latches continuously data made to synchronize with the latch included in a pre-fetch circuit, and timing is performed optimally.

    DYNAMIC LOGIC CIRCUIT
    74.
    发明专利

    公开(公告)号:JP2000235786A

    公开(公告)日:2000-08-29

    申请号:JP2000035922

    申请日:2000-02-14

    Abstract: PROBLEM TO BE SOLVED: To obtain a low voltage bus signalling architecture by providing a storage circuit which stores data after it is placed in a set state, an output circuit which connects stored data to an output by responding to an output strobe pulse and a reset circuit resetting the storage circuit by responding to the falling edge of the output strobe pulse. SOLUTION: This low voltage bus signalling architecture 20 has a driver 200 and a storage part 210. The driver 200 is an n-channel MOSFET inverter and inputs an input logic signal being on a line 203. The storage part 210 has a latch 250, an output circuit 260 and a reset circuit 270. The output circuit 260 connects stored data to an output DQ by responding to an output strobe pulse PNTo1. The reset circuit 270 precharges the storage part 210 via a first transistor 240 by responding to the falling edge of the pulse PNTo1.

    SEMICONDUCTOR MEMORY AND METHOD OF IMPROVING YIELD THEREOF

    公开(公告)号:JP2000222898A

    公开(公告)日:2000-08-11

    申请号:JP36513699

    申请日:1999-12-22

    Abstract: PROBLEM TO BE SOLVED: To increase yield of chips while preventing signal contention of a sense amplifier using a high replacement flexibility redundancy and method. SOLUTION: Redundancy elements are integrated in at least two memory arrays which don't share the sense amplifiers. A defective row/column line in a first array or block is replaced with a redundant row/column line from its own redundancy. A corresponding row/column line whether defective or not is replaced in a second array or block which does not share sense amplifiers with the first block. The corresponding row/column line is replaced to mimic the redundancy replacement of the first block.

    PATTERNING METHOD OF SEMICONDUCTOR ELEMENT AND SEMICONDUCTOR DEVICE

    公开(公告)号:JP2000208434A

    公开(公告)日:2000-07-28

    申请号:JP2000000881

    申请日:2000-01-06

    Abstract: PROBLEM TO BE SOLVED: To form a contact of minimum feature dimensions by forming a pattern with a first parallel line and a second parallel line vertical to it inside a mask layer on a dielectric layer and forming a rectangular hole which reaches a substrate layer inside a dielectric layer according to the pattern. SOLUTION: A dielectric layer 22, a mask layer 24, a mask layer 26 and a resist layer 28 are provided sequentially on a substrate layer 20. The mask layer 26 is etched according to a line 30 of a pattern of the resist layer 28 and a parallel line 27 is formed in the mask layer 26. Then, a resist layer 32 is provided. A pattern of the resist layer 32 comprises a parallel line 34 and the line 34 is vertical to the line 27. A lattice pattern with a rectangular hole 36 is formed by anisotropically etching the mask layer 24 by using the line 27 and the line 34. The dielectric layer 22 is etched until it reaches the substrate layer 20 according to the lattice pattern.

    TEST DEVICE FOR JTAG-BASED INTEGRATED CIRCUITS AND TEST SYSTEM FOR TESTING INTEGRATED CIRCUITS

    公开(公告)号:JP2000148528A

    公开(公告)日:2000-05-30

    申请号:JP30895499

    申请日:1999-10-29

    Inventor: GARREAU OLIVIER

    Abstract: PROBLEM TO BE SOLVED: To obtain a test device which supports an embedded debugging protocol by providing a programmable switch which forms a test loop between a master controller and a selected integrated circuit. SOLUTION: The programmable switch 204 is connected to a slave target device 206 which includes JTAG-based integrated circuits IC1 to IC4. At least one of the integrated circuits IC1 to IC4 is an on-chip debugging support(OCDS) integrated circuit which has an on-chip debugging circuit. A switch controller 218 included in the master controller 202 sends a switch control signal out and a programmable switch 204 connects one integrated circuit selected out of the ICI to IC4 to a JTAG controller 210. The controller 210 functionally tests, for example, the integrated circuit ICI by using the corresponding JTAG test protocol.

    OPTICAL FIBER CONNECTOR SYSTEM
    79.
    发明专利

    公开(公告)号:JP2002072029A

    公开(公告)日:2002-03-12

    申请号:JP2001170141

    申请日:2001-06-05

    Abstract: PROBLEM TO BE SOLVED: To provide an optical fiber connector system that allows direct substrate-vs.-substrate optical communications without needing data transmission through a back plane. SOLUTION: The system is provided with a means for mounting an optical fiber input part 126 on printed boards 14-20, an optical component 130, and an optical fiber receiving surface 144. The optical fiber receiving surface 144 is provided with two or more alignment grooves 146 that receive two or more optical fibers 128 of a multi-fiber optical cable 120 and that are designed to guide the received optical fibers so as to bring them into optical contact with the optical component 130.

    SEMICONDUCTOR DEVICE, AND METHOD OF MODULATING CONDUCTIVITY OF TRANSISTOR

    公开(公告)号:JP2002016241A

    公开(公告)日:2002-01-18

    申请号:JP2001126300

    申请日:2001-04-24

    Abstract: PROBLEM TO BE SOLVED: To provide an advantageous method of reducing an on-state resistance of a transistor in a semiconductor device 36, including the transistor 38 formed on semiconductor substrates 12, 14, the transistor comprising a first terminal region 16 and a second terminal region 18, the terminal regions forming a current channel 44, when the transistor is conducting. SOLUTION: The semiconductor device 36 comprises a minority carrier injector 40 positioned near the second terminal region, with the minority carrier injector supplying the minority carrier into the transistor, when the transistor is in a prescribed voltage state; and a photoelectric device 42 which generates injection voltage in the minority carrier injector in response to incident light, the injection voltage which drives the transistor into the prescribed voltage state and, thereby causing the injector to supply the minority carrier into the vicinity of the second terminal region.

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