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公开(公告)号：US20240327200A1
公开(公告)日：2024-10-03
申请号：US18328624
申请日：2023-06-02
Applicant: Omnitron Sensors
Inventor： Trent Huang
CPC classification number: B81B3/0054 , G02B26/0833 , B81B2201/042
Abstract: A system and method for precisely positioning a moveable structure in a micro-electromechanical system (MEMS). The system includes a substrate and a moveable device structure supported on the substrate. The device structure is moveable from an initial position to a deployment position at a predetermined offset angle to the substrate. A moveable anchor structure is supported on the substrate in proximity to the device structure. The anchor structure is locked to the device structure when the device structure is moved to the deployment position.
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公开(公告)号：US20240317576A1
公开(公告)日：2024-09-26
申请号：US18734302
申请日：2024-06-05
Inventor： Kensuke MIHARA , Ryouichi TAKAYAMA
CPC classification number: B81B3/0072 , G02B26/105 , H10N30/704 , B81B2201/042 , B81B2203/0154 , B81B2203/058
Abstract: An optical reflective device includes: a movable part configured to be rotated about a rotation axis; a reflection surface located on the movable part; a frame part connected to the movable part at two positions symmetrical about the rotation axis; torsion part extending along the rotation axis; a connection part connecting one end of the torsion part to the frame part; a drive part connected to another end of the torsion part and configured to rotate the torsion part about the rotation axis; and a fixation part supporting the drive part, the connection part has higher rigidity than the torsion part, at least one pair of joint surfaces are formed at a boundary between the torsion part and the connection part, and the one pair of joint surfaces are symmetrical about the rotation axis and each have an acute angle on the torsion part side with the rotation axis.
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3.发明授权公开(公告)号：US12091309B2
公开(公告)日：2024-09-17
申请号：US17312177
申请日：2019-11-01
Applicant: Ricoh Company, Ltd.
Inventor： Masayuki Fujishima , Junichi Konishi , Tsuyoshi Ueno , Nobunari Tsukamoto
CPC classification number: B81B3/0037 , G02B26/0858 , G02B26/101 , B81B2201/042 , G01S7/4817 , G03B21/008
Abstract: A movable device includes a movable portion including a reflecting surface; a pair of drive beams to support the movable portion rotatably around a predetermined rotation axis with the movable portion disposed between the pair of drive beams; and a support portion configured to support the pair of drive beams. The support portion has a light passing portion on each of both sides of the movable portion in a direction intersecting with the rotation axis in a plane along the reflecting surface in a state in which the movable portion is not rotated, the light passing portion allowing light reflected by the reflecting surface to pass through the light passing portion.
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公开(公告)号：US20240288681A1
公开(公告)日：2024-08-29
申请号：US18576974
申请日：2022-06-20
Applicant: STANLEY ELECTRIC CO., LTD.
Inventor： Susumu NAKAMURA
CPC classification number: G02B26/0858 , B81B3/0045 , G02B26/10 , B81B2201/042 , B81B2203/0154 , B81B2207/03
Abstract: An optical scanning device includes a mirror portion, a torsion bar extending along a resonance axis, an annular-shaped body coupled to the torsion bar from both sides of the resonance axis to rotate the mirror portion, and an intersection portion piezoelectric element and/or coupling portion piezoelectric elements formed in a rigidity adjustment region including an intersection portion of the torsion bar and the annular-shaped body to change a rigidity of the rigidity adjustment region when a voltage is applied.
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公开(公告)号：US12071338B2
公开(公告)日：2024-08-27
申请号：US17459073
申请日：2021-08-27
Inventor： Christian Drabe , Bert Kaiser
CPC classification number: B81B3/0051 , G02B26/0833 , G02B26/0841 , B81B2201/033 , B81B2201/035 , B81B2201/037 , B81B2201/042 , B81B2203/0154 , B81B2203/04 , B81B2203/051 , B81B2203/053 , B81B2203/058
Abstract: A micromechanical structure has a first micromechanical element, a second micromechanical element and a torsion spring arrangement having a first torsion spring element, having a first center line, mechanically connected to the first micromechanical element at a first contact region and to the second micromechanical element at a second contact region, and having a second torsion spring element, having a second center line, mechanically connected to the first micromechanical member at a third contact region and to the second micromechanical member at a fourth contact region in order to connect the first micromechanical member and the second micromechanical member to be movable relative to each other. A distance between the first and second center lines, starting from the first and third contact regions toward the second and fourth contact regions, decreases in a first portion and increases in a second portion. In a rest position of the micromechanical structure, the first and second torsion spring elements are arranged without contact to each other.
