High resolution etalon-grating monochromator
    91.
    发明授权
    High resolution etalon-grating monochromator 有权
    高分辨率标准光栅单色仪

    公开(公告)号:US06480275B2

    公开(公告)日:2002-11-12

    申请号:US09772293

    申请日:2001-01-29

    CPC classification number: G01J3/12 G01J1/4257 G01J3/22 G01J3/26 G01J9/02

    Abstract: A high resolution etalon-grating monochromator. A preferred embodiment presents an extremely narrow slit function in the ultraviolet range and is very useful for measuring bandwidth of narrow band excimer lasers used for integrated circuit lithography. Light from the laser is focused into a diffuser and the diffused light exiting the diffuser illuminates an etalon. A portion of its light exiting the etalon is collected and directed into a slit positioned at a fringe pattern of the etalon. Light passing through the slit is collimated and the collimated light illuminates a grating positioned in an approximately Littrow configuration which disburses the light according to wavelength. A portion of the dispursed light representing the wavelength corresponding to the selected etalon fringe is passed through a second slit and monitored by a light detector. When the etalon and the grating are tuned to the same precise wavelength a slit function is defined which is extremely narrow such as about 0.034 pm (FWHM) and about 0.091 pm (95 percent integral). The bandwidth of a laser beam can be measured very accurately by a directing portion of the laser beam into the monochromator and scanning the laser wavelength over a range which includes the monochromator slit wavelength.

    Abstract translation: 高分辨率标准光栅单色仪。 优选的实施例在紫外范围内呈现非常狭窄的狭缝功能,并且对于测量用于集成电路光刻的窄带准分子激光器的带宽是非常有用的。 来自激光的光被聚焦成漫射器,并且离开扩散器的漫射光照射标准具。 将其从标准具出射的光的一部分收集并引导到位于标准具的边缘图案处的狭缝中。 通过狭缝的光线被准直,并且准直光照射位于大约Littrow配置中的光栅,其根据波长散发光。 表示对应于所选择的标准具条纹的波长的调度光​​的一部分通过第二狭缝并由光检测器监视。 当标准具和光栅调谐到相同的精确波长时,定义狭缝功能,其极窄,例如约0.034μm(FWHM)和约0.091μm(95%积分)。 激光束的带宽可以通过激光束的引导部分进入单色仪并且在包括单色器狭缝波长的范围内扫描激光波长而被非常精确地测量。

    Spectrophotometer
    92.
    发明申请
    Spectrophotometer 失效
    分光光度计

    公开(公告)号:US20020131044A1

    公开(公告)日:2002-09-19

    申请号:US10061864

    申请日:2002-01-31

    Abstract: A spectrophotometer is provided which includes: (i) a Linear Variable Filter, (ii) a linear sensor or a two-dimensional image sensor, and (iii) at least one fiber optic plate that is disposed between the Linear Variable Filter and the linear sensor or two-dimensional image sensor, and that transfers light separated into spectral components and outgoing from the Linear Variable Filter to the linear sensor or two-dimensional image sensor. With this structure, a compact spectrophotometer can be obtained which has an excellent wavelength resolution, accuracy, and light transfer ratio, and which can conduct wavelength spectral measurements at high speed and with high accuracy.

    Abstract translation: 提供一种分光光度计,其包括:(i)线性可变滤波器,(ii)线性传感器或二维图像传感器,以及(iii)至少一个光纤板,其设置在线性可变滤波器和线性可变滤波器之间 传感器或二维图像传感器,并将分离成光谱分量并从线性可变滤波器输出的光传输到线性传感器或二维图像传感器。 利用这种结构,可以获得具有优异的波长分辨率,精度和光传输比的紧凑型分光光度计,并且可以高速和高精度地进行波长光谱测量。

    Method and apparatus for spectrum analysis and encoder
    93.
    发明授权
    Method and apparatus for spectrum analysis and encoder 有权
    频谱分析和编码器的方法和装置

