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    Array of encoders for alignment measurement
    3.
    发明授权
    Array of encoders for alignment measurement 有权

    公开(公告)号：US10078269B2

    公开(公告)日：2018-09-18

    申请号：US15283669

    申请日：2016-10-03

    Applicant: NIKON CORPORATION

    Inventor： Eric Peter Goodwin ,  Michael B. Binnard ,  Ruslan Kurdyumov

    IPC: G03B27/52 ,  G03B27/54 ,  G03F7/20 ,  G01J1/04 ,  G01N21/47

    CPC classification number: G03F7/70141 ,  G01J1/0414 ,  G01J1/0448 ,  G01J1/0477 ,  G01J1/08 ,  G01J1/4209 ,  G01N21/4788 ,  G01N21/4795 ,  G03F7/70775 ,  G03F9/7088

    Abstract: System and method for accurately measuring alignment of every exposure field on a pre-patterned wafer without reducing wafer-exposure throughput. Diffraction grating disposed in scribe-lines of such wafer, used as alignment marks, and array of encoder-heads (each of which is configured to define positional phase(s) of at least one such alignment mark) are used. Determination of trajectory of a wafer-stage scanning during the wafer-exposure in the exposure tool employs determining in-plane coordinates of such spatially-periodic alignment marks by simultaneously measuring position-dependent phases of signals produced by these marks as a result of recombination of light corresponding to different diffraction orders produced by these marks. Measurements may be performed simultaneously at all areas corresponding to at least most of the exposure fields of the wafer, and/or with use of a homodyne light source, and/or in a wavelength-independent fashion, and/or with a pre-registration process allowing for accommodation of wafers with differently-dimensioned exposure fields.

    ARRAY OF ENCODERS FOR ALIGNMENT MEASUREMENT
    6.
    发明申请
    ARRAY OF ENCODERS FOR ALIGNMENT MEASUREMENT 审中-公开

    公开(公告)号：US20170097574A1

    公开(公告)日：2017-04-06

    申请号：US15283669

    申请日：2016-10-03

    Applicant: NIKON CORPORATION

    Inventor： ERIC PETER GOODWIN ,  MICHAEL B. BINNARD ,  Ruslan Kurdyumov

    IPC: G03F7/20 ,  G01N21/47 ,  G01J1/04

    CPC classification number: G03F7/70141 ,  G01J1/0414 ,  G01J1/0448 ,  G01J1/0477 ,  G01J1/08 ,  G01J1/4209 ,  G01N21/4788 ,  G01N21/4795 ,  G03F7/70775 ,  G03F9/7088

    Abstract: System and method for accurately measuring alignment of every exposure field on a pre-patterned wafer without reducing wafer-exposure throughput. Diffraction grating disposed in scribe-lines of such wafer, used as alignment marks, and array of encoder-heads (each of which is configured to define positional phase(s) of at least one such alignment mark) are used. Determination of trajectory of a wafer-stage scanning during the wafer-exposure in the exposure tool employs determining in-plane coordinates of such spatially-periodic alignment marks by simultaneously measuring position-dependent phases of signals produced by these marks as a result of recombination of light corresponding to different diffraction orders produced by these marks. Measurements may be performed simultaneously at all areas corresponding to at least most of the exposure fields of the wafer, and/or with use of a homodyne light source, and/or in a wavelength-independent fashion, and/or with a pre-registration process allowing for accommodation of wafers with differently-dimensioned exposure fields.

    Sensor having a rotatable enclosure
    7.
    发明授权
    Sensor having a rotatable enclosure 有权
    传感器具有可旋转的外壳

    公开(公告)号：US09568356B2

    公开(公告)日：2017-02-14

    申请号：US14540357

    申请日：2014-11-13

    Applicant: Lutron Electronics Co., Inc.

    Inventor： Greg Edward Sloan ,  Fabian Brugger ,  Jeffrey A. Kessler

    IPC: G01J1/02 ,  G01J1/42 ,  G01J1/44 ,  G01J1/04

    CPC classification number: G01J1/0271 ,  G01J1/02 ,  G01J1/0448 ,  G01J1/4204 ,  G01J1/44

    Abstract: A sensor adapted to be mounted to a surface has a rotatable enclosure that may be used, for example, to direct a lens of the sensor towards a window. The daylight sensor includes a photosensitive circuit for measuring a light intensity in the space, a cover portion, and a base portion adapted to be mounted to the surface. The cover portion is rotatable with respect to the base portion, for example, to direct the lens towards the window after the base portion is mounted to the surface. The base portion may also include a cylindrical wall having a channel adapted to capture a snap of the cover portion, such that the snap may move angularly through the channel to allow for rotation of the cover portion with respect to the base portion to a plurality of discrete positions.

