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公开(公告)号:JP2001230257A
公开(公告)日:2001-08-24
申请号:JP2001031574
申请日:2001-02-07
Applicant: ST MICROELECTRONICS SA , KONINKL PHILIPS ELECTRONICS NV
Inventor: KORDIC SRDJAN , TORRES JOAQUIM , MOTTE PASCALE , DESCOUTS BRIGITTE
IPC: H01L23/52 , H01L21/3205 , H01L23/522 , H01L23/532
Abstract: PROBLEM TO BE SOLVED: To avoid increase of resistivity of a metallic track caused by silicon diffusion to copper. SOLUTION: This process comprises a step for generating at least one metallic track 7 in an inside of a track insulation material 1 at a predetermined metallization level. The generation step of the metallization track 7 comprises an etching step of the track insulation material 1 forming a clearance 4 in the position of the track, a step for depositing a conduction barrier layer 5 in the clearance, a step for filling the clearance with copper, and a step for depositing a silicon nitride layer 8 on the predetermined metallization level. Titanium is deposited in at least a barrier layer between a deposition step of a barrier layer and a filling step of copper. The titanium changes to TiSi2 (60) during silicon diffusion from the silicon nitride layer 8.
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公开(公告)号:FR2851373A1
公开(公告)日:2004-08-20
申请号:FR0301978
申请日:2003-02-18
Applicant: ST MICROELECTRONICS SA , KONINKL PHILIPS ELECTRONICS NV
Inventor: TORRES JOAQUIM , ARNAL VINCENT , GOSSET LAURENT
IPC: H01L21/768 , H01L23/522 , H01L23/532 , H01L21/764
Abstract: The method involves forming air-gap (C1) between interconnection units (11-13) above a portion regulated of a surface of a substrate (100) inside an interconnection layer that has a silicon-di-oxide (1) extending above an intermediary layer of a permeable material (2). The air-gap is formed by retraction of a part of the silicon-di-oxide by keeping the material in contact with a retraction agent of the silicon-di-oxide. An independent claim is also included for an integrated electronic circuit.
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公开(公告)号:FR2830984A1
公开(公告)日:2003-04-18
申请号:FR0113375
申请日:2001-10-17
Applicant: ST MICROELECTRONICS SA
Inventor: MARTY MICHEL , LEVERD FRANCOIS , CORONEL PHILIPPE , TORRES JOAQUIM
IPC: H01L21/762 , H01L21/764
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公开(公告)号:FR2803092A1
公开(公告)日:2001-06-29
申请号:FR9916488
申请日:1999-12-24
Applicant: ST MICROELECTRONICS SA
Inventor: TORRES JOAQUIM , GAYET PHILIPPE , HAOND MICHEL
IPC: H01L21/316 , H01L21/768 , H01L23/522 , H01L21/28 , H01L23/528
Abstract: One embodiment of the invention is directed to a method of forming a metallization level of an integrated circuit including the steps of forming metal areas of a metallization level laterally separated by a first insulating layer, removing the first insulating layer, non-conformally depositing a second insulating layer so that gaps can form between neighboring metal areas, or to obtain a porous layer. The removal of the first insulating layer is performed through a mask, to leave in place guard areas of the first insulating layer around the portions of the metal areas intended for being contacted by a via crossing the second insulating layer.