    公开(公告)号:US06388794B2

    公开(公告)日:2002-05-14

    申请号:US09846583

    申请日:2001-05-01

    Inventor: Thomas W. Hagler

    Abstract: A disc serving as a spatial radiation modulator has dispersed radiation filters thereon. Each filter has a transmittance or reflectance modulation function of the form sin2(m&thgr;+p&pgr;/4), where m is a positive integer and p has one of the four values 0, 1, 2, 3. A radiation beam including selected wavelength components is diffracted into an elongated image dispersed according to wavelength. Different wavelength components are focused onto different filters on the modulator and are encoded by correspond filters. Since the modulation functions of the filters are orthogonal to one another, it is possible to extract the amplitude of each wavelength component after it has been encoded or modulated by corresponding filter from the total detected signal during one measurement.

    Abstract translation: 用作空间辐射调制器的盘在其上具有分散的辐射滤波器。 每个滤波器具有形式为sin2(mtata + ppi / 4)的透射率或反射率调制函数,其中m是正整数,p具有四个值0,1,2,3中的一个。包括选择的波长分量 被衍射成根据波长分散的细长图像。 不同的波长分量聚焦在调制器上的不同滤波器上,并由相应的滤波器编码。 由于滤波器的调制功能彼此正交,因此可以在一次测量期间从总检测信号对相应的滤波器进行编码或调制之后提取每个波长分量的振幅。

    Calibration for optical filter
    95.
    发明申请
    Calibration for optical filter 有权
    滤光片校准

    公开(公告)号:US20010038452A1

    公开(公告)日:2001-11-08

    申请号:US09778242

    申请日:2001-02-06

    Inventor: Matt Beaumont

    Abstract: Calibrating each of a plurality of driven optical filters. The color parameters of the driven optical filters are characterized for the individual optical filter. These color parameters are used as calibration data to calibrate more standard information.

    Abstract translation: 校准多个驱动光学滤波器中的每一个。 驱动光学滤波器的颜色参数的特征在于各个滤光器。 这些颜色参数用作校准数据,以校准更多的标准信息。

    Optical spectrum analyzer
    96.
    发明申请
    Optical spectrum analyzer 有权
    光谱分析仪

    公开(公告)号:US20010030745A1

    公开(公告)日:2001-10-18

    申请号:US09753673

    申请日:2001-01-04

    CPC classification number: G01J3/447 G01J3/12

    Abstract: An optical spectrum analyzer comprises a diffraction grating (DG), a polarization decomposing unit (PDM) for decomposing the input light beam into first and second light beams having mutually-perpendicular linear states of polarization, and two output ports (FP2/1, FP2/2) each for receiving from the grating, substantially exclusively, a respective one of the polarized light beams (LT, LR) after diffraction by the diffraction grating (DG). Each of the linearly-polarized light beams is directed onto the diffraction grating with its linear state of polarization at any prescribed angle to a corresponding plane of diffraction of the diffraction grating The arrangement is such that the state of polarization of the light beams, at any particular wavelength within an operating band of the analyzer remains substantially unchanged with respect to time, The analyzer also may have a reflector (RAM) for reflecting the light beams leaving the diffraction grating after diffraction a first time so as to return them to the diffraction grating for diffraction a second time.

    Abstract translation: 光谱分析仪包括衍射光栅(DG),用于将输入光束分解成具有相互垂直的极化状态的第一和第二光束的偏振分解单元(PDM)和两个输出端口(FP2 / 1,FP2 / 2),每个用于在衍射光栅(DG)衍射之后从光栅接收基本上仅相应的一个偏振光束(LT,LR)。 每个线性偏振光束以与其衍射光栅的相应衍射平面成任意规定角度的线性极化状态被引导到衍射光栅上。这种布置使得光束的偏振状态 分析仪的工作频带内的特定波长相对于时间保持基本不变。分析仪还可以具有用于在衍射之后第一次反射离开衍射光栅的光束的反射器(RAM),以便将它们返回到衍射光栅 用于衍射第二次。