    Abstract translation: 适于安装到表面的传感器具有可旋转的外壳，其可以用于例如将传感器的透镜朝向窗口引导。 日光传感器包括用于测量空间中的光强度的光敏电路，盖部分和适于安装到表面的基部。 盖部分可相对于基部旋转，例如，在将基部安装到表面之后，将透镜朝向窗口引导。 基部还可以包括圆柱形壁，其具有适于捕获盖部分的卡扣的通道，使得卡扣可以成角度地移动通过通道，以允许盖部分相对于基部旋转到多个 离散位置。

    FIBER COUPLED INTEGRATING SPHERE BASED-LASER ENERGY METER AND CALIBRATION SYSTEM (FCIS based - LEMCS) TRACEABLE TO PRIMARY LEVEL STANDARDS
    9.
    发明申请
    FIBER COUPLED INTEGRATING SPHERE BASED-LASER ENERGY METER AND CALIBRATION SYSTEM (FCIS based - LEMCS) TRACEABLE TO PRIMARY LEVEL STANDARDS 有权

    公开(公告)号：US20160334285A1

    公开(公告)日：2016-11-17

    申请号：US15113839

    申请日：2014-01-24

    Applicant: TUBITAK (TURKIYE BILIMSEL VE TEKNOLOJIK ARASTIRMA KURUMU

    Inventor： Oguz CELIKEL ,  Ferhat SAMETOGLU

    IPC: G01K17/00 ,  G01J1/42

    CPC classification number: G01K17/003 ,  G01J1/0407 ,  G01J1/0418 ,  G01J1/0425 ,  G01J1/0448 ,  G01J1/1626 ,  G01J1/22 ,  G01J1/4257 ,  G01J2001/0481 ,  G01J2001/4238 ,  G01J2001/444

    Abstract: The averaged pulse energy (J) of a Pulsed Type Laser Source can be measured by several types of commercial laser energy meters, such as pyroelectric detector or thermopile sensor, the spectral responsivity and the time/frequency related response properties of which are compatible with those of the Pulsed Type Laser Source. These Commercial Laser Energy Meters, regardless of sensor/detector type, should be calibrated against the working standards calibrated in a national (or an international) traceability chain relying on primary standards on the highest level having the lowest uncertainty in realizations of the fundamental SI units. FCIS based-LEMCS designed in this invention accomplishes both of the above proficiencies of measuring the averaged pulse energy of the Pulsed Type Laser Source and calibrating the Commercial Laser Energy Meters, which are traceably to primary level standards. FCIS based-LEMCS contains an integrating sphere having a novel port and an interior design and a series of mechanical choppers having separate Duty Cycles, each of which is rotated by an electrical motor in FCIS based-LEMCS, used for generating a chopped type laser, called as Chopped Type Laser Source, in order to provide the reference and averaged pulse energy for traceable calibration of Commercial Laser Energy Meters. With this invention, in addition to generating the reference and averaged pulse energy to be used during the calibration of Commercial Laser Energy Meters to be performed by means of FCIS based-LEMCS, the peak pulse energies of the Pulsed Type Laser Source and the Chopped Type Laser Source, which is a strict part of FCIS based-LEMS and which is used for producing the reference averaged pulse energy in the calibration of Commercial Laser Energy Meters, are also measured by FCIS based-LEMCS, traceable to Electrical Substitution Cryogenic Radiometer (ESCR) in primary optical watt scale (W), to 133Cs (or 87Rb) Atomic Frequency Standard in time scale t (s), and to direct current unit (A) realized with Quantum Hall—primary resistance standard (ohm) and DC Josephson primary voltage standard (V). With this configuration presented as a preferred embodiment, the averaged pulse energy measurements are performed and achieved for a range extending from 16.5 p J to 100 mJ.

    MONOCHROMATOR USING OPTICAL FILTERS TO SELECT WAVELENGTH OF LIGHT
    10.
    发明申请
    MONOCHROMATOR USING OPTICAL FILTERS TO SELECT WAVELENGTH OF LIGHT 审中-公开
    使用光学滤波器选择光的波长的单色器

    公开(公告)号：US20160097887A1

    公开(公告)日：2016-04-07

    申请号：US14787141

    申请日：2014-02-13

    Applicant: KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY

    Inventor： Seung Min JIN ,  Il Seung YANG ,  Yung Doug SUH ,  Sang Hwan NAM ,  Yu Jin JUNG ,  Hae Mi LEE ,  Yun Mi BAE ,  So Jeong PARK ,  Yu Sic KIM

    IPC: G02B5/20

    CPC classification number: G02B5/20 ,  G01J1/0414 ,  G01J1/0448 ,  G01J3/12 ,  G01J2003/1243 ,  G01J2003/1247

    Abstract: Provided is a monochromatization device for easily selecting light having a specific wavelength, comprising: a first broadband filter arranged to have a first rotational angle with respect to an incident direction of light to enable a first wavelength band to pass therethrough with respect to the incident light; a second broadband filter arranged to have a second rotational angle with respect to an incident direction of light to enable a second wavelength band to pass therethrough with respect to the light passing through the first broadband filter; and a path compensation unit for adjusting a light path so that the light path passing through the second broadband filter is the same as a path of the light incident to the first broadband filter. Accordingly, the output light efficiency for the incident light is increased and the required specific wavelength can be more easily selected.

    Abstract translation: 提供一种用于容易地选择具有特定波长的光的单色化装置，包括：第一宽带滤光器，被布置成相对于光的入射方向具有第一旋转角度，以使得第一波长带相对于入射光能够通过 ; 第二宽带滤波器，被布置成相对于光的入射方向具有第二旋转角度，以使第二波长带相对于穿过所述第一宽带滤光器的光线通过; 以及路径补偿单元，用于调整光路，使得穿过第二宽带滤波器的光路与入射到第一宽带滤波器的光的路径相同。 因此，入射光的输出光效率增加，并且可以更容易地选择所需的特定波长。

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