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公开(公告)号:FR2823377B1
公开(公告)日:2004-07-16
申请号:FR0104693
申请日:2001-04-06
Applicant: ST MICROELECTRONICS SA
Inventor: TORRES JOAQUIM , AMAL VINCENT , FRACY ALEXIS
IPC: H01L21/3205 , H01L23/522 , H01L45/00
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公开(公告)号:FR2805084B1
公开(公告)日:2003-09-26
申请号:FR0001801
申请日:2000-02-14
Applicant: ST MICROELECTRONICS SA
Inventor: KORDIC SRDJAN , TORRES JOAQUIM , MOTTE PASCALE , DESCOUTS BRIGITTE
IPC: H01L23/52 , H01L21/3205 , H01L23/522 , H01L23/532
Abstract: A process produces at a predetermined metallization level at least one metal track (7) within an intertrack dielectric material (1). The process includes the steps of etching the intertrack dielectric material (1) so as to form a cavity (4) at the position of the track, depositing a conducting barrier layer (5) in the cavity (4), filling the cavity (4) with copper, and depositing a silicon nitride layer (8) on the predetermined metallization level. Between the barrier layer deposition step and the copper filling step, titanium is deposited on at least part of the barrier layer. This titanium will be transformed into TiSi2 (60) during the diffusion of the silicon from the silicon nitride layer (8).
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公开(公告)号:FR2803092B1
公开(公告)日:2002-11-29
申请号:FR9916488
申请日:1999-12-24
Applicant: ST MICROELECTRONICS SA
Inventor: TORRES JOAQUIM , GAYET PHILIPPE , HAOND MICHEL
IPC: H01L21/316 , H01L21/768 , H01L23/522 , H01L21/28 , H01L23/528
Abstract: One embodiment of the invention is directed to a method of forming a metallization level of an integrated circuit including the steps of forming metal areas of a metallization level laterally separated by a first insulating layer, removing the first insulating layer, non-conformally depositing a second insulating layer so that gaps can form between neighboring metal areas, or to obtain a porous layer. The removal of the first insulating layer is performed through a mask, to leave in place guard areas of the first insulating layer around the portions of the metal areas intended for being contacted by a via crossing the second insulating layer.
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公开(公告)号:FR2823375A1
公开(公告)日:2002-10-11
申请号:FR0104820
申请日:2001-04-09
Applicant: ST MICROELECTRONICS SA
Inventor: ARNAL VINCENT , TORRES JOAQUIM
IPC: H01L21/764 , H01L21/768 , H01L23/522
Abstract: The production of an integrated circuit incorporating an insulating gaseous layer totally separating at least two selected tracks of a level of metallization of row i (Mi) comprises: (a) realizing the metallization of row I by inserting a sacrificial material (MSi) between the selected tracks at this level; (b) realizing, in the material of the insulating inter-tracks (IMDi+1) separating the tracks of the level of metallization of row i+1 and in the inter-way insulating material (ILDi+1) separating the interconnection contacts at the level of interconnection of row I+1, some shafts (CH) emerging in the sacrificial material; and (c) eliminating the sacrificial material across these shafts. An Independent claim is also included for an integrated circuit incorporating an insulating gaseous layer totally separating at least two tracks of a level of metallization of the circuit (L1, L2).
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公开(公告)号:FR2805084A1
公开(公告)日:2001-08-17
申请号:FR0001801
申请日:2000-02-14
Applicant: ST MICROELECTRONICS SA
Inventor: KORDIC SRDJAN , TORRES JOAQUIM , MOTTE PASCALE , DESCOUTS BRIGITTE
IPC: H01L23/52 , H01L21/3205 , H01L23/522 , H01L23/532
Abstract: Integrated circuit production comprises the production of a metal track (7) at the heart of a dielectric inter-track material (1) incorporating an engraving forming a cavity (4), the deposition of a conductive barrier layer (5) in the cavity (4), the filling of the cavity (4) with copper and the deposition of a layer of silicon nitride (8) at a predetermined metallization level. A titanium deposit (6) is realized on at least a part of the barrier layer between the deposition of the barrier layer and the copper filling phases.
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公开(公告)号:FR2851373B1
公开(公告)日:2006-01-13
申请号:FR0301978
申请日:2003-02-18
Applicant: ST MICROELECTRONICS SA , KONINKL PHILIPS ELECTRONICS NV
Inventor: TORRES JOAQUIM , ARNAL VINCENT , GOSSET LAURENT
IPC: H01L21/764 , H01L21/768 , H01L23/522 , H01L23/532
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