CAPACITOR HAVING MULTILEVEL MUTUAL CONNECTION TECHNOLOGY

    公开(公告)号:JPH10303059A

    公开(公告)日:1998-11-13

    申请号:JP10894598

    申请日:1998-04-20

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To provide a superior direct capacitor attachment by loading a mask so that the opening of the mask exposes the upper face of a high melting point solder ball, making low melting point metallic layer adhere on the high melting point solder ball and forming a capacitor having a low melting point metallic cap. SOLUTION: The high melting point solder ball (solder ball) 18 is formed on the semiconductor moist pad 16 of the multilayer insulating capacitor 10. The solder moist pad 16 is connected to the inner electrodes 11 of the capacitor 10 through a shorting bar 12. The mask 20 having the opening 26 is loaded on the capacitor 10 having a solder ball assembly 14 and the solder ball 18. The uppermost part of the solder ball 18 is exposed and tin 23 is adhered by a solder evaporator. When the solder ball 18 having a tin cap 23 is reflowed, an eutectic alloy 43 is formed on the uppermost part of the solder ball 18 and it can be joined to the circuit 47 of a substrate constituted of copper foil on an organic carrier card 40.

    PLANARIZATION PROCESS FOR ORGANIC FILLING OF DEEP TRENCHES

    公开(公告)号:CA1233914A

    公开(公告)日:1988-03-08

    申请号:CA503286

    申请日:1986-03-04

    Applicant: IBM

    Abstract: Disclosed is a process for planarization of semiconductor structures having dielectric isolation regions. Specifically, the process is directed to planarization of an organic polyimide layer obtained following filling of deep trenches in a semiconductor substrate having high and low density trench regions with this material. After over-filling the trenches with the polyimide and obtaining a non-planar polyimide layer having a thickness much larger in the low trench density regions than that in the high density regions, a photoresist layer is applied thereover. The photoresist is then controllably exposed using a mask which is the complement or inverse of the mask used for imaging the trench patterns to obtain a thick blockout photoresist mask over the trenches and a thin wetting layer of photoresist over the remainder of the substrate. Next, by means of a thermal step, the blockout photoresist is caused to reflow to form a relatively thick photoresist layer over the high trench density regions and a thin photoresist layer over the low trench density regions, thereby exactly compensating for the non-planarity of the polyimide layer.

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