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Patent Agency Ranking
6.发明公开公开(公告)号：US20240279051A1
公开(公告)日：2024-08-22
申请号：US18627028
申请日：2024-04-04
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Nao INOUE , Katsumi SHIBAYAMA
CPC classification number: B81B3/0072 , B81C1/00666 , G02B26/0833 , B81B2201/042 , B81B2207/07 , B81C2201/0104 , B81C2201/0181
Abstract: The damascene wiring structure includes a base including a main surface provided with a groove, an insulating layer including a first portion provided on an inner surface of the groove and a second portion provided on the main surface, a metal layer provided on the first portion, a wiring portion embedded in the groove, and a cap layer provided to cover the second portion and the wiring portion. A surface of a boundary part between the first portion and the second portion includes an inclined surface inclined with respect to a direction perpendicular to the main surface.
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7.发明公开公开(公告)号：US20240270568A1
公开(公告)日：2024-08-15
申请号：US18044571
申请日：2022-07-15
Inventor： Tao YANG , HuanHuan LI , Lei PENG , JunWei JIANG , NiNi ZHANG , QingFeng LIU , Li MA , Fang WANG
CPC classification number: B81C1/00698 , B81B3/0086 , G02B26/0841 , H02N1/008 , B81B2201/042 , B81B2203/0136 , B81B2203/04 , B81C2201/0109
Abstract: Disclosed are an electrostatically driven comb structure of an MEMS (Micro Electro Mechanical System), a micro-mirror using the same, and a preparation method therefor. The surface of a comb of the electrostatically driven comb structure of the MEMS has an insulating layer, and the insulating layers on the surfaces of adjacent combs are the same type of insulating layers or different insulating layers; the micro-mirror with the electrostatically driven comb structure of the MEMS successively includes a substrate, an isolating layer and a device layer from bottom to top; the method for manufacturing the micro-mirror prepares the insulating layers by high temperature oxidization, plasma enhanced chemical vapor deposition, low pressure chemical vapor deposition, atmospheric pressure chemical vapor deposition, physical deposition, atomic layer deposition or stepwise heterogeneous deposition; same or different insulating layers are obtained on the surfaces of the driving comb and the ground comb; when the driving comb and the ground comb adsorb each other, the insulating layers on the surfaces of the two contact without forming a short circuit, so that a good insulating effect is achieved. The electrostatically driven MEMS micro-mirror capable of preventing adsorptive damage provided by the present invention features compact structure and simple process.
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8.发明授权公开(公告)号：US12061334B2
公开(公告)日：2024-08-13
申请号：US17231898
申请日：2021-04-15
Applicant: Raytheon Company
Inventor： David J. Knapp , Gerald P. Uyeno , Sean D. Keller , Benn H. Gleason , Eric Rogala , Mark K. Lange , Garret A. Odom , Craig O. Shott , Zachary D. Barker
CPC classification number: G02B26/105 , B81B3/0083 , G02B26/0833 , B81B2201/042 , B81B2203/058 , B81B2207/053
Abstract: An optical scanning system includes one or more Micro-Electro-Mechanical System (MEMS) Micro-Mirror Arrays (MMAs) used to scan a field-of-view (FOV) over a field-of-regard (FOR). The MEMS MMA is configured such that optical radiation from each point in the FOV does not land on or originate from out-of-phase mirror segments and a diffraction limited resolution of the optical system is limited by the size of the entrance pupil and not by the size of individual mirrors.
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公开(公告)号：US20240228265A1
公开(公告)日：2024-07-11
申请号：US18142779
申请日：2023-05-03
Applicant: Texas Instruments Incorporated
Inventor： Jane Liu , Osvaldo Enriquez , Rafael S. Mendoza
CPC classification number: B81B7/0054 , B81C1/00317 , G02B26/0833 , B81B2201/042 , B81C2203/019
Abstract: Systems, apparatus, articles of manufacture, and methods to reduce delamination of layers in semiconductor packages with window assemblies are disclosed. An apparatus comprising: a translucent panel, a semiconductor substrate, a stack of bonding materials between the translucent panel and the semiconductor substrate, and a buffer material extending along a lateral side of the stack of bonding materials.
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公开(公告)号：US20240192483A1
公开(公告)日：2024-06-13
申请号：US18584740
申请日：2024-02-22
Applicant: Hamamatsu Photonics K.K.
Inventor： Tatsuya SUGIMOTO , Tomofumi SUZUKI , Kyosuke KOTANI , Yutaka KURAMOTO , Daiki SUZUKI
CPC classification number: G02B26/0841 , B81B3/0045 , B81C1/00555 , G02B7/1821 , G02B26/105 , H02N1/008 , B81B2201/042 , B81C2201/013 , B81C2201/0174 , B81C2201/0198
Abstract: An optical device includes a support portion, a movable portion; and a pair of torsion bars. An optical function portion is provided on one surface of the movable portion and a rib portion is provided on the other surface of the movable portion. The rib portion includes eight extending portions of first to eighth extending portions. When setting directions in which the first to eighth extending portions extend as first to eighth extending directions respectively, and setting an angle between the first and second extending directions as a first angle, an angle between the third and fourth extending directions as a second angle, an angle between the fifth and sixth extending directions as a third angle, and an angle between the seventh and eighth extending directions as a fourth angle, each of the first and second angle is larger than each of the third and fourth angle.
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