公开(公告)号：NL2008833A

公开(公告)日：2012-12-28

申请号：NL2008833

申请日：2012-05-16

Applicant: ASML NETHERLANDS BV

Inventor： HUANG YANG-SHAN ,  BUTLER HANS ,  EIJK JAN ,  HOL SVEN ANTOIN JOHAN ,  PASCH ENGELBERTUS ,  VEN BASTIAAN ,  VERMEULEN JOHANNES ,  CADEE THEODORUS ,  LEEUWEN ROBBERT

IPC: G03F7/20 ,  H01L21/68

公开(公告)号：NL2009196A

公开(公告)日：2013-02-27

申请号：NL2009196

申请日：2012-07-17

Applicant: ASML NETHERLANDS BV

Inventor： KOENEN WILLEM ,  EUSSEN EMIEL ,  PASCH ENGELBERTUS ,  LEEUWEN ROBBERT ,  KOEVOETS ADRIANUS

IPC: G03F7/20 ,  H01L21/68

Abstract: A position measurement system includes a first part and a second part for determining a position of a first member relative to a second member by providing a position signal representing a position of the first part relative to the second part, and a computational unit comprising an input terminal for receiving the position signal. The computational unit is configured to, in use, apply a conversion to the position signal to obtain a signal representing a position of the first member relative to the second member; and apply an adjustment to the conversion to at least partly compensate for a drift of the first part or the second part or both. The adjustment is based on a predetermined drift characteristic of the first part or the second part or both respectively. The predetermined drift characteristic includes one or more base shapes of the first part and/or the second part.

公开(公告)号：NL2007155A

公开(公告)日：2012-02-28

申请号：NL2007155

申请日：2011-07-21

Applicant: ASML NETHERLANDS BV

Inventor： PASCH ENGELBERTUS ,  EUSSEN EMIEL ,  JEUNINK ANDRE ,  LEEUWEN ROBBERT

IPC: G03F7/20 ,  H01L21/68