    Random wavelength access monochromator incorporating coaxial off-axis
parabolic OAP reflectors
    98.
    发明授权
    Random wavelength access monochromator incorporating coaxial off-axis parabolic OAP reflectors 失效
    采用同轴离轴抛物线OAP反射器的随机波长访问单色仪

    公开(公告)号:US5889588A

    公开(公告)日:1999-03-30

    申请号:US934103

    申请日:1997-09-19

    CPC classification number: G01J3/12 G01J3/02 G01J3/0208

    Abstract: A random wavelength access monochromator incorporates a pair of coaxial off-axis parabolic reflectors configured so that the spherical aberrations introduced by the reflectors cancel each other. Light enters through an entrance slit and impinges upon a first off-axis parabolic reflector that collimates the beam and directs it towards a stationary grating. The grating in turn defracts the light and directs it towards a high speed scanning mirror which reflects the defracted light onto a second off-axis parabolic reflector which in turn focuses the beam to an exit slit. Both off-axis parabolic surfaces share the same axis of revolution and the same collimated beam axis. In order to make the apparatus practical, the beam is folded twice so that the exit point is focused away from the internal path of the beam. The resulting instrument is capable of accepting a broad wavelength beam of light, dividing that broad band light into discrete wavelength bands of less than 1 nm optic wavelength, and emitting only the desired wavelength band.

    Abstract translation: 随机波长访问单色仪包括一对同轴离轴抛物面反射器,其被配置为使得由反射器引入的球面像差彼此抵消。 光通过入口狭缝进入,并撞击到第一离轴抛物面反射器,该反射器使光束准直并将其引向静止的光栅。 光栅又折射光并将其引导到高速扫描镜,该反射镜将折射的光反射到第二离轴抛物面反射器上,反射器又将光束聚焦到出射狭缝。 两个离轴抛物面共享相同的旋转轴和相同的准直光束轴。 为了使设备变得实用,光束被折叠两次,使得出射点聚焦远离光束的内部路径。 所得到的仪器能够接受宽波长光束,将该宽带光分成小于1nm光波长的离散波长带,并且仅发射期望的波长带。

    Optical spectrum separation apparatus
    100.
    发明授权
    Optical spectrum separation apparatus 失效
    光谱分离装置

    公开(公告)号:US5748310A

    公开(公告)日:1998-05-05

    申请号:US791512

    申请日:1997-01-30

    CPC classification number: G01J3/04 G01J3/12 G01J3/18

    Abstract: A high-precision spectrum separation apparatus enables to generate an output beam having a specific wavelength from a multi-wavelength input beam. The input beam is focused on a diffraction grating through a focusing lens to generate a number of diffracted component beams, of which a diffracted component beam having a specific wavelength is directed to an output slit, resulting in an output beam having well-defined spectral properties. When the output beam is required to have a band of wavelengths, the fixed focal distance of the focusing lens is shorter than is required to generate well-defined output beam, resulting that the diffracted component beam cannot be focused precisely on the output slit. In such a case, a flat glass plate is introduced between the focusing lens and the output slit to adjust the focal-point of the focusing lens so that the diffracted component beams are focused precisely on the output slit. An output beam having well-defined spectral properties is thus produced from the apparatus.

    Abstract translation: 高精度频谱分离装置能够从多波长输入光束产生具有特定波长的输出光束。 输入光束通过聚焦透镜聚焦在衍射光栅上以产生多个衍射分量光束,其中具有特定波长的衍射分量光束被引导到输出狭缝,导致输出光束具有明确的光谱特性 。 当输出光束需要具有波长带时,聚焦透镜的固定焦距比生成明确定义的输出光束所需要的短,导致衍射分量光束不能精确地聚焦在输出狭缝上。 在这种情况下,在聚焦透镜和输出狭缝之间引入平板玻璃板,以调整聚焦透镜的焦点,使得衍射分量光束精确地聚焦在输出狭缝上。 因此,从设备产生具有明确定义的光谱特性的输出光束